Cleaning device for cleaning manipulator
By designing a cleaning device for robotic arms, which utilizes a movable door, a liquid spraying component, and a drying component to automatically clean the robotic arms, the problem of low wafer cleaning efficiency caused by robotic arm contamination is solved, achieving low-cost and high-efficiency cleaning results.
Patent Information
- Application Number
- CN202423302719.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-31
- Publication Date
- 2026-02-03
- Estimated Expiration
- 2034-12-31
AI Technical Summary
Robotic arms are easily contaminated during use, resulting in low wafer cleaning efficiency and high cost. Using multiple robotic arms increases costs and space requirements.
A cleaning device for cleaning robotic arms has been designed, including an openable and closable movable door, a liquid spraying component, and a drying component. The movable door seals the robotic arm in a cavity, and the liquid spraying component and the drying component are used to quickly rinse and dry the robotic arm. Waste liquid and waste gas are discharged through a gas-liquid discharge component, thus achieving automatic cleaning.
This enables low-cost and high-efficiency cleaning with robotic arms, reduces the risk of contamination of robotic arms, and improves the cleaning effect and production efficiency of wafers.
Smart Images
Figure CN223862379U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to a cleaning device, especially a cleaning device for cleaning a mechanical hand. BACKGROUND
[0002] In the technical field of semiconductor, wafers need to be transferred between cavities by robots during processing. However, when a single robot hand is used, pollution may be caused by the cavity environment or other factors. At this time, the robot hand may pollute the clean wafers when picking them up, thereby causing the cleaning efficiency of the wafers to fail to meet the requirements. If multiple robot hands are used to avoid cross-contamination, the cost will increase, and it is not easy to debug, occupies a large area, and brings many inconveniences to actual use. SUMMARY
[0003] The utility model aims at overcoming the defects of the prior art and provides a cleaning device for cleaning a mechanical hand, which is low in cost, easy to control, and effective in cleaning the mechanical hand.
[0004] To achieve the above-mentioned purpose, the utility model adopts the technical scheme of a cleaning device for cleaning a mechanical hand, which comprises:
[0005] The mechanical hand can move forward and backward and rotate.
[0006] The cavity has a movable door on one side, which can be opened and closed. When the movable door is opened, the mechanical hand moves through the movable door into the cavity. When the mechanical hand rotates to be perpendicular or inclined to the movable door, the movable door is closed to seal the mechanical hand inside the cavity.
[0007] The liquid spraying part and the drying part are angularly adjustable and arranged in the cavity to respectively spray and dry the mechanical hand entering from the movable door.
[0008] The gas-liquid discharge part is communicated with the bottom of the cavity to discharge the waste liquid and waste gas discharged by the liquid spraying part and the drying part.
[0009] In an embodiment, the movable door comprises two oppositely movable first and second movable doors arranged on the side wall of the cavity. The opposite sides of the first and second movable doors are respectively provided with grooves. When the first and second movable doors are closed, the two grooves form an insertion port matching the shape of the tail end of the mechanical hand in the perpendicular or inclined state.
[0010] In an embodiment, the insertion port is rectangular, and the insertion port matches the shape of the mechanical hand after being rotated by 90°.
[0011] In an embodiment, the liquid spraying component and the drying component are arranged in the cavity by a support and above the mechanical arm.
[0012] In an embodiment, the liquid spraying component is arranged at the front end of the support; the liquid spraying component is a spray head, and the circumferential surface of the spray head is provided with arc-shaped liquid spraying ports.
[0013] In an embodiment, the drying component is a wind knife, and the drying component is arranged above the mechanical arm by an inclined block and below the liquid spraying component.
[0014] In an embodiment, the gas-liquid discharge part comprises a discharge pipe communicated with the bottom of the cavity; the tail end of the discharge pipe is communicated with a gas-liquid separation box, and the gas-liquid separation box is provided with a liquid discharge port and a vacuum air suction and discharge port.
