Filter for polycrystalline silicon production

Abstract

The utility model discloses a filter for polycrystalline silicon production. The filter comprises an absorption cylinder, a backflushing assembly and a filtering assembly, a feeding and discharging assembly is arranged on the outer side of the absorption barrel. The filtering assembly comprises a supporting plate arranged on the inner wall of the absorption barrel, the top of the supporting plate is connected with a plurality of filtering barrels used for blocking dust in a penetrating mode, and locking parts used for fixing the filtering barrels are arranged at the penetrating positions of the filtering barrels and the supporting plate; the back-flushing assembly is arranged on the edge side of the top of the absorption cylinder and used for flushing and falling dust on the surface of the filter cylinder; the locking portion is arranged at the penetrating position of the filter cartridge and the supporting plate, the filter cartridge and the supporting plate are connected and locked through the locking portion, and in the maintenance and replacement operation of the filter cartridge, compared with the mode that the filter cartridge and the supporting plate are directly connected and fixed through threads, the filter cartridge can be rapidly separated, installed and replaced through the locking portion, and the maintenance efficiency is improved. The time-consuming operation of rotating and disassembling the plurality of filter cartridges is avoided.

Description

Technical Field

[0001] This utility model relates to the field of filter technology, and in particular to a filter for polycrystalline silicon production. Background Technology

[0002] In the polysilicon production process, the silicon furnace is the core equipment. During its operation, it generates a large amount of waste gas containing harmful substances such as silicon powder and hydrogen chloride. In order to protect the environment and make effective use of resources, it is crucial to recycle and treat these waste gases. As a key component of the waste gas recovery system, the filter used in polysilicon production is responsible for removing solid particles and liquid impurities from the waste gas, ensuring the role of gas recovery and utilization.

[0003] In traditional polysilicon production filters, the filter is divided into upper and lower parts by a support plate. The gas entering from the lower part can only pass through the filter cartridges inserted on the surface of the support plate to enter the upper part, thus trapping dust on the outer surface of the filter cartridges. The filter cartridges and the support plate are generally fixed by a direct threaded connection. In actual production and maintenance, especially when the filter cartridges need to be replaced due to blockage, wear, or reaching the end of their service life, operators need to use tools to loosen and tighten the filter cartridges one by one. For multiple filter cartridges, this consumes maintenance time and limits the quick replacement of the filter cartridges.

[0004] Therefore, there is an urgent need for an improved filter design for polycrystalline silicon production, addressing the problems existing in the current technology. Utility Model Content

[0005] The purpose of this invention is to provide a filter for polycrystalline silicon production to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a filter for polycrystalline silicon production, comprising:

[0007] An absorption cylinder is used for the circulation of dust, and an inlet / outlet assembly is provided on the outside of the absorption cylinder.

[0008] A filter assembly for trapping dust in a gas includes a support plate disposed on the inner wall of an absorption cylinder, a plurality of filter cylinders for blocking dust are inserted and connected to the top of the support plate, and a locking part for fixing the filter cylinders is provided at the insertion point between the filter cylinders and the support plate.

[0009] A backwash assembly is disposed on the top side of the absorption cylinder, and the backwash assembly is used to wash away and remove dust from the surface of the filter cylinder.

[0010] Preferably, the locking part includes:

[0011] A connecting sleeve is provided at the top of the filter cylinder, and the bottom of the connecting sleeve is inserted and connected to the top of the support plate;

[0012] The insertion rod has its end inserted into the insertion point between the connecting sleeve and the support plate. The insertion point between the insertion rod and the support plate is provided with a spring-loaded component for resetting the insertion rod. The insertion rod is used to insert and fix the connecting sleeve.

[0013] An extrusion member is inserted into the top of the connecting sleeve, and the extrusion member is used for extruding and unlocking the insertion rod.

[0014] Preferably, the extrusion member comprises:

[0015] A handle, both ends of which are inserted and connected to the top of a connecting sleeve;

[0016] A squeeze protrusion is provided at one end of the handle near the insertion rod, and the squeeze protrusion is used to squeeze and unlock the insertion rod;

[0017] An elastic ring is fitted onto the other end of the handle and is used to prevent the handle from moving.

[0018] Preferably, one end of the insert rod that passes through the connecting sleeve is configured as a hemispherical shape, and the hemispherical end of the connecting sleeve is used to assist in the compression of the protrusion.

[0019] Preferably, the springback element includes:

[0020] A fixing ring is provided at the intersection of the insertion rod and the support plate and is sleeved on the outside of the insertion rod;

[0021] A compression spring, which is sleeved on the outside of the insertion rod and located on the side of the fixing ring near the connecting sleeve;

[0022] The movable ring is sleeved on the outside of the insertion rod and located at the end of the compression spring away from the fixed ring.

