Semiconductor liquid supply device and semiconductor equipment

Abstract

The utility model provides a semiconductor liquid supply device and semiconductor equipment, the semiconductor liquid supply device includes: a first liquid supply assembly including a first pipeline, and a first switch and a first flow meter arranged on the first pipeline, the first flow meter being used for detecting a first flow value of a flowing medium in the first pipeline; the second liquid supply assembly comprises a second pipeline and a second flow meter arranged on the second pipeline, and the second flow meter is used for detecting a second flow value of the flowing medium in the second pipeline; the detection assembly is used for receiving the first flow value and the second flow value and generating an indication signal for representing a flow difference value between the first flow value and the second flow value; wherein the second pipeline is connected with the first pipeline, the connection position is located in the first pipeline and located at the upstream of the first flowmeter, and the first switch is located in the first pipeline and located at the upstream of the connection position. By the adoption of the technical scheme, the detection precision of the flowmeter can be improved, and then the liquid supply stability is improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a semiconductor liquid supply device and semiconductor equipment. Background Technology

[0002] Flow meters are essential tools in integrated circuit manufacturing and are widely used in various liquid pipelines. However, in actual operation, flow meters inevitably produce errors, leading to inaccurate flow rate readings and severely impacting production.

[0003] In addition, flow meters are real-time feedback tools. If the flow meter has a large error, it may cause some abnormalities, such as uneven etching, inadequate grinding or excessive grinding, which will affect product quality. Flow problems may also cause dust or contaminants to be adsorbed on the product surface, further affecting the cleaning effect.

[0004] Against this backdrop, how to provide technical solutions to improve the detection accuracy of flow meters and thus improve the stability of liquid supply has become a technical problem that urgently needs to be solved by those skilled in the art. Utility Model Content

[0005] In view of this, the present invention provides a semiconductor liquid supply device and semiconductor equipment, which can improve the detection accuracy of the flow meter and thus improve the stability of the liquid supply.

[0006] This disclosure provides a semiconductor liquid supply device, including:

[0007] The first liquid supply assembly includes: a first pipe, and a first switch and a first flow meter disposed on the first pipe, wherein the first flow meter is used to detect a first flow value of the flowing medium in the first pipe;

[0008] The second liquid supply assembly includes: a second pipe and a second flow meter disposed on the second pipe, the second flow meter being used to detect a second flow value of the flowing medium in the second pipe;

[0009] The detection component is electrically connected to the first flow meter and the second flow meter respectively, and is used to receive the first flow value and the second flow value, and generate an indication signal to characterize the flow difference between the first flow value and the second flow value;

[0010] The second pipe is connected to the first pipe, and the connection point in the first pipe is upstream of the first flow meter. The first switch is located upstream of the connection point in the first pipe.

[0011] Optionally, one of the first flow meter and the second flow meter is used as a standard flow meter, and the standard flow meter includes an electromagnetic flow meter.

[0012] Optionally, the detection component includes:

[0013] A first converter is electrically connected to the first flow meter and converts the first flow value into a corresponding first voltage value.

[0014] The second converter is electrically connected to the second flow meter and converts the second flow value into a corresponding second voltage value.

[0015] A comparator, wherein a first input terminal of the comparator is connected to the first converter and a second input terminal of the comparator is connected to the second converter, is used to generate the indication signal based on the first voltage value and the second voltage value;

[0016] An indicator, electrically coupled to the comparator, changes the display state based on the indication signal, the display state representing the magnitude of the flow difference between the first flow value and the second flow value.

[0017] Optionally, the indicator includes an LED.

[0018] Optionally, the detection component includes a controller.

[0019] Optionally,

[0020] The first liquid supply assembly also satisfies one or more of the following:

[0021] A pneumatic pump is installed on the first pipeline and located between the first switch and the first end of the first pipeline;

[0022] A temperature sensor is installed inside the first pipe to detect the temperature of the flowing medium;

[0023] A concentration sensor is installed inside the first pipe to detect the concentration of the flowing medium;

[0024] A filter, disposed on the first pipe and located between the first switch and the first end of the first pipe, is used to filter out a specific medium from the flowing medium.

