Quartz boat wafer inclination detection jig

Abstract

The utility model discloses a quartz boat wafer inclination detection jig, which belongs to the field of detection jigs, and comprises a mounting frame, a wafer inclination detection device, a wafer inclination detection device and a wafer inclination detection device, and is characterized in that the mounting frame is detachably connected with a quartz boat; the positioning rod is connected with the mounting frame; one end of the movable rod is in movable locking connection with the positioning rod, and the other end of the movable rod is used for abutting against the wafer; and the measuring assembly is used for detecting inclination of the quartz boat wafer. The mounting rack comprises a side plate detachably connected with the quartz boat, and one end of the side plate is connected with the positioning rod; and the bottom plate is connected with one side of the other end of the side plate. The mounting rack further comprises a connecting block connected with one side of one end of the side plate, and the connecting block is used for being matched with a quartz boat. The mounting frame further comprises a supporting table connected with the other side of the other end of the side plate. The utility model has the technical effect that whether the clamping groove of the related quartz boat meets the bearing standard of the wafer or not can be conveniently detected.

Description

TECHNICAL FIELD

[0001] The utility model relates to detection fixture, especially a quartz boat wafer inclination detection fixture. BACKGROUND

[0002] The quartz boat is a tool for bearing wafers in the semiconductor integrated circuit manufacturing process, and has the advantages of high temperature resistance and good chemical stability.

[0003] The related quartz boat is generally provided with a plurality of clamping grooves, and the plurality of clamping grooves correspond to bearing a plurality of wafers. When the wafers are located in the clamping grooves, a certain inclination will occur. In order to prevent the wafers from being damaged, it is necessary to ensure that the adjacent wafers do not collide. However, the detection performance of the related detection fixture is poor, and it is difficult to detect whether the clamping grooves of the related quartz boat meet the bearing standard of the wafers. UTILITY MODEL CONTENT

[0004] The utility model aims at providing a quartz boat wafer inclination detection fixture which can detect whether the clamping grooves of the related quartz boat meet the bearing standard of the wafers.

[0005] TECHNICAL SCHEME

[0006] A quartz boat wafer inclination detection fixture, comprising:

[0007] A mounting frame for detachable connection with the quartz boat;

[0008] A positioning rod connected with the mounting frame;

[0009] A moving rod, one end of the moving rod is movably and tightly connected with the positioning rod, and the other end of the moving rod is used for abutting against the wafer;

[0010] A measuring assembly for detecting the inclination of the quartz boat wafer.

[0011] Optionally, the mounting frame comprises:

[0012] A side plate for detachable connection with the quartz boat, one end of the side plate is connected with the positioning rod;

[0013] A bottom plate connected with one side of the other end of the side plate.

[0014] Optionally, the mounting frame further comprises a connecting block connected with one side of one end of the side plate, and the connecting block is used for cooperating with the quartz boat.

[0015] Optionally, the mounting frame further comprises a supporting table connected with the other side of the other end of the side plate.

[0016] Optionally, further comprising:

[0017] A first limiting slot is arranged on one side of the other end of the side plate, and at least part of the bottom plate is located in the first limiting slot.

[0018] A second limiting slot is arranged on the other side of the other end of the side plate, and at least part of the support table is located in the second limiting slot.

[0019] Optionally, the moving rod comprises a moving block and a rod piece connected with each other, the moving block is movably connected with the positioning rod, and the rod piece is used for abutting against the wafer.

[0020] Optionally, the moving block and the positioning rod are movably connected through a fastener.

[0021] Optionally, the positioning rod and the mounting frame are detachably connected.

[0022] Beneficial effects: in the detection, first, the first horizontal distance d1 between the adjacent clamping grooves of the quartz boat is detected by using the measuring assembly; then, the wafer is placed in the clamping groove of the quartz boat; then, the moving rod is moved towards the wafer direction until the other end of the moving rod abuts against the wafer and the wafer is locked at the maximum inclination angle; finally, the second horizontal distance d2 of the maximum inclination of the wafer is detected by using the measuring assembly, if the second horizontal distance d2 is less than half of the first horizontal distance d1, it is proved that the adjacent wafers do not collide, so that the detection is completed, and the detection performance is good, and the clamping groove of the quartz boat can be conveniently detected whether it meets the bearing standard of the wafer. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 It is a structure schematic view of a quartz boat wafer inclination detection jig of the embodiment 1 of the utility model;

[0024] Figure 2 It is a structure schematic view of a quartz boat wafer inclination detection jig of the embodiment 1 of the utility model; Figure 1 It is a partial view of A;

[0025] Figure 3 It is a partial view of A; Figure 1 It is a partial view of B;

