Reaction furnace with scraper discharging device for CVD (chemical vapor deposition) method

Abstract

The utility model discloses a reacting furnace with a scraper discharging device for a CVD (chemical vapor deposition) method, which is characterized in that the reacting furnace comprises a belt type conveying device and a furnace body, the belt type conveying device arranged in the furnace body comprises a belt and a roller, the belt is a substrate for preparing sediments by the CVD method, the roller comprises a discharging roller, the discharging roller comprises a shaft and a cylinder, and the belt is wrapped by an enveloping cylinder; the furnace body comprises an initial section, a reaction section and a discharging section, and chemical reaction products grow on a belt of the reaction section and are discharged at the discharging section; the discharging roller is installed in the discharging section, the discharging section comprises a scraper device, the scraper device comprises a scraper seat and a scraper, the scraper seat and the scraper are fixedly connected into a whole, the scraper comprises a blade, the scraper seat comprises a positioning hole, and the shaft is sleeved with the scraper device through the positioning hole. The steel belt cutting device has the main advantages that continuous automatic production is achieved, efficiency is high, energy consumption is low, and the gap between the cutting edge and the steel belt can be guaranteed and adjusted according to needs.

Description

TECHNICAL FIELD

[0001] The utility model relates to the production equipment technical field of chemical vapor deposition method, specifically is a kind of reaction furnace for CVD method with scraper discharging device. BACKGROUND

[0002] The substrate for generating deposit in existing chemical vapor deposition method is discontinuous in horizontal reaction furnace, for example, carbon nanotube generated in horizontal reaction furnace in CVD method is deposited in the container of substrate material such as quartz boat or stainless steel box, and the container is arranged one by one in horizontal furnace, and the carbon nanotube attached to the inner wall of container is particularly difficult to discharge.

[0003] At present, the addition of catalyst and the discharge of carbon nanotube are cooled to room temperature first, and then completed by manual operation, which not only increases a large amount of energy consumption, but also is difficult to realize unmanned automatic continuous production under such high temperature condition, so that the production capacity is greatly limited.

[0004] Carbon nanotube and carbon nanotube fiber as emerging frontier material have been widely concerned and researched by scientific and industrial circles due to their unique physical and chemical properties and wide application potential. At present, there are three methods for preparing carbon nanotube fiber from carbon nanotube in the world: wet spinning method, carbon nanotube array spinning method and floating catalytic spinning method. The carbon nanotube fiber produced by carbon nanotube array spinning method has the highest cleanliness, but due to the discontinuous and small area of its substrate container, it cannot be continuously produced, and the production capacity is low, resulting in particularly high price. The technical bottleneck of the existing technology is that the area of carbon nanotube growth substrate provided by traditional structure is limited and intermittent operation.

[0005] In summary, it is urgent to seek a solution that can provide carbon nanotube growth substrate area without limitation and continuous production. UTILITY MODEL CONTENT

[0006] In view of the problems existing in the prior art, the utility model aims to provide a reaction furnace with scraper discharging device for CVD method to solve the problems mentioned in the background art.

[0007] In order to achieve the above object, the utility model provides the following technical scheme: horizontal reaction furnace 1 of continuous production by chemical vapor deposition method includes belt conveyor 2 and furnace body 3, and the belt conveyor 2 including belt 2A and roller 4 is installed in furnace body 3, and the belt 2A is the substrate of deposit prepared by CVD method, and the roller 4 includes discharge roller 4A, the discharge roller 4A includes shaft 4A1 and cylinder 4A2, and the belt 2A is enveloped by cylinder 4A2;The furnace body 3 includes initial section 5, reaction section 7 and discharge section 8, and the chemical reaction product grows on the belt 2A in reaction section 7 and completes discharge in discharge section 8;

[0008] The discharge roller 4A is installed in the discharge section 8, and the discharge section 8 includes scraper device 9, the scraper device 9 includes scraper seat 9A and scraper 9B, the scraper seat 9A and the scraper 9B are integrally connected, the scraper 9B includes blade 9B1, the scraper seat 9A includes positioning hole 9A1, and the scraper device 9 is sleeved on the shaft 4A1 through the positioning hole 9A1.

[0009] As a further scheme of the utility model: the reaction furnace 1 includes the reaction furnace for preparing carbon nanotube, and the belt 2A includes stainless steel belt;The carbon nanotube grows on the belt 2A in the furnace body 3 and completes discharge in the discharge section 8.

[0010] As a further scheme of the utility model: the scraper device 9 cuts and peels the chemical reaction product adhered to the belt 2A through the blade 9B1 on the scraper 9B, and the peeled chemical reaction product falls by gravity to complete discharge.

[0011] As a further scheme of the utility model: the scraper device 9 includes integral scraper device 91, and the scraper seat 9A and the scraper 9B in the integral scraper device 91 adopt an integral structure.

[0012] As a further scheme of the utility model: the scraper device 9 includes split scraper device 92, and the split scraper seat 92A and the split scraper 92B in the split scraper device 92 adopt independent structure.