[0025] Optionally, the semiconductor liquid supply device also satisfies one or more of the following:

[0026] A liquid supply assembly is connected to the first end of the first pipeline, and the liquid supply assembly stores the flowing medium.

[0027] A first liquid collection assembly is disposed at the second end of the first pipe for storing the flowing medium flowing out of the first pipe;

[0028] The second liquid collection assembly is disposed at the second end of the second pipe and is used to store the flowing medium flowing out of the second pipe;

[0029] The second switch is located on the side of the second pipe near the connection point.

[0030] Optionally, when the semiconductor liquid supply device includes a first liquid collection assembly, the first liquid collection assembly has a first drain port, a first drain pipe communicating with the first drain port, and a third switch disposed on the first drain pipe.

[0031] When the semiconductor liquid supply device includes a second liquid collection assembly, the second liquid collection assembly has a second drain port, a second drain pipe communicating with the second drain port, and a fourth switch disposed on the second drain pipe;

[0032] When the semiconductor liquid supply device includes a liquid supply assembly, the semiconductor liquid supply device further includes: a liquid level detector disposed within the liquid supply assembly for detecting the liquid level height within the liquid supply assembly.

[0033] Accordingly, this disclosure also provides a semiconductor device, including: the semiconductor liquid supply device described in any of the foregoing embodiments; and a processing device connected to the semiconductor liquid supply device for processing wafers.

[0034] Optionally, the processing apparatus includes: a mechanical grinding machine or a wet etching machine.

[0035] Compared with the prior art, the technical solution of this utility model embodiment has the following advantages:

[0036] The semiconductor liquid supply device provided in this utility model embodiment has a first flow meter installed on a first pipe and a second flow meter installed on a second pipe. Since the second pipe is connected to the first pipe, the flowing medium can flow simultaneously in both pipes, allowing both the first and second flow meters to simultaneously detect the flow rate. By using one of the first or second flow meters as a standard flow meter, the other flow meter can be calibrated, ensuring that the detection accuracy of either the first or second flow meter meets the application requirements, thereby improving the stability of the liquid supply. Attached Figure Description

[0037] To more clearly illustrate the technical solutions of the embodiments of this disclosure, the drawings used in the description of the embodiments of this disclosure or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0038] Figure 1 A schematic diagram of a semiconductor liquid supply device according to the first embodiment of the present invention is shown;

[0039] Figure 2 A schematic diagram of the structure of a detection component according to an embodiment of the present invention is shown;

[0040] Figure 3 A schematic diagram of a semiconductor liquid supply device according to the second embodiment of the present invention is shown. Detailed Implementation

[0041] In the following description, only certain exemplary embodiments are briefly described. As those skilled in the art will recognize, the described embodiments can be modified in various ways without departing from the spirit or scope of this invention. Therefore, the drawings and description are considered exemplary in nature and not restrictive.

[0042] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, features defined as "first" or "second" may explicitly or implicitly include one or more of the stated features. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified. It should be noted in the description of this utility model that, unless otherwise explicitly specified and limited, the terms "installed," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection, an electrical connection, or a connection that allows for mutual communication; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0043] The following disclosure provides many different embodiments or examples for implementing various structures of this invention. To simplify the disclosure, specific examples of components and arrangements are described below. These are merely examples and are not intended to limit the scope of the invention. Furthermore, reference numerals and / or letters may be repeated in different examples; such repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed. In addition, examples of various specific processes and materials are provided in this invention, but those skilled in the art will recognize the application of other processes and / or the use of other materials.

[0044] As described in the background section, if the flow meter has a large error, it may cause some abnormal situations to occur. Therefore, the flow meter needs to be calibrated to ensure the detection accuracy of the flow meter.

[0045] In some calibration schemes, the flow meter calibration process is typically performed at the device end. Deviations can occur during calibration, potentially damaging the product. Furthermore, since only one flow meter is used for calibration, the calibration results may contain errors if the flow meter's accuracy is unknown.

