Silicon crystal bar size measuring machine device

Abstract

The utility model discloses a silicon crystal bar size measuring machine device which comprises a bearing module, a crystal bar supporting module and a measuring module, the bearing module is provided with the crystal bar supporting module and the measuring module, the bearing module comprises a rack, the crystal bar supporting module comprises a crystal bar platform and a calibration tool, the crystal bar platform is arranged in the middle of one side of the upper end face of the rack, and the calibration tool is arranged on the crystal bar platform. The measuring module comprises a laser range finder and a detection mechanism, a laser range finder support is arranged on the rear side of the crystal bar platform, the detection mechanism comprises linear guide rails and a detection housing, the linear guide rails are arranged on the front side and the rear side of the crystal bar platform respectively, and the two ends of the detection housing slide on the linear guide rails respectively. And a plurality of cylinders and a detection sensor are arranged on the detection housing. According to the utility model, the height and width dimensions of the crystal bar are measured through the arrangement of the detection mechanism, the calibration of the detection mechanism is facilitated through the arrangement of the calibration tool, and the accuracy of crystal bar dimension measurement is improved.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor technology, specifically relating to a silicon crystal rod size measuring device. Background Technology

[0002] After repeated use, the dimensions of silicon crystal rods need to be measured to determine whether the rods are damaged. The original technology used manual measurement, in which the crystal rods were placed on the testing table and the width of the crystal rods was measured manually using vernier calipers. The measurement process was cumbersome and had a large measurement error. Utility Model Content

[0003] The purpose of this invention is to overcome the shortcomings of the prior art and provide a silicon crystal rod size measuring device. This invention, through the setting of the detection mechanism, can simultaneously measure the height and width of the crystal rod, and the setting of the calibration fixture facilitates the calibration of the detection mechanism, thereby improving the accuracy of crystal rod size measurement.

[0004] To achieve the aforementioned objectives of this utility model, the technical solution provided by this utility model patent is as follows:

[0005] A silicon ingot size measuring machine device includes a carrier module, an ingot support module, and a measuring module. The carrier module is equipped with the ingot support module and the measuring module. The carrier module includes a frame. The ingot support module includes an ingot platform and a calibration fixture. The ingot platform is located at the center of one side of the upper end face of the frame, and the calibration fixture is located at the center of the other side of the upper end face of the frame. The measuring module includes a laser rangefinder and a detection mechanism. A laser rangefinder bracket is located at the rear of the ingot platform, and laser rangefinders are respectively mounted on the laser rangefinder bracket. The detection mechanism includes linear guide rails and a detection housing. The linear guide rails are respectively located on the front and rear sides of the ingot platform. The two ends of the detection housing slide on the linear guide rails. Multiple cylinders and detection sensors are mounted on the detection housing.

[0006] Furthermore, the rack is generally rectangular in shape, with horizontal adjustment feet on the front and rear sides of the bottom of the rack, and height adjustment feet on the four corners of the rack and the middle of the front and rear sides of the bottom of the rack. An electrical cabinet is provided on one side of the rack opposite the crystal rod platform, and an operation box is provided on the electrical cabinet. Indicator lights are also provided on the electrical cabinet.

[0007] Furthermore, the frame is generally rectangular, with multiple square plates on the upper end of the crystal rod platform and multiple elbow plates on the lower end of the crystal rod platform. The elbow plates are fixedly connected to the upper end face of the frame by bolts, and the upper end face of the crystal rod platform is parallel to the upper end face of the frame. A calibration fixture is provided on the end face of the frame near the electrical cabinet.

[0008] Furthermore, the lower end of the calibration fixture is connected and fixed to the upper end face of the frame via an I-beam, and the calibration fixture and the crystal rod platform are arranged on the same straight line.

[0009] Furthermore, the laser rangefinder bracket is located on the upper rear side of the frame, and there are two laser rangefinder brackets. The laser rangefinder is located on the side of the crystal rod platform near the calibration fixture, and the laser rangefinder is vertically connected to the frame.

[0010] Furthermore, the linear guide rails are arranged parallel to each other on both sides of the crystal rod platform. A moving module is also provided on the frame end face behind the linear guide rail on one side of the laser rangefinder bracket. The moving module includes a slide groove and a connecting plate. The connecting plate slides on the slide groove, which is parallel to the linear guide rail. The connecting plate is connected to the bottom of one side of the detection cover. A drag chain bracket is provided at the front end of the frame, and a drag chain is provided on the drag chain bracket. The drag chain drives the connecting plate to slide on the slide groove.

