Air inlet structure of PECVD coating equipment
By designing an annular tube and air inlet box structure in the PECVD coating equipment, and using inclined connecting pipes and conical air inlet connecting pipes to achieve multiple gas mixing, the problem of film non-uniformity caused by the annular air inlet method is solved, thereby improving film uniformity and the performance of the coating equipment.
Patent Information
- Application Number
- CN202520333381.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-28
- Publication Date
- 2026-01-27
- Estimated Expiration
- 2035-02-28
AI Technical Summary
The annular air intake method in PECVD coating equipment leads to uneven gas concentration distribution in the reaction chamber, resulting in uneven film thickness deposited on the substrate.
It adopts a ring pipe and air intake box structure, which is connected by multiple connecting pipes. The connecting pipes are set at an angle, and the air intake pipe axis is symmetrical and does not overlap. The air intake box is equipped with a baffle and a conical air intake connecting pipe. The mixed gas is mixed multiple times in the ring pipe and air intake box to ensure uniform gas distribution.
It improves the mixing uniformity of the reaction gases, ensures the uniformity and quality of the film, reduces edge effects, and enhances the performance of the coating equipment.
Smart Images
Figure CN223837558U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the field of coating equipment technology, specifically an air intake structure for a PECVD coating equipment. Background Technology
[0002] PECVD (Plasma Enhanced Chemical Vapor Deposition) is an advanced thin film deposition technology primarily used to deposit uniform, dense, and high-quality thin films on substrates through chemical reactions with plasma under low-temperature and low-pressure conditions. This technology is widely used in electronics, optoelectronics, and surface modification, especially in the solar photovoltaic industry; therefore, PECVD coating equipment has become one of the key pieces of equipment.
[0003] In the PECVD process, the design of the gas inlet structure is crucial for ensuring uniform gas distribution and reaction efficiency. The design directly affects the performance of the PECVD process, including film uniformity, growth rate, and quality. Currently, PECVD coating equipment commonly employs gas inlet methods such as multi-point inlet, spray inlet, mixed inlet, laminar flow inlet, and annular inlet. Among these, the annular inlet method introduces gas into an annular channel surrounding the reaction chamber, and then into the reaction chamber through multiple evenly distributed inlet holes, forming a uniform airflow covering the entire substrate surface. This design can effectively reduce edge effects and improve the uniformity of the deposited film. However, this inlet method may result in excessive airflow near the inlet area, while the airflow near the center of the reaction chamber is thin, leading to uneven film thickness on the substrate and affecting coating quality. Utility Model Content
[0004] To address the problem that the current annular air intake method in PECVD coating equipment may cause uneven gas concentration distribution in the reaction chamber, resulting in uneven film thickness deposited on the substrate, this invention proposes an air intake structure for PECVD coating equipment.
[0005] To achieve the above objectives, the present invention adopts the following technical solution:
[0006] An air intake structure for a PECVD coating equipment includes an annular pipe and an air intake box. The annular pipe is located above the air intake box, and the air intake box is located above the substrate. The annular pipe and the air intake box are connected by multiple connecting pipes, which are respectively connected to the annular pipe and the air intake box. An air intake pipe 1 and an air intake pipe 2 are provided on the outer side of the annular pipe, and the annular pipe is respectively connected to the air intake pipe 1 and the air intake pipe 2. The air intake pipe 1 and the air intake pipe 2 are symmetrical about the center point of the annular pipe. The bottom wall of the air intake box has multiple rows of air intake holes.
[0007] As a preferred embodiment, the row spacing of the multiple rows of air intake holes near the side wall of the air intake box is greater than the row spacing of the multiple rows of air intake holes located in the central area of the air intake box.
[0008] As a preferred option, the connecting pipe is set at an angle.
[0009] As a preferred embodiment, the axes of the first intake pipe and the second intake pipe are located in the same horizontal plane.
[0010] As a preferred embodiment, the axes of the first intake pipe and the second intake pipe do not coincide, and their axes are parallel to each other.
[0011] As a preferred embodiment, the air intake box is provided with a partition, and the partition has multiple air intake holes II, the axes of the air intake holes I and the air intake holes II coincide.
