Purging dustproof device of high-temperature diffusion annealing furnace for tooth insertion suction cup
By designing a rectangular hollow shell dust-proof device and combining it with filter cotton, the problems of silicon wafer damage and dust generation during cleaning with toothpicks and suction cups were solved, achieving efficient cleaning and increased production capacity.
Patent Information
- Application Number
- CN202423249002.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-27
- Publication Date
- 2026-02-03
- Estimated Expiration
- 2034-12-27
AI Technical Summary
Existing technologies can easily cause silicon wafer chipping and contamination when removing dust from toothed inserts and suction cups. Furthermore, air gun cleaning can easily generate dust, resulting in substandard cleanliness in the workshop and affecting production capacity and product quality.
Design a rectangular hollow shell dust-proof blowing device with internal toothed inserts and suction cups for blowing. Combined with filter cotton, it absorbs dust. Through different blowing angles and air duct designs, it can achieve efficient cleaning of the toothed inserts and suction cups, reducing the risk of dust generation.
It achieves efficient cleaning of the tooth pick and suction cup, reduces silicon wafer damage and workshop contamination, and improves production capacity and workshop cleanliness.
Smart Images
Figure CN223862438U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application belongs to the technical field of annealing furnace dust prevention and collection, and particularly relates to a dust prevention and collection device for a high-temperature diffusion annealing furnace for toothed suction cups. BACKGROUND
[0002] A diffusion annealing furnace is an indispensable piece of equipment in the photovoltaic manufacturing field. In recent years, with the rapid development of the photovoltaic industry in China, the requirements for equipment capacity, workshop environment cleanliness and technology are becoming higher and higher. In the process of processing and producing crystalline silicon solar cells, there is a step in which an automatic suction cup manipulator takes out unprocessed silicon wafers and puts them into the slot of a quartz boat, fills the boat with 2880 silicon wafers, and uses a carbon paddle to send the boat into a quartz furnace tube. The furnace door is closed, the furnace tube is in a sealed state, the pressure in the quartz furnace tube is drawn to a certain pressure using a vacuum pump, the temperature is raised, and trichloroboron, oxygen and nitrogen are introduced for high-temperature reaction to form a PN junction. Then the temperature is lowered to a certain temperature, nitrogen is introduced to break the vacuum to normal pressure, the furnace door is opened, the boat is taken out using a carbon paddle, the process is completed, the mechanical hand puts the quartz boat loaded with processed silicon wafers onto a buffer rack for cooling. After cooling, the quartz boat is sent to the unloading area using a mechanical hand and a sliding table, and the unloading process begins. First, the toothed top tooth of the automatic toothed suction cup manipulator pushes out a part of the processed silicon wafers from the quartz boat, and then the automatic suction cup manipulator takes out the silicon wafers and puts them into a flower basket for transferring the silicon wafers to the next process. The automatic toothed top tooth and the automatic suction cup are prone to contain silicon wafer debris and dust, and the toothed suction cup needs to be in contact with the silicon wafers frequently, which can easily cause the silicon wafers to crack and be contaminated. At this time, regular maintenance of the toothed suction cup is required. The common methods are as follows: the first method is to use a narrow ruler and a brush to remove the debris and dust in the gaps of the 60 toothed top teeth and suction cups. This method takes a long time, delays production capacity, and is easy to break the toothed suction cup. The second method is to use an air gun to blow the toothed suction cup. This method takes a short time and is not easy to damage the toothed suction cup. However, the air gun blowing is easy to cause dust, resulting in a substandard workshop cleanliness, leading to product degradation or even scrap. CONTENT OF THE UTILITY MODEL
[0003] In order to solve the above problems, the present application provides a kind of high-temperature diffusion annealing furnace blowing dustproof device for tooth insert suction disc, the inside of blowing dustproof device is equipped with tooth insert and suction disc, the blowing dustproof device is rectangular hollow shell, the left and right sides of the shell are equipped with tooth insert blowing port and suction disc blowing port respectively, the middle part of the front and rear sides of shell is vertically equipped with filter cotton installation slot, the tooth insert blowing port and suction disc blowing port are vertically symmetrical and arranged on the upper and lower sides of the left and right sides of shell respectively, the suction disc blowing port is L-shaped double-sided blowing port, the inside of the top opening of suction disc blowing port is vertically vertically equipped with suction disc, the other side of the top opening of suction disc blowing port is longitudinally equipped with tooth insert installation slot, the inside of the tooth insert installation slot is vertically vertically equipped with tooth insert, the middle part between the top surface of tooth insert installation slot and suction disc blowing port is longitudinally equipped with filter cotton, the both ends of filter cotton are through and equipped on the both ends of filter cotton installation slot, the both ends of filter cotton are fixed by bolt and connected with the both sides of filter cotton installation slot in Z shape, by the blowing dustproof device of box shell, tooth insert and suction disc can be blown by one device, and the dust blown out can be absorbed by filter cotton, and the different blowing angles of tooth insert and suction disc can be achieved by placing tooth insert and suction disc in different forms, so as to ensure the blowing effect, and different blowing ports are arranged on the both sides of shell, so as to realize the air duct through the both sides, ensure one in and one out, improve the dust adsorption effect.