[0023] Preferably, the recoil assembly includes:

[0024] A high-pressure gas cylinder is disposed on the top side of the absorption cylinder;

[0025] Multiple backflush pipes are provided, with their ends inserted and connected to the top side of the absorption cylinder. The air inlet of each backflush pipe is fixedly connected to the output of the high-pressure gas tank.

[0026] A backflush nozzle is located at the bottom of the backflush pipe and within the inner cavity of the absorption cylinder. The backflush nozzle is used for backwashing dust from the filter cylinder.

[0027] Preferably, the feeding / discharging assembly includes:

[0028] An air intake pipe, the end of which is inserted and connected to the bottom side of the absorption cylinder;

[0029] An exhaust pipe, the end of which is inserted and connected to the top side of the absorption cylinder;

[0030] A flow guide jacket is disposed on the inner wall of the absorption cylinder and close to the air inlet pipe. The flow guide jacket is used to guide the flow of the air inlet.

[0031] Multiple intercepting filter plates are arranged around the interlayer of the flow guide jacket, and the intercepting filter plates are used for initial interception of dust.

[0032] The technical effects and advantages of this utility model are as follows:

[0033] This invention features a locking part at the intersection of the filter cartridge and the support plate, which connects and locks the filter cartridge and the support plate. Compared to the direct threaded connection between the filter cartridge and the support plate, this design utilizes the locking part to enable quick disassembly and replacement of the filter cartridge during filter cartridge maintenance and replacement, avoiding the time-consuming operation of rotating and disassembling multiple filter cartridges. Attached Figure Description

[0034] Figure 1 This is a schematic diagram of the overall structure of this utility model.

[0035] Figure 2 This is a cross-sectional view of the entire utility model.

[0036] Figure 3 This is a partial structural schematic diagram of the recoil assembly of this utility model.

[0037] Figure 4 This is a cross-sectional view of the locking part of this utility model.

[0038] Figure 5 This is a cross-sectional view of the connection between the absorption cylinder and the flow guide jacket of this utility model.

[0039] Figure 6 This is a schematic diagram of the flow guide jacket and interception filter plate of this utility model.

[0040] In the diagram: 1. Absorption cylinder; 101. Inlet pipe; 102. Outlet pipe; 2. Backflush pipe; 201. Backflush nozzle; 3. High-pressure gas tank; 4. Support plate; 5. Filter cylinder; 501. Connecting sleeve; 6. Guide jacket; 601. Interceptor filter plate; 7. Pull handle; 701. Elastic ring; 702. Extrusion protrusion; 8. Insert rod; 801. Fixed ring; 802. Compression spring; 803. Movable ring. Detailed Implementation

[0041] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0042] This utility model provides, for example Figure 1-6 As shown:

[0043] Example 1,

[0044] A filter for polysilicon production includes: an absorption cylinder 1, a filter assembly, and a backwash assembly;

[0045] Specifically, the absorption cylinder 1 is used for dust circulation. The outer side of the absorption cylinder 1 is equipped with inlet and outlet components. The top of the absorption cylinder 1 is equipped with a connecting flange. By unscrewing the bolts of the connecting flange, the top of the absorption cylinder 1 can be lifted to install and maintain the filter components. The bottom of the absorption cylinder 1 is openable to facilitate the cleaning of dust.

[0046] The filter assembly is used to trap dust in the gas, and the backflushing assembly is located on the top side of the absorption cylinder 1.

[0047] Specifically, the filter assembly includes a support plate 4 disposed on the inner wall of the absorption cylinder 1, and a plurality of filter cylinders 5 for blocking dust are inserted and connected to the top of the support plate 4. A locking part for fixing the filter cylinder 5 is provided at the insertion point between the filter cylinder 5 and the support plate 4.

[0048] It should be noted that the support plate 4 is fixed to the inner wall of the absorption cylinder 1 by welding. The filter cylinder 5 is made of polyester + ePTFE membrane filter material. The bottom of the filter cylinder 5 is closed. The top of the support plate 4 has a cylindrical hole for the filter cylinder 5 to pass through.

[0049] Specifically, the locking part includes: a connecting sleeve 501, a plug rod 8, and a pressing member;

[0050] It should be noted that the connecting sleeve 501 is glued to the top of the filter cylinder 5, the bottom of the connecting sleeve 501 is inserted into the top of the support plate 4, the end of the insertion rod 8 is inserted into the insertion point of the connecting sleeve 501 and the support plate 4, and a spring-loaded part is provided at the insertion point of the insertion rod 8 and the support plate 4 for the insertion rod 8 to reset. The insertion rod 8 is used to insert and fix the connecting sleeve 501, and the pressing part is inserted into the top of the connecting sleeve 501. The pressing part is used to press and unlock the insertion rod 8.

[0051] It should be noted that the inner wall of the cylindrical hole of the support plate 4 is provided with a cylindrical groove for the insertion of the rod 8, and the spring is set in the inner cavity of the cylindrical groove.

[0052] The extruded components include: a handle 7, an extrusion protrusion 702, and an elastic ring 701;

[0053] It should be noted that both ends of the handle 7 are inserted and connected to the top of the connecting sleeve 501. The handle 7 is made of stainless steel. One end of the insert rod 8 that is inserted into the connecting sleeve 501 is set as a hemispherical shape. The hemispherical end of the connecting sleeve 501 is used to assist in the compression of the extrusion protrusion 702. The top of the connecting sleeve 501 is provided with a cylindrical groove for the handle 7 to be inserted, and the side of the connecting sleeve 501 is provided with a cylindrical hole for the insert rod 8 to be inserted. The cylindrical hole and the cylindrical groove are interconnected.

[0054] The extrusion protrusion 702 is located at one end of the handle 7 near the insertion rod 8. The extrusion protrusion 702 is used for extrusion unlocking of the insertion rod 8. By extruding the extrusion protrusion 702, the insertion rod 8 is extruded and moved. At the same time, due to the hemispherical shape, during the upward movement of the connecting sleeve 501, the end of the insertion rod 8 is extruded from the cylindrical hole of the connecting sleeve 501.

[0055] Specifically, the elastic ring 701 is sleeved on the other end of the handle 7. The elastic ring 701 is used to prevent the handle 7 from moving. The other end of the handle 7 is provided with a protrusion, which restricts the position of the elastic ring 701. The elastic ring 701 is used to hinder the movement of the handle 7, so that the maximum wind speed thrust of the absorption cylinder 1 cannot drive the handle 7 to move.

[0056] The spring-loaded components include: a fixed ring 801, a compression spring 802, and a movable ring 803;

[0057] It should be noted that the fixing ring 801 is located at the intersection of the insertion rod 8 and the support plate 4 and is sleeved on the outside of the insertion rod 8; the compression spring 802 is sleeved on the outside of the insertion rod 8 and is located on the side of the fixing ring 801 close to the connecting sleeve 501; and the movable ring 803 is sleeved on the outside of the insertion rod 8 and is located at the end of the compression spring 802 away from the fixing ring 801.

[0058] Specifically, the fixed ring 801 is bonded and fixed to the inner wall of the columnar groove of the support plate 4. The insertion rod 8 can move in the middle of the fixed ring 801. The end of the insertion rod 8 away from the connecting sleeve 501 is provided with a protrusion, thereby restricting the insertion rod 8 from detaching from the fixed ring 801. The middle of the movable ring 803 is glued and fixed to the outer side of the insertion rod 8. The movable ring 803 can only move in the columnar groove and cannot detach from the fixed groove.

[0059] The feeding and discharging assembly includes: an air inlet pipe 101, a flow guide jacket 6, an air outlet pipe 102, and multiple intercepting filter plates 601;

[0060] It should be noted that the end of the air inlet pipe 101 is inserted and connected to the bottom side of the absorption cylinder 1, the end of the air outlet pipe 102 is inserted and connected to the top side of the absorption cylinder 1, the flow guide sleeve 6 is welded to the inner wall of the absorption cylinder 1 and close to the air inlet pipe 101, and multiple intercepting filter plates 601 are welded around the interlayer of the flow guide sleeve 6.

[0061] Specifically, the inlet pipe 101 and the absorption cylinder 1 are fixed by welding at their intersection, and the outlet pipe 102 and the absorption cylinder 1 are fixed by welding at their intersection. The guide jacket 6 is used to guide the airflow of the inlet. Multiple intercepting filter plates 601 are used to initially intercept dust, achieving tangential air intake of the inlet pipe 101. The airflow rotates along the outside of the guide jacket 6. The intercepting filter plates 601 can reduce airflow turbulence in the dust collector, causing some dust to impact and fall, thereby reducing the load on the filter cylinder 5.

[0062] Example 2,

[0063] A backflush component is used in the polysilicon production filter of Example 1;

[0064] Specifically, the backwash assembly is used to flush and remove dust from the surface of the filter cartridge 5;

[0065] The backflush assembly includes: a high-pressure gas tank 3, multiple backflush pipes 2 and a backflush nozzle 201;

[0066] Specifically, a high-pressure gas tank 3 is located on the top side of the absorption cylinder 1. The output end of the high-pressure gas tank 3 is a valve type, which can control the gas output of the high-pressure gas tank 3. The ends of multiple backwash pipes 2 are inserted and connected to the top side of the absorption cylinder 1. The air inlet end of the backwash pipe 2 is fixedly connected to the output end of the high-pressure gas tank 3. The backwash nozzle 201 is welded to the bottom of the backwash pipe 2 and located in the inner cavity of the absorption cylinder 1. The backwash nozzle 201 is aligned with the middle of the filter cylinder 5. The airflow impact is used to backwash the dust in the filter cylinder 5, so that the dust falls from the bottom of the absorption cylinder 1. The insertion point of the backwash pipe 2 and the absorption cylinder 1 is fixed by welding.