[0012] As a preferred embodiment, the diameter of the first air inlet is larger than the diameter of the second air inlet.
[0013] As a preferred embodiment, a plurality of vertical air intake connecting pipes are fixed between the partition and the bottom wall of the air intake box; the axis of the air intake connecting pipes coincides with the axis of the first air intake hole and the second air intake hole.
[0014] As a preferred embodiment, the air intake connecting pipe is a tapered pipe.
[0015] As a preferred embodiment, the small end of the air intake connecting pipe faces upward and the large end faces downward.
[0016] This utility model has the following beneficial effects:
[0017] 1. Two reactive gases enter the annular pipe through inlet pipe one and inlet pipe two respectively, flow along the flow direction a, and mix. After initial mixing, the two reactive gases enter the inlet box through multiple connecting pipes. After entering the mixing chamber formed before the partition and the top wall of the inlet box, the mixed reactive gases will undergo a second mixing, which can make the mixing of the two reactive gases more thorough. Finally, the mixed reactive gases enter the reaction chamber through inlet port two, inlet connecting pipe, and inlet port one in sequence.
[0018] 2. The connecting pipe is set at an angle so that the gas will not collide with the bottom wall of the air inlet box in the vertical direction. This can promote the flow of gas in the air inlet box, thereby further improving the mixing uniformity of the two reaction gases.
[0019] 3. Since the airflow enters the inlet box from the annular pipe through multiple connecting pipes, a larger airflow will form near the side wall of the inlet box. As the mixed reaction gas flows towards the center of the inlet box, the airflow entering the center of the inlet box will gradually decrease. The row spacing D1 of the multiple rows of inlet holes near the side wall of the inlet box is greater than the row spacing D2 of the multiple rows of inlet holes in the center. Thus, the density of inlet holes in the center of the inlet box will be greater than that near the side wall. Although the airflow entering the center of the inlet box will gradually decrease, the amount of gas passing through the inlet holes in the center will increase. This makes the gas concentration in the middle of the inlet box consistent with the gas concentration at the edge of the inlet box, thereby improving the uniformity of the film.
[0020] 4. The inlet connecting pipe is a tapered pipe with the small end facing upward and the large end facing downward. As the gas passes through the second inlet, the inlet connecting pipe, and the first inlet in sequence, the mixed gas will gradually diffuse, allowing the mixed gas to quickly and evenly fill the reaction chamber, thereby further improving the uniformity of the film. Attached Figure Description
[0021] Figure 1 This is a schematic diagram of the connection between the annular pipe and the air inlet box in the air inlet structure of a preferred embodiment of a PECVD coating equipment;
[0022] Figure 2 A schematic diagram of the bottom structure of the air inlet box in a preferred embodiment of a PECVD coating equipment;
[0023] Figure 3 This is a schematic diagram of the internal structure of the annular pipe in the air inlet structure of a preferred embodiment of a PECVD coating equipment;
[0024] Figure 4 This is a schematic diagram of the internal structure of the air inlet box in a preferred embodiment of a PECVD coating apparatus;
[0025] Figure 5 A front cross-sectional view of the air inlet structure of a PECVD coating apparatus according to a preferred embodiment;
[0026] Figure 6 This is a schematic diagram showing the distribution of the second air inlet in the air inlet structure of a PECVD coating equipment according to a preferred embodiment.
[0027] In the diagram, 1 is the air intake box; 11 is the air intake port one; 12 is the partition; 121 is the air intake port two; 13 is the air intake connecting pipe; 2 is the annular pipe; 3 is the connecting pipe; 4 is the air intake pipe one; and 5 is the air intake pipe two. Detailed Implementation
[0028] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments, so that those skilled in the art can implement it based on the description.
