Boat structure and processing equipment

Abstract

The utility model provides a boat structure and processing equipment, relates to the field of semiconductor or photovoltaic material processing, and solves the technical problem that blue edges are easy to appear on the edge of a battery piece when the battery piece is subjected to horizontal film coating. The boat structure comprises at least one boat piece which is arranged in the vertical direction and extends in the horizontal direction, at least one groove is formed in the upper surface of each boat piece, and the grooves are configured to contain horizontally-placed sheet materials; and the at least one mask assembly is arranged in one-to-one correspondence with the at least one boat piece, the mask assembly is arranged adjacent to the corresponding boat piece and located above and / or below the corresponding boat piece, and the mask assembly can surround the at least one groove of the corresponding boat piece in the horizontal direction. Due to the fact that the mask assembly can influence the electric field and the gas field around the groove, the mask can adjust the film coating effect on the edge of the sheet-shaped material, and the blue edge phenomenon of the sheet-shaped material is avoided.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of semiconductor or photovoltaic material processing, in particular to a boat structure and a processing device. BACKGROUND

[0002] The biggest difference between the back contact (BC) crystalline silicon photovoltaic cell and other crystalline silicon cells is that the emitter, surface field and metal electrode are all made on the back of the cell, and are distributed in a crossbar pattern. The positive surface of the cell is not blocked by any grid lines, so that the incident light can be maximally utilized, the optical loss is reduced, more effective generating area is brought, high conversion efficiency is achieved, and the appearance is more beautiful. In the future, the BC cell may become one of the mainstream photovoltaic cell routes of the next generation.

[0003] In the BC process, a plasma enhanced chemical vapor deposition (PECVD) device is used to deposit a layer of antireflection film on the surface of the cell to improve the photoelectric conversion efficiency and make the cell appear completely black.

[0004] In the traditional vertical plug-in graphite boat, 3-5 clamping points are installed on the graphite boat leaf for fixing the vertically inserted cell. During the film plating process, a clamping point mark will be generated near the clamping point position, affecting the appearance of the cell. In order to solve the problem of clamping point mark, in the related art, the graphite boat is designed to be horizontally arranged, and a groove is dug on the graphite boat sheet for placing the cell, and the cell is not contacted by the clamping point around, so that the clamping point mark will not be generated. However, due to the difference in electrical conductivity between the cell and the graphite boat sheet, the electric field at the edge of the cell is strong, and during the film plating process, the edge of the cell will have a thicker film thickness than the center, resulting in a blue edge of the cell. The blue edge phenomenon cannot be solved by simply adjusting the process parameters. After the cell is pressed into a module, the blue edge will be very obvious under strong light, affecting the appearance of the product and reducing the photoelectric conversion efficiency of the cell. Therefore, a new graphite boat needs to be designed to solve the problem of blue edge of the cell caused by horizontal film plating. Practical new type content

[0005] In order to solve the above technical problems, the present application is proposed. The embodiments of the present application provide a boat structure and a processing device.

[0006] In a first aspect, an embodiment of the present application provides a boat structure, comprising: at least one boat piece arranged in a vertical direction, the boat piece extending in a horizontal direction, an upper surface of the boat piece having at least one groove configured to accommodate a horizontally placed sheet material; and at least one mask assembly corresponding to the at least one boat piece, the mask assembly being arranged adjacent to and above and / or below the corresponding boat piece, and being capable of surrounding the at least one groove of the corresponding boat piece in the horizontal direction.

[0007] In some embodiments, the mask assembly comprises: at least one mask piece having at least one hollowed-out region corresponding to the at least one groove, the hollowed-out region being above or below the corresponding groove.

[0008] In some embodiments, the boat piece has at least one first through hole extending in the vertical direction, the mask piece has at least one second through hole extending in the vertical direction, and each boat piece and the corresponding mask piece form a set of bearing units; wherein the boat structure further comprises: at least one connecting rod passing through one first through hole of all the boat pieces and one second through hole of all the mask pieces; and at least one ceramic sleeve arranged between adjacent bearing units and sleeved on the connecting rod.

[0009] In some embodiments, a projection of the hollowed-out region on a lower surface of the boat piece is a first projection, a projection of the groove corresponding to the hollowed-out region on the lower surface of the boat piece is a second projection, and the first projection covers the second projection.

[0010] In some embodiments, the upper surface or the lower surface of the boat piece has a plurality of clamping grooves; wherein the mask assembly comprises: a plurality of mask structures, the mask structures being at least partially arranged in the clamping grooves, and the plurality of mask structures surrounding the at least one groove in the horizontal direction.

[0011] In some embodiments, a groove bottom of the groove has at least one exhaust hole penetrating through the boat piece.

[0012] In some embodiments, the number of boat pieces is a plurality, the plurality of boat pieces comprises at least one first boat piece and at least one second boat piece arranged alternately, one first boat piece is electrically connected to the power supply device, one second boat piece is electrically connected to the power supply device, and the power supply device is configured to provide voltages of opposite polarities to the first boat piece and the second boat piece; wherein the boat structure further comprises: a first pad electrically connecting adjacent first boat pieces; and a second pad electrically connecting adjacent second boat pieces; wherein the first pad has a first ventilation hole penetrating through the first pad, and / or the second pad has a second ventilation hole penetrating through the second pad.

