Source gas supply system

Abstract

The utility model provides a source gas supply system. The source gas supply system comprises a seat body, a heat insulation sleeve body, a constant temperature sleeve body and a source gas supply device, a constant-temperature sleeve body sleeves the outer side of the source gas supply device, the hollow constant-temperature sleeve body is embedded in the heat insulation sleeve body, a thermal medium circulating device is arranged in the seat body, the inlet end of the thermal medium circulating device is communicated with a discharging part, the outlet end of the thermal medium circulating device is communicated with a feeding part, and the constant-temperature sleeve body is communicated with the feeding part and the discharging part; the constant-temperature sleeve body is arranged in the base, so that a thermal medium discharged by the feeding part enters the constant-temperature sleeve body, the operation of frequently adding or reducing the thermal medium is not needed, the temperature of the constant-temperature sleeve body can be controlled through the thermal medium circulating device, and outward heat dissipation of the constant-temperature sleeve body is reduced through the heat insulation sleeve body so as to enhance the heat preservation effect; the heat insulation sleeve body is arranged on the seat body, the constant-temperature sleeve body is embedded in the heat insulation sleeve body, and the source gas supply device is embedded in the constant-temperature sleeve body, so that the problem that the source gas supply device is easy to be placed unstably to cause an overturning risk is solved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and in particular to a source gas supply system. Background Technology

[0002] Vapor deposition technology has a wide range of applications, utilizing the interaction of various source gases to perform vapor-phase growth reactions on the substrate surface to generate solid thin films. For example, MOCVD (metal-organic chemical vapor deposition) uses source materials such as organometallic compounds of group III and group II elements and hydrides of group V and VI elements as source gases to perform vapor-phase deposition on the substrate through thermal decomposition reactions to grow various group III-V main compound semiconductors, group II-VI subgroup semiconductors, and their multi-component solid solutions into thin single-crystal materials.

[0003] Some types of source materials, such as organometallic compounds of Group III and Group II elements (i.e., MO sources), are flammable, explosive, and toxic substances. They are usually placed in a bubbler, which is made of stainless steel. During use, the MO source is carried out and delivered to the reaction chamber by a carrier gas (such as hydrogen). To ensure that the MO source has a constant vapor pressure, the MO source temperature needs to be controlled within a certain range.

[0004] Current technology uses an open-type constant-temperature water bath to heat and maintain the stainless steel bottle storing MO source. However, this water bath is susceptible to environmental influences. If the water bath temperature is higher than the ambient temperature, the liquid level tends to drop; if the water bath temperature is lower than the ambient temperature, water will condense in the bath. In both cases, frequent adjustments to the water volume and activation of the heater are necessary to regulate the temperature of the constant-temperature water bath. Furthermore, the heater is usually located outside the constant-temperature water bath. Considering the flammable, explosive, and highly toxic nature of the MO source inside the stainless steel bottle, an instability could lead to tipping and leakage of the MO source. Utility Model Content

[0005] In view of the shortcomings of the prior art described above, the purpose of this utility model is to provide a source gas supply system to solve the problems in the prior art that require frequent adjustment of water volume in the constant temperature water bath used to keep the source material at a constant temperature, and that the bottles used to store the source material are easily placed unstable, which may cause them to tip over.

[0006] To achieve the above objectives, this utility model provides a source gas supply system, comprising:

[0007] The seat body is equipped with a heat medium circulation device. The inlet end of the heat medium circulation device is connected to the discharge section, and the outlet end is connected to the feed section. The heat medium is received from the discharge section, and after being kept at a constant temperature, it is discharged from the feed section. The feed section and the discharge section extend to the outside of the seat body.

[0008] A heat insulation sleeve is provided on the base body;

[0009] A constant temperature sleeve is embedded in the heat insulation sleeve. The constant temperature sleeve is hollow inside and connects the feeding part and the discharging part, so that the hot medium discharged from the feeding part enters the constant temperature sleeve.

[0010] The gas supply device is embedded in the constant temperature sleeve.