[0004] The outer contour shape of tooth insert is rectangular plate, the bottom of tooth insert is fixedly equipped with tooth insert mounting seat, tooth insert is inserted into the inside of tooth insert installation slot from bottom to top through tooth insert mounting seat, the adjacent outside of shell on the top of tooth slot is equipped with tooth insert blowing port, the plate type tooth insert is inserted into the inside of shell from bottom to top, and the tooth insert is blown and cleaned from top to bottom through the tooth insert blowing port above, so as to ensure that dust can be fully retained in the lower part of shell, and realize efficient tooth insert cleaning effect.
[0005] The outer contour shape of suction disc is F-shaped plate, the bottom of suction disc is fixedly equipped with suction disc mounting seat, suction disc is inserted into the inside of top surface of suction disc blowing port from top to bottom through suction disc mounting seat, the adjacent outside of shell on the bottom of suction disc is adjacent to the side of suction disc blowing port, the transverse protrusion of suction disc is arranged on the inside below shell in the form of suction disc being inverted from top to bottom, and suction head blowing port is also arranged above, which can stably and efficiently clean the protrusion of suction disc from top to bottom, ensure the cleaning effect of suction disc and reduce the dust range of cleaning.
[0006] The filter cotton mounting slot is a vertical rectangular groove, and its outline is the same as the cross-sectional outline of the filter cotton. The two filter cotton mounting slots on the front and rear sides of the housing are axially symmetrically provided with filter cotton locking holes on the left and right sides. The filter cotton locking holes are threaded holes, and the filter cotton locking holes are connected by bolts passing through the filter cotton for locking. The filter cotton mounting slots longitudinally divide the interior of the housing, thereby enabling the toothed insert and suction cup to be blown. The two ends of the filter cotton are fixed by Z-shaped bolts, thereby ensuring the overall stability of the filter cotton installation and ensuring that the filter cotton remains taut during the blower blowing process, thus improving the blowing effect.
[0007] The filter cotton is a high-absorption HPA filter cotton, and it is also a ventilated filter cotton. The toothed insert blow-out port and the suction cup blow-out port are connected by airflow through the filter cotton. The high-absorption HPA filter cotton can not only effectively absorb the blown-out dust, but also achieve mutual airflow between the two sides of the surface. This effectively directs the airflow through the blow-out ports on both sides, keeping the dust on the filter cotton. This prevents air circulation inside the sealed shell from causing excessive dust generation inside, increasing the dust absorption effect on the filter cotton and reducing the cleaning frequency inside the shell.
[0008] Beneficial effects:
[0009] By using a box-type housing with a dust-blowing device, it is possible to blow away both the dental inserts and suction cups with a single device. The dust blown out is absorbed by the filter cotton. The different arrangements of the dental inserts and suction cups at the top and bottom allow for different blowing angles based on their different shapes, thus ensuring the blowing effect. Furthermore, different blowing ports are set on both sides of the housing to achieve a through-flow air duct, ensuring one inlet and one outlet, thereby improving the dust adsorption effect.
[0010] By inserting the plate-shaped dental insert into the housing from bottom to top, and then blowing it clean from top to bottom through the dental insert blowing port above, dust is effectively retained inside the lower part of the housing, achieving a highly efficient dental insert cleaning effect.
[0011] By inverting the F-type suction cup from top to bottom, placing the lateral protrusion of the suction cup on the lower inner side of the housing, and placing the suction head's blowing port above it, the suction cup's protrusion can be cleaned stably and efficiently from top to bottom, preventing dust from being stirred up. This ensures the cleaning effect of the suction cup while reducing the dust stirring range.
[0012] The internal structure of the housing is divided vertically by the filter cotton installation groove, which allows the toothed insert and suction cup to be blown. The two ends of the filter cotton are fixed with Z-shaped bolts, which ensures the overall stability of the filter cotton installation and keeps the filter cotton taut during the blower blowing process, thereby improving the blowing effect.