[0067] In actual use, a locking part is provided at the intersection of the filter cylinder 5 and the support plate 4. The filter cylinder 5 and the support plate 4 are connected and locked by the locking part. In the maintenance and replacement of the filter cylinder 5, compared with the direct threaded connection and fixation between the filter cylinder 5 and the support plate 4, this design uses the locking part to realize the quick disassembly and replacement of the filter cylinder 5, avoiding the time-consuming operation of rotating and disassembling multiple filter cylinders 5.

[0068] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A filter for polycrystalline silicon production, characterized in that, include: Absorption cylinder (1), the absorption cylinder (1) is used for dust circulation, and the outer side of the absorption cylinder (1) is provided with a feeding and discharging assembly; A filter assembly is used to trap dust in a gas. The filter assembly includes a support plate (4) disposed on the inner wall of the absorption cylinder (1). A plurality of filter cylinders (5) for blocking dust are inserted and connected to the top of the support plate (4). A locking part for fixing the filter cylinder (5) is provided at the insertion point between the filter cylinder (5) and the support plate (4). A backwash assembly is disposed on the top side of the absorption cylinder (1) and is used to flush and remove dust from the surface of the filter cylinder (5).

2. The filter for polycrystalline silicon production according to claim 1, characterized in that, The locking part includes: A connecting sleeve (501) is provided at the top of the filter cylinder (5), and the bottom of the connecting sleeve (501) is inserted and connected to the top of the support plate (4). Insert rod (8), the end of the insert rod (8) is inserted and connected to the insertion point of the connecting sleeve (501) and the support plate (4), and the insertion point of the insert rod (8) and the support plate (4) is provided with a spring-loaded part for the insertion and reset of the insert rod (8), and the insert rod (8) is used to insert and fix the connecting sleeve (501). An extrusion member is inserted into the top of the connecting sleeve (501) and is used for extrusion unlocking of the insertion rod (8).

3. A filter for polycrystalline silicon production according to claim 2, characterized in that, The extrusion component includes: A handle (7), both ends of which are inserted and connected to the top of a connecting sleeve (501); A squeeze protrusion (702) is provided at one end of the handle (7) near the insertion rod (8), and the squeeze protrusion (702) is used for squeezing and unlocking the insertion rod (8); An elastic ring (701) is sleeved on the other end of the handle (7) and is used to prevent the position of the handle (7) from moving.

4. A filter for polycrystalline silicon production according to claim 3, characterized in that, One end of the insert (8) that passes through the connecting sleeve (501) is set to be hemispherical, and the hemispherical end of the connecting sleeve (501) is used to assist in the compression of the extrusion protrusion (702).

5. A filter for polycrystalline silicon production according to claim 2, characterized in that, The spring-loaded component includes: A fixing ring (801) is provided at the intersection of the insertion rod (8) and the support plate (4) and is sleeved on the outside of the insertion rod (8); Compression spring (802), the compression spring (802) is sleeved on the outside of the insert (8) and located on the side of the fixing ring (801) near the connecting sleeve (501); The movable ring (803) is sleeved on the outside of the insert rod (8) and located at the end of the compression spring (802) away from the fixed ring (801).

6. A filter for polycrystalline silicon production according to claim 5, characterized in that, The recoil assembly includes: High-pressure gas tank (3), which is located on the top side of the absorption cylinder (1); Multiple backflush pipes (2) are inserted and connected at the ends of the multiple backflush pipes (2) to the top side of the absorption cylinder (1), and the air inlet end of the backflush pipe (2) is fixedly connected to the output end of the high-pressure gas tank (3). A backwash nozzle (201) is disposed at the bottom of the backwash pipe (2) and located in the inner cavity of the absorption cylinder (1). The backwash nozzle (201) is used for backwashing dust from the filter cylinder (5).

7. A filter for polycrystalline silicon production according to claim 1, characterized in that, The feeding / discharging assembly includes: An air inlet pipe (101) is inserted and connected at the end of the air inlet pipe (1) to the bottom side of the absorber cylinder (1); An exhaust pipe (102) is inserted and connected at its end to the top side of the absorption cylinder (1); A flow guide jacket (6) is disposed on the inner wall of the absorption cylinder (1) and close to the air inlet pipe (101). The flow guide jacket (6) is used to guide the flow of the air inlet. Multiple intercepting filter plates (601) are arranged around the interlayer of the flow guide jacket (6) for initial interception of dust.

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