[0013] In some embodiments, the boat pieces have first and second ends arranged opposite in the extension direction of the boat pieces; wherein the boat structure further comprises: a first boat leg at least partially located below the first end of the lowermost boat piece and electrically connected to one of the first boat pieces, the first boat leg being configured to be electrically connected to the power supply; a second boat leg at least partially located below the first end of the lowermost boat piece and electrically connected to one of the second boat pieces, the second boat leg being configured to be electrically connected to the power supply; a first insulating member connecting the first boat leg and the second boat leg; a first electrode block located at a side of the second end of at least one of the boat pieces away from the first end and electrically connected to the first pad block, the first electrode block being configured to be electrically connected to the power supply; a second electrode block at least partially located below the second end of the lowermost boat piece, the second electrode block being electrically connected to one of the second boat pieces, the second electrode block being configured to be electrically connected to the power supply; and / or, the boat structure further comprises: a first support beam having first and second ends arranged opposite and a middle portion between the first and second ends, the first end of the first support beam being connected to the first boat leg, the second end of the first support beam being connected to the second electrode block; a second support beam having first and second ends arranged opposite and a middle portion between the first and second ends, the first end of the second support beam being connected to the second boat leg, the second end of the second support beam being connected to the second electrode block; an auxiliary boat leg having first and second ends arranged opposite, the first end of the auxiliary boat leg being connected to the middle portion of the first support beam, the second end of the auxiliary boat leg being connected to the middle portion of the second support beam; wherein the first support beam, the second support beam, the auxiliary boat leg, the first boat leg, the second boat leg, the first insulating member and the second electrode block collectively support the boat pieces and the mask assembly.

[0014] In some embodiments, the boat structure further comprises: a clamping member connected to the first pad block and the second pad block, the clamping member and the first electrode block being configured to be contacted by the boat handling device; wherein the clamping member has a third vent hole penetrating through the clamping member, and / or the first electrode block has a fourth vent hole penetrating through the first electrode block.

[0015] In a second aspect, an embodiment of the present application provides a processing apparatus, comprising: a reaction furnace having a process chamber configured to process a sheet material; the boat structure of any one of the first aspect configured to carry the sheet material; a boat handling device configured to grasp the boat structure and transport the boat structure to the process chamber; and a gas supply device in communication with the process chamber and configured to supply a process gas to the process chamber.

[0016] The boat structure and the processing equipment provided by the embodiments of the present application have the following advantages. The mask assembly is arranged around the groove in the horizontal direction, and the mask assembly can affect the electric field and the air field around the groove. Therefore, the mask assembly can adjust the film plating effect of the edges of the sheet-shaped material during film plating, so that the film plating thickness of the edges of the sheet-shaped material is uniform with the film plating thickness of the center of the sheet-shaped material, and the sheet-shaped material does not have a blue edge phenomenon. The photoelectric conversion efficiency of the sheet-shaped material is improved. In addition, the mask assembly is far away from the center of the groove in the horizontal direction, and does not affect the film plating effect of the center of the sheet-shaped material. BRIEF DESCRIPTION OF DRAWINGS

[0017] The above and other objects, features and advantages of the present application will become more apparent from the following detailed description when taken in conjunction with the accompanying drawings in which:

[0018] Figure 1 Fig. 1 shows a structural schematic diagram of a boat structure provided by an exemplary embodiment of the present application.

[0019] Figure 2 Fig. 2 shows a structural schematic diagram of a boat structure provided by another exemplary embodiment of the present application.

[0020] Figure 3 Fig. 3 shows a side view of a boat structure provided by an exemplary embodiment of the present application.

[0021] Figure 4 Fig. 4 shows a structural schematic diagram of a first boat sheet provided by an exemplary embodiment of the present application.

[0022] Figure 5 Fig. 5 shows a structural schematic diagram of a second boat sheet provided by an exemplary embodiment of the present application.

[0023] Figure 6 Fig. 6 shows a structural schematic diagram of a third boat sheet provided by an exemplary embodiment of the present application.

[0024] Figure 7 Fig. 7 shows a structural schematic diagram of a mask sheet provided by an exemplary embodiment of the present application.

[0025] Figure 8 Fig. 8 shows a structural schematic diagram of a top boat sheet provided by an exemplary embodiment of the present application.

[0026] Figure 9 Fig. 9 shows a bottom view of a boat structure provided by an exemplary embodiment of the present application.

[0027] Figure 10Fig. 1 shows a schematic diagram of a processing apparatus according to an example embodiment of the present application.

[0028] Figure 11 Fig. 2 shows a schematic diagram of a boat structure according to another example embodiment of the present application.

[0029] Figure 12 Fig. 3 shows a schematic diagram of a boat structure according to another example embodiment of the present application. Figure 1 Fig. 4 shows a partial enlarged view of the boat structure in region A.

[0030] Figure 13 Fig. 5 shows a partial enlarged view of the boat structure in region B. Figure 11 Fig. 6 shows a partial enlarged view of the boat structure in region C.

