Wafer handheld visual inspection device
By employing a guide structure and elastic element-driven clamping assembly design in the handheld wafer inspection device, the problem of poor movement when clamping and releasing wafers in the prior art has been solved, achieving higher operational reliability and wafer safety.
Patent Information
- Application Number
- CN202520547827.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-26
- Publication Date
- 2026-02-03
- Estimated Expiration
- 2035-03-26
AI Technical Summary
Existing handheld visual inspection devices suffer from poor movement when clamping and releasing wafers, which can easily damage the wafers.
A handheld wafer inspection device was designed, which uses a clamping assembly with a guide structure and elastic elements. The linear movement of the clamping assembly is achieved by guide posts and linear bearings to avoid jamming, and the movement of the clamping assembly is driven by elastic elements to ensure smooth movement.
This enables smooth movement of the clamping components when clamping and releasing wafers, reducing the probability of wafer damage and improving operational reliability and safety.
Smart Images
Figure CN223863651U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor manufacturing technology, specifically to a handheld visual inspection device for wafers. Background Technology
[0002] A wafer is a silicon wafer used to fabricate silicon semiconductor circuits; its raw material is silicon. High-purity polycrystalline silicon is dissolved, doped with silicon crystal seeds, and then slowly pulled out to form a cylindrical single-crystal silicon ingot. After grinding, polishing, and slicing, the silicon crystal ingot is formed into a silicon wafer, or crystal.
[0003] When visually inspecting wafers for defects, the semiconductor industry prohibits human contact with the wafers; therefore, handheld inspection devices are used to hold the wafers for inspection. However, existing handheld inspection devices suffer from poor movement when clamping and releasing the wafers, which can easily damage them. Utility Model Content
[0004] The technical problem to be solved by this utility model is to provide a handheld wafer inspection device with smooth movement when clamping and releasing wafers.
[0005] To achieve the above objectives, the technical solution adopted by this utility model is as follows:
[0006] A handheld wafer inspection device includes a handle assembly, a clamping arm connected to one end of the handle assembly, and a clamping assembly for clamping a wafer. The clamping arms are respectively disposed on opposite sides of the handle assembly, and a receiving space for accommodating the wafer is formed between the clamping arms on both sides. Each clamping arm includes an arm body connected to the handle assembly at one end and a base fixedly disposed at the other end of the arm body. The clamping assemblies are respectively disposed on the inner side of the base on the corresponding side, and each clamping assembly on each side is capable of moving relative to the base towards and away from the receiving space.
[0007] A guide structure is provided between the clamping assembly and the base. The guide structure includes a guide post fixedly disposed on one of the clamping assembly and the base, and a linear bearing disposed on the other. The linear bearing is sleeved on the outside of the guide post and cooperates with the guide post.
[0008] The handheld wafer inspection device also includes a lever for driving the clamping assembly to move away from the accommodating space, and the lever is fixedly mounted on the clamping assembly on each side.
[0009] The handheld wafer inspection device also includes an elastic element for driving the clamping assembly to move toward the accommodating space. One end of the elastic element is disposed on the part of the clamping assembly and the base on which the guide post is disposed, and the other end is disposed on the linear bearing.
[0010] In some embodiments, the arm body and the seat body are separately disposed, and the material density of the seat body is less than the material density of the arm body.
[0011] In some embodiments, the arm body is made of aluminum alloy and the seat is made of POM material.
[0012] In some embodiments, a first tenon is provided at one end of the arm body, and a first mortise is provided on the handle assembly. The first tenon is inserted into the first mortise, and the first tenon and the first mortise are subjected to an interference fit or a transition fit.
[0013] In some embodiments, the first tenon includes a first segment and a second segment sequentially connected to the first segment, wherein opposite sides of the second segment extend obliquely from the intersection with the first segment in a direction away from the first segment and outward from the first tenon.
[0014] In some embodiments, the handle assembly includes a handle base and a handle rod disposed on the handle base. The handle base includes a base and a cover. The cover has a first slot on the side facing the base that mates with the first segment. The base has a second slot on the side facing the cover that mates with the second segment. The base and the cover are fixedly connected. The first slot and the second slot are opposite to each other to form a first mortise.