[0029] This embodiment proposes an air intake structure for a PECVD coating equipment, such as... Figure 1 and Figure 2 As shown, it includes an annular pipe 2 and an air inlet box 1. The annular pipe 2 is located above the air inlet box 1, and the air inlet box 1 is located above the substrate. The annular pipe 2 and the air inlet box 1 are connected by multiple connecting pipes 3. The connecting pipes 3 are respectively connected to the annular pipe 2 and the air inlet box 1. An air inlet pipe 4 and an air inlet pipe 5 are provided on the outside of the annular pipe 2. The annular pipe 2 is respectively connected to the air inlet pipe 4 and the air inlet pipe 5. The air inlet pipe 4 and the air inlet pipe 5 are symmetrical about the center point of the annular pipe 2. Multiple rows of air inlet holes 11 are opened on the bottom wall of the air inlet box 1.
[0030] like Figure 5 and Figure 6 As shown, the row spacing of the multiple rows of air intake holes 11 near the side wall of the air intake box 1 is greater than the row spacing of the multiple rows of air intake holes 11 located in the central area of the air intake box 1.
[0031] like Figure 1 , Figure 3 and Figure 5 As shown, the connecting pipe 3 is set at an angle.
[0032] like Figure 3 As shown, the axes of intake pipe 4 and intake pipe 5 are located in the same horizontal plane.
[0033] like Figure 3 As shown, the axes of intake pipe 4 and intake pipe 5 do not coincide, and their axes are parallel.
[0034] The two reactant gases enter the annular pipe 2 through inlet pipe 4 and inlet pipe 5 respectively, and flow along... Figure 3 The two reactive gases flow in the direction shown as a and are mixed. After initial mixing, they enter the inlet box 1 through multiple connecting pipes 3. After entering the inlet box 1, the mixed reactive gases undergo a second mixing, which makes the mixing of the two reactive gases more thorough. Finally, the mixed reactive gases enter the reaction chamber through the inlet port 11.
[0035] The inclined setting of connecting pipe 3 allows the mixed reaction gases to proceed as follows: Figure 5 The flow direction b shown enters the air inlet box 1 without colliding with the bottom wall of the air inlet box 1 in the vertical direction. This promotes the flow of gas in the air inlet box 1, thereby further improving the mixing uniformity of the two reactive gases.
[0036] The axes of intake pipe 4 and intake pipe 5 are located in the same horizontal plane. The axes of intake pipe 4 and intake pipe 5 do not coincide and are parallel to each other. With this arrangement, the two reactive gases will not collide perpendicularly with the inner wall of the annular pipe 2. This will reduce the loss of kinetic energy of the reactive gases, ensure the fluidity of the reactive gases, and allow the reactive gases to enter the reaction chamber more smoothly.
[0037] like Figure 5 and Figure 6 As shown, since the airflow enters the inlet box 1 from the annular pipe 2 through multiple connecting pipes 3, a larger airflow will be formed in the area near the side wall of the inlet box 1. As the mixed reaction gas flows towards the central area of the inlet box 1, the airflow entering the central area of the inlet box 1 will gradually decrease. The row spacing D1 of the multiple rows of air inlets 11 near the side wall of the inlet box 1 is greater than the row spacing D2 of the multiple rows of air inlets 11 in the central area. Thus, the density of the air inlets 11 in the central area of the inlet box 1 will be greater than the density of the air inlets 11 near the side wall of the inlet box 1. Although the airflow entering the central area of the inlet box 1 will gradually decrease, the amount of gas passing through the air inlets 11 in the central area of the inlet box 1 will increase. This makes the gas concentration in the central area of the inlet box 1 consistent with the gas concentration in the edge area of the inlet box 1, thereby improving the uniformity of the film.
[0038] like Figure 4 As shown, the air intake box 1 is provided with a partition 12, and multiple air intake holes 121 are provided on the partition 12. The axes of the air intake holes 11 and the air intake holes 121 coincide.
[0039] like Figure 5 As shown, the diameter of air inlet 11 is larger than the diameter of air inlet 121.
[0040] like Figure 5 As shown, multiple vertical air intake connecting pipes 13 are fixed between the partition 12 and the bottom wall of the air intake box 1. The axis of the air intake connecting pipe 13 coincides with the axis of the first air intake hole 11 and the second air intake hole 121.
[0041] like Figure 4 and Figure 5 As shown, the intake connecting pipe 13 is a tapered pipe.
[0042] like Figure 4 and Figure 5 As shown, the small end of the intake connecting pipe 13 faces upward, and the large end of the intake connecting pipe 13 faces downward.
[0043] A mixing chamber is formed between the partition 12 and the top wall of the air inlet box 1, which allows the mixed reaction gases to be further mixed in the mixing chamber, making the mixing of the two reaction gases more complete.
[0044] The inlet pipe 13 is a tapered pipe with the small end facing upward and the large end facing downward. In this way, when the gas passes through the second inlet hole 121, the inlet pipe 13, and the first inlet hole 11 in sequence, the mixed gas will gradually diffuse, so that the mixed gas quickly and evenly fills the reaction chamber, thereby further improving the uniformity of the film.
[0045] Using the technical solution of this utility model, the two reactive gases enter the annular pipe 2 through inlet pipe 4 and inlet pipe 5 respectively, and flow along... Figure 3 The flow direction a is shown, and the two reactive gases flow and mix. After initial mixing, the two reactive gases enter the air inlet box 1 through multiple connecting pipes 3. After the mixed reactive gases enter the mixing chamber formed between the partition 12 and the top wall of the air inlet box 1, they will undergo a second mixing. Then, the mixed reactive gases will enter the reaction chamber through the second air inlet 121, the air inlet connecting pipe 13, and the first air inlet 11 in sequence.
[0046] The embodiments of this utility model have been described in detail above. However, those skilled in the art will recognize that the scope of this utility model is defined by the appended claims and their equivalents.
Claims
1. An air inlet structure for a PECVD coating equipment, characterized in that, It includes an annular pipe (2) and an air inlet box (1). The annular pipe (2) is located above the air inlet box (1), and the air inlet box (1) is located above the substrate. The annular pipe (2) and the air inlet box (1) are connected by multiple connecting pipes (3). The connecting pipes (3) are respectively connected to the annular pipe (2) and the air inlet box (1). An air inlet pipe 1 (4) and an air inlet pipe 2 (5) are provided on the outside of the annular pipe (2). The annular pipe (2) is respectively connected to the air inlet pipe 1 (4) and the air inlet pipe 2 (5). The air inlet pipe 1 (4) and the air inlet pipe 2 (5) are symmetrical about the center point of the annular pipe (2). The bottom wall of the air inlet box (1) has multiple rows of air inlet holes 1 (11).
2. The air inlet structure of a PECVD coating equipment according to claim 1, characterized in that, The row spacing of the multi-row air inlet holes (11) near the side wall of the air inlet box (1) is greater than the row spacing of the multi-row air inlet holes (11) located in the central area of the air inlet box (1).
3. The air inlet structure of a PECVD coating equipment according to claim 1, characterized in that, The connecting pipe (3) is set at an angle.
4. The air inlet structure of a PECVD coating equipment according to claim 1, characterized in that, The axes of the first intake pipe (4) and the second intake pipe (5) are located in the same horizontal plane.
5. The air inlet structure of a PECVD coating equipment according to claim 4, characterized in that, The axes of the first intake pipe (4) and the second intake pipe (5) do not coincide, and their axes are parallel to each other.
6. The air inlet structure of a PECVD coating equipment according to claim 1, characterized in that, The air intake box (1) is provided with a partition (12), and the partition (12) is provided with a plurality of air intake holes (121), the axes of the air intake hole (11) and the air intake hole (121) are coincident.
7. The air inlet structure of a PECVD coating equipment according to claim 6, characterized in that, The diameter of the first air inlet (11) is larger than the diameter of the second air inlet (121).
8. The air inlet structure of a PECVD coating equipment according to claim 7, characterized in that, Multiple vertical air intake connecting pipes (13) are fixed between the partition (12) and the bottom wall of the air intake box (1); the axis of the air intake connecting pipe (13) coincides with the axis of the first air intake hole (11) and the second air intake hole (121).
9. The air inlet structure of a PECVD coating equipment according to claim 8, characterized in that, The air intake connecting pipe (13) is a tapered pipe.
10. The air inlet structure of a PECVD coating equipment according to claim 9, characterized in that, The small end of the air intake connecting pipe (13) faces upward, and the large end of the air intake connecting pipe (13) faces downward.