[0015] In an embodiment, the gas-liquid separation box is provided with a liquid level sensor.
[0016] In an embodiment, the discharge pipe is provided with a one-way air door above the gas-liquid separation box, so as to avoid that external particles flow into the inside of the cavity through the discharge pipe; the one-way air door comprises a one-way pipe communicated with the discharge pipe, the inner wall of the one-way pipe is provided with a stop block, and the right end of the stop block is provided with a rotation plate eccentrically rotating upward.
[0017] In an embodiment, one side of the cavity is further provided with a maintenance cover plate.
[0018] By using the above technical scheme, the utility model has the following advantages compared with the prior art:
[0019] The cleaning device for the mechanical arm is additionally provided with a movable door which is arranged on the side wall of the cavity and can be opened and closed; when the movable door is opened, the mechanical arm is moved into the cavity; when the mechanical arm is rotated and is perpendicular to or inclined to the movable door, the movable door is closed to seal the mechanical arm in the inside of the cavity; then the liquid spraying component and the drying component are used to successively perform rapid flushing and drying treatment on the mechanical arm of the inclined or vertical equipment; in this way, the water can flow down by gravity or be blown down by the drying component above, and the mechanical arm is easily dried, the cleaning effect of the mechanical arm is good, waste liquid and waste gas are discharged through the gas-liquid discharge part, the automatic cleaning of the mechanical arm is realized, the overall cost is low, the control is easy, and the actual use requirement is met. BRIEF DESCRIPTION OF DRAWINGS
[0020] The technical scheme of the utility model will be further described below with reference to the drawings:
[0021] Figure 1 It is a three-dimensional structure schematic view of one embodiment of the utility model;
[0022] Figure 2 is another use state of the structure diagram of the embodiment of the utility model; Figure 1 is another use state of the structure diagram of the embodiment of the utility model;
[0023] Figure 3 is the structure diagram of the embodiment of the utility model that the liquid spraying part and the drying part are connected;
[0024] Figure 4 is the structure diagram of the movable door in the embodiment of the utility model;
[0025] Figure 5 is another use state of the structure diagram of the embodiment of the utility model; Figure 2 is the structure diagram of the embodiment of the utility model that the mechanical hand and the gas-liquid discharge part are omitted;
[0026] Figure 6 is the cross-sectional view of the liquid spraying part in the embodiment of the utility model when working;
[0027] Figure 7 is the partial cross-sectional view of the drying part in the embodiment of the utility model when working;
[0028] Figure 8 is the use state diagram of the one-way air door in the embodiment of the utility model;
[0029] Figure 9 is another use state diagram of the one-way air door in the embodiment of the utility model;
[0030] 1, mechanical hand; 2, cavity; 3, movable door; 4, liquid spraying part; 5, drying part; 6, gas-liquid discharge part; 7, support; 8, maintenance cover plate; 30, first sliding door; 31, second sliding door; 32, groove; 33, insertion port; 40, spray head; 41, arc-shaped liquid spraying port; 50, inclined block; 60, discharge pipe; 61, gas-liquid separation box; 62, liquid discharge port; 63, vacuum suction and exhaust port; 64, liquid level sensor; 65, one-way air door; 650, one-way pipe; 651, stop block; 652, rotating plate. DETAILED DESCRIPTION
[0031] In order to make the personnel in the technical field better understand the scheme of the present application, the technical scheme in the embodiments of the present application will be described clearly and completely in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, not all. Based on the embodiments in the present application, all other embodiments obtained by the person skilled in the art without creative labor should belong to the scope of protection of the present application.
[0032] The utility model provides a kind of cleaning device for mechanical hand cleaning, to solve the cross contamination of wafer caused by the pollution of mechanical hand in prior art when using, cause wafer yield difference problem.
