Ceramic plate placing device

Abstract

The utility model relates to the technical field of semiconductor processing, and discloses a ceramic plate placing device which comprises a placing box, two placing grooves are formed in the placing box, the tops of the inner walls of the two placing grooves are fixedly connected with placing plates, and the placing plates are provided with a plurality of placing frames and a plurality of pushing assemblies. Through the arrangement of the placement box, the placement frame, the inclined plate, the push plate, the extrusion block and other structures, the placement frame can be conveniently pushed to move when the ceramic plate is taken and placed, so that the placement frame is staggered from other placement frames, the ceramic plate can be conveniently placed on the flexible base or taken down from the flexible base, the taking and placing efficiency of the ceramic plate is improved, and the ceramic plate taking and placing efficiency is improved. And meanwhile, when the ceramic plates are placed or taken out, the corresponding ceramic plates can be automatically clamped and fixed or released in the moving process of the placing frame, convenience and rapidness are achieved, the stability of ceramic plate placing is improved, meanwhile, ceramic plate taking-out work is facilitated, and then the practicability of the device is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor processing especially relates to a ceramic tray placing device. BACKGROUND

[0002] Wafer, also known as wafer, is a silicon wafer used for integrated circuit manufacturing. It is also called wafer because of its circular shape. By making various circuit structures on the wafer surface, it can become an electronic component with specific electrical properties. During the production and processing of wafers, it usually needs to go through slicing, grinding, polishing and cleaning process steps. At present, during the grinding, polishing and other processes, ceramic trays are used as the carrier or base plate of the wafer, that is, the wafer is attached to the surface of the ceramic tray for processing, and the ceramic tray has high surface flatness, which can provide a reference plane for the grinding and polishing of the wafer. For example, when grinding the wafer, the wafer needs to be placed in a cleaning device for cleaning, then a waxing device is used to attach the wafer to the surface of a flat ceramic tray, the ceramic tray with the attached wafer is moved to a polishing machine for polishing, and after polishing, the wafer is cleaned using a cleaning machine, and finally the wafer is dewaxed and taken out.

[0003] The utility model discloses a kind of ceramic tray placing devices, including shell, placing unit and spraying component, shell has multiple placing spaces along up-down direction, placing unit is set in placing space, placing unit includes a pair of placing rack, one of a pair of placing rack is horizontally set, another of a pair of placing rack is obliquely set, placing rack has the clamping slot that passes through, the clamping slot of one of a pair of placing rack and the clamping slot of another of a pair of placing rack form the placing slot for placing ceramic tray together. The ceramic tray placing device of the utility model has simple structure, can realize the vertical storage of ceramic tray, and placing stability is good, not easy to tip over, reduce security risk, there is gap between each ceramic tray, can prevent ceramic tray surface abrasion, and through spraying component, ceramic tray surface can be kept wet.

[0004] The device in the above patent can stably place the ceramic tray and prevent it from tipping over, improving the safety of ceramic tray placement. However, during actual use of the device, the gap between the ceramic trays is still small after they are placed, which affects the taking and placing of the ceramic trays, thereby reducing the efficiency of taking and placing the ceramic trays. UTILITY MODEL CONTENTS

[0005] The utility model aims at solving the shortcomings in the prior art and provides a ceramic tray placing device.

[0006] In order to achieve the above object, the utility model discloses the following technical scheme: a ceramic tray placing device, including the placing box, the inside of placing box is provided with two placing grooves, the top of two placing groove inner wall is all fixedly connected with the placing board, is provided with a plurality of placing frame and a plurality of push material assemblies on the placing board, the top of placing frame inner wall is fixedly connected with the flexible base, is seted up in the slot of the flexible base, the push material assembly includes push groove and inclined plate, the top of placing board is seted up in push groove, the inside sliding connection of push groove has the push plate, the back of placing box inner wall is rotatably connected with the inclined plate, is provided with steady reset component and clamping assembly on the placing frame, is provided with humidification component on the placing box, the flexible base and flexible clamping piece are all made of flexible silica gel material, have antiskid nature, can reduce the clamping intensity of ceramic tray simultaneously, the front of placing box is provided with airtight box door.

[0007] As further description of the above technical scheme:

[0008] The bottom end of the inclined plate extends to the inside of the push groove and movably abuts one end of the push plate, the placing rack is arranged in a U shape, and the end of the push plate away from the push groove movably abuts the back of the placing rack.