[0013] As a further scheme of the utility model: the split scraper device 92 includes gap adjusting device 6, the gap adjusting device 6 includes adjusting nut 6A, the split scraper seat 92A includes screw head 92A1 at the end, and the split scraper 92B includes screw hole 92B1;The split scraper 92B is sleeved on the screw head 92A1 through the screw hole 92B1, and then the gap between the blade 9B1 and the belt 2A is adjusted through the adjusting nut 6A.

[0014] As a further scheme of the utility model: the scraper device 9 includes angle adjusting device 10, angle adjusting device 10 includes adjusting screw rod 10A, and one end of adjusting screw rod 10A is connected with the discharging section 8, and the other end is connected with scraper seat 9A or scraper 9B;The length of the fixed position center distance of the two ends of adjusting screw rod 10A is adjusted, to adjust the angle of scraper seat 9A relative to discharging roller 4A.

[0015] As a further scheme of the utility model: the discharging roller 4A includes driving roller.

[0016] Summarized above, compared with prior art, the utility model provides a continuous production solution because of adopting a unique structure with belt as base, and specific advantages are as follows: 1) because the belt in conveyer is continuously operated, so the base area in CVD method is unlimited;2) because the conveyer belt is planar, so the discharging and cleaning of carbon nanotube are particularly easy;3) energy consumption is low;4) because the gap between blade and steel belt can be guaranteed, so the discharging of carbon nanotube is particularly convenient. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 It is the structure schematic view of belt conveyor device 2 and furnace body 3 of horizontal reaction furnace 1, also the structure schematic view of belt 2A and roller 4 of belt conveyor device 2, also the structure schematic view of discharging roller 4A, shaft 4A1 and cylinder 4A2, also the structure schematic view of scraper seat 9A and scraper 9B of scraper device 9, also the structure schematic view of integral scraper device 91, also the structure schematic view of initial section 5, reaction section 7 and discharging section 8 of furnace body 3;

[0018] Figure 2 It is the A-A sectional view of Figure 1 ;

[0019] Figure 3 It is the structure schematic view of split scraper device 92, also the structure schematic view of angle adjusting device 10;

[0020] Figure 4 It is the local enlarged view of I in Figure 3 ;

[0021] Figure 5 It is the B view of Figure 3 ;

[0022] Figure 6 It is the structure schematic view of integral furnace body 3.

[0023] Reactor 1, belt conveyor 2, belt 2A, furnace body 3, roller 4, discharge roller 4A, shaft 4A1, cylinder 4A2, initial section 5, gap adjustment device 6, adjusting nut 6A, reaction section 7, discharge section 8, scraper device 9, scraper seat 9A, positioning hole 9A1, scraper 9B, blade 9B1, integral scraper device 91, split scraper device 92, split scraper seat 92A, screw head 92A1, split scraper 92B, screw hole 92B1, angle adjustment device 10, adjusting screw 10A. Detailed Implementation

[0024] The technical solutions of the present utility model will be described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the protection scope of the present utility model.

[0025] Please see Figures 1-6 In this embodiment of the present invention, the horizontal reactor 1 for continuous production using chemical vapor deposition includes a belt conveyor 2 and a furnace body 3. The belt conveyor 2 installed in the furnace body 3 includes a belt 2A and a roller 4. The belt 2A is the substrate for the CVD-prepared deposits. The roller 4 includes a discharge roller 4A, which includes a shaft 4A1 and a cylinder 4A2. The belt 2A is enveloped by the cylinder 4A2. The furnace body 3 includes an initial section 5, a reaction section 7, and a discharge section 8. The chemical reaction products grow on the belt 2A in the reaction section 7 and are discharged in the discharge section 8.

[0026] The discharge roller 4A is installed in the discharge section 8. The discharge section 8 includes a scraper device 9, which includes a scraper seat 9A and a scraper 9B. The scraper seat 9A and the scraper 9B are fixedly connected as one unit. The scraper 9B includes a blade 9B1. The scraper seat 9A includes a positioning hole 9A1. The scraper device 9 is sleeved on the shaft 4A1 through the positioning hole 9A1.

[0027] The reactor 1 includes a reactor for preparing carbon nanotubes, and the belt 2A includes a stainless steel belt; the carbon nanotubes are grown on the belt 2A inside the furnace body 3 and discharged in the discharge section 8.

[0028] The scraper device 9 cuts and peels off the chemical reaction products adhering to the belt 2A with the blade 9B1 on the scraper 9B. The peeled chemical reaction products fall by gravity to complete the discharge.

[0029] The scraper device 9 includes an integral scraper device 91, in which the scraper seat 9A and the scraper 9B are integrated into one piece.

[0030] The scraper device 9 comprises a split scraper device 92, the split scraper seat 92A and the split scraper 92B of the split scraper device 92 adopt independent structures.

[0031] The split scraper device 92 comprises a gap adjusting device 6, the gap adjusting device 6 comprises an adjusting nut 6A, the split scraper seat 92A comprises a screw head 92A1 at an end, and the split scraper 92B comprises a screw hole 92B1; the split scraper 92B is sleeved on the screw head 92A1 through the screw hole 92B1, and the gap between the blade 9B1 and the belt 2A is adjusted through the adjusting nut 6A.

[0032] The scraper device 9 comprises an angle adjusting device 10, the angle adjusting device 10 comprises an adjusting screw 10A, one end of the adjusting screw 10A is connected with the discharging section 8, and the other end is connected with the scraper seat 9A or the scraper 9B; the angle of the scraper seat 9A relative to the discharging roller 4A is adjusted by adjusting the length of the center distance between the two fixed positions of the adjusting screw 10A.

[0033] It should be noted that the angle adjusting device 10 can also be a rotation preventing device of the scraper device 9.

[0034] The discharging roller 4A comprises a driving roller.

[0035] It should be noted that the roller 4 comprises a driving roller and a driven roller.

[0036] In the description of the utility model, it should be explained that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "front", "back" and the like indicate the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element indicated must have a particular orientation, be constructed and operated in a particular orientation, therefore, it cannot be understood as a limitation on the utility model, and it should be explained that the terms "mounting", "connecting" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrally connected, or it can be mechanically connected, or it can be indirectly connected through an intermediate medium, and the specific meaning of the terms in the utility model can be understood according to the specific circumstances.

[0037] In addition, it should be understood that although the present specification is described in terms of embodiments, not every embodiment contains only one independent technical solution, and the description of the specification is only for the sake of clarity, and those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A reactor for use in a CVD process with a doctor blade discharge device, characterized in that The horizontal reaction furnace (1) for continuous production by chemical vapor deposition method comprises a belt conveying device (2) and a furnace body (3), the belt conveying device (2) installed in the furnace body (3) comprises a belt (2A) and rollers (4), the belt (2A) is a substrate for depositing a deposit by the CVD method, and the rollers (4) comprise a discharge roller (4A) comprising a shaft (4A1) and a cylinder (4A2), and the belt (2A) is wrapped around the cylinder (4A2); the furnace body (3) comprises an initial section (5), a reaction section (7) and a discharge section (8), a chemical reaction product grows on the belt (2A) in the reaction section (7) and is discharged in the discharge section (8). The discharge roller (4A) is installed in the discharge section (8), the discharge section (8) comprises a scraper device (9), the scraper device (9) comprises a scraper seat (9A) and a scraper (9B), the scraper seat (9A) and the scraper (9B) are fixedly connected into one body, the scraper (9B) comprises a blade (9B1), the scraper seat (9A) comprises a positioning hole (9A1), and the scraper device (9) is sleeved on the shaft (4A1) through the positioning hole (9A1).

2. A reactor for use in a CVD process with a doctor blade discharge device according to claim 1, characterized in that The reaction furnace (1) comprises a reaction furnace for preparing carbon nanotubes, and the belt (2A) comprises a stainless steel belt; the carbon nanotubes grow on the belt (2A) in the furnace body (3) and are discharged in the discharge section (8).

3. A reactor for use in a CVD process with a doctor blade discharge device according to claim 2, characterized in that The scraper device (9) cuts and peels off the chemical reaction product adhered to the belt (2A) through the blade (9B1) on the scraper (9B), and the peeled chemical reaction product is discharged by falling under gravity.

4. A reactor for use in a CVD process having a doctor blade discharge device according to claim 3, characterized in that The scraper device (9) comprises an integral scraper device (91), and the scraper seat (9A) and the scraper (9B) in the integral scraper device (91) adopt an integral structure.

5. A reactor for use in CVD process with doctor blade discharge means according to claim 3, characterized in that The scraper device (9) comprises a split scraper device (92), and the split scraper seat (92A) and the split scraper (92B) in the split scraper device (92) adopt independent structures.

6. A reactor for use in a CVD process having a doctor blade discharge device according to claim 5, characterized in that The split scraper device (92) comprises a gap adjusting device (6), the gap adjusting device (6) comprises an adjusting nut (6A), the split scraper seat (92A) comprises a screw head (92A1) at an end, and the split scraper (92B) comprises a screw hole (92B1); the split scraper (92B) is sleeved on the screw head (92A1) through the screw hole (92B1), and the gap between the blade (9B1) and the belt (2A) is adjusted through the adjusting nut (6A).

7. A reactor for use in a CVD process with a doctor blade discharge device according to claim 4 or 6, characterized in that The scraper device (9) comprises an angle adjusting device (10), the angle adjusting device (10) comprises an adjusting screw (10A), one end of the adjusting screw (10A) is connected with the discharge section (8), the other end is connected with the scraper seat (9A) or the scraper (9B), and the angle of the scraper seat (9A) relative to the discharge roller (4A) is adjusted by fixing the length of the center distance between the two ends of the adjusting screw (10A).

8. A reactor for use in CVD process with doctor blade discharge device according to claim 1, characterized in that The discharge roller (4A) comprises a driving roller.

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