[0046] To address the aforementioned technical problems, this disclosure provides a semiconductor liquid supply device, comprising: a first liquid supply assembly, the first liquid supply assembly including: a first pipe, and a first switch and a first flow meter disposed on the first pipe, the first flow meter being used to detect a first flow rate value of a medium flowing in the first pipe; a second liquid supply assembly, the second liquid supply assembly including: a second pipe, and a second flow meter disposed on the second pipe, the second flow meter being used to detect a second flow rate value of a medium flowing through the second pipe; and a detection assembly electrically connected to the first flow meter and the second flow meter respectively, used to receive the first flow rate value and the second flow rate value, and generate an indication signal characterizing the flow rate difference between the first flow rate value and the second flow rate value; wherein the second pipe is connected to the first pipe, and the connection position in the first pipe is upstream of the first flow meter, and the first switch is upstream of the connection position in the first pipe.

[0047] The semiconductor liquid supply device provided in this embodiment has a first flow meter installed on a first pipe and a second flow meter installed on a second pipe. Since the second pipe is connected to the first pipe, the flowing medium can flow simultaneously in both pipes. Therefore, the first and second flow meters can simultaneously detect the flow rate of the flowing medium. By using one of the first and second flow meters as a standard flow meter, the other flow meter can be calibrated, ensuring that the detection accuracy of either the first or second flow meter meets the usage requirements, thereby improving the stability of the liquid supply.

[0048] Furthermore, this solution involves directly testing the flow rate of the fluid used in the processing, resulting in test data that is more realistic and higher calibration accuracy.

[0049] To enable those skilled in the art to have a clearer understanding of the technical concepts, principles, advantages, etc. contained in the embodiments of this disclosure, a detailed description will be provided below with reference to the accompanying drawings, specific embodiments, and specific application scenarios.

[0050] See Figure 1 The schematic diagram shown below illustrates the structure of a semiconductor liquid supply device in the first embodiment of this utility model. Figure 1 As shown, the semiconductor liquid supply device may include:

[0051] The first liquid supply assembly 110 may include: a first pipe 112, and a first switch 114 and a first flow meter 116 disposed on the first pipe 112. The first flow meter 116 is used to detect the first flow value of the flowing medium (not shown) in the first pipe 112.

[0052] The second liquid supply assembly 120 may include: a second pipe 122, and a second flow meter 124 disposed on the second pipe 122, the second flow meter 124 being used to detect a second flow value of the flowing medium in the second pipe 122;

[0053] The detection component 130 is electrically connected to the first flow meter 116 and the second flow meter 124 respectively, and is used to receive the first flow value and the second flow value, and generate an indication signal to characterize the flow difference between the first flow value and the second flow value.

[0054] The second pipe 122 is connected to the first pipe 112, and the connection position is located upstream of the first flow meter 116 in the first pipe 112. The first switch 114 is located upstream of the connection position in the first pipe 112.

[0055] Specifically, when a calibration operation is performed, the first switch 114 is activated, allowing the flowing medium to flow from the first end of the first pipe 112 to the second end. Furthermore, since the first pipe 112 and the second pipe 122 are connected, the flowing medium can be split at the connection point, allowing the flowing medium to flow simultaneously within both the first pipe 112 and the second pipe 122.

[0056] Along the flow direction of the flowing medium, a first flow meter 116 is installed on the first pipe 112, and a second flow meter 124 is installed on the second pipe 122. When the flowing medium reaches the detection area corresponding to the first flow meter 116 and the second flow meter 124, the first flow meter 116 can obtain the first flow rate value of the flowing medium in the first pipe 112, and the second flow meter 124 can obtain the second flow rate value of the flowing medium in the second pipe 122.

[0057] Since one of the first flowmeter 116 and the second flowmeter 124 can be used as a standard flowmeter, the flow rate value detected by the standard flowmeter is accurate. This allows the other flowmeter (i.e., the flowmeter under test) to be calibrated based on the flow rate value detected by the standard flowmeter.

[0058] For example, in one embodiment, the second flow meter 124 is a standard flow meter and the first flow meter 116 is the flow meter to be tested. The first flow meter 116 can be calibrated using the second flow value and the first flow value. In another embodiment, the first flow meter 116 is a standard flow meter and the second flow meter 124 is the flow meter to be tested. The second flow meter 124 can be calibrated using the first flow value and the second flow value.