[0009] As further description of the above technical scheme:

[0010] The steady reset component includes a damper, the damper is fixedly installed on the back of the placing box inner wall, the telescopic end of the damper is fixedly connected with the back of the placing rack, a reset spring is sleeved on the outer surface of the damper, and the two ends of the reset spring are fixedly connected with the back of the placing rack and the back of the placing box inner wall.

[0011] As further description of the above technical scheme:

[0012] The top of the placing groove is provided with a plurality of guide grooves, the inside of the guide groove is slidably connected with a sliding block, the bottom of the sliding block is fixedly connected with the top of the placing rack, a plurality of guide grooves are arranged in a linear array, and the number of guide grooves and the placing rack is consistent and one-to-one correspondence.

[0013] As further description of the above technical scheme:

[0014] The inside of the guide groove is fixedly connected with a guide block, the inside of the guide groove is slidably connected with an extrusion block, the bottom of the extrusion block is fixedly connected with a connecting rod, and the bottom end of the connecting rod movably penetrates the placing rack and extends to the inside, through the setting of the guide block, the extrusion block can be extruded and guided to move upwards.

[0015] As further description of the above technical scheme:

[0016] The clamping assembly comprises an extrusion spring and a flexible clamping piece, the extrusion spring is fixedly connected to the top of the inner wall of the placing rack, and the flexible clamping piece is fixedly connected to the bottom end of the extrusion spring, and an arc-shaped clamping groove is formed in the flexible clamping piece.

[0017] As a further description of the above technical solution:

[0018] The bottom end of the connecting rod is fixedly connected to the top of the flexible clamping piece, and the extrusion spring is sleeved on the outer surface of the connecting rod.

[0019] As a further description of the above technical solution:

[0020] The humidifying assembly comprises two square tubes, two square tubes are fixedly connected to the two sides of the placing box, and a plurality of atomizing nozzles are arranged on the opposite sides of the two square tubes, the atomizing nozzles are fixedly connected to the placing box, the back surfaces of the two square tubes are fixedly connected to the soft tubes, the two square tubes are arranged opposite to each other, and the plurality of atomizing nozzles are arranged in a linear array.

[0021] The utility model has the advantages of the following beneficial effects:

[0022] 1、Compared with the prior art, the ceramic disc placing device is provided with a placing box, a placing rack, an inclined plate, a push plate and an extrusion block, and when the ceramic disc is taken or placed, the placing rack can be conveniently pushed to move, the placing rack is dislocated with other placing racks, the ceramic disc can be conveniently placed on or taken off the flexible base, the taking and placing efficiency of the ceramic disc is improved, and when the ceramic disc is placed or taken off, the corresponding ceramic disc can be automatically clamped and fixed or released from clamping during the movement of the placing rack, so that the stability of the ceramic disc is improved, the ceramic disc is conveniently taken off, and the practicability of the device is improved.

[0023] 2、Compared with the prior art, the ceramic disc placing device is provided with a damper, a reset spring, a guide groove and a sliding block, and when the reset spring is stretched and released, the force generated when the placing rack is reset can be absorbed, so that the placing rack is stably reset, and the stability and safety during the placing of the ceramic disc are improved. BRIEF DESCRIPTION OF DRAWINGS

[0024] Figure 1 The utility model provides a kind of overall structure perspective view of ceramic disc placing device;

[0025] Figure 2 The utility model provides a kind of inclined plate and push groove structure diagram of ceramic disc placing device;

[0026] Figure 3The utility model provides a kind of ceramic plate placing device's guide slot and damper etc. structure schematic diagram is proposed.

[0027] Figure 4 The utility model provides a kind of ceramic plate placing device's connecting rod and slotting etc. structure schematic diagram.

[0028] Legend:

[0029] 1, placing box;2, placing groove;3, placing plate;4, placing rack;5, flexible base;6, slot;7, push groove;8, inclined plate;9, push plate;10, damper;11, reset spring;12, guide slot;13, sliding block;14, guide block;15, extrusion block;16, connecting rod;17, extrusion spring;18, flexible clamping piece;19, arc clamping groove;20, square tube;21, atomizing nozzle;22, hose. Specific embodiments

[0030] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor belong to the scope of protection of the utility model.