[0031] Reference signs:

[0032] 100, boat structure; 101, boat piece; 1011, groove; 10111, exhaust hole; 1012, first through hole; 1013, first boat piece; 10131, first protrusion; 10132, third protrusion; 1014, second boat piece; 10141, second protrusion; 1015, first end of boat piece; 1016, second end of boat piece; 102, mask assembly; 1021, hollow region; 1022, second through hole; 1023, mask piece; 1024, mask structure; 103, connecting rod; 104, ceramic sleeve; 105, graphite nut; 106, elastic pad; 107, first pad; 1071, first air hole; 108, second pad; 1081, second air hole; 109, first boat leg; 110, second boat leg; 111, first insulating piece; 112, first electrode block; 1121, first electrode hole; 1122, first conductive part; 1123, first insulating part; 1124, second conductive part; 113, second electrode block; 1131, second electrode hole; 1132, third conductive part; 1133, second insulating part; 1134, fourth conductive part; 114, top boat piece; 1141, fourth protrusion; 1142, third through hole; 115, first support beam; 1151, first end of first support beam; 1152, second end of first support beam; 1153, middle part of first support beam; 116, second support beam; 1161, first end of second support beam; 1162, second end of second support beam; 1163, middle part of second support beam; 117, auxiliary boat leg; 1171, first end of auxiliary boat leg; 1172, second end of auxiliary boat leg; 118, clamping piece; 1181, third air hole; 1182, ceramic connecting block; 1183, first graphite connecting block; 1184, second graphite connecting block; 119, first ceramic pad; 120, second ceramic pad; 200, processing apparatus; 201, reaction furnace; 202, boat moving device; 203, gas supply device. DETAILED DESCRIPTION

[0033] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of the present application.

[0034] Figure 1 Fig. 1 shows a structural schematic diagram of a boat structure provided by an exemplary embodiment of the present application, Figure 2 Fig. 2 shows a structural schematic diagram of a boat structure provided by another exemplary embodiment of the present application, Figure 3 Fig. 3 shows a side view of a boat structure provided by an exemplary embodiment of the present application, Figure 4 Fig. 4 shows a structural schematic diagram of a first boat piece provided by an exemplary embodiment of the present application, Figure 5 Fig. 5 shows a structural schematic diagram of a second boat piece provided by an exemplary embodiment of the present application, Figure 6 Fig. 6 shows a structural schematic diagram of a third boat piece provided by an exemplary embodiment of the present application, Figure 7 Fig. 7 shows a structural schematic diagram of a mask piece provided by an exemplary embodiment of the present application, Figure 11 Fig. 8 shows a structural schematic diagram of a boat structure provided by another exemplary embodiment of the present application.

[0035] As shown in Figures 1 to 7 The embodiment of the present application provides a boat structure 100, which comprises at least one boat piece 101 and at least one mask assembly 102. The at least one boat piece 101 is arranged along a vertical direction, the boat piece 101 extends along a horizontal direction, and the upper surface of the boat piece 101 has at least one groove 1011 configured to accommodate a horizontally placed sheet material. The at least one mask assembly 102 is arranged one-to-one corresponding to the at least one boat piece 101, the mask assembly 102 is arranged adjacent to the corresponding boat piece 101 and above and / or below the corresponding boat piece 101, and the mask assembly 102 can surround the at least one groove 1011 of the corresponding boat piece 101 in the horizontal direction.

[0036] Exemplarily, the sheet material is exemplarily a silicon wafer, a glass substrate, a battery piece or a wafer.

[0037] Exemplarily, the material of the mask assembly 102 is an insulating material, such as alumina ceramic.

[0038] Exemplarily, the material of the boat piece 101 is graphite.

[0039] In the above embodiment, since the mask assembly 102 is arranged around the groove 1011 in the horizontal direction, the mask assembly 102 can affect the electric field and the gas field around the groove 1011, so that the mask assembly 102 can adjust the film plating effect of the edge of the sheet-shaped material during film plating, thereby avoiding the uneven thickness of the film plating at the edge and the center of the sheet-shaped material, and the sheet-shaped material does not have a blue edge phenomenon, and the photoelectric conversion efficiency of the sheet-shaped material is improved. Moreover, since the mask assembly 102 is far away from the center of the groove in the horizontal direction, the film plating effect of the center of the sheet-shaped material is not affected.

[0040] Figure 12 The boat structure is shown in the partial enlarged view of region A. Figure 1 The boat structure is shown in the partial enlarged view of region A.

[0041] In some embodiments, as shown in Figures 1 to 3 and Figure 12 The mask assembly 102 includes at least one mask sheet 1023. The mask sheet 1023 has at least one hollow area 1021, and the at least one hollow area 1021 is arranged above or below the at least one groove 1011.

[0042] For example, the upper surface of the boat sheet 101 has a plurality of grooves 1011, for example, 12 grooves 1011, and the mask sheet 1023 has a plurality of hollow areas 1021, for example, 12 hollow areas 1021.

[0043] For example, the mask sheet 1023 is arranged above or below the boat sheet 101.

[0044] For example, the mask assembly 102 includes two mask sheets 1023, one mask sheet 1023 is arranged above the corresponding boat sheet 101, and the other mask sheet 1023 is arranged below the corresponding boat sheet 101.