[0011] Furthermore, the detection housing is generally rectangular, with a square hole in the middle, and sliders are respectively provided at the lower ends of both sides of the detection housing. The sliders slide on a linear guide rail, and when the detection housing slides on the linear guide rail, the calibration fixture passes through the square hole on the detection housing.

[0012] Furthermore, the cylinder on the detection housing includes a horizontal cylinder and a vertical cylinder. The detection housing is also provided with two horizontal crossbars. Support rods are provided on both sides of the detection housing. The support rods are vertically and movably connected to the horizontal crossbars. The upper ends of the support rods on both sides of the detection housing are connected by a horizontal fixing rod. The square hole of the detection housing is between the two support rods. The support rods slide on the horizontal crossbars.

[0013] Furthermore, a mounting plate is provided at the lower end of the support rod, and a horizontal cylinder is provided on the upper surface of the mounting plate. Horizontal cylinders are symmetrically arranged in the middle of the support rods on both sides of the detection cover. A detection sensor is provided on the upper part of each horizontal cylinder, and the horizontal cylinder drives the detection sensor to move horizontally. A vertical cylinder is provided at the lower end of the mounting plate, and vertical cylinders are provided on both sides of the horizontal fixing rod. A detection sensor is provided on the vertical cylinder, and the vertical cylinder drives the detection sensor to move vertically.

[0014] Based on the above technical solution, the silicon crystal rod size measuring device of this utility model patent has achieved the following technical advantages through practical application:

[0015] 1. This utility model discloses a silicon crystal rod size measuring device. Through the setting of the detection mechanism, it can simultaneously measure the height and width of the crystal rod. At the same time, the setting of the calibration fixture facilitates the calibration of the detection mechanism and improves the accuracy of crystal rod size measurement. Attached Figure Description

[0016] Figure 1 This is a perspective view of the dimension measuring machine in the silicon crystal rod dimension measuring machine device of this utility model.

[0017] Figure 2 This is a front view of the detection cover in a silicon crystal rod size measuring machine device of this utility model.

[0018] Figure 3 This is a perspective view of the detection cover in a silicon crystal rod size measuring machine device of this utility model.

[0019] Figure 4 This is a structural diagram of the moving module in a silicon crystal rod size measuring machine device of this utility model. Detailed Implementation

[0020] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model is described below with reference to specific examples shown in the accompanying drawings. However, it should be understood that these descriptions are merely exemplary and not intended to limit the scope of the present utility model. Furthermore, descriptions of well-known structures and technologies are omitted in the following description to avoid unnecessarily obscuring the concept of the present utility model.

[0021] like Figure 1 The present invention relates to a silicon crystal rod size measuring machine device, which includes a carrier module, a crystal rod support module, and a measuring module. The carrier module is equipped with the crystal rod support module and the measuring module. The carrier module includes a frame 3. The crystal rod support module includes a crystal rod platform 5 and a calibration fixture 11. The crystal rod platform 5 is located in the middle of one side of the upper end face of the frame 3, and the calibration fixture 11 is located in the middle of the other side of the upper end face of the frame 3. The measuring module includes a laser rangefinder 8 and a detection mechanism. A laser rangefinder bracket 7 is located on the rear side of the crystal rod platform 5, and laser rangefinders 8 are respectively installed on the laser rangefinder bracket 7. The detection mechanism includes a linear guide rail 4 and a detection cover 13. The linear guide rail 4 is respectively located on the front and rear sides of the crystal rod platform 5. The two ends of the detection cover 13 slide on the linear guide rail 4, and multiple cylinders and detection sensors 9 are installed on the detection cover 13.

[0022] By setting up the testing mechanism, the height and width of the crystal rod can be measured simultaneously. At the same time, the setting of the calibration fixture 11 facilitates the calibration of the testing mechanism and improves the accuracy of crystal rod size measurement.

[0023] The frame 3 is generally rectangular. Horizontal adjustment feet 1 are provided on the front and rear sides of the bottom of the frame 3. Height adjustment feet 2 are provided at the four corners of the frame 3 and in the middle of the front and rear sides of the bottom of the frame 3. An electrical cabinet 16 is provided on one side of the frame 3 opposite to the crystal rod platform 5. An operation box 17 is provided on the electrical cabinet 16, and indicator lights 14 are also provided on the electrical cabinet 16. The electrical cabinet 16 supplies power to the entire measuring device. The operation box 17 is used to control and set the measurement parameters and control the movement position of the detection cover 13. The height adjustment feet 2 and horizontal adjustment feet 1 are used to adjust the placement position of the frame 3, facilitating the adjustment of the frame 3's position.