[0015] In some embodiments, a second tenon is provided at the other end of the arm body, and a second mortise is provided on the base body. The second tenon is inserted into the second mortise, and the second tenon and the second mortise are subjected to an interference fit or a transition fit.
[0016] In some embodiments, the handle assembly includes a handle base and a handle rod disposed on the handle base, the handle rod being detachably disposed on the handle base, and the material density of the handle rod being less than the material density of the handle base.
[0017] In some embodiments, the handle base is made of aluminum alloy and the handle bar is made of POM material.
[0018] In some embodiments, the clamping assembly includes a clamping seat and clamping wheels fixedly disposed at both ends of the clamping seat, each clamping wheel having a groove recessed inward from the wheel surface to clamp the wafer.
[0019] Due to the application of the above technical solution, this utility model has the following advantages compared with the prior art: In the wafer handheld visual inspection device of this utility model, when clamping the wafer, the clamping component moves towards the receiving space relative to the base, and when releasing the wafer, the clamping component moves away from the receiving space relative to the base. When the clamping component moves relative to the base, the guide post moves linearly along the linear bearing. This can avoid the guide post from deviating and getting stuck during the movement, and can also reduce the friction force when the clamping component moves, thereby ensuring that the clamping component moves smoothly when clamping and releasing the wafer, and reducing the probability of wafer damage. Attached Figure Description
[0020] Appendix Figure 1 This is a three-dimensional schematic diagram of the handheld wafer inspection device in this embodiment;
[0021] Appendix Figure 2 This is an exploded view of the handheld wafer inspection device in this embodiment;
[0022] Appendix Figure 3 This is an exploded view of the connection between the arm body and the handle base in the handheld wafer inspection device of this embodiment.
[0023] Appendix Figure 4 This is an exploded view of the handle assembly in the handheld wafer inspection device of this embodiment;
[0024] Appendix Figure 5 This is a schematic projection of the clamping components and the base portion in the handheld wafer inspection device of this embodiment;
[0025] Appendix Figure 6 For the appendix Figure 5 Schematic diagram of cross section along line AA.
[0026] The components include: 1. Handle assembly; 11. Handle seat; 111. Base; 1111. Second slot; 112. Cover; 1121. First slot; 12. Handle rod; 2. Clamping arm; 21. Arm body; 211. First tenon; 2111. First section; 2112. Second section; 22. Seat; 221. Second mortise; 3. Clamping assembly; 31. Clamping seat; 32. Clamping wheel; 41. Guide post; 42. Linear bearing; 5. Pull rod; 6. Elastic element; 800. Wafer. Detailed Implementation
[0027] To make the above-mentioned objects, features, and advantages of this utility model more apparent and understandable, the present utility model will be described in detail below with reference to the accompanying drawings and specific embodiments. Many specific details are set forth in the following description to provide a full understanding of the present utility model. However, the present utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of the present utility model. Therefore, the present utility model is not limited to the specific embodiments disclosed below.
[0028] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.
[0029] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.
[0030] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.
[0031] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.
[0032] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.
[0033] like Figure 1 and Figure 2 As shown, the wafer handheld visual inspection device of this utility model includes a handle assembly 1, a clamping arm 2, and a clamping assembly 3.
[0034] like Figure 1 , Figure 2 and Figure 4 As shown, the handle assembly 1 includes a handle base 11 and a handle rod 12 disposed on the handle base 11.
[0035] Preferably, the handle 12 is detachably mounted on the handle base 11, so that handles 12 of different diameters can be replaced according to different user needs, which is in line with ergonomic design.
[0036] The material density of the handle rod 12 is less than that of the handle base 11. This reduces the overall weight of the device and meets the operator's requirements for prolonged use. The handle base 11 can be made of aluminum alloy, and the handle rod 12 can be made of POM material.
[0037] The clamping arms 2 are respectively disposed on opposite sides of the handle assembly 1, and one end of each clamping arm 2 is fixedly connected to the handle assembly 1. After the clamping arms 2 on both sides are fixedly connected to the handle assembly 1, a U-shaped structure is formed between the clamping arms 2 on both sides. The opening of the U-shaped structure between the clamping arms 2 on both sides forms an accommodating space for accommodating the wafer 800. The handle assembly 1 is located at the bottom end of the U-shaped structure and is located outside the accommodating space formed by the opening of the U-shaped structure.