[0045] In the above embodiment, the solid part of the mask sheet 1023 can surround the groove 1011 in the horizontal direction, and the hollow area 1021 is arranged above or below the groove 1011, so that the electric field and the gas field around the groove 1011 (i.e., at the edge of the sheet-shaped material) can be adjusted without affecting the electric field and the gas field at the center of the groove 1011 (i.e., at the center of the sheet-shaped material), thereby avoiding the uneven thickness of the film plating at the edge and the center of the sheet-shaped material.

[0046] In some embodiments, as shown in Figures 3 to 6 and Figure 12As shown, the boat piece 101 has at least one first through hole 1012 extending vertically, and the mask piece 1023 has at least one second through hole 1022 extending vertically. Each boat piece 101 and its corresponding mask piece 1023 form a set of support units. The boat structure 100 also includes at least one connecting rod 103 and at least one ceramic sleeve 104. The connecting rod 103 passes through one first through hole 1012 of all the boat pieces 101 and one second through hole 1022 of all the mask pieces 102. At least one ceramic sleeve 104 is sleeved on the connecting rod 103 and is respectively disposed between adjacent support units.

[0047] For example, from bottom to top, the connecting rod 103 passes through the following in sequence: the fourth through hole of the first support beam 115 or the fifth through hole of the second support beam 116 (described later), the first through hole 1012 of the boat piece 101 (for the bottommost boat piece 101, a corresponding mask 1023 may or may not be provided; here, we take not providing one as an example), the ceramic sleeve 104, the second through hole 1022 of the mask 1023, the first through hole 1012 of the boat piece 101, the ceramic sleeve 104, the second through hole 1022 of the mask 1023, the first through hole 1012 of the boat piece 101... the ceramic sleeve 104, the second through hole 1022 of the mask 1023, and the third through hole 1142 of the top boat piece 114 (described later).

[0048] For example, the boat 101 has a plurality of first through holes 1012, the mask 1023 has a plurality of second through holes 1022, and there are a plurality of connecting rods 103, each connecting rod 103 passing through one first through hole 1012 of all the boat 101 and one second through hole 1022 of all the mask 1023.

[0049] For example, the connecting rod 103 is made of ceramic.

[0050] In the above embodiments, this structure can stably connect multiple boat pieces 101 and mask pieces 1023. By setting ceramic sleeves 104 to separate the mask pieces 1023 and the corresponding boat pieces 101, sufficient operating space can be reserved for the sheet picking and placing device to pick up and place sheet materials on the boat pieces 101.

[0051] In some embodiments, such as Figure 3 As shown, the boat structure 100 also includes at least two graphite nuts 105 and at least two spring washers 106. A spring washer 106 is fitted onto each end of the connecting rod 103. The two ends of the connecting rod 103 are threaded. The two graphite nuts 105 are screwed into the threads at both ends of the connecting rod 103. The spring washers 106 at both ends are located on the side of the adjacent graphite nut 105 closest to the boat piece 101.

[0052] In the above embodiment, the graphite lock nut 105 is tightened by the elastic pad 106, so as to lock the boat piece 101 and the mask piece 1023, and the stability of the structure is improved.

[0053] In some embodiments, the orthographic projection of the hollow region 1021 on the lower surface of the boat piece 101 is a first projection, the orthographic projection of the groove 1011 corresponding to the hollow region 1021 on the lower surface of the boat piece 101 is a second projection, and the first projection covers the second projection, i.e., the size of the first projection is greater than or equal to the size of the second projection.

[0054] For example, the first projection is a first rectangle, the second projection is a second rectangle, the length of the first rectangle is greater than the length of the second rectangle, and the width of the first rectangle is greater than the width of the second rectangle.

[0055] In the above embodiment, the large-size hollow region 1021 can make the first projection cover the second projection, so as to ensure that the mask piece 1023 has little influence on the gas field and electric field of the center of the sheet material during film plating.

[0056] In some embodiments, on the basis of the above first projection covering the second projection, the distance between the edge of the first projection and the edge of the second projection ranges from 8 mm to 9 mm.

[0057] For example, the first projection is a first rectangle, the second projection is a second rectangle, the length of the first rectangle is parallel to the length of the second rectangle, the width of the first rectangle is parallel to the width of the second rectangle, the distance between the length of the first rectangle and the length of the second rectangle is 8.5 mm, and the distance between the width of the first rectangle and the width of the second rectangle is 8.5 mm.

[0058] In the above embodiment, the distance between the edge of the first projection and the edge of the second projection ranges from 8 mm to 9 mm, so as to make the mask piece 1023 have little influence on the gas field and electric field of the center of the sheet material during film plating, and have sufficient adjustment effect on the gas field and electric field of the edge of the sheet material, thereby avoiding over-thick film plating of the edge of the sheet material.

[0059] Figure 13 The boat structure is shown in a partial enlarged view of region B. Figure 11 The boat structure is shown in a partial enlarged view of region B.

[0060] In some embodiments, as shown in the figure, the upper surface or the lower surface of the boat piece 101 has a plurality of clamping grooves. Figure 13 As shown in the figure, the mask assembly 102 includes a plurality of mask structures 1024. The mask structures 1024 are at least partially located in the clamping grooves, and the plurality of mask structures 1024 surround the at least one groove 1011 in the horizontal direction.

[0061] For example, each groove 1011 can be surrounded by four mask structures 1024 in the horizontal direction.

[0062] For example, the mask structure 1024 is a strip structure.

[0063] In the above embodiments, the mask structure 1024 arranged around the groove 1011 in the horizontal direction can adjust the electric field and gas field around the groove 1011 (i.e. the edge of the sheet material) without affecting the electric field and gas field at the center of the groove 1011 (i.e. the center of the sheet material), thus avoiding the occurrence of uneven coating thickness between the edge and center of the sheet material.

[0064] In some embodiments, such as Figure 6 As shown, the bottom of the groove 1011 has at least one vent hole 10111 that penetrates the boat piece 101.

[0065] For example, Figure 6 The boat piece 101 shown is the bottommost boat piece 101, and the bottommost boat piece 101 has at least one vent hole 10111.

[0066] In the above embodiments, an exhaust hole 10111 is provided at the bottom of the groove 1011. First, it can prevent the sheet material from floating due to the gas between the sheet material and the bottom of the groove when it is placed. Second, it can make the sheet material stick tightly to the bottom of the groove when the process chamber is evacuated, thus preventing the sheet material from floating during the process. Third, it can allow gas to enter between the sheet material and the bottom of the groove through the exhaust hole 10111 when the sheet is picked up, thereby enabling the sheet picking and placing device to smoothly pick up the sheet material.

[0067] In some embodiments, such as Figure 3 As shown, there are multiple boat pieces 101, including at least one first boat piece 1013 and at least one second boat piece 1014 arranged in an alternating manner. One first boat piece 1013 is electrically connected to a power supply device, and one second boat piece 1014 is electrically connected to a power supply device. The power supply device is configured to provide voltages of opposite polarity to the first boat piece 1013 and the second boat piece 1014. The boat structure 100 also includes a first pad 107 and a second pad 108. The first pad 107 is electrically connected to an adjacent first boat piece 1013. The second pad 108 is electrically connected to an adjacent second boat piece 1014. The first pad 107 has a first vent 1071 penetrating through it, and / or the second pad 108 has a second vent 1081 penetrating through it.

[0068] Specifically, the power supply device can supply power to a first boat piece 1013 and a second boat piece 1014, the first pad 107 is electrically connected to adjacent first boat pieces 1013, and the second pad 108 is electrically connected to adjacent second boat pieces 1014, so that a plurality of first boat pieces 1013 form a path through the first pad 107, and a plurality of second boat pieces 1014 form a path through the second pad 108, so that adjacent first boat pieces 1013 and second boat pieces 1014 have opposite voltages, thereby forming an electric field.

[0069] Exemplarily, the power supply device includes a sputtering power supply.

[0070] Exemplarily, the first boat piece 1013 is as shown in Figure 4 Exemplarily, the second boat piece 1014 is as shown in Figure 5 The two ends of the first boat piece 1013 respectively have first protruding portions 10131, and the two ends of the second boat piece 1014 respectively have second protruding portions 10141. The first pad 107 can be electrically connected between the first protruding portions 10131 of adjacent first boat pieces 1013, and the second pad 108 can be electrically connected between the second protruding portions 10141 of adjacent second boat pieces 1014.

[0071] Exemplarily, the lowest boat piece 101 can be a first boat piece 1013 or a second boat piece 1014, but in order to maintain the stability of the structure, each end of the lowest boat piece 101 can have two third protruding portions 10132. For each end of the lowest boat piece 101, one third protruding portion 10132 is electrically connected to the first pad 107 or the second pad 108, and the boat structure 100 further includes a second ceramic pad 120, and the other third protruding portion 10132 is connected to the first protruding portion 10131 or the second protruding portion 10141 through the second ceramic pad 120.

[0072] Exemplarily, taking the first boat piece 1013 as the lowest boat piece 101 as an example, the boat structure 100 further includes a second ceramic pad 120, the second ceramic pad 120 connects one third protruding portion 10132 of the lowest boat piece 101 and the second boat leg 110, and the other third protruding portion 10132 of the lowest boat piece 101 is electrically connected to the first boat leg 109.

[0073] In the above embodiment, by providing the first pad 107 with a first vent hole 1071 and the second pad 108 with a second vent hole 1081, the process gas can pass through the first vent hole 1071 and the second vent hole 1081 to enter between the first boat piece 1013 and the second boat piece 1014, thereby improving the uniformity of the gas and further improving the film coating effect.

[0074] Figure 8 As shown in the structural schematic diagram of the top boat piece provided by an exemplary embodiment of the present application.

[0075] In some embodiments, such as Figure 8 As shown, the boat structure 100 further includes a top boat piece 114, disposed above the boat piece 101. The polarity of the top boat piece 114 can be the same as that of the first boat piece 1013 or the second boat piece 1014, meaning that the top boat piece 114 can be electrically connected to the adjacent first boat piece 1013 or second boat piece 1014 through the first pad 107 or the second pad 108. The top boat piece 114 does not have a groove 1011. The top boat piece 114 has a third through hole 1142, through which the connecting rod 103 also passes. The uppermost graphite nut 105 and spring washer 106 are located on the side of the top boat piece 114 away from the boat piece 101.

[0076] For example, the top boat piece 114 has a fourth protrusion 1141 at each end in the extending direction of the top boat piece 114, and in order to maintain the stability of the structure, each end of the top boat piece 114 has two fourth protrusions 1141. For each end of the top boat piece 114, one fourth protrusion 1141 is electrically connected to the first pad 107 or the second pad 108. The boat structure 100 also includes a first ceramic pad 119, and the other fourth protrusion 1141 is connected to the first protrusion 10131 or the second protrusion 10141 through the first ceramic pad 119.

[0077] In some embodiments, such as Figures 1 to 3 As shown, the boat piece 101 has a first end 1015 and a second end 1016 disposed opposite each other in its extending direction. The boat structure 100 further includes: a first boat foot 109, a second boat foot 110, a first insulating member 111, a first electrode block 112, and a second electrode block 113. The first boat foot 109 is at least partially located below the first end 1015 of the lowermost boat piece 101 and is electrically connected to a first boat piece 1013 (if the first boat piece 1013 is the lowermost boat piece 101). The first boat foot 109 can be electrically connected to a power supply device. The second boat foot 110 is at least partially located below the first end 1015 of the lowermost boat piece 101 and is electrically connected to a second boat piece 1014. The second boat foot 110 can be electrically connected to a power supply device. The first insulating member 111 connects the first boat foot 109 and the second boat foot 110. A first electrode block 112 is located on the side of the second end 1016 of at least one boat piece 101 away from the first end, and is electrically connected to a first pad block 107. The first electrode block 112 is configured to be electrically connected to a power supply device. A second electrode block 113 is at least partially located below the second end 1016 of the lowermost boat piece 101, i.e., the second electrode block 113 is located below the first electrode block 112. The second electrode block 113 is electrically connected to a second boat piece 1014, and is configured to be electrically connected to a power supply device.

[0078] The first insulating piece 111 is made of insulating material, such as ceramic, so that the first boat leg 109 and the second boat leg 110 are not conductive and are connected to each other, and have higher structural stability.

[0079] The first boat leg 109 and the second boat leg 110 are made of graphite.

[0080] The first electrode block 112 has a first electrode hole 1121 into which one output end of the power supply device is inserted, and the second electrode block 113 has a second electrode hole 1131 into which the other output end of the power supply device is inserted, so that the power supply device is electrically connected to the first electrode block 112 and the second electrode block 113.

[0081] In the above embodiment, the first electrode block 112 and the second electrode block 113 can supply power to the boat piece 101, or the first boat leg 109 and the second boat leg 110 can supply power to the boat piece 101, so that different process requirements can be flexibly selected.

[0082] In some embodiments, as shown in Figure 3 The first electrode block 112 includes a first conductive part 1122, a first insulating part 1123, and a second conductive part 1124. The first conductive part 1122 is electrically connected to the first pad 107, and can be electrically connected to the power supply device. The first insulating part 1123 connects the first conductive part 1122 and the second conductive part 1124. The second conductive part 1124 is connected to the second pad 108.

[0083] The first conductive part 1122 is made of graphite, the first insulating part 1123 is made of ceramic, and the second conductive part 1124 is made of graphite.

[0084] In the above embodiment, the first electrode block 112 is stably fixed, and the first electrode block 112 can be used as a handle and be grabbed by the boat moving device 202.

[0085] In some embodiments, as shown in Figure 3 The second electrode block 113 includes a third conductive part 1132, a second insulating part 1133, and a fourth conductive part 1134. The third conductive part 1132 is electrically connected to one second boat piece 1014, the second insulating part 1133 connects the third conductive part 1132 and the fourth conductive part 1134, and the fourth conductive part 1134 is electrically connected to one first boat piece 1013. The third conductive part 1132 and the fourth conductive part 1134 are at least partially located below the second end 1016 of the lowermost boat piece 101.

[0086] For example, the fourth conductive part 1134 is in contact with the lowermost boat piece 101.

[0087] For example, the material of the third conductive part 1132 is graphite, the material of the second insulating part 1133 is ceramic, and the material of the fourth conductive part 1134 is graphite.

[0088] Figure 9 The image shown is a bottom view of a boat structure provided in an exemplary embodiment of this application.

[0089] In some embodiments, such as Figure 9 As shown, the boat structure 100 further includes: a first support beam 115, a second support beam 116, and an auxiliary boat foot 117. The first support beam 115 has a first end 1151 and a second end 1152 disposed opposite to each other, and a middle portion 1153 located between the first end 1151 and the second end 1152. The first end 1151 of the first support beam 115 is connected to the first boat foot 109, and the second end 1152 of the first support beam 115 is connected to the second electrode block 113. The second support beam 116 has a first end 1161 and a second end 1162 disposed opposite to each other, and a middle portion 1163 located between the first end 1161 and the second end 1162. The first end 1161 of the second support beam 116 is connected to the second boat foot 110, and the second end 1162 of the second support beam 116 is connected to the second electrode block 113. The auxiliary boat foot 117 has a first end 1171 and a second end 1172 disposed opposite to each other. The first end 1171 of the auxiliary boat foot 117 is connected to the middle portion 1153 of the first support beam 115, and the second end 1172 of the auxiliary boat foot 117 is connected to the middle portion 1163 of the second support beam 116. The first support beam 115, the second support beam 116, the auxiliary boat foot 117, the first boat foot 109, the second boat foot 110, the first insulating member 111, and the second electrode block 113 together support the boat sheet 101 and the mask assembly 102.

[0090] For example, both the first support beam 115 and the second support beam 116 are made of ceramic.

[0091] In the above embodiments, by setting auxiliary boat feet 117, the overall rigidity of the boat structure 100 is increased, making the boat structure 100 less prone to deformation in the extension direction during handling and processing, thus extending the service life of the boat structure 100.

[0092] In some embodiments, such as Figure 1As shown, the boat structure 100 further comprises a clamping piece 118. The clamping piece 118 is connected with the first pad 107 and the second pad 108, and the clamping piece 118 and the first electrode block 112 are capable of contacting the boat moving device 202. The clamping piece 118 has a third air hole 1181 penetrating the clamping piece 118, and / or the first electrode block 112 has a fourth air hole 1125 penetrating the first electrode block 112. The boat moving device 202 is capable of grabbing the boat structure 100 by grabbing the clamping piece 118 and the first electrode block 112.

[0093] Exemplarily, the clamping piece 118 comprises a ceramic connecting block 1182, a first graphite connecting block 1183 and a second graphite connecting block 1184. The first graphite connecting block 1183 is connected with the first pad 107, the second graphite connecting block 1184 is connected with the second pad 108, and the ceramic connecting block 1182 connects the first graphite connecting block 1183 and the second graphite connecting block 1184. The ceramic connecting block 1182 has the third air hole 1181.

[0094] In the above embodiment, by making the clamping piece 118 have the third air hole 1181 and / or making the first electrode block 112 have the fourth air hole 1125, the process gas can pass through the third air hole 1181 and the fourth air hole 1125 into the first boat sheet 1013 and the second boat sheet 1014, thereby improving the gas uniformity and further improving the film coating effect.

[0095] Figure 10 As shown, the processing equipment provided by an exemplary embodiment of the present application comprises a reaction furnace 201, the boat structure 100, the boat moving device 202 and the gas supply device 203.

[0096] Based on the same concept, as Figure 10 As shown, the processing equipment 200 provided by the embodiment of the present application comprises a reaction furnace 201, the boat structure 100, the boat moving device 202 and the gas supply device 203. The reaction furnace 201 has a process chamber and is configured to process sheet-shaped materials. The boat structure 100 is configured to carry the sheet-shaped materials. The boat moving device 202 is configured to grab the boat structure 100 and transport the boat structure 100 to the process chamber. The gas supply device 203 is in communication with the process chamber and is configured to provide process gas to the process chamber.

[0097] The basic principles of the present application are described above in combination with specific embodiments, but it should be pointed out that the advantages, advantages, effects and the like mentioned in the present application are only examples and not limitations, and these advantages, advantages, effects and the like cannot be considered as the must-have of each embodiment of the present application. In addition, the above-mentioned specific details are only for the purpose of example and for the purpose of understanding, and are not limited to the present application, and the above-mentioned details do not limit the present application to the above-mentioned specific details.

[0098] The block diagrams of the devices, apparatuses, equipment, systems referred to in this application are merely illustrative examples and are not intended to require or imply that the connections, arrangements, configurations must be as shown in the block diagrams. These devices, apparatuses, equipment, systems can be connected, arranged, configured in any manner as will be appreciated by those skilled in the art. Words such as "including," "containing," "comprising," and the like are to be construed in an inclusive fashion, indicating open-ended groups and that "consisting of will be perceived as specifying the noted components or steps and further alternative embodiments are useful while yet being encompassed by such definitions. The words "or" and "and" as used herein, unless otherwise indicated, are to be interpreted as "and / or," and are not to be interpreted as "exclusive or." The word "comprising" as used herein, is to be interpreted as "including," "containing," or "comprising," and not as a term of limitation. The word "comprising" as used herein, is to be interpreted as "including," "containing," or "comprising," and not as a term of limitation.

[0099] It is also important to note that each of the devices, apparatuses, and methods described herein can be embodied in a variety of forms, including but not limited to a circuit, an application-specific integrated circuit (ASIC), a field programmable gate array (FPGA), a processor, a software routine that runs on a personal computer, a mobile device, a programmable consumer electronics, a graphical processing unit (GPU), or the like. Each of the devices, apparatuses, and methods can be implemented in one of the following technologies: a graphical processing unit (GPU), a central processing unit (CPU), an application-specific integrated circuit (ASIC), a field programmable gate array (FPGA), or the like.