[0024] The frame 3 is generally rectangular. The upper end of the crystal rod platform 5 is provided with multiple square plates, and the lower end of the crystal rod platform 5 is provided with multiple elbow plates. The elbow plates are fixedly connected to the upper end face of the frame 3 by bolts. The upper end face of the crystal rod platform 5 is parallel to the upper end face of the frame 3. A calibration fixture 11 is provided on the end face of the frame 3 near the electrical cabinet 16.

[0025] The lower end of the calibration fixture 11 is connected and fixed to the upper end face of the frame 3 via an I-beam. The calibration fixture 11 and the crystal rod platform 5 are arranged on the same straight line.

[0026] The laser rangefinder bracket 7 is located on the upper rear side of the frame 3. There are two laser rangefinder brackets 7. The laser rangefinder 8 is located on the side of the crystal rod platform 5 near the calibration fixture 11. The laser rangefinder 8 is vertically connected to the frame 3.

[0027] The linear guide rails 4 are arranged parallel to each other on both sides of the crystal rod platform 5. A moving module 6 is also provided on the end face of the frame 3 behind the linear guide rails 4 on one side of the laser rangefinder bracket 7. The moving module 6 includes a slide groove 61 and a connecting plate 62. The connecting plate 62 slides on the slide groove 61. The slide groove 61 is arranged parallel to the linear guide rails 4. The connecting plate 62 is connected to the bottom of one side of the detection cover 13. A drag chain bracket 20 is provided at the front end of the frame 3. A drag chain 19 is provided on the drag chain bracket 20. The drag chain 19 drives the connecting plate 62 to slide on the slide groove 61.

[0028] The detection housing 13 is generally rectangular, with a square hole in the middle. Slider 18 is provided at the lower ends of both sides of the detection housing 13. The slider 18 slides on the linear guide rail 4. When the detection housing 13 slides on the linear guide rail 4, the calibration fixture 11 passes through the square hole on the detection housing 13.

[0029] The cylinders on the detection housing 13 include a horizontal cylinder 10 and a vertical cylinder 21. The detection housing 13 is also provided with two horizontal crossbars. Support rods are provided on both sides of the detection housing 13. The support rods are vertically and movably connected to the horizontal crossbars. The upper ends of the support rods on both sides of the detection housing 13 are connected by a horizontal fixing rod. There is a square hole in the detection housing 13 between the two support rods. The support rods slide on the horizontal crossbars.

[0030] A mounting plate is provided at the lower end of the support rod, and a horizontal cylinder 10 is provided on the upper surface of the mounting plate. Horizontal cylinders 10 are symmetrically arranged in the middle of the support rods on both sides of the detection cover 13. A detection sensor 9 is provided on the upper part of each horizontal cylinder 10. The horizontal cylinder 10 drives the detection sensor 9 to move horizontally. A vertical cylinder 21 is provided at the lower end of the mounting plate, and vertical cylinders 21 are provided on both sides of the horizontal fixing rod. A detection sensor 9 is provided on the vertical cylinder 21, and the vertical cylinder 21 drives the detection sensor 9 to move vertically.

[0031] A specific workflow of a silicon ingot size measuring machine: An assembly line operation is adopted. Ingots flow to the inspection area via a conveyor line. A robot clamps the ingots in the inspection area onto the ingot platform 5. After the silicon ingot measuring machine detects the silicon ingot product on the ingot platform 5 via the laser rangefinder 8 on the laser rangefinder bracket 7, the laser rangefinder 8 transmits a signal to the inspection mechanism via a PLC. The inspection cover 13 slides on the linear guide rail 4 via a drag chain 19 and moves to the set inspection position. Each product is inspected three times. When reaching the inspection position, the height is detected by the detection sensor 9 on the vertical cylinder 21, and the ingot width is detected by the detection sensor 9 on the horizontal cylinder 10. After the three inspections are completed, the average value is calculated to obtain the width and height of the product and record it in the touch screen. Depending on the actual situation, after a period of use, the inspection fixture 11 is re-tested to verify its accuracy.

[0032] The linear module drives the detection mechanism to the calibration fixture position. According to the different width specifications of the incoming crystal rod, the detection sensor is calibrated on the calibration fixture according to the corresponding width size. The slotted photoelectric sensor is used to determine the location of the four detection sensors on the left and right. It is installed on the mounting base of the detection sensor. The solenoid valve is used to control the extension and retraction of the cylinder and is connected to the mounting bracket through the mounting plate.