[0038] like Figure 1 and Figure 2 As shown, each clamping arm 2 includes an arm body 21 and a seat 22. One end of the arm body 21 is fixedly connected to the handle seat 11, and the seat 22 is fixedly disposed at the other end of the arm body 21.
[0039] The arm body 21 and the base 22 are separate components, with the base 22 having a lower material density than the arm body 21. This reduces the overall weight of the device, meeting the operator's requirements for extended use and conforming to ergonomic design. The arm body 21 can be made of aluminum alloy, and the base 22 can be made of POM material.
[0040] The connection method between the arm body 21 and the handle base 11 is as follows:
[0041] like Figure 2 and Figure 3 As shown, a first tenon 211 is provided at one end of the arm body 21, and a first mortise is provided on the handle assembly 1. The first tenon 211 is inserted into the first mortise, and the first tenon 211 and the first mortise adopt an interference fit or a transition fit.
[0042] The first tenon 211 includes a first segment 2111 and a second segment 2112 sequentially connected to the first segment 2111. The opposite sides of the second segment 2112 extend obliquely from the intersection with the first segment 2111 in a direction away from the first segment 2111 and outward from the first tenon 211. The first mortise is adapted to the first tenon 211. This arrangement ensures that the connection between the clamping arm 2 and the handle assembly 1 will not loosen after prolonged use of the wafer handheld visual inspection device, reducing the risk of wafer 800 falling off.
[0043] In this embodiment, the handle base 11 includes a base 111 and a cover 112. The cover 112 has a first slot 1121 on the side facing the base 111 that mates with the first segment 2111. The base 111 has a second slot 1111 on the side facing the cover 112 that mates with the second segment 2112. The base 111 and the cover 12 are fixedly connected, and the first slot 1121 and the second slot 1111 form a first mortise. This design ensures a reliable connection between the clamping arm 2 and the handle assembly 1, and simplifies the manufacturing process.
[0044] The connection between the arm body 21 and the base 22 is as follows: a second tenon is provided at the other end of the arm body 21, and a second mortise 221 is provided on the base 22. The second tenon is inserted into the second mortise 221, and the second tenon and the second mortise 221 adopt an interference fit or a transition fit to ensure that the connection between the arm body 21 and the base 22 will not become loose, which can reduce the risk of wafer 800 falling off.
[0045] Clamping components 3 are used to clamp the wafer 800. Each clamping component 3 is disposed on the inner side of the corresponding base 22, and each clamping component 3 is movable relative to the base 22 in a direction approaching or moving away from the receiving space. When clamping the wafer 800, both clamping components 3 move relative to the base 22 towards the receiving space. When releasing the wafer 800, both clamping components 3 move relative to the base 22 away from the receiving space.
[0046] like Figure 1 , Figure 2 and Figure 6As shown, the clamping assembly 3 includes a clamping base 31 and clamping wheels 32 fixedly disposed at both ends of the clamping base 31. Each clamping wheel 32 is provided with a slot recessed inward from the wheel surface to clamp the wafer 800. The slots on the clamping wheels 32 can limit and protect the wafer 800, improve the reliability of the clamping assembly 3 in clamping the wafer 800, and prevent the wafer 800 from falling off during the pick-up and inspection process. Moreover, the clamping wheels 32 are fixedly disposed relative to the clamping base 31 to avoid unstable positioning and rolling of the wafer 800 in the slots, making the wafer 800 less likely to fall off and reducing the breakage rate of the wafer 800.
[0047] In this embodiment, the seat 22 has a receiving cavity, and the clamping seat 31 is disposed in the receiving cavity of the seat 22 and can be slidably disposed in the receiving cavity of the seat 22.
[0048] A guide structure is provided between the clamping base 31 and the base 22 to guide the movement of the clamping component 3, so as to avoid the clamping component 3 from deviating and getting stuck during the movement, thus making the movement of the clamping component 3 smooth.
[0049] like Figure 5 and Figure 6 As shown, the guiding structure includes a guide post 41 fixedly mounted on one of the clamping base 31 and the base 22, and a linear bearing 42 mounted on the other. The linear bearing 42 is sleeved on the outside of the guide post 41 and cooperates with the guide post 41. During the movement of the clamping assembly 3, the cooperation between the guide post 41 and the linear bearing 42 not only guides the movement of the clamping assembly 3, but also allows the guide post 41 to move linearly along the linear bearing 42. This prevents the guide post 41 from deviating during movement and causing jamming in the movement of the clamping assembly 3. It also reduces the friction during the movement of the clamping assembly 3, making the movement of the clamping assembly 3 smoother when clamping and releasing the wafer 800, thereby reducing the probability of damage to the wafer 800.