[0059] In this embodiment, the second flow meter 124 is used as the standard flow meter and the first flow meter 116 is used as the flow meter to be tested for illustration.

[0060] Accordingly, the second flow meter 124 (i.e., the standard flow meter) may include an electromagnetic flow meter. Electromagnetic flow meters are characterized by high precision and strong adaptability, and can be applied to various calibration scenarios while improving calibration accuracy.

[0061] The first flow meter 116 can be one or more of the following: electromagnetic flow meter, mechanical flow meter, and ultrasonic flow meter.

[0062] Upon receiving a first flow value from the first flow meter 116 and a second flow value from the second flow meter 124, the detection component 130 can generate an indication signal to characterize the flow difference between the first flow value and the second flow value, and then determine the detection accuracy of the first flow meter 116 or the second flow meter 124 based on the indication signal.

[0063] It should be noted that, firstly, Figure 1 The schematic diagrams of the first liquid supply assembly 110 and the second liquid supply assembly 120 are merely illustrative examples, used to demonstrate how the calibration operation is achieved through the cooperation between the components, and do not show the actual structure of each component; secondly, the parameters of the first and second pipes in this scheme are the same, for example, the pipe diameter is the same, the material is the same, etc., to reduce the problem of low calibration accuracy caused by differences in pipes; thirdly, along the flow direction of the flowing medium (e.g. Figure 1 (In the direction indicated by the middle arrow), the first and second pipes are arranged in parallel, and the interval between the first and second pipes is as small as possible along the flow direction perpendicular to the flow medium to reduce the impact of the height difference on the flow velocity of the flow medium; Fourth, in this scheme, "upstream" refers to the location of the starting point of the flow medium along the flow direction; Fifth, in this scheme, "flow medium" can refer to polishing fluid, etching fluid, water, air, saline, methanol, or other mixed fluids, etc.

[0064] See Figure 2 The diagram shown is a structural schematic of a detection component in one embodiment of the present invention. Figure 1 and Figure 2 As shown, the detection component 130 may include:

[0065] The first converter 131 is electrically connected to the first flow meter 116 and converts the first flow value into a corresponding first voltage value.

[0066] The second converter 132 is electrically connected to the second flow meter 124 and converts the second flow value into a corresponding second voltage value.

[0067] Comparator 133, the first input terminal of which is connected to the first converter 131, and the second input terminal of which is connected to the second converter 132, is used to generate the indication signal based on the first voltage value and the second voltage value;

[0068] Indicator 134, electrically coupled to comparator 133, changes display state based on indication signal, the display state representing the magnitude of the flow difference between the first flow value and the second flow value.

[0069] Specifically, when the first converter 131 receives the first flow value from the first flow meter 116, it can convert the first flow value into a first voltage value through a conversion operation and output it to the first input terminal of the comparator 133 (as a non-limiting example, the first input terminal is the positive input terminal).

[0070] More specifically, the first flow rate value is a fixed value. By pre-setting a mapping table in the first converter 131 to represent the correspondence between the flow rate value and the voltage value, when the first flow rate value is obtained, the first voltage value corresponding to the first flow rate value can be obtained by looking up the table.

[0071] Similarly, when the second converter 132 receives the second flow value from the second flow meter 124, it can convert the second flow value into a second voltage value through a conversion operation similar to that of the first converter 131, and output it to the second input terminal of the comparator 133 (as a non-limiting example, the second input terminal is an inverting input terminal).

[0072] After the comparator 133 acquires the first voltage value and the second voltage value, it can generate an indication signal to characterize the magnitude between the first voltage value and the second voltage value by performing a comparison operation.

[0073] More specifically, when the first voltage value is greater than the second voltage value, the indicator signal has a first level "1"; and when the first voltage value is less than the second voltage value, the indicator signal has a second level "0".

[0074] Thus, based on the indication signal generated by comparator 133, the display state of indicator 134 can change. Therefore, based on the display state of indicator 134, the relationship between the first voltage value and the second voltage value can be determined. That is, it can be determined whether the difference between the first flow rate value and the second flow rate value is 0.