[0013] The high-absorption HPA filter cotton not only effectively absorbs the blown-out dust, but also allows for air circulation between the two sides. This effectively directs airflow through the blow-out ports on both sides, keeping the dust on the filter cotton. This prevents air circulation inside the sealed housing, which would otherwise generate excessive dust inside. This increases the dust absorption effect on the filter cotton and reduces the frequency of cleaning inside the housing. Attached Figure Description
[0014] Figure 1 This is a schematic diagram of the blow-off side of a blow-off dustproof device for a high-temperature diffusion annealing furnace used for dental insert suction cups;
[0015] Figure 2 This is a schematic diagram of the suction cup blowing side of a dust removal device for a high-temperature diffusion annealing furnace used for dental suction cups;
[0016] Figure 3 This is a schematic diagram of the housing assembly of a dust-proof device for a high-temperature diffusion annealing furnace used for dental insert suction cups;
[0017] Figure 4 This is a schematic diagram of the casing of a dust-prevention and purging device for a high-temperature diffusion annealing furnace used for dental insert suction cups;
[0018] Figure 5 This is a schematic diagram showing the position of the dental insert suction cup in the purging and dust prevention device of a high-temperature diffusion annealing furnace for dental insert suction cups;
[0019] In the diagram: 1. Housing; 2. Dental insert purge port; 3. Suction cup purge port; 4. Filter cotton mounting slot; 5. Filter cotton locking hole; 6. Dental insert mounting groove; 7. Dental insert; 8. Dental insert mounting base; 9. Suction cup; 10. Suction cup mounting base; 11. Filter cotton. Detailed Implementation
[0020] To enhance understanding of this utility model, the present utility model will be further described in detail below with reference to the embodiments and accompanying drawings. These embodiments are only used to explain the present utility model and do not constitute a limitation on the scope of protection of the present utility model.
[0021] 1. Housing; 2. Dental insert purge port; 3. Suction cup purge port; 4. Filter cotton mounting slot; 5. Filter cotton locking hole; 6. Dental insert mounting groove; 7. Dental insert; 8. Dental insert mounting base; 9. Suction cup mounting base; 10. Filter cotton.
[0022] like Figure 1 ,2 As shown in Figures 3, 4, and 5;
[0023] A dust-prevention and cleaning device for a high-temperature diffusion annealing furnace using a dental insert suction cup is disclosed. The device contains a dental insert 7 and a suction cup 9. The device is a rectangular hollow shell 1. A dental insert blowing port 2 and a suction cup blowing port 3 are respectively located on the left and right sides of the shell 1. A filter cotton mounting slot 4 is vertically located in the middle of the front and rear sides of the shell 1. The dental insert blowing port 2 and the suction cup blowing port 3 are symmetrically arranged on the upper and lower sides of the left and right sides of the shell 1. The suction cup blowing port 3 is an L-shaped, double-sided blowing port. The suction cup 9 is vertically mounted inside the top opening of the suction cup blowing port 3. A dental insert mounting groove 6 is vertically mounted on the other side of the top opening of the suction cup blowing port 3. A dental insert 7 is vertically mounted inside the dental insert mounting groove 6. A filter cotton 11 is vertically mounted in the middle between the dental insert mounting groove 6 and the top surface of the suction cup blowing port 3. The filter cotton 11 is inserted through both ends and located on the outer sides of both ends of the filter cotton mounting slot 4. The two ends of the filter cotton 11 are Z-shaped and fixed to the sides of the filter cotton mounting slot 4 by bolts. The dental insert 7 has a rectangular outer shape and a fixed dental insert mounting base 8 at its bottom. The dental insert 7 is inserted into the dental insert mounting slot 6 from bottom to top through the dental insert mounting base 8. A dental insert blowing port 2 is located on the outer side of the shell 1 at the top of the slot. The suction cup 9 has an F-shaped outer shape and a fixed suction cup mounting base 10 at its bottom. The suction cup 9 is inserted upside down into the top surface of the suction cup blowing port 3 through the suction cup mounting base 10. The outer side of the shell 1 at the bottom of the suction cup 9 is adjacent to the side of the suction cup blowing port 3. Adjacent to each other, the filter cotton mounting slot 4 is a vertical rectangular groove. The outline shape of the filter cotton mounting slot 4 is the same as the cross-sectional outline shape of the filter cotton. The two filter cotton mounting slots on the front and rear sides of the housing 1 are axially symmetrically provided with filter cotton locking holes 5. The filter cotton locking holes 5 are threaded holes. The filter cotton locking holes 5 are connected by bolts through the filter cotton 11. The filter cotton 11 is a high-dust suction type HPA filter cotton. The filter cotton 11 is a ventilated filter cotton. The toothed insert blowing port 2 and the suction cup blowing port 3 are connected by air through the filter cotton 11.