[0050] In this embodiment, the guide post 41 is fixedly mounted on the clamping seat 31, and the seat body 22 is provided with a through hole that matches the guide post 41. When the clamping assembly 3 moves away from the accommodating space, the guide post 41 can pass through the through hole on the seat body 22 to the outside of the seat body 22.
[0051] The preferred guide structures are respectively set on the opposite sides of the clamping seat 31 and the seat body 22.
[0052] The handheld wafer inspection device also includes a pull rod 5, which is used to drive the clamping assembly 3 to move away from the receiving space to release the wafer 800. The pull rod 5 is fixedly mounted on the clamping base 31 on each side. The pull rod 5 can be driven manually or by a drive mechanism such as a cylinder.
[0053] The handheld wafer inspection device also includes an elastic element 6. The elastic force of the elastic element 6 is used to drive the clamping assembly 3 to move towards the receiving space to clamp the wafer 800. One end of the elastic element 6 is disposed on the component in both the clamping base 31 and the base 22 where the guide post 41 is disposed, and the other end is disposed on the linear bearing 42. In this embodiment, two sets of elastic elements 6 are provided corresponding to the guide structure. When the clamping assembly 3 moves away from the receiving space under the action of the pull rod 5, the elastic element 6 is compressed and undergoes elastic deformation. After the pull rod 5 is released, the clamping assembly 3 moves towards the receiving space automatically under the elastic force of the elastic element 6.
[0054] The operation method of this handheld wafer inspection device is as follows:
[0055] (1) When it is necessary to clamp the wafer 800 for inspection, firstly, by operating the pull rods 5 on both sides, the clamping components 3 on both sides are moved a certain distance away from the accommodating space, and then the wafer 800 is placed between the clamping components 3 on both sides.
[0056] (2) Remove the force acting on the pull rods 5 on both sides. Under the elastic force of the elastic element 6, the clamping components 3 on both sides automatically move towards the accommodating space, so that the clamping wheels 32 on both sides are respectively locked on the opposite sides of the wafer 800. In this way, the wafer 800 is clamped in the wafer handheld visual inspection device, and the wafer 800 can be inspected.
[0057] (3) After the inspection is completed, operate the pull rods 5 on both sides again to move the clamping components 3 on both sides a certain distance away from the accommodating space, so that the wafer 800 can be removed from the wafer handheld visual inspection device.
[0058] The above embodiments are only for illustrating the technical concept and features of this utility model, and are intended to enable those skilled in the art to understand the content of this utility model and implement it accordingly. They should not be construed as limiting the scope of protection of this utility model. All equivalent changes or modifications made in accordance with the spirit and essence of this utility model should be included within the scope of protection of this utility model.
Claims
1. A handheld visual inspection device for wafers, characterized in that: The device includes a handle assembly, a clamping arm connected to the handle assembly at one end, and a clamping assembly for clamping a wafer. The clamping arms are respectively disposed on opposite sides of the handle assembly, and a receiving space for accommodating the wafer is formed between the clamping arms on both sides. Each clamping arm includes an arm body connected to the handle assembly at one end and a base fixedly disposed at the other end of the arm body. The clamping assemblies are respectively disposed on the inner side of the base on the corresponding side, and each clamping assembly on each side is capable of moving relative to the base towards and away from the receiving space. A guide structure is provided between the clamping assembly and the base. The guide structure includes a guide post fixedly disposed on one of the clamping assembly and the base, and a linear bearing disposed on the other. The linear bearing is sleeved on the outside of the guide post and cooperates with the guide post. The handheld wafer inspection device also includes a lever for driving the clamping assembly to move away from the accommodating space, and the lever is fixedly mounted on the clamping assembly on each side. The handheld wafer inspection device also includes an elastic element for driving the clamping assembly to move toward the accommodating space. One end of the elastic element is disposed on the part of the clamping assembly and the base on which the guide post is disposed, and the other end is disposed on the linear bearing.
2. