Film coating correction frame and film coating correction structure
By designing a coating correction frame and adjustment components, the problem of uneven film thickness in the coating machine was solved, achieving concentrated sputtering of the target material and uniform coating of the substrate, thereby improving product quality and performance.
Patent Information
- Application Number
- CN202422933641.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-29
- Publication Date
- 2026-01-30
- Estimated Expiration
- 2034-11-29
AI Technical Summary
In traditional coating machines, it is difficult to control the unevenness of film thickness, which affects product quality and performance.
A coating correction frame, including a vertical panel and a correction plate, is used to form a sputtering space. The position of the correction plate is adjusted by an adjustment component to concentrate the sputtering of the target material and improve the coating uniformity.
This results in more concentrated sputtering of the target material, more uniform coating of the substrate, reduced film thickness inhomogeneity, and improved product quality and performance.
Smart Images
Figure CN223852744U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of coating processing technology, specifically to a coating correction frame and a coating correction structure. Background Technology
[0002] Vacuum deposition is a technique that deposits materials onto the surface of a substrate in a vacuum environment to form a thin film. Sputtering is a commonly used vacuum deposition method, which uses ions generated by gas discharge to bombard a target (the material to be deposited), causing atoms or molecules on the target surface to be sputtered out and deposited on the substrate to form a thin film.
[0003] Sputtering technology is widely used in semiconductor manufacturing, optical components, decorative coatings, tool coatings, and many other fields to improve substrate performance or add new functions, playing a crucial role in enhancing product performance and quality. However, due to design limitations, traditional coating machines often struggle to achieve highly uniform film thickness. This non-uniformity can negatively impact product quality and performance. Utility Model Content
[0004] In view of the technical problems existing in the prior art, the purpose of this utility model is to provide a coating correction frame and coating correction structure, wherein the vertical panel surrounds the coating sputtering space, making the sputtered target material more concentrated in space, and the combination with the correction plate increases the uniformity of the coating.
[0005] To achieve the above objectives, the present invention adopts the following technical solution:
[0006] A coating correction frame includes a frame body and a correction plate. The frame body includes a mounting panel, a vertical panel, and a support plate. The vertical panel is disposed on the edge of the mounting panel. A sputtering groove frame for sputtering target material to pass through is formed on the mounting panel. The support plate is fixed in the middle of the sputtering groove frame, and the correction plate is mounted on the support plate.
[0007] As a preferred embodiment, the mounting panel is rectangular, and there are three vertical panels. The three vertical panels are installed sequentially on the three edges of the mounting panel, and the mounting panel is perpendicular to the vertical panels.
[0008] As a preferred embodiment, the three vertical panels are designated as the first vertical panel, the second vertical panel, and the third vertical panel. The first vertical panel is parallel to the third vertical panel, the support plate is parallel to the first vertical panel, and there are two correction plates, which are symmetrically distributed about the support plate as the axis of symmetry.
[0009] As a preferred embodiment, the frame body also includes a guard plate, which is disposed on the edge of the mounting panel opposite to the second vertical panel and is parallel to the mounting panel.
[0010] As a preferred embodiment, the coating correction frame also includes two adjustment plates. The two adjustment plates are fixedly connected to both sides of the support plate, and the adjustment plates are stacked with the correction plate. The correction plate and the adjustment plates are connected by an adjustment assembly, and the correction plate can be adjusted and installed by moving laterally through the adjustment assembly.
[0011] As a preferred embodiment, the adjustment assembly includes an adjustment bolt and an adjustment nut, with an adjustment groove formed on the adjustment plate, the adjustment nut located in the adjustment groove, and the adjustment bolt passing through the adjustment plate and threadedly connected to the adjustment nut.
[0012] As a preferred embodiment, a shielding surface is provided on the side of the adjustment groove closest to the target material, and a limiting edge is provided on the side away from the target material to prevent the adjustment nut from falling outward.
[0013] As a preferred option, the correction plate is shaped to be wider in the middle and narrower at both ends.
[0014] A coating correction structure includes a coating correction frame, a mounting bracket, a target, a substrate bracket, and a support. A track is provided on the support, and the substrate bracket is slidably connected to the track. Multiple substrates are mounted on the side of the substrate bracket. The mounting bracket is fixedly mounted on the support. The coating correction frame is mounted on the side of the mounting bracket closest to the substrate, and the target is mounted on the side of the mounting bracket furthest from the substrate.
[0015] As a preferred embodiment, multiple substrates are mounted on each of the two sides of the substrate holder, and a coating frame, a mounting frame, and a target are respectively provided on each side of the substrate holder.
[0016] This utility model has the following advantages:
[0017] (1) The coating correction frame of this utility model includes a frame body and a correction plate. The upright panel is set on the edge of the mounting panel. The upright panel can surround the periphery of the coating sputtering space, making the target sputtering more concentrated and less dispersed. The sputtering concentration is high in the middle of the target. The correction plate is located in the middle of the target and plays a shielding role. Therefore, the upright panel surrounds and the correction plate shields, making the sputtered material more evenly distributed in the vacuum coating concentrated space. The combination of the upright panel and the correction plate promotes more uniform coating of the substrate.
[0018] (2) The adjustment assembly includes an adjustment bolt and an adjustment nut. An adjustment groove is provided on the adjustment plate. The correction plate is adjusted to move laterally through the adjustment assembly. The correction plate can move away from or close to the support plate. The adjustment plate and the correction plate together block the sputtering position in the middle of the target material.
[0019] (3) In this embodiment, the correction plate is adjusted laterally with the adjustment plate by adjusting the adjustment assembly. The position between the adjustment plate and the correction plate can be adjusted by adjusting the adjusting bolt and adjusting nut, so that the shading area can be adjusted without replacing the correction plate multiple times.
[0020] (4) The coating correction structure is set on the support with a track, the substrate frame is slidably connected to the track, the mounting frame is fixedly installed on the support, the coating correction frame is installed on the side of the mounting frame close to the substrate, and the target material is installed on the side of the mounting frame away from the substrate. The track carries the substrate horizontally past the front of the target material for coating. The vertical panel surrounds the sputtered target material to slow down the diffusion and make the sputtering space more concentrated. Together with the correction plate, it makes the coating of the substrate more uniform. Attached Figure Description
[0021] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0022] Figure 1 This is a schematic diagram of the coating correction frame in Example 1.
[0023] Figure 2 This is a front view of the coating correction frame in Example 2.
[0024] Figure 3 for Figure 2 AA sectional view.
[0025] Figure 4 for Figure 3 Enlarged view of point B.
[0026] Figure 5 A schematic diagram of the structure for moving the correction plate away from the support plate.
[0027] Figure 6 This is a schematic diagram of the coating correction frame in Example 2 after the correction plate has been removed.
[0028] Figure 7 for Figure 6 Enlarged view of point C.
[0029] Figure 8 This is a schematic diagram of the adjusting nut.
[0030] Figure 9 This is a schematic diagram of the coating correction structure.
[0031] Figure 10 for Figure 9 A structural diagram showing the removal of the coating correction frame and substrate frame.
[0032] The components are as follows: 1. Correction plate; 2. Mounting panel; 3. Sputtering tank frame; 4. Support plate; 5. First upright panel; 6. Second upright panel; 7. Third upright panel; 8. Adjustment plate; 9. Adjustment groove; 10. Adjustment bolt; 11. Adjustment nut; 12. Covering surface; 13. Limiting edge; 14. Mounting bracket; 15. Target material; 16. Substrate frame; 17. Support; 18. Track; 19. Protective plate; 20. Coating correction frame; 21. Fixed hanging rod; 22. Hanging hole. Detailed Implementation
[0033] The technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.
[0034] Example 1
[0035] like Figure 1 As shown, a coating correction frame includes a frame body and a correction plate 1. The frame body includes a mounting panel 2, a vertical panel, and a support plate 4. The vertical panel is disposed on the edge of the mounting panel 2. A sputtering groove frame 3 is formed on the mounting panel 2 for the sputtering of a target material 15. The support plate 4 is fixed in the middle of the sputtering groove frame 3. The correction plate 1 is mounted on the support plate 4. A mounting block is fixedly connected to the support plate 4. A threaded hole is formed on the mounting block, and a mounting bolt passes through the correction plate 1 and is threadedly connected to the threaded hole, thereby realizing the detachable installation of the correction plate 1. The mounting panel 2 is 20.4 cm long and 19 cm wide, and the vertical panel is 2.7 cm high.
[0036] Mounting panel 2 is rectangular, with three vertical panels. The three vertical panels are installed sequentially on the three edges of mounting panel 2, and mounting panel 2 is perpendicular to the vertical panels. The three vertical panels are the first vertical panel 5, the second vertical panel 6, and the third vertical panel 7. The first vertical panel 5 and the third vertical panel 7 are parallel. The support plate 4 is parallel to the first vertical panel 5. There are two correction plates 1, which are symmetrically distributed about the support plate 4 as the axis of symmetry.
[0037] The frame body also includes a protective plate 19, which is disposed on the edge of the mounting panel 2 opposite to the second vertical panel 6, and is parallel to the mounting panel 2. When the coating correction frame 20 is applied to the coating machine, the protective plate 19 is located between the track 18 and the target material 15. The protective plate 19 blocks the target material 15 and protects the track 18 from being sputtered with too much target material, which would cause the track 18 to jam.
[0038] The correction plate 1 is shaped as being wider in the middle and narrower at both ends. The correction plate 1 is 9.8 cm long, 2.6 cm wide, and 0.2 cm thick.
[0039] Mounting panel 2, vertical panel, support plate 4, and correction plate 1 are made of stainless steel or aluminum alloy.
[0040] The coating correction frame 20 of this embodiment is preferably suitable for the SPH-2500 coating machine, the target material 15 is preferably a silver target, the substrate is preferably a wafer, and a layer of silver film is vacuum-deposited on the surface of the wafer.
[0041] The vertical panel can surround the perimeter of the coating sputtering space, making the sputtering of the target 15 more concentrated and less dispersed. The sputtering concentration in the middle of the target 15 is too high. The correction plate 1, located in the middle of the target 15, plays a shielding role. Therefore, the combination of the vertical panel surrounding the target and the correction plate 1 promotes more uniform coating of the substrate.
[0042] The implementation principle of this embodiment is as follows: The substrate passes horizontally in front of the target 15, and the target 15 sputters the substrate through the sputtering tank frame 3. The three vertical panels enclose the sputtering space, making the sputtered material separated from the target 15 more concentrated and less dispersed. In addition, the correction plate 1 blocks the middle of the target 15, making the sputtered material more evenly distributed in the vacuum coating concentrated space. The substrate can be coated in one horizontal pass, and the coating is more uniform.
[0043] Example 2
[0044] like Figures 2-8 As shown, the difference between this embodiment and Embodiment 1 is that the coating correction frame 20 also includes two adjustment plates 8. The two sides of the support plate 4 are fixedly connected to the two adjustment plates 8 respectively. The adjustment plates 8 are stacked with the correction plate 1. The correction plate 1 and the adjustment plates 8 are connected by an adjustment component. The correction plate 1 can be adjusted and installed by moving laterally through the adjustment component.
[0045] The adjustment assembly includes an adjustment bolt 10 and an adjustment nut 11. An adjustment groove 9 is formed on the adjustment plate 8, and the adjustment nut 11 is located in the adjustment groove 9. The adjustment bolt 10 passes through the correction plate 1 and is threadedly connected to the adjustment nut 11. A scale is set on the adjustment plate 8 above the adjustment groove 9 to facilitate precise adjustment of the movement distance of the correction plate 1.
[0046] A shielding surface 12 is provided on the side of the adjusting groove 9 closest to the target material 15, and a limiting edge 13 is provided on the side away from the target material 15 to prevent the adjusting nut 11 from falling outward. When machining the adjusting groove 9, a long groove is milled on the adjusting plate 8. The long groove cannot be milled into a through groove. The long groove has a bottom surface. A smaller long groove is milled on the bottom surface of the long groove to form the limiting edge 13. The adjusting nut 11 is placed into the adjusting groove 9, and then the shielding surface 12 is welded to ensure that the adjusting nut 11 can only move within the adjusting groove 9 and will not fall out.
[0047] The implementation principle of this embodiment is as follows: the coating thickness and coating area are adjusted by the correction plate 1. However, the traditional correction plate 1 is fixed and cannot adjust the shading area. In this embodiment, the correction plate 1 is adjusted laterally with the adjustment plate 8 by adjusting the adjustment component. The position between the adjustment plate 8 and the correction plate 1 can be adjusted by adjusting the adjustment bolt 10 and adjusting nut 11, so that the shading area can be adjusted without replacing the correction plate 1 multiple times.
[0048] Example 3
[0049] like Figure 9 , Figure 10 As shown, a coating correction structure includes a coating correction frame 20 as described in Embodiment 1 or Embodiment 2, and also includes a mounting frame 14, a target 15, a substrate frame 16, and a support 17. A track 18 is provided on the support 17, and the substrate frame 16 is slidably connected to the track 18. Multiple substrates are mounted on the side of the substrate frame 16. The mounting frame 14 is fixedly mounted on the support 17. A slot is provided on the mounting frame 14 for coating sputtering to pass through. The coating correction frame 20 is mounted on the side of the mounting frame 14 closer to the substrate, and the target 15 is mounted on the side of the mounting frame 14 away from the substrate.
[0050] Multiple substrates are installed on the two sides of the substrate frame 16, and a coating frame, a mounting frame 14 and a target material 15 are respectively provided on the two sides of the substrate frame 16.
[0051] The mounting panel 2 is provided with a hanging hole 22, and the mounting bracket 14 is provided with a fixed hanging rod 21. When the coating correction frame 20 is installed on the mounting bracket 14, the hanging hole 22 is hung on the fixed hanging rod 21.
[0052] The implementation principle of this embodiment is as follows: On the coating machine, the track 18 carries the substrate horizontally through the space where the target material 15 is coated on both sides. The target material 15 sputters the substrate through the sputtering tank frame 3. The three vertical panels and the surface of the support 17 surround the sputtering space, making the sputtered material separated from the target material 15 more concentrated and less dispersed. In addition, the correction plate 1 blocks the middle of the target material 15, making the sputtered material more evenly distributed in the vacuum coating concentrated space. The substrate can be coated in one horizontal pass, and the coating is more uniform.
[0053] The present invention has been further described above with reference to specific embodiments. However, it should be understood that the specific description herein should not be construed as limiting the substance and scope of the present invention. Various modifications made by those skilled in the art to the above embodiments after reading this specification are all within the scope of protection of the present invention.
Claims
1. A coating correction frame, characterized by: The frame body comprises a mounting panel (2), an upright panel and a support panel (4), the upright panel is arranged on the edge of the mounting panel (2), a sputtering slot frame (3) is arranged on the mounting panel (2) and used for allowing the target material (15) to sputter through, and the support panel (4) is fixed to the middle of the sputtering slot frame (3).
2. The coating correction frame of claim 1, wherein: The mounting panel (2) is rectangular, and the three upright panels are sequentially arranged on the three edges of the mounting panel (2) and are perpendicular to the mounting panel (2).
3. The coating correction frame of claim 2, wherein: The three upright panels are a first upright panel (5), a second upright panel (6) and a third upright panel (7), the first upright panel (5) is parallel to the third upright panel (7), the support panel (4) is parallel to the first upright panel (5), and the two correction panels (1) are symmetrically arranged with the support panel (4) as the axis of symmetry.
4. The coating correction frame of claim 3, wherein: The frame body further comprises a guard plate (19) arranged on the edge of the mounting panel (2) opposite to the second upright panel (6), and the guard plate (19) is parallel to the mounting panel (2).
5. The coating correction frame of claim 3, wherein: The film-coating correction frame (20) further comprises two adjusting plates (8), the two sides of the support panel (4) are fixedly connected with the two adjusting plates (8) respectively, the adjusting plate (8) is overlapped with the correction panel (1), the correction panel (1) and the adjusting plate (8) are connected through an adjusting assembly, and the correction panel (1) can be adjusted and installed by being moved transversely through the adjusting assembly.
6. The coating correction frame of claim 5, wherein: The adjusting assembly comprises an adjusting bolt (10) and an adjusting nut (11), the adjusting groove (9) is arranged on the adjusting plate (8), the adjusting nut (11) is located in the adjusting groove (9), and the adjusting bolt (10) passes through the correction panel (1) and is threadedly connected with the adjusting nut (11).
7. The gobo frame of claim 6, wherein: The side of the adjusting groove (9) close to the target material (15) is provided with a shielding surface (12), and the side of the adjusting groove (9) away from the target material (15) is provided with a limiting edge (13) for limiting the adjusting nut (11) from falling out.
8. The gobo frame of claim 1, wherein: The correction panel (1) is wide in the middle and narrow at both ends.
9. A coated correction structure, characterized by: The film-coating correction frame comprises the mounting rack (14), the target material (15), the substrate rack (16) and the support (17), the track (18) is arranged on the support (17), the substrate rack (16) is slidably connected with the track (18), a plurality of substrates are arranged on the side surface of the substrate rack (16), the mounting rack (14) is fixedly arranged on the support (17), the film-coating correction frame (20) is arranged on the side of the mounting rack (14) close to the substrate, and the target material (15) is arranged on the side of the mounting rack (14) away from the substrate.
10. The coated correction structure of claim 9, wherein: The two side surfaces of the substrate rack (16) are respectively provided with a plurality of substrates, and the two sides of the substrate rack (16) are respectively provided with the film-coating frame, the mounting rack (14) and the target material (15).