[0011] Preferably, the inner sidewall and bottom wall of the thermostatic sleeve are hollow and interconnected to form a liquid storage cavity for containing the heat medium, and the discharge section and the inlet section are both connected to the liquid storage cavity from the top of the thermostatic sleeve.

[0012] Preferably, the heat medium circulation device includes a heating circulation unit and a cooling unit connected in series. The inlet end of the heating circulation unit is connected to the discharge section, and the outlet end of the cooling unit is connected to the feed section, so that the heat medium flowing out of the discharge section flows from the feed section into the constant temperature jacket body after being heated by the heating circulation unit and regulated by the temperature of the cooling unit.

[0013] Preferably, the heating circulation unit includes a circulation unit and a heating unit. The circulation unit is connected in series with the refrigeration unit, and its inlet end is connected to the discharge section. The heating unit is sleeved on the circulation unit and is used to heat the heat medium entering the circulation unit.

[0014] Preferably, it further includes a control unit disposed in the seat body or on the surface of the seat body. The control unit is electrically connected to the cooling unit and the heating unit to determine whether to drive the cooling unit to cool the received heat medium based on the temperature information fed back by the heating unit and the pre-stored target temperature.

[0015] Preferably, the thermostatic sleeve is provided with a temperature measuring device electrically connected to the control unit, the temperature measuring device being used to measure and feed back the temperature of the heat medium inside the thermostatic sleeve to the control unit.

[0016] Preferably, at least one of the feeding section and the discharging section is provided with a flow control device to control the flow of the heat medium.

[0017] Preferably, the base is a detachable structure.

[0018] Preferably, the thermal insulation sleeve has a vacuum interlayer that extends around the outer contour of the thermostatic sleeve.

[0019] Preferably, the height of the heat insulation sleeve is not lower than the height of the constant temperature sleeve.

[0020] The beneficial effects of this utility model's source gas supply system are as follows: By installing a constant temperature sleeve on the outside of the source gas supply device, and embedding the hollow constant temperature sleeve within a heat insulation sleeve, a heat medium circulation device is installed in the base. The inlet end of the heat medium circulation device is connected to a discharge section, and the outlet end is connected to a feed section. The constant temperature sleeve connects the feed section and the discharge section, allowing the heat medium discharged from the feed section to enter the constant temperature sleeve. This eliminates the need for frequent addition or reduction of the heat medium, and the temperature of the constant temperature sleeve can be controlled by the heat medium circulation device. The heat insulation sleeve reduces heat loss from the constant temperature sleeve to enhance its heat preservation effect. By placing the heat medium circulation device within the base, the heat insulation sleeve on the base, and the constant temperature sleeve embedded within the heat insulation sleeve, while the source gas supply device is embedded within the constant temperature sleeve, the problem of the source gas supply device being easily placed unstable and causing the risk of tipping over is avoided. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the source gas supply system according to an embodiment of the present utility model.

[0022] Figure 2 This is a structural block diagram of an embodiment of the present invention, which consists of a heat medium circulation device, a control unit, a feeding section, and a discharging section.

[0023] Figure label:

[0024] 1-base body;

[0025] 2-Heat medium circulation device; 21-Heating circulation unit; 211-Circulation unit; 212-Heating unit; 22-Refrigeration unit; 23-Temperature measuring device; 24-Control unit;

[0026] 3-Insulation jacket; 31-Vacuum interlayer;

[0027] 4-Thermostatic sleeve; 41-Liquid storage chamber; 42-Feed section; 43-Discharge section; 44-Media inlet; 45-Media outlet;

[0028] 5-Source gas supply device; 51-Bubble inlet; 52-Carrier gas outlet. Detailed Implementation

[0029] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions in the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without inventive effort are within the scope of protection of this utility model. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art to which this utility model pertains. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed after the word and its equivalents, but does not exclude other elements or objects. Unless otherwise specified, the term "connection" as used herein can refer to a direct connection or an indirect connection, i.e., a connection through an intermediate object.