[0033] For the convenience of understanding, the specific process in the embodiments of the application is described below. Please refer to Figures 1-2 , a cleaning device for cleaning a mechanical hand in the embodiments of the application, comprising a mechanical hand 1, a cavity 2, a movable door 3, a liquid spraying component 4, a drying component 5 and a gas-liquid discharge part 6; the mechanical hand 1 can move forward and backward and rotate; the movable door 3 is provided on one side of the cavity 2 and can be opened and closed; the liquid spraying component 4 and the drying component 5 are provided in the cavity 1 and can be adjusted in angle, and are respectively used for liquid spraying and drying treatment of the mechanical hand entering from the movable door; the gas-liquid discharge part 6 is communicated with the bottom of the cavity 1 and is used for discharging waste liquid and waste gas discharged by the liquid spraying component 4 and the drying component 5.
[0034] The cleaning device for cleaning a mechanical hand of the utility model, when the movable door 3 is opened, the mechanical hand 1 moves to the cavity 1 through the movable door 3, when the mechanical hand 1 rotates and is perpendicular or inclined to the movable door 3, the movable door 3 closes and seals the mechanical hand 1 in the cavity 1, then the liquid spraying component 4 and the drying component 5 successively wash and dry the mechanical hand 1, and the waste liquid and waste gas are respectively discharged through the gas-liquid discharge part 6, so that the automatic cleaning of the mechanical hand 1 is realized, the operation is convenient, the overall cost is low, and the control is easy. When the mechanical hand 1 is in an inclined or vertical state, the water can flow down by gravity or be blown down by the drying component 5 above, which is easy to dry and ensures good cleaning effect of the mechanical hand 1.
[0035] As a further preferred embodiment of the utility model, please refer to Figure 1 、 Figure 2 、 Figure 4 and Figure 5 , the movable door 3 comprises a first movable door 30 and a second movable door 31 movably arranged on the side wall of the cavity 1, and recesses 32 are respectively arranged on the opposite sides of the first movable door 30 and the second movable door 31, when the first movable door 30 and the second movable door 31 are separated, the mechanical hand 1 can directly move into the cavity 1, when the first movable door 30 and the second movable door 31 are closed, an insertion opening 33 formed by the two recesses 32 is left between the first movable door 30 and the second movable door 31, and the insertion opening 33 is adapted to the shape of the mechanical hand 1 after rotation.
[0036] When the mechanical hand 1 enters the cavity 1, the mechanical hand 1 rotates, and the rotation is to enable the liquid spraying component 4 and the drying component 5 to effectively clean the mechanical hand 1, after rotation, the first movable door 30 and the second movable door 31 are closed after moving relative to each other, and the insertion opening 33 is adapted to the shape of the mechanical hand 1 after rotation, so that the mechanical hand can be relatively sealed in the cavity, which is convenient for subsequent cleaning and drying treatment.
[0037] Further, the insertion port 33 in the embodiment is rectangular, and when the mechanical arm 1 is rotated by 90 degrees counterclockwise or clockwise, the shape of the mechanical arm 1 facing the insertion port 33 is adapted to the shape of the insertion port 33, so that the mechanical arm 1 is vertically arranged in the cavity 1, and the cleaning effect is better. Of course, other angles can also be used, as long as the tail end of the mechanical arm 1 can be clamped in the insertion port 33.
[0038] As a further preferred embodiment of the utility model, referring to Figures 1-3 , the liquid spraying component 4 and the drying component 5 are arranged in the cavity 1 through the support 7 and above the mechanical arm 3. Of course, the liquid spraying component 4 and the drying component 5 can also be arranged below the mechanical arm 3, as long as efficient cleaning of the mechanical arm 1 can be achieved.
[0039] Further, the liquid spraying component 4 is arranged at the front end of the support 7. In the embodiment, the liquid spraying component 4 is a spray head 40, and arc-shaped liquid spraying openings 41 are formed on the circumferential surface of the spray head 40. The cleaning liquid can be uniformly and widely sprayed on the mechanical arm 1 through the arc-shaped liquid spraying openings 41 for cleaning, as shown in the accompanying drawings. Figure 6 In the embodiment, the spray head 40 sprays ultrapure water for cleaning the mechanical arm 1, and the direction of the spray head 40 can be adjusted.
