Air inlet sealing plate with side holes

Abstract

The utility model relates to the field of air inlet sealing plates, and discloses an air inlet sealing plate with side holes, which comprises a control mechanism, the control mechanism comprises two shells, the inner walls of the two shells are rotatably connected with double-thread screws, the outer walls of the two double-thread screws are both in threaded connection with two sliding blocks, and the sliding blocks are in threaded connection with the two shells. Second bevel gears are fixedly connected to the middles of the outer walls of the two double-thread screws, rotating shafts are rotatably connected to the inner walls of the front end faces of the two shells, first bevel gears are fixedly connected to the ends, close to the second bevel gears, of the two rotating shafts, and air inlet sealing plates are fixedly connected to the ends, closest to each other, of the two shells. An air inlet mechanism is fixedly arranged in the center of the front end of the air inlet sealing plate and comprises an air inlet hole and two vertical rods. According to the utility model, the size of the opening of the side hole can be controlled through the control mechanism, and dust and impurities in the air can be prevented from entering the equipment through the arrangement of the air inlet mechanism.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of air inlet sealing plate, especially to an air inlet sealing plate with side holes. BACKGROUND

[0002] The semiconductor cleaning equipment is a special equipment for cleaning semiconductor wafers in the semiconductor manufacturing process, and the air inlet sealing plate is a device or system for adjusting the air inlet amount. In some equipment, one side of the air inlet sealing plate is the external environment, and the other side is the internal system. When the equipment is running, the internal air pressure may change due to the air inlet process or the internal working state. The side hole can balance the internal and external air pressures to a certain extent.

[0003] The inventor found that the prior art has the following problems in the process of implementing the present application: The existing air inlet sealing plate generally includes an air inlet hole, an air outlet hole, and an air inlet sealing plate body. The existing air inlet sealing plate does not have a side hole for adjusting the internal air pressure when in use, and cannot balance the internal air pressure, nor can it adjust the size of the internal air pressure. The existing air inlet hole lacks a mechanism for filtering air impurities at the connection with the air pump, and dust can easily accumulate inside the mechanism over time.

[0004] Therefore, the skilled in the art provides an air inlet sealing plate with side holes to solve the problems raised in the background. SUMMARY

[0005] The utility model discloses a kind of air inlet sealing plates with side holes to solve the problems existing in prior art, and the utility model can control the size of side hole opening by control mechanism, and the dust impurities in air can be prevented from entering equipment interior by the setting of air inlet mechanism.

[0006] To achieve the above object, the utility model provides the following technical scheme: an air inlet sealing plate with side holes, including control mechanism, the control mechanism includes two housings, two the double-end screw rod is rotatably connected in inner wall of two housings, two the double-end screw rod outer wall is all connected with two sliding blocks in screw, two the double-end screw rod outer wall middle part is fixedly connected with second bevel gear, two the rotation shaft is rotatably connected in inner wall of two housings front end face, two the rotation shaft is fixedly connected with first bevel gear in one end close to second bevel gear, two the housings are fixedly connected with air inlet sealing plate in the nearest one end of each other;

[0007] The air inlet sealing plate front end center is fixedly provided with air inlet mechanism, the air inlet mechanism includes air inlet hole, two vertical rods, the air inlet hole inner wall is slidably connected with filter screen, the filter screen top is fixedly connected with clamping column, the clamping column top is movably connected with limiting column, the limiting column bottom end face is fixedly connected with spring in one end close to clamping column, two the vertical rod inner wall is fixedly connected with cross bar.

[0008] Further, the outer wall of the cross bar is rotationally connected with the limiting column, and the spring is fixedly connected with the air inlet hole at the end away from the limiting column.

[0009] Further, the bottom end faces of the two vertical rods are fixedly connected with the top of the air inlet hole, the front end of the limiting column is fixedly connected with a moving block, and the top of the moving block is uniformly fixed with a plurality of protruding blocks.

[0010] Further, a groove is formed at the connecting position between the rear end of the limiting column and the clamping column, and the depth of the groove is relatively small, so that the clamping column at the bottom is not limited during movement.

[0011] Further, the outer wall of the four sliding blocks is slidingly connected with the inner wall of the two shells, and the inner wall of the four sliding blocks is fixedly provided with a gasket.

[0012] Further, the two first bevel gears and the two second bevel gears are meshed with each other, and the front end faces of the two rotating shafts are fixedly connected with a handle.

[0013] Further, the air inlet sealing plate is provided with a side hole near the two ends, and the rear end face of the air inlet hole is fixedly connected with the air inlet sealing plate.

[0014] The utility model has the following beneficial effects:

[0015] 1. The air inlet sealing plate with a side hole provided by the utility model can prevent most dust and impurities from entering the equipment when air enters the air inlet hole for a long time, and then the moving block is pressed and moved downward, so that the rear end of the limiting column slides away from the top of the clamping column, the filter screen in the air inlet hole can be taken out for cleaning, and then the filter screen is reset, and the limiting column can be clamped out of the clamping column to limit the clamping column under the action of the spring.

[0016] 2. When the air pressure in the air inlet sealing plate is too large and needs to be released, the handle is rotated, the handle drives the rotating shaft to rotate, the rotating shaft drives the first bevel gear to rotate, the first bevel gear drives the second bevel gear in meshing to rotate, the second bevel gear drives the double-headed screw rod in the inner wall to rotate, the double-headed screw rod can drive the two sliding blocks to drive the gaskets in the inner wall to block the side hole, and the size of the side hole opening can be adjusted according to the internal pressure condition. DRAWINGS

[0017] Figure 1 It is a whole axial measurement structure schematic view of the utility model;

[0018] Figure 2 It is a rear view structure schematic view of the utility model;

[0019] Figure 3 It is a sectional view structure schematic view of the utility model;

[0020] Figure 4 It is a local structure schematic view of the utility model;

[0021] Figure 5 It is a card column, limit column amplification structure schematic view of the utility model;

[0022] Figure 6 It is another local structure schematic view of the utility model.

[0023] Legend:

[0024] 1, control mechanism, 2, air inlet sealing plate, 3, side hole, 4, air inlet mechanism, 101, shell, 102, sliding block, 103, double head screw, 104, primary bevel gear, 105, secondary bevel gear, 106, gasket, 107, rotating shaft, 108, handle, 401, air inlet hole, 402, filter screen, 403, card column, 404, limit column, 405, spring, 406, cross bar, 407, moving block, 408, vertical rod. DETAILED DESCRIPTION

[0025] The technical scheme in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor belong to the scope of protection of the utility model.

[0026] Reference Figures 1-6 , the utility model provides an embodiment: a kind of air inlet sealing plate with side hole, including control mechanism 1, control mechanism 1 includes two shell 101, two shell 101 inner wall rotationally connected with double head screw 103, two double head screw 103 outer wall is all screw thread connection with two sliding blocks 102, two double head screw 103 outer wall middle part is fixedly connected with secondary bevel gear 105, two shell 101 front end face is rotationally connected with rotating shaft 107 in the middle, two rotating shafts 107 are fixedly connected with primary bevel gear 104 in the end close to secondary bevel gear 105, two shell 101 are fixedly connected with air inlet sealing plate 2 at the closest segment from each other;

[0027] Air inlet sealing plate 2 front end center is fixedly provided with air inlet mechanism 4, and air inlet mechanism 4 includes air inlet hole 401, two vertical rods 408, air inlet hole 401 inner wall is slidably connected with filter screen 402, filter screen 402 top is fixedly connected with card column 403, card column 403 top is movably connected with limit column 404, limit column 404 bottom end face is fixedly connected with spring 405 in the end close to card column 403, two vertical rods 408 inner wall are fixedly connected with cross bar 406.

[0028] Specific, press down the moving block 407, moving block 407 drive the rear end of the limit post 404 along the horizontal axis 406 rotation, limit post 404 rear end drive the bottom spring 405 upward rotation, while from the top of the card column 403 slip out, make the card column 403 lose limit, hold the card column 403 from the air inlet hole 401 inner wall take out the filter screen 402, clean up and then reset, after the filter screen 402 reset, release the moving block 407, under the tension of the spring 405 make the limit post 404 reset, make the limit post 404 rear end bottom re fix the card column 403.

[0029] With reference to Figures 1-6 , the outer wall of the horizontal rod 406 and the limit post 404 are rotationally connected, the spring 405 is fixedly connected to the air inlet hole 401 at the end away from the limit post 404, the bottom end faces of the two vertical rods 408 are fixedly connected to the top of the air inlet hole 401, the front end of the limit post 404 is fixedly connected with the moving block 407, the top of the moving block 407 is uniformly fixed with a plurality of protrusions, a groove is formed at the rear end of the limit post 404 and the connection position of the card column 403, and the depth of the groove is relatively shallow, so that the bottom card column 403 is not restricted during movement, the outer walls of the four sliding blocks 102 are slidingly connected to the inner walls of the two housings 101, the inner walls of the four sliding blocks 102 are fixedly provided with gaskets 106, the two primary bevel gears 104 and the two secondary bevel gears 105 are meshed with each other, the front end faces of the two shafts 107 are fixedly connected with handles 108, the air inlet sealing plate 2 is provided with side holes 3 near the two ends, and the rear end face of the air inlet hole 401 is fixedly connected with the air inlet sealing plate 2.

[0030] Specifically, rotating the handle 108 drives the shaft 107 to rotate, the shaft 107 drives the primary bevel gear 104 to rotate, the primary bevel gear 104 drives the secondary bevel gear 105 meshed therewith to rotate, the secondary bevel gear 105 drives the double-headed screw rod 103 in the inner wall to rotate, and the double-headed screw rod 103 drives the two sliding blocks 102 to move the gaskets 106 in the inner wall along the inner wall of the housing 101 in upward and downward directions respectively, thereby shielding the four side holes 3 on the two sides of the air inlet sealing plate 2, adjusting the size of the side holes 3, and relieving pressure according to different degrees of pressure.

[0031] Working principle: air inlet hole 401 is connected with air pump, air enters into air inlet sealing plate 2 from air inlet hole 401, from the multiple air outlet holes at the back to the inside of the device, the setting of filter screen 402 can block dust or impurities in the air, press down moving block 407 with fingers, moving block 407 makes the rear end of limiting column 404 rotate upwards along horizontal shaft 406, at the same time, the rear end of limiting column 404 drives the spring 405 at the bottom to rotate upwards, so that the clamping column 403 loses the restriction, at this time, the filter screen 402 can be taken out from the inner wall of air inlet hole 401 by holding clamping column 403, and then reset, release the fingers pressing moving block 407, under the tension of spring 405, limiting column 404 is reset, and the rear end of limiting column 404 re-fixes clamping column 403, two vertical rods 408 provide support for horizontal rod 406.

[0032] Secondly, turn the handle 108 to the left, the handle 108 drives the rotating shaft 107 to rotate, the rotating shaft 107 drives the first bevel gear 104 to rotate to the left, the first bevel gear 104 drives the second bevel gear 105 engaged therewith to rotate, the second bevel gear 105 drives the double-headed screw rod 103 on the inner wall to rotate, the double-headed screw rod 103 rotates to make the two sliding blocks 102 connected with it by screw threads move in opposite directions along the inner wall of the housing 101, at the same time, drive the gasket 106 inside to move, and shield the four side holes 3 opened on both sides of the air inlet sealing plate 2.

[0033] Finally, it should be pointed out that: the above only for the preferred embodiments of the utility model, and does not limit the utility model, although the utility model has been described in detail with reference to the foregoing embodiments, for the person skilled in the art, it still can modify the technical scheme recorded in the foregoing each embodiment, or make equivalent replacement to part of technical features, any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the utility model, should be included in the protection scope of the utility model.

Claims

1. A gas inlet closure plate with side holes comprising a control mechanism (1), characterized in that: The control mechanism (1) includes two housings (101), the inner wall of two double head screws (103) is rotatably connected, the outer wall of two double head screws (103) is threadedly connected with two sliding blocks (102), two double head screws (103) are fixedly connected with two bevel gears (105) on the outer wall, the inner wall of the front end face of two housings (101) is rotatably connected with a rotating shaft (107), one bevel gear (104) is fixedly connected with the rotating shaft (107) close to the two bevel gears (105), and the closest part of the two housings (101) is fixedly connected with an air inlet sealing plate (2). The air inlet sealing plate (2) is provided with an air inlet mechanism (4) at the front end center, the air inlet mechanism (4) comprises an air inlet hole (401), two vertical rods (408), the inner wall of the air inlet hole (401) is slidably connected with a filter screen (402), the filter screen (402) is fixedly connected with a clamping column (403) on the top, the clamping column (403) is movably connected with a limiting column (404) on the top, the limiting column (404) is fixedly connected with a spring (405) at the bottom end face close to one end of the clamping column (403), and the inner wall of two vertical rods (408) is fixedly connected with a cross rod (406).

2. The gas inlet seal plate with side holes according to claim 1, characterized in that: The outer wall of the cross rod (406) is rotatably connected with the limiting column (404), and the end of the spring (405) away from the limiting column (404) is fixedly connected with the air inlet hole (401).

3. The gas inlet seal plate with side holes according to claim 1, characterized in that: The bottom end face of two vertical rods (408) is fixedly connected with the top of the air inlet hole (401), the limiting column (404) is fixedly connected with a moving block (407) at the front end, and a plurality of convex blocks are uniformly fixedly arranged on the top of the moving block (407).

4. The gas inlet seal plate with side holes according to claim 1, characterized in that: The limiting column (404) is connected with the clamping column (403), and a groove is formed at the connecting position of the limiting column (404) and the clamping column (403), and the depth of the groove is relatively shallow, so that the clamping column (403) at the bottom is not limited when moving.

5. The gas inlet seal plate with side holes according to claim 1, characterized in that: The outer wall of four sliding blocks (102) is slidably connected with the inner wall of two housings (101), and the inner wall of four sliding blocks (102) is fixedly provided with a gasket (106).

6. The gas inlet seal plate with side holes according to claim 1, characterized in that: Two bevel gears (104) and two bevel gears (105) are meshed with each other, and the front end face of two rotating shafts (107) is fixedly connected with a handle (108).

7. The gas inlet seal plate with side holes according to claim 1, characterized in that: The air inlet sealing plate (2) is provided with a side hole (3) close to the two ends, and the rear end face of the air inlet hole (401) is fixedly connected with the air inlet sealing plate (2).

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