[0031] Reference Figures 1-4 The utility model provides a kind of ceramic plate placing device:including placing box 1, the inside of placing box 1 is provided with two placing grooves 2, the top of two placing grooves 2 inner wall is all fixedly connected with placing plate 3, and placing plate 3 is provided with a plurality of placing racks 4 and a plurality of push material assemblies on, and placing rack 4 is arranged in U type, and the top of placing rack 4 inner wall is fixedly connected with flexible base 5, and slot 6 is set up on flexible base 5, and push material assembly includes push groove 7 and inclined plate 8, and push groove 7 is set up in the top of placing plate 3, and the inside of push groove 7 is slidably connected with push plate 9, and inclined plate 8 is rotatably connected on the back of placing box 1 inner wall, and the bottom of inclined plate 8 extends to the inside of push groove 7 and with the one end of push plate 9 movable abutment, and placing rack 4 is provided with stable reset assembly and clamping assembly, and placing box 1 is provided with humidification assembly, and through the setting of placing box 1, placing rack 4, inclined plate 8, push plate 9 and extrusion block 15 etc. structure, can be conveniently pushed when ceramic plate is taken and placed, and the rack 4 moves, so that the rack 4 and other racks 4 generate dislocation, and ceramic plate is placed on flexible base 5 or taken from flexible base 5, improve the taking efficiency of ceramic plate, simultaneously, when ceramic plate is placed or taken, can be automatically clamped and fixed or released clamping to corresponding ceramic plate in the process of rack 4 movement, it is convenient and fast, improves the stability of ceramic plate placement, and also facilitates the taking work of ceramic plate, to improve the practicability of device.

[0032] The stable reset assembly comprises a damper 10 fixedly installed on the back of the inner wall of the placing box 1, the telescopic end of the damper 10 is fixedly connected with the back of the placing rack 4, the outer surface of the damper 10 is sleeved with a reset spring 11, through the cooperation of the damper 10, the reset spring 11, the guide groove 12 and the sliding block 13 and the like, the force generated when the reset spring 11 stretched is absorbed when the elastic force of the reset spring 11 is released, so that the placing rack 4 is stably reset, and the stability and safety of the ceramic plate during placement are improved.

[0033] A plurality of guide grooves 12 are formed in the top of the placing groove 2, a sliding block 13 is slidably connected in the guide groove 12, the bottom of the sliding block 13 is fixedly connected with the top of the placing rack 4, a guide block 14 is fixedly connected in the guide groove 12, an extrusion block 15 is slidably connected in the guide groove 12, the bottom of the extrusion block 15 is fixedly connected with a connecting rod 16, the bottom end of the connecting rod 16 movably penetrates the placing rack 4 and extends into the interior, through the arrangement of the guide groove 12 and the guide block 14, the corresponding placing rack 4 can be guided to move horizontally, and the accuracy of the moving direction is improved.

[0034] The clamping assembly comprises an extrusion spring 17 and a flexible clamping piece 18, the extrusion spring 17 is fixedly connected to the top of the inner wall of the placing rack 4, the extrusion spring 17 is sleeved on the outer surface of the connecting rod 16, the flexible clamping piece 18 is fixedly connected to the bottom end of the extrusion spring 17, the bottom end of the connecting rod 16 is fixedly connected with the top of the flexible clamping piece 18, an arc-shaped clamping groove 19 is formed in the flexible clamping piece 18, through the arrangement of the clamping assembly, the ceramic plate can be prevented from shaking after being placed, and the stability of the ceramic plate after being placed is improved.

[0035] The humidifying assembly comprises two square tubes 20, the two square tubes 20 are fixedly connected to the two sides of the placing box 1, a plurality of atomizing nozzles 21 are arranged on the opposite sides of the two square tubes 20, the atomizing nozzles 21 fixedly penetrate the placing box 1, a soft tube 22 is fixedly connected to the back of the two square tubes 20, through the arrangement of the humidifying assembly, the inside of the placing box 1 can be humidified, and the placed ceramic plate can be kept in a moist state.