[0030] Please see Figure 1 and Figure 2 This utility model provides a source gas supply system, including: a base 1, a heat insulation sleeve 3, a constant temperature sleeve 4, and a source gas supply device 5.

[0031] A heat medium circulation device 2 is provided inside the base 1. The inlet end of the heat medium circulation device 2 is connected to the discharge section 43, and the outlet end is connected to the feed section 42. The heat medium is received from the discharge section 43, and after being kept at a constant temperature, it is discharged from the feed section 42. The feed section 42 and the discharge section 43 extend to the outside of the base 1. A heat insulation sleeve 3 is provided on the base 1. A constant temperature sleeve 4 is embedded in the heat insulation sleeve 3. The constant temperature sleeve 4 is hollow inside and connects to the feed section 42 and the discharge section 43, so that the heat medium discharged from the feed section 42 enters the constant temperature sleeve 4. A source gas supply device 5 is embedded in the constant temperature sleeve 4.

[0032] The source gas supply device 5 is used to store MO source gas.

[0033] The source gas supply device 5 includes a bubbling input section 51 and a carrier gas output section 52. One end of the bubbling input section 51 is inserted into the source gas supply device 5, and the other end is connected to the carrier gas source, wherein the end inserted into the source gas supply device 5 is below the surface of the MO source liquid. One end of the carrier gas output section 52 is inserted into the source gas supply device 5, and the other end is connected to the MO source user device, wherein the end inserted into the source gas supply device 5 is above the surface of the MO source liquid.

[0034] In this embodiment, the heat medium circulation device 2, the discharge section 43, the feed section 42, and the constant temperature sleeve 4 form a circulation loop. The heat medium circulation device 2 drives the heat medium to circulate in the loop and simultaneously regulates the temperature of the flowing heat medium, ensuring that it is discharged into the constant temperature sleeve 4 at a constant temperature. This configuration enables constant temperature control of the constant temperature sleeve 4, thereby ensuring a constant temperature of the MO source inside the source gas supply device 5.

[0035] In some embodiments, the inner sidewall and bottom wall of the thermostatic sleeve 4 are hollow and interconnected to form a liquid storage cavity 41 for containing the heat medium, and the discharge section 43 and the feed section 42 are both connected to the liquid storage cavity 41 from the top of the thermostatic sleeve 4.

[0036] Specifically, the heat medium is a liquid or a gas; in this embodiment, the heat medium is water; in other embodiments, the heat medium is an aqueous solution of ethylene glycol or a heat transfer oil.

[0037] By installing the thermostatic sleeve 4 on the outside of the gas supply device 5, the temperature inside the gas supply device 5 can be adjusted by adjusting the temperature of the thermostatic sleeve 4.

[0038] Please see Figure 2 In some embodiments, the heat medium circulation device 2 includes a heating circulation unit 21 and a cooling unit 22 connected in series. The inlet end of the heating circulation unit 21 is connected to the discharge section 43, and the outlet end of the cooling unit 22 is connected to the feed section 42. This allows the heat medium flowing out of the discharge section 43 to flow from the feed section 42 into the constant temperature sleeve 4 after being heated by the heating circulation unit 21 and temperature regulated by the cooling unit 22. By setting the heating circulation unit 21, the heat medium flowing through the heating circulation unit 211 can be heated simultaneously during the circulation process. By setting the cooling unit 22, the heat medium can be cooled. Through the cooperation of the heating circulation unit 21 and the cooling unit 22, the temperature stability of the heat medium can be effectively controlled.

[0039] Furthermore, the heating circulation unit 21 includes a circulation unit 211 and a heating unit 212; wherein, the circulation unit 211 is connected in series with the cooling unit 22, and the inlet end of the circulation unit 211 is connected to the discharge section 43, and the heating unit 212 is sleeved on the circulation unit 211 for heating the heat medium entering the circulation unit 211.

[0040] Specifically, the circulation unit 211 can be a peristaltic pump or a circulating pump, the heating unit 212 can be an electric heating jacket or a steam jacket, and the cooling unit 22 can be a cooling plate.

[0041] In some embodiments, the heat medium circulation device 2 further includes a control unit 24, which is located inside the base 1. The control unit 24 is electrically connected to the cooling unit 22 and the heating unit 212 to determine whether to drive the cooling unit 22 to cool the received heat medium based on the temperature information fed back by the heating unit 212 and the pre-stored target temperature.

[0042] Furthermore, the heating unit 212 includes a temperature detector that monitors the temperature of the heat medium flowing through the heating unit 212 in real time and feeds it back to the control unit 24. When the temperature information fed back by the temperature detector is lower than the preset target temperature, the heating unit 212 starts and heats the heat medium, while the cooling unit 22 stops working. When the temperature information fed back by the temperature detector is higher than the preset target temperature, the heating unit 212 stops heating the heat medium, and the cooling unit 22 starts and cools the heat medium. Through the setting of the control unit 24, the temperature information of the heat medium flowing through the heating unit 212 can be monitored in real time, and the temperature of the heat medium can be adjusted according to the temperature information and the preset target temperature, effectively improving the temperature control accuracy and efficiency of the heat medium. In some other embodiments, the control unit 24 may also be disposed on the surface of the base 1.

[0043] Please refer to Figure 1 and Figure 2 In some embodiments, the thermostatic sleeve 4 is provided with an electrical connection ( Figure 1 The temperature measuring device 23 (represented by dashed lines) of the control unit 24 measures and feeds back the temperature of the heat medium inside the constant temperature jacket 4 to the control unit 24. By adding the temperature measuring device 23 to the temperature detector in the heating unit 212, the accuracy of the heat medium temperature measurement is improved, which is beneficial to improving the accuracy of the heat medium temperature control. In a specific implementation environment, either the temperature detector or the temperature measuring device 23 of the heating unit 212 can be selected as the temperature information feedback device for heat medium temperature control, depending on the actual situation. Specifically, the temperature measuring device 23 can be any type of temperature detector.

[0044] In some embodiments, the feed section 42 is provided with a conduction control device to control the flow of the heat medium. In an emergency (such as a heat medium leak), the operator can operate the conduction control device to conduct or block the flow of the heat medium in the feed section 42.

[0045] In other embodiments, the discharge section 43 is provided with a conduction control device to control the flow of the heat medium. In an emergency, the operator can operate the conduction control device to conduct or block the flow of the heat medium in the discharge section 43.

[0046] In some other embodiments, both the feed section 42 and the discharge section 43 are provided with a flow control device to control the flow of the heat medium. In an emergency, the operator can operate the flow control device of the feed section 42 or the discharge section 43 to open or close the flow of the heat medium in the discharge section 43.

[0047] In the above embodiments, the feeding section 42 is a feeding pipe, the discharging section 43 is a discharging pipe, the top of the liquid storage chamber 41 is connected to a medium inlet 44 and a medium outlet 45, one end of the feeding pipe is connected to the medium inlet 44, and the other end is connected to the outlet end of the refrigeration unit 22; one end of the discharging pipe is connected to the medium outlet 45, and the other end is connected to the inlet end of the heating circulation unit 21.

[0048] The conduction control device may be a manual or electric switch valve (such as a solenoid valve) installed in the feed pipe or discharge pipe.

[0049] In some embodiments, the base 1 is a detachable structure, which facilitates the maintenance and repair of the heat medium circulation device and / or control unit inside the base 1.

[0050] In some embodiments, the thermal insulation sleeve 3 has a vacuum interlayer 31 that extends around the outer contour of the thermostatic sleeve 4. The vacuum interlayer 31 can effectively isolate the thermostatic sleeve 4 from heat exchange with the outside environment, thereby reducing the energy loss of the thermostatic sleeve 4 and reducing system energy consumption.

[0051] In some embodiments, the height of the heat insulation sleeve 3 is not lower than the height of the constant temperature sleeve 4, so as to maximize the contact area with the constant temperature sleeve 4, thereby reducing the heat exchange between the constant temperature sleeve 4 and the outside world and maintaining the constant temperature of the constant temperature sleeve 4.