[0040] As a further preferred embodiment of the utility model, referring to Figure 3 and Figure 7 , the drying component 5 is a wind knife, and the drying component 5 is arranged above the mechanical arm 1 through the inclined block 50 and below the liquid spraying component 4. In the embodiment, the drying component 5 is inclined to the outlet of the mechanical arm 1 due to the existence of the inclined block 50, so that the drying component 5 can widely and quickly and effectively blow and dry the clamping component of the mechanical arm 1. In the embodiment, the drying component is started after the liquid spraying component is finished, and the drying component uniformly sprays N2 gas to blow and dry the mechanical arm 1.
[0041] As a further preferred embodiment of the utility model, referring to Figure 1 and Figure 6 , the gas-liquid discharge part 6 comprises a discharge pipe 60 communicating with the bottom of the cavity 1. The tail end of the discharge pipe 60 communicates with a gas-liquid separation box 61, and the gas-liquid separation box has a liquid discharge opening 62 and a vacuum suction and exhaust opening 63. During operation, the ultrapure water sprayed by the spray head flows into the discharge pipe 60 due to gravity, flows into the gas-liquid separation box 61, and then flows out through the liquid discharge opening 62. After the spraying of the spray head 40 is finished, the N2 gas sprayed by the drying component enters the discharge pipe 60, and then enters the gas-liquid separation box 61 and is discharged through the vacuum suction and exhaust opening 63.
[0042] In addition, the gas-liquid separation box 61 is equipped with a liquid level sensor 64. When the drain port 62 is blocked, the liquid level rises and exceeds the set maximum liquid level. The liquid level sensor 64 will trigger an alarm to notify the staff to carry out technical handling.
[0043] As a further preferred embodiment of this utility model, see [reference needed]. Figures 6-9 The discharge pipe 60 has a one-way damper 65 located above the gas-liquid separation box 61. The one-way damper 65 includes a one-way pipe 650 communicating with the discharge pipe 60. A baffle 651 is provided on the upper part of the inner wall of the one-way pipe 650. A rotating plate 652 that rotates upward eccentrically is provided on the right end of the baffle 651.
[0044] like Figure 9 As shown, when external particles are about to enter the cavity 1 through the exhaust pipe 60, the flow direction is from left to right. The rotating plate 652 will rotate counterclockwise under the influence of the outside air. However, since the rotating plate 652 is eccentrically set, the upper end of the rotating plate 652 will be blocked by the stop block 651 when rotating counterclockwise. In this way, the rotating plate 652 cannot rotate, and the one-way pipe 650 is blocked, thereby effectively preventing external particles from flowing into the cavity 1 through the exhaust pipe 60.
[0045] like Figure 8 As shown, when the cavity 1 is draining or venting, the flow direction is from right to left. The rotating plate 652 is driven to rotate clockwise. At this time, the upper end of the rotating plate 652 will also rotate clockwise. Since there is no block 651 to block it, the rotating plate 652 can rotate clockwise, thereby opening the one-way tube 650 and realizing the circulation of internal to external discharge.
[0046] As a further preferred embodiment of this utility model, see [reference needed]. Figure 1 A maintenance port cover plate 8 is also provided on the left side of the cavity 1, which allows for convenient maintenance and replacement of relevant components inside the cavity 1.
[0047] The following is an example illustrating the specific workflow:
[0048] The movable door 3 opens automatically, and the robotic arm 1 automatically extends into the cavity 2. The robotic arm 1 rotates 90° on its own, and then the movable door 3 closes. At this time, the tail end of the robotic arm 1 is precisely locked in the insertion port 33 of the movable door 3.
[0049] The arc-shaped spray nozzle 41 on the nozzle 40 sprays ultrapure water evenly, and uses ultrapure water to clean the gripping part of the robot arm 1. After cleaning, the ultrapure water flows into the discharge pipe 60 due to gravity, then through the one-way damper 65, into the gas-liquid separation box 61, and finally the waste liquid flows out through the discharge port 62.
[0050] After the arc-shaped spray nozzle 41 finishes spraying, the drying component 5 evenly sprays N2 to dry the gripping part of the robotic arm 1. After drying, the N2 enters the discharge pipe 60, then passes through the one-way damper 65, flows into the gas-liquid separation box 61, and finally discharges the waste gas through the vacuum suction and exhaust port 63.
[0051] The above-described embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application.
Claims
1. A cleaning device for robotic arms, characterized in that, include: A robotic arm (1) capable of moving back and forth and rotating; The cavity (2) has an openable and closable movable door (3) on one side. When the movable door (3) is opened, the robotic arm (1) moves through the movable door (3) into the cavity (2). When the robotic arm (1) is rotated and is perpendicular or inclined to the movable door (3), the movable door (3) closes and seals the robotic arm (1) inside the cavity (2). The spraying component (4) and the drying component (5) are angle-adjustable and are installed in the cavity (2) to spray and rinse the robotic arm (1) that enters from the movable door (3) and blow it dry, respectively. The gas-liquid discharge section (6) is connected to the bottom of the cavity (2) and is used to discharge the waste liquid and waste gas sent out by the spraying component (4) and the drying component (5).
2. The cleaning device for cleaning robotic arms as described in claim 1, characterized in that: The movable door (3) includes two relatively movable first sliding door (30) and second sliding door (31) disposed on the side wall of the cavity (2). The first sliding door (30) and the second sliding door (31) are respectively provided with grooves (32) on opposite sides. When the first sliding door (30) and the second sliding door (31) are closed, the two grooves (32) form an insertion port (33) adapted to the tail shape of the robot arm (1) when it is in a vertical or inclined state.
3. The cleaning device for cleaning robotic arms as described in claim 2, characterized in that: The insertion port (33) is rectangular and is adapted to the shape of the robotic arm (1) after it has been rotated 90°.
4. The cleaning device for cleaning robotic arms as described in claim 1, characterized in that: The spraying component (4) and the drying component (5) are disposed in the cavity (2) by means of a bracket (7) and are located above the robotic arm (1).
5. The cleaning device for robotic arm cleaning as described in claim 4, characterized in that: The spraying component (4) is disposed at the front end of the bracket (7); the spraying component (4) is a nozzle (40), and an arc-shaped spray nozzle (41) is opened on the circumferential surface of the nozzle (40).
6. The cleaning device for cleaning robotic arms as described in claim 4, characterized in that: The drying component (5) is an air knife. The drying component (5) is inclined above the robot arm (1) and below the liquid spraying component (4) via an inclined block (50).
7. The cleaning device for cleaning robotic arms as described in claim 1, characterized in that: The gas-liquid discharge section (6) includes a discharge pipe (60) communicating with the bottom of the cavity (2); the tail end of the discharge pipe (60) is communicating with the gas-liquid separation box (61), and the gas-liquid separation box (61) has a liquid discharge port (62) and a vacuum suction and exhaust port (63).
8. The cleaning device for cleaning a robotic arm as described in claim 7, characterized in that: The gas-liquid separation box (61) has a liquid level sensor (64).
9. The cleaning device for cleaning a robotic arm as described in claim 7, characterized in that: The discharge pipe (60) has a one-way damper (65) located above the gas-liquid separation box (61) to prevent external particles from flowing into the cavity (2) through the discharge pipe (60); the one-way damper (65) includes a one-way pipe (650) communicating with the discharge pipe (60), and a baffle (651) is provided on the upper part of the inner wall of the one-way pipe (650), and a rotating plate (652) that rotates upward eccentrically is provided on the right end of the baffle (651).
10. The cleaning device for cleaning a robotic arm as described in claim 1, characterized in that: The cavity (2) is also provided with a maintenance port cover (8) on one side.