[0100] The above description of disclosed aspects is given for illustrative purposes and is not intended to limit the scope of the application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the generic principles defined herein can be applied to other aspects without departing from the scope of the application. Thus, the present application is not intended to be limited to the aspects shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0101] The above description has been given for illustrative and descriptive purposes. Furthermore, this description is not intended to limit embodiments of the application to the forms disclosed herein. Although several example aspects and embodiments have been discussed above, those of ordinary skill in the art will appreciate certain variations, modifications, changes, additions and sub-combinations thereof.

Claims

1. A boat structure, characterized by, The application relates to a boat structure, comprising: at least one boat piece arranged in a vertical direction, the boat piece extending in a horizontal direction, an upper surface of the boat piece being provided with at least one groove configured to accommodate a horizontally placed sheet material; at least one mask assembly corresponding to the at least one boat piece, the mask assembly being arranged adjacent to and above and / or below the corresponding boat piece, and being capable of surrounding at least one groove of the corresponding boat piece in the horizontal direction.

2. The boat structure of claim 1, wherein The mask assembly comprises: at least one mask piece, the mask piece being provided with at least one hollowed-out area corresponding to the at least one groove, the hollowed-out area being above or below the corresponding groove.

3. The boat structure of claim 2, wherein, The boat piece is provided with at least one first through hole extending in the vertical direction, and the mask piece is provided with at least one second through hole extending in the vertical direction, each boat piece and the corresponding mask piece forming a set of bearing units; wherein the boat structure further comprises: at least one connecting rod passing through one first through hole of all the boat pieces and one second through hole of all the mask pieces; at least one ceramic sleeve sleeved on the connecting rod and arranged between adjacent bearing units.

4. The boat structure according to claim 2 or 3, characterized in that, The orthographic projection of the hollowed-out area on the lower surface of the boat piece is a first projection, and the orthographic projection of the groove corresponding to the hollowed-out area on the lower surface of the boat piece is a second projection, and the first projection covers the second projection.

5. The boat structure of claim 1, wherein The upper surface or the lower surface of the boat piece is provided with a plurality of clamping grooves; wherein the mask assembly comprises: a plurality of mask structures, the mask structures being at least partially located in the clamping grooves, and the plurality of mask structures surrounding at least one groove in the horizontal direction.

6. The boat structure according to any one of claims 1 to 3, 5, characterized by, The groove bottom is provided with at least one exhaust hole penetrating through the boat piece.

7. The boat structure according to any one of claims 1 to 3, 5, characterized by, The number of boat pieces is a plurality, and the plurality of boat pieces comprise at least one first boat piece and at least one second boat piece arranged alternately, one first boat piece being electrically connected to a power supply device, one second boat piece being electrically connected to the power supply device, and the power supply device being configured to provide the first boat piece and the second boat piece with voltages of opposite polarities. wherein the boat structure further comprises: a first pad electrically connected to adjacent first boat pieces; a second pad electrically connected to adjacent second boat pieces; wherein the first pad is provided with a first ventilation hole penetrating through the first pad, and / or the second pad is provided with a second ventilation hole penetrating through the second pad.

8. The boat structure of claim 7, wherein The boat piece is provided with oppositely arranged first and second ends in the extension direction of the boat piece. wherein the boat structure further comprises: a first boat leg at least partially located below the first end of the lowermost boat piece and electrically connected to one first boat piece, the first boat leg being capable of being electrically connected to the power supply device; a second boat leg at least partially located below the first end of the lowermost boat piece and electrically connected to one second boat piece, the second boat leg being capable of being electrically connected to the power supply device; a first insulating piece connecting the first boat leg and the second boat leg. a first electrode block electrically connected to the first pad block, the first electrode block being configured to be electrically connected to the power supply device; a second electrode block at least partially located below the second end of the lowermost boat piece, the second electrode block being electrically connected to one of the second boat pieces, the second electrode block being configured to be electrically connected to the power supply device; and / or, the boat structure further comprises: a first support beam having first and second ends arranged oppositely and a middle portion between the first and second ends, the first end of the first support beam being connected to the first boat leg, the second end of the first support beam being connected to the second electrode block; a second support beam having first and second ends arranged oppositely and a middle portion between the first and second ends, the first end of the second support beam being connected to the second boat leg, the second end of the second support beam being connected to the second electrode block; an auxiliary boat leg having first and second ends arranged oppositely, the first end of the auxiliary boat leg being connected to the middle portion of the first support beam, the second end of the auxiliary boat leg being connected to the middle portion of the second support beam; wherein the first support beam, the second support beam, the auxiliary boat leg, the first boat leg, the second boat leg, the first insulating member and the second electrode block collectively support the boat pieces and the mask assembly.

9. The boat structure of claim 8, wherein, further comprising: a clamping member connected to the first pad block and the second pad block, the clamping member and the first electrode block being capable of being contacted by a boat handling device; wherein the clamping member has a third gas passage hole penetrating through the clamping member, and / or the first electrode block has a fourth gas passage hole penetrating through the first electrode block.

10. A processing apparatus characterized by comprising: comprising: a reaction furnace having a process chamber configured to process a sheet material; the boat structure of any one of claims 1-9, configured to carry the sheet material; a boat handling device configured to grasp the boat structure and transport the boat structure to the process chamber; a gas supply device in communication with the process chamber, configured to provide a process gas to the process chamber.

Images