[0026] Figure 4 It is a partial view of C; Figure 1

[0027] Figure 5 It is a structure schematic view of a quartz boat wafer inclination detection jig of the embodiment 1 of the utility model;

[0028] Figure 6 It is a structure schematic view of a quartz boat wafer inclination detection jig of the embodiment 1 of the utility model;

[0029] ​In the figure: 1, mounting frame; 11, side plate; 111, first limiting groove; 112, second limiting groove; 12, bottom plate; 13, connecting block; 14, support table; 2, positioning rod; 3, moving rod; 31, moving block; 32, rod; 4, fastener; 5, quartz boat; 51, clamping groove; 6, wafer. DETAILED DESCRIPTION

[0030] In order to make the technical scheme of the utility model more clear, the utility model will be further described in detail below in combination with the drawings and specific embodiments.

[0031] The application will be further described in detail below in combination with the drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the related utility model, and not to limit the utility model. In addition, it should be noted that only the parts related to the utility model are shown in the drawings for convenience of description. The first, second and the like in the utility model are set for the convenience of describing the technical scheme of the utility model, and do not have a specific limiting effect, and are generic, which does not limit the technical scheme of the utility model. It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict. In the description of the utility model, it should be noted that the orientation or position relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like is based on the orientation or position relationship shown in the drawings, and is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the utility model. In addition, the terms "first", "second", "third" are only for description purposes, and cannot be understood as indicating or implying relative importance. Unless otherwise specified and limited, the terms "mounting", "connection", "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be connected inside two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances. The multiple technical schemes in the same embodiment, and the multiple technical schemes of different embodiments can be arranged and combined to form new technical schemes without contradiction or conflict, which are within the scope of the utility model claimed.

[0032] Embodiment 1

[0033] As Figure 1 and Figures 5-6The embodiment provides a quartz boat wafer tilt detection jig, which comprises: a mounting frame 1 used for detachable connection with a quartz boat 5; a positioning rod 2 connected with the mounting frame 1; a moving rod 3, one end of the moving rod 3 is movably and tightly connected with the positioning rod 2, and the other end of the moving rod 3 is used for abutting against a wafer 6; and a measuring assembly used for detecting the wafer 6 tilt of the quartz boat 5.

[0034] Specifically, during detection, first, the measuring assembly is used to detect a first horizontal distance d1 between adjacent clamping grooves 51 of the quartz boat 5; then, the wafer 6 is placed in the clamping groove 51 of the quartz boat 5; then, the moving rod 3 is moved towards the wafer 6 until the other end of the moving rod 3 abuts against the wafer 6 and the wafer 6 is at a maximum tilt angle and is tightly locked; finally, the measuring assembly is used to detect a second horizontal distance d2 of the maximum tilt of the wafer 6, if the second horizontal distance d2 is less than half of the first horizontal distance d1, it indicates that the adjacent wafers 6 do not collide, thereby the detection is completed, and the detection performance is good, and the mounting frame 1 is convenient for detecting whether the clamping groove 51 of the quartz boat 5 meets the bearing standard of the wafer 6.

[0035] Specifically, the mounting frame 1 is used for bearing the quartz boat 5 and the positioning rod 2; the positioning rod 2 is used for bearing the moving rod 3, and the length of the positioning rod 2 should be greater than the length of the quartz boat 5, so that the moving range of the moving rod 3 covers the whole quartz boat 5, thereby the detection on all the clamping grooves 51 of the quartz boat 5 is facilitated; the moving rod 3 is convenient for the wafer 6 to be at a maximum tilt angle; and the measuring assembly is used for detection, in order to ensure the accuracy, preferably, a large-size measuring assembly such as a Hexagon three-coordinate measuring machine is adopted, at this time, the mounting frame 1, the quartz boat 5 and other components in the embodiment can be placed on the measuring assembly, or a small-size measuring assembly such as a vernier caliper can be adopted, at this time, the measuring assembly is located at one side of the mounting frame 1, the quartz boat 5 and other components in the embodiment.

[0036] Further, as shown in Figures 1 to 3, Figure 1 the mounting frame 1 comprises: a side plate 11 used for detachable connection with the quartz boat 5, one end of the side plate 11 is connected with the positioning rod 2; and a bottom plate 12 connected with one side of the other end of the side plate 11.

[0037] Specifically, the side plate 11 is used for bearing the quartz boat 5 and the positioning rod 2; and the bottom plate 12 is used for increasing the stability of the side plate 11, so that the side plate 11 is prevented from toppling, thereby the detection accuracy is increased.

[0038] Further, as shown in Figures 1 to 3, Figure 1 the mounting frame 1 further comprises a connecting block 13 connected with one side of one end of the side plate 11, and the connecting block 13 is used for cooperation with the quartz boat 5.

[0039] Specifically, the connecting block 13 is used for limiting the position of the quartz boat 5 in the vertical direction, so that the cooperation accuracy of the quartz boat 5 and the side plate 11 is ensured.

[0040] Further, as Figure 1 The mounting frame 1 further comprises a support table 14 connected to the other side of the other end of the side plate 11. Specifically, the support table 14 is used to further increase the stability of the side plate 11, prevent the side plate 11 from falling, thereby increasing the detection accuracy, and the horizontal section of the support table 14 is preferably gradually increased along the direction of gravity.

[0041] Further, as Figures 2-3 It further comprises: a first limiting groove 111 provided on one side of the other end of the side plate 11, and at least part of the bottom plate 12 is located in the first limiting groove 111; and a second limiting groove 112 provided on the other side of the other end of the side plate 11, and at least part of the support table 14 is located in the second limiting groove 112.

[0042] Specifically, the first limiting groove 111 is used to limit the position of the bottom plate 12 in the vertical direction, so as to ensure the good cooperation accuracy of the bottom plate 12 and the side plate 11; and the second limiting groove 112 is used to limit the position of the support table 14 in the vertical direction, so as to ensure the good cooperation accuracy of the support table 14 and the side plate 11; in order to ensure the strength of the side plate 11, the depth of the first limiting groove 111 and the depth of the second limiting groove 112 should be much smaller than the thickness of the side plate 11.

[0043] Further, as Figure 4 The moving rod 3 comprises a moving block 31 and a rod piece 32 connected to each other, the moving block 31 and the positioning rod 2 are movably connected, and the rod piece 32 is used to abut against the wafer 6 at one end away from the moving block 31. Specifically, the moving block 31 is used to connect the rod piece 32 to the positioning rod 2.

[0044] Further, as Figure 4 The moving block 31 and the positioning rod 2 are movably connected through the fastener 4. Specifically, the movable connection is convenient for preventing the moving block 31 and the rod piece 32 from moving during the detection, so as to ensure the detection accuracy, and the fastener 4 can be a screw, a bolt or the like.

[0045] Further, as Figure 1 The positioning rod 2 and the mounting frame 1 are detachably connected. Specifically, the detachable connection is convenient for timely replacing the positioning rod 2.

[0046] The above embodiments only express several implementation manners of the present application, and the description is relatively specific and detailed, but it should not be understood as the limitation of the patent scope of the present application. It should be noted that, for ordinary skilled in the art, without departing from the concept of the present application, a number of modifications and improvements can be made, which all belong to the protection scope of the present application. Therefore, the protection scope of the present application patent should be subject to the appended claims.

Claims

1. A quartz boat wafer tilt detection jig, characterized by, The utility model relates to a kind of quartz boat (5) and the installation frame (1) for being detachably connected with the quartz boat (5);With the positioning rod (2) being connected with the installation frame (1);Moving rod (3), one end of the moving rod (3) and the positioning rod (2) are moved locking connection, the other end of the moving rod (3) is used to and the wafer (6) is in contact;For detecting the measurement assembly of the quartz boat (5) wafer (6) inclination. The installation frame (1) includes: For and the quartz boat (5) detachably connected side plate (11), one end of the side plate (11) and the positioning rod (2) are connected; With the bottom plate (12) being connected with the other end of the side plate (11) one side. The installation frame (1) further includes the connecting block (13) being connected with one side of one end of the side plate (11), and the connecting block (13) is used to cooperate with the quartz boat (5).

2. The wafer tilt detection jig of claim 1, wherein The installation frame (1) further includes the support table (14) being connected with the other side of the other end of the side plate (11). Further include: First limiting groove (111) is arranged in one side of the other end of the side plate (11), and at least part of the bottom plate (12) is located in the first limiting groove (111); 3. The wafer tilt detection tool for a quartz boat as claimed in claim 2, wherein Second limiting groove (112) is arranged in the other side of the other end of the side plate (11), and at least part of the support table (14) is located in the second limiting groove (112).

4. The wafer tilt detection tool for a quartz boat as claimed in claim 2, wherein The moving rod (3) includes the moving block (31) and the rod piece (32) being connected with each other, the moving block (31) and the positioning rod (2) are moved locking connection, and the rod piece (32) is used to and the wafer (6) is in contact with the end away from the moving block (31).

5. The wafer tilt detection tool for a quartz boat as claimed in claim 4, wherein The moving block (31) and the positioning rod (2) are locked by fastener (4) connection. The positioning rod (2) and the installation frame (1) are detachably connected. ​ 6. The wafer tilt detection jig of any one of claims 1-5, wherein: ​ 7. The wafer tilt detection tool for a quartz boat as claimed in claim 6, wherein ​ 8. The wafer tilt detection jig of any one of claims 1-5, wherein: ​

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