[0052] In summary, this invention, by installing a thermostatic sleeve around the gas supply device, allows for temperature regulation within the gas supply device by adjusting the temperature of the thermostatic sleeve. Furthermore, by incorporating a storage chamber containing a heat transfer medium within the thermostatic sleeve, the temperature of the thermostatic sleeve can be adjusted by regulating the temperature of the heat transfer medium, thereby achieving temperature regulation within the gas supply device. The inclusion of a heat circulation device within the housing and the construction of a heat transfer medium circulation system improve the temperature uniformity and thermostatic effect of the thermostatic sleeve, ensuring stable MO source temperature. Finally, by installing a heat-insulating sleeve on the outer wall of the thermostatic sleeve, heat exchange between the thermostatic sleeve and the external environment is effectively isolated, thereby reducing energy loss from the thermostatic sleeve and decreasing system energy consumption.

[0053] The above description is merely a specific implementation of the embodiments of this application, but the protection scope of the embodiments of this application is not limited thereto. Any changes or substitutions within the technical scope disclosed in the embodiments of this application should be covered within the protection scope of the embodiments of this application. Therefore, the protection scope of the embodiments of this application should be determined by the protection scope of the claims.

Claims

1. A source gas supply system, characterized in that, include: The seat body is equipped with a heat medium circulation device. The inlet end of the heat medium circulation device is connected to the discharge section, and the outlet end is connected to the feed section. The heat medium is received from the discharge section, and after being kept at a constant temperature, it is discharged from the feed section. The feed section and the discharge section extend to the outside of the seat body. A heat insulation sleeve is provided on the base body; A constant temperature sleeve is embedded in the heat insulation sleeve. The constant temperature sleeve is hollow inside and connects the feeding part and the discharging part, so that the hot medium discharged from the feeding part enters the constant temperature sleeve. The gas supply device is embedded in the constant temperature sleeve.

2. The source gas supply system according to claim 1, characterized in that: The inner walls of the thermostatic sleeve and the bottom wall are hollow and interconnected to form a liquid storage cavity for containing the heat medium. The discharge section and the feed section are both connected to the liquid storage cavity from the top of the thermostatic sleeve.

3. The source gas supply system according to claim 1, characterized in that, The heat medium circulation device includes a heating circulation unit and a cooling unit connected in series. The inlet end of the heating circulation unit is connected to the discharge section, and the outlet end of the cooling unit is connected to the feed section. The heat medium flowing out of the discharge section is heated by the heating circulation unit and regulated by the cooling unit before flowing from the feed section into the constant temperature jacket.

4. The source gas supply system according to claim 3, characterized in that: The heating circulation unit includes a circulation unit and a heating unit. The circulation unit is connected in series with the refrigeration unit, and its inlet end is connected to the discharge section. The heating unit is sleeved on the circulation unit and is used to heat the heat medium entering the circulation unit.

5. The source gas supply system according to claim 4, characterized in that: It also includes a control unit disposed in the seat body or on the surface of the seat body. The control unit is electrically connected to the cooling unit and the heating unit to determine whether to drive the cooling unit to cool the received heat medium based on the temperature information fed back by the heating unit and the pre-stored target temperature.

6. The source gas supply system according to claim 5, characterized in that: The thermostatic sleeve is equipped with a temperature measuring device electrically connected to the control unit. The temperature measuring device is used to measure and feed back the temperature of the heat medium inside the thermostatic sleeve to the control unit.

7. The source gas supply system according to claim 1, characterized in that: At least one of the feeding section and the discharging section is provided with a flow control device to control the flow of the heat medium.

8. The source gas supply system according to claim 1, characterized in that, The base is a detachable structure.

9. The source gas supply system according to claim 1, characterized in that: The thermal insulation sleeve has a vacuum interlayer that extends around the outer contour of the thermostatic sleeve.

10. The source gas supply system according to claim 1, characterized in that: The height of the heat insulation sleeve is not lower than the height of the constant temperature sleeve.

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