[0036] Working principle: when using, after the hose 22 is communicated with the external pump body output end, the humidification to the inside of the placing box 1 can be carried out by cooperating with the atomizing nozzle 21, the ceramic plate to be placed is kept in the wet state, when the ceramic plate to be placed needs to be taken out, after the placing box 1 is opened, the corresponding push plate 9 is manually pressed to move to the inside of the placing box 1, the corresponding inclined plate 8 is extruded to rotate, the corresponding placing rack 4 is pushed to move to the front of the placing box 1, and in the moving process of the placing rack 4, the corresponding reset spring 11 is stretched, the damper 10 is extended, the corresponding sliding block 13 and the extrusion block 15 are slid in the guide slot 12, and in the moving process of the extrusion block 15, after the extrusion block 15 is abutted with the corresponding guide block 14, under the extrusion and guiding of the guide block 14, the extrusion block 15 is moved upwards, the corresponding connecting rod 16 and the flexible clamping piece 18 are synchronously moved upwards, the extrusion spring 17 is extruded, and then when the placing rack 4 drives the ceramic plate to move out from the inside of the placing box 1, the clamping and fixing of the corresponding ceramic plate is automatically released, thereby facilitating the taking work of the worker.

[0037] Finally, it should be noted that: the above only for the preferred embodiments of the utility model have described, and does not limit the utility model, although the utility model is described in detail with reference to the foregoing embodiments, for the person skilled in the art, it still can modify the technical scheme recorded in the foregoing each embodiment, or equivalent replacement to part of technical features, any modification, equivalent replacement, improvement etc. made within the spirit and principles of the utility model, should be contained in the protection scope of the utility model.

Claims

1. A ceramic disc placing device comprising a placing box (1), characterized in that: The inside of the placing box (1) is provided with two placing grooves (2), the top of the inner wall of the two placing grooves (2) is fixedly connected with a placing plate (3), a plurality of placing racks (4) and a plurality of pushing assemblies are arranged on the placing plate (3), the top of the inner wall of the placing rack (4) is fixedly connected with a flexible base (5), the flexible base (5) is provided with a groove (6), the pushing assembly comprises a pushing groove (7) and an inclined plate (8), the pushing groove (7) is arranged on the top of the placing plate (3), the inside of the pushing groove (7) is slidably connected with a push plate (9), the inclined plate (8) is rotatably connected to the back of the inner wall of the placing box (1), the placing rack (4) is provided with a stable reset assembly and a clamping assembly, and the placing box (1) is provided with a humidifying assembly.

2. A ceramic disc placement device according to claim 1, wherein: The bottom end of the inclined plate (8) extends to the inside of the pushing groove (7) and movably abuts one end of the push plate (9), and the placing rack (4) is arranged in a U shape.

3. The ceramic disc placement apparatus of claim 1, wherein: The stable reset assembly comprises a damper (10), the damper (10) is fixedly installed on the back of the inner wall of the placing box (1), the telescopic end of the damper (10) is fixedly connected with the back of the placing rack (4), and the outer surface of the damper (10) is sleeved with a reset spring (11).

4. The ceramic disc placement apparatus of claim 1, wherein: The top of the placing groove (2) is provided with a plurality of guide grooves (12), the inside of the guide groove (12) is slidably connected with a sliding block (13), and the bottom of the sliding block (13) is fixedly connected with the top of the placing rack (4).

5. A ceramic disc placement device according to claim 4, wherein: The inside of the guide groove (12) is fixedly connected with a guide block (14), the inside of the guide groove (12) is slidably connected with an extrusion block (15), the bottom of the extrusion block (15) is fixedly connected with a connecting rod (16), and the bottom end of the connecting rod (16) movably penetrates the placing rack (4) and extends to the inside.

6. A ceramic disc placement device according to claim 5, wherein: The clamping assembly comprises an extrusion spring (17) and a flexible clamping piece (18), the extrusion spring (17) is fixedly connected to the top of the inner wall of the placing rack (4), the flexible clamping piece (18) is fixedly connected to the bottom end of the extrusion spring (17), and the flexible clamping piece (18) is provided with an arc-shaped clamping groove (19).

7. A ceramic disc placement device according to claim 6, wherein: The bottom end of the connecting rod (16) is fixedly connected with the top of the flexible clamping piece (18), and the extrusion spring (17) is sleeved on the outer surface of the connecting rod (16).

8. The ceramic disc placement apparatus of claim 1, wherein: The humidifying assembly comprises two square tubes (20), two square tubes (20) are fixedly connected on both sides of the placing box (1), and a plurality of atomizing nozzles (21) are arranged on the opposite side of the two square tubes (20). The atomizing nozzle (21) fixedly penetrates the placing box (1), and the back of the two square tubes (20) is fixedly connected with a hose (22).

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