[0033] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and not to limit it; although the utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications can still be made to the specific implementation of the utility model or equivalent substitutions can be made to some technical features without departing from the spirit of the technical solution of this utility model, and all such modifications and substitutions should be covered within the scope of the technical solution claimed by this utility model.

Claims

1. A silicon crystal rod size measuring device, characterized in that, The device includes a carrier module, a crystal rod support module, and a measurement module. The carrier module is equipped with the crystal rod support module and the measurement module. The carrier module includes a frame. The crystal rod support module includes a crystal rod platform and a calibration fixture. The crystal rod platform is located in the middle of one side of the upper end face of the frame, and the calibration fixture is located in the middle of the other side of the upper end face of the frame. The measurement module includes a laser rangefinder and a detection mechanism. A laser rangefinder bracket is located on the rear side of the crystal rod platform, and laser rangefinders are respectively mounted on the laser rangefinder bracket. The detection mechanism includes linear guide rails and a detection housing. The linear guide rails are respectively located on the front and rear sides of the crystal rod platform. The two ends of the detection housing slide on the linear guide rails. Multiple cylinders and detection sensors are mounted on the detection housing.

2. The silicon crystal rod size measuring device according to claim 1, characterized in that, The rack is rectangular in shape. Horizontal adjustment feet are provided on the front and rear sides of the bottom of the rack. Height adjustment feet are provided at the four corners of the rack and in the middle of the front and rear sides of the bottom of the rack. An electrical cabinet is provided on one side of the rack opposite the crystal rod platform. An operation box is provided on the electrical cabinet, and indicator lights are also provided on the electrical cabinet.

3. The silicon crystal rod size measuring device according to claim 2, characterized in that, The frame is rectangular in shape. Multiple square plates are provided on the upper part of the crystal rod platform, and multiple elbow plates are provided on the lower part of the crystal rod platform. The elbow plates are fixedly connected to the upper end face of the frame by bolts. The upper end face of the crystal rod platform is parallel to the upper end face of the frame. A calibration fixture is provided on the end face of the frame near the electrical cabinet.

4. The silicon crystal rod size measuring device according to claim 3, characterized in that, The lower end of the calibration fixture is connected and fixed to the upper end face of the frame via an I-beam, and the calibration fixture and the crystal rod platform are arranged on the same straight line.

5. The silicon crystal rod size measuring device according to claim 1, characterized in that, The laser rangefinder bracket is located on the upper rear side of the frame. There are two laser rangefinder brackets. The laser rangefinder is located on the side of the crystal rod platform near the calibration fixture. The laser rangefinder is vertically connected to the frame.

6. The silicon crystal rod size measuring device according to claim 5, characterized in that, The linear guide rails are arranged parallel to each other on both sides of the crystal rod platform. A moving module is also provided on the frame end face behind the linear guide rail on one side of the laser rangefinder bracket. The moving module includes a slide groove and a connecting plate. The connecting plate slides on the slide groove, which is parallel to the linear guide rail. The connecting plate is connected to the bottom of one side of the detection cover. A drag chain bracket is provided at the front end of the frame. A drag chain is provided on the drag chain bracket, and the drag chain drives the connecting plate to slide on the slide groove.

7. The silicon crystal rod size measuring device according to claim 6, characterized in that, The detection housing is generally rectangular in shape, with a square hole in the middle. Slider blocks are respectively provided at the lower ends of both sides of the detection housing. The sliders slide on a linear guide rail. When the detection housing slides on the linear guide rail, the calibration fixture passes through the square hole on the detection housing.

8. The silicon crystal rod size measuring device according to claim 7, characterized in that, The cylinders on the detection housing include a horizontal cylinder and a vertical cylinder. The detection housing is also provided with two horizontal crossbars. Support rods are provided on both sides of the detection housing. The support rods are vertically and movably connected to the horizontal crossbars. The upper ends of the support rods on both sides of the detection housing are connected by a horizontal fixing rod. There is a square hole in the detection housing between the two support rods. The support rods slide on the horizontal crossbars.

9. The silicon crystal rod size measuring device according to claim 8, characterized in that, A mounting plate is provided at the lower end of the support rod, and a horizontal cylinder is provided on the upper surface of the mounting plate. Horizontal cylinders are symmetrically provided in the middle of the support rods on both sides of the detection cover. A detection sensor is provided on the upper part of each horizontal cylinder. The horizontal cylinder drives the detection sensor to move horizontally. A vertical cylinder is provided at the lower end of the mounting plate, and vertical cylinders are provided on both sides of the horizontal fixing rod. A detection sensor is provided on the vertical cylinder, and the vertical cylinder drives the detection sensor to move vertically.

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