[0075] More specifically, if the indicator 134 changes from the first display state to the second display state, it indicates that the first voltage value and the second voltage value are different. This indicates that the difference between the first flow value and the second flow value is not 0, and the flow meter under test does not meet the detection accuracy requirements. Therefore, the flow meter under test can be replaced until the display state is always the first display state.

[0076] In this embodiment, the indicator 134 can be an LED, and the brightness change of the LED is used to determine whether the detection accuracy of the flow meter under test meets the requirements.

[0077] It should be noted that indicator 134 can also be other devices or units with state switching capabilities, such as buzzer lights.

[0078] In this embodiment, the detection component 130 can also be a controller. This allows for direct calculation upon obtaining the first flow rate value and the second flow rate value, thereby generating the indication signal.

[0079] In this embodiment, the controller can be implemented by a processing chip such as a central processing unit (CPU) or a field programmable gate array (FPGA), or by an application specific integrated circuit (ASIC) or one or more integrated circuits configured to implement the embodiments of this utility model.

[0080] It should be noted that the detection component can use general-purpose computer equipment to communicate and perform data calculations with the first and second flow meters. This invention does not involve any improvement to the specific working method of the computing device. The process of acquiring and comparing data by the computing device can be implemented using existing or conventional techniques in the field.

[0081] See Figure 3 The diagram shown is a structural schematic of a semiconductor liquid supply device according to the second embodiment of this utility model. For similarities between this embodiment and the foregoing embodiments, please refer to the foregoing embodiments. Figure 3 As shown, the difference also lies in:

[0082] The semiconductor liquid supply device may also include:

[0083] A pneumatic pump 140 is installed on the first pipe 112 and located between the first switch 114 and the first end of the first pipe 112.

[0084] The pneumatic pump 140 can make the flowing medium flow freely in the first pipe 112 and the second pipe 122 by changing its own air pressure, thereby delivering the flowing medium to the wafer surface or to other locations.

[0085] In this embodiment, the pneumatic pump 140 includes one or more of a pneumatic pump and a vacuum pump.

[0086] A temperature sensor 150 is disposed inside the first pipe 112 for detecting the temperature of the flowing medium.

[0087] The temperature sensor 150 can monitor the temperature of the flowing medium in the first pipe 112 in real time or at preset time intervals. In the case of a semiconductor device including a controller, the temperature sensor 150 can upload the detected temperature value to the controller to determine whether the temperature of the flowing medium meets the processing requirements.

[0088] A concentration sensor 170 is disposed inside the first pipe 112 for detecting the concentration of the flowing medium.

[0089] Different processing applications require different concentrations of the flowing medium. Therefore, during the actual calibration process, the concentration of the flowing medium can be detected to determine whether the flowing medium meets the processing requirements.

[0090] A filter 170 is disposed on the first pipe 112 and located between the first switch 114 and the first end of the first pipe 112, for filtering out a specific medium from the flowing medium.

[0091] In this process, if there are some large particles or foreign objects in the flowing medium, a filter 170 can be installed at the first end of the first pipe 112 to filter them, so that the components of the flowing medium flowing to other locations through the first switch 114 meet the processing requirements.

[0092] In this embodiment, filter 170 may include at least one of a bag filter and a membrane filter.

[0093] It should be noted that when both filter 170 and air pump 140 are included, filter 170 is located closer to the first end of the first pipe 112.

[0094] See next Figure 3 The semiconductor liquid supply device may further include: a liquid supply component 180, which is connected to the first end of the first pipe 112, and the liquid supply component 180 stores the flowing medium.

[0095] The liquid supply assembly 180 serves to provide the flowing medium. By storing the flowing medium within the liquid supply assembly 180, liquid supply operations can be performed in real time to the first pipe 112 and the second pipe 122.

[0096] In some embodiments, there are multiple liquid supply assemblies 180, and each liquid supply assembly 180 stores a type of flow medium.

[0097] Accordingly, the passage between any one of the liquid supply components 180 and the first pipe 112 can be selected according to actual needs, thereby providing at least one type of flow medium.

[0098] In some embodiments, where the semiconductor liquid supply device includes a liquid supply assembly, the semiconductor liquid supply device may further include: a liquid level detector (not shown), disposed within the liquid supply assembly 180, for detecting the liquid level height within the liquid supply assembly 180.

[0099] Specifically, during the process of the liquid supply assembly 180 supplying the flowing medium to the first pipeline 112, the liquid level detector can detect the real-time liquid level height in the liquid supply assembly 180. This allows the flowing medium to be replenished in a timely manner when the real-time liquid level height in the liquid supply assembly 180 is lower than the set height, so that the flowing medium in the liquid supply assembly 180 meets the processing usage requirements.

[0100] The first liquid collection assembly 191 is disposed at the second end of the first pipe 112 and is used to store the flowing medium flowing out of the first pipe 112.

[0101] During the calibration process, the flowing medium flowing out of the first pipe 112 can be collected and reused.

[0102] In some embodiments, when the semiconductor liquid supply device includes a first liquid collection assembly 191, the first liquid collection assembly 191 has a first drain port G1, a first drain pipe P1 communicating with the first drain port G1, and a third switch K2 disposed on the first drain pipe P1.

[0103] In other words, by selecting the third switch K2, the flowing medium in the first liquid collection assembly 191 can be discharged, so as to achieve continuous operation of the first liquid collection assembly 191.

[0104] In this embodiment, the third switch K2 may include at least one of a solenoid valve, a pneumatic solenoid valve, or a manual valve.

[0105] The second liquid collection assembly 192 is disposed at the second end of the second pipe 122 and is used to store the flowing medium flowing out through the second pipe 122.

[0106] During the calibration process, the flowing medium flowing out of the second pipe 122 can be collected and reused.

[0107] When the semiconductor liquid supply device includes a second liquid collection assembly 192, the second liquid collection assembly 192 has a second drain port G2, a second drain pipe communicating with the second drain port G2, and a fourth switch K3 disposed on the second drain pipe P2.

[0108] In other words, by selecting the fourth switch K3, the flowing medium inside the second liquid collection assembly 192 can be discharged, enabling the second liquid collection assembly 192 to operate continuously.

[0109] In this embodiment, the fourth switch K3 may include at least one of a solenoid valve, a pneumatic solenoid valve, or a manual valve.

[0110] In some embodiments, the second pipe 122 and the first pipe 112 may share a single liquid collection assembly. In other words, in Figure 3 The illustrated structure may include only one of the second liquid collection component 192 and the first liquid collection component 191.

[0111] In this embodiment, the semiconductor liquid supply device may further include a second switch K1, disposed on the side of the second pipe 122 near the connection position. Thus, when it is determined that the detection performance of the flow meter under test meets the processing requirements, the second switch K1 is closed, allowing the flow medium to be transmitted through the first pipe 112 to the wafer surface for processing.

[0112] In this embodiment, the second switch K1 may include at least one of a solenoid valve, a pneumatic solenoid valve, or a manual valve.

[0113] It should be noted that the semiconductor liquid supply device may actually include other components. In order to facilitate the description of the technical solution of this disclosure and to highlight the innovative part of this disclosure, the components of the semiconductor liquid supply device that can be implemented by the prior art have been omitted in this disclosure.

[0114] This application describes multiple embodiment schemes provided by the present utility model. The optional methods described in each embodiment scheme can be combined and cross-referenced with each other without conflict, thereby extending to a variety of possible embodiment schemes. These can all be considered as the embodiment schemes disclosed and made public by the present utility model.

[0115] The inventors further discovered that the flow meter can be applied to wet etching and planarization processes.

[0116] Based on this, this disclosure also provides a semiconductor device corresponding to the semiconductor liquid supply device described in any of the above embodiments, which will be described below. It should be noted that the content of the semiconductor device described below can be referred to in correspondence with the content of the semiconductor liquid supply device described above.

[0117] In some embodiments, the semiconductor device may include the semiconductor liquid supply device described in any of the foregoing embodiments; and a processing apparatus connected to the semiconductor liquid supply device for processing the wafer. The specific details regarding the structure, connection relationships, functions, and working principles of the semiconductor liquid supply device can be found in the descriptions and figures above, and will not be repeated here.

[0118] In some embodiments, the processing apparatus may include a mechanical grinding machine or a wet etching machine.

[0119] While the embodiments disclosed herein are as described above, the utility model is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of this utility model; therefore, the scope of protection of this utility model should be determined by the scope defined in the claims.

Claims

1. A semiconductor liquid supply device, characterized in that, include: The first liquid supply assembly includes: a first pipe, and a first switch and a first flow meter disposed on the first pipe, wherein the first flow meter is used to detect a first flow value of the flowing medium in the first pipe; The second liquid supply assembly includes: a second pipe and a second flow meter disposed on the second pipe, the second flow meter being used to detect a second flow value of the flowing medium in the second pipe; The detection component is electrically connected to the first flow meter and the second flow meter respectively, and is used to receive the first flow value and the second flow value, and generate an indication signal to characterize the flow difference between the first flow value and the second flow value; The second pipe is connected to the first pipe, and the connection point in the first pipe is upstream of the first flow meter. The first switch is located upstream of the connection point in the first pipe.

2. The semiconductor liquid supply device according to claim 1, characterized in that, One of the first flow meter and the second flow meter is used as a standard flow meter, and the standard flow meter includes an electromagnetic flow meter.

3. The semiconductor liquid supply device according to claim 1, characterized in that, The detection component includes: A first converter is electrically connected to the first flow meter and converts the first flow value into a corresponding first voltage value. The second converter is electrically connected to the second flow meter and converts the second flow value into a corresponding second voltage value. A comparator, wherein a first input terminal of the comparator is connected to the first converter and a second input terminal of the comparator is connected to the second converter, is used to generate the indication signal based on the first voltage value and the second voltage value; An indicator, electrically coupled to the comparator, changes the display state based on the indication signal, the display state representing the magnitude of the flow difference between the first flow value and the second flow value.

4. The semiconductor liquid supply device according to claim 3, characterized in that, The indicator includes LEDs.

5. The semiconductor liquid supply device according to claim 1, characterized in that, The detection component includes a controller.

6. The semiconductor liquid supply device according to claim 1, characterized in that, The first liquid supply assembly also satisfies one or more of the following: A pneumatic pump is installed on the first pipe and located between the first switch and the first end of the first pipe; A temperature sensor is installed inside the first pipe to detect the temperature of the flowing medium; A concentration sensor is installed inside the first pipe to detect the concentration of the flowing medium; A filter is disposed on the first pipe and located between the first switch and the first end of the first pipe, for filtering out a specific medium from the flowing medium.

7. The semiconductor liquid supply device according to claim 1, characterized in that, It also meets one or more of the following conditions: A liquid supply assembly is connected to the first end of the first pipeline, and the liquid supply assembly stores the flowing medium. A first liquid collection assembly is disposed at the second end of the first pipe for storing the flowing medium flowing out of the first pipe; The second liquid collection assembly is disposed at the second end of the second pipe and is used to store the flowing medium flowing out of the second pipe; The second switch is located on the side of the second pipe near the connection point.

8. The semiconductor liquid supply device according to claim 7, characterized in that, When the semiconductor liquid supply device includes a first liquid collection assembly, the first liquid collection assembly has a first drain port, a first drain pipe communicating with the first drain port, and a third switch disposed on the first drain pipe. When the semiconductor liquid supply device includes a second liquid collection assembly, the second liquid collection assembly has a second drain port, a second drain pipe communicating with the second drain port, and a fourth switch disposed on the second drain pipe; When the semiconductor liquid supply device includes a liquid supply assembly, the semiconductor liquid supply device further includes: a liquid level detector disposed within the liquid supply assembly for detecting the liquid level height within the liquid supply assembly.

9. A semiconductor device, characterized in that, include: The semiconductor liquid supply device as described in any one of claims 1 to 8; A processing apparatus connected to the semiconductor liquid supply device for processing wafers.

10. The semiconductor device according to claim 9, characterized in that, The processing equipment includes: a mechanical grinding machine or a wet etching machine.

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