[0024] Implementation example;
[0025] When installing the toothed insert 7 for purging, first prepare a filter cotton 11 of suitable size. Insert the filter cotton 11 into the housing 1 through the filter cotton 11 installation slot 4. Secure the excess part of the filter cotton 11 on both sides with bolts. Then align the toothed insert installation slot 6 of the housing 1 with the toothed insert 7. Insert the toothed insert 7 into the housing 1 from top to bottom. When installing the toothed insert 7, be careful not to let the bottom of the housing 1 hit the toothed insert 7 to avoid damage. After the toothed insert 7 is installed, the bottom of the housing 1 is supported by the toothed insert installation seat 8. Just hold the housing 1 steady and do not shake it from side to side. Then hold the air gun and connect it to nitrogen. Aim the air gun at the pressure groove inside the toothed insert purging port 2 of the housing 1 and purge each toothed insert 7 inside. After purging, take out the housing 1 from bottom to top, remove the filter cotton 11 and discard it. Clean the debris inside the device for the next use.
[0026] When installing the suction cup 9 for purging, first prepare a filter cotton 11 of suitable size. Insert the filter cotton 11 into the housing 1 through the filter cotton 11 installation slot 4. Secure the excess filter cotton 11 on both sides with bolts. Then, align the top surface of the suction cup purging port 3 of the housing 1 with the suction cup 9 and install the housing 1 onto the suction cup 9 from bottom to top. When installing the suction cup 9, be careful not to let the top of the device hit the suction cup 9 to avoid damage. After installing the suction cup 9 on the housing 1, support the bottom of the housing 1 with your hand. Then, hold the air gun and connect it to nitrogen. Use the air gun to purge each suction cup 9 on the side of the suction cup purging port 3 of the housing 1. After purging, remove the housing 1 from top to bottom. After purging, remove the filter cotton 11 and discard it. Clean the debris inside the device for future use.
[0027] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.
Claims
1. A dust-prevention and cleaning device for a high-temperature diffusion annealing furnace using a dental insert suction cup, wherein the dust-prevention and cleaning device contains a dental insert and a suction cup, characterized in that, The dust-proof blowing device is a rectangular hollow shell. The left and right sides of the shell are respectively provided with a toothed insert blowing port and a suction cup blowing port. A filter cotton mounting slot is vertically provided in the middle of the front and rear sides of the shell. The toothed insert blowing port and the suction cup blowing port are symmetrically arranged on the upper and lower sides of the left and right sides of the shell. The suction cup blowing port is an L-shaped double-sided blowing port. A suction cup is vertically provided on the inner side of the top opening of the suction cup blowing port. A toothed insert mounting groove is vertically provided on the other side of the top opening of the suction cup blowing port. A toothed insert is vertically provided inside the toothed insert mounting groove. Filter cotton is vertically provided in the middle between the top surfaces of the toothed insert mounting groove and the suction cup blowing port. The two ends of the filter cotton are provided through the outer sides of the two ends of the filter cotton mounting slot. The two ends of the filter cotton are connected to the two sides of the filter cotton mounting slot in a Z-shape by bolts.
2. The dust-prevention and purging device for a high-temperature diffusion annealing furnace for dental suction cups according to claim 1, characterized in that, The outer contour of the dental insert is a rectangular plate. The bottom of the dental insert is fixedly provided with a dental insert mounting seat. The dental insert is inserted into the dental insert mounting slot from bottom to top through the dental insert mounting seat. The outer side of the shell at the top of the dental slot is provided with a dental insert blowing port.
3. The dust-prevention and purging device for a high-temperature diffusion annealing furnace for dental insert suction cups according to claim 1, characterized in that, The suction cup has an F-shaped outer contour and a fixed suction cup mounting base at the bottom. The suction cup is inserted into the top surface of the suction cup blowing port from top to bottom through the suction cup mounting base. The outer side of the bottom shell of the suction cup is adjacent to the side of the suction cup blowing port.
4. The dust-prevention and purging device for a high-temperature diffusion annealing furnace for dental suction cups according to claim 1, characterized in that, The filter cotton mounting slot is a vertical rectangular groove. The outline of the filter cotton mounting slot is the same as the cross-sectional outline of the filter cotton. The two filter cotton mounting slots on the front and rear sides of the housing are axially symmetrically provided with filter cotton locking holes. The filter cotton locking holes are threaded holes, and the filter cotton locking holes are connected by bolts that pass through the filter cotton for locking.
5. The dust-prevention and purging device for a high-temperature diffusion annealing furnace for dental insert suction cups according to claim 1, characterized in that, The filter cotton is a high-absorption HPA filter cotton, and the filter cotton is a ventilated filter cotton. The toothed insert blow port and the suction cup blow port are connected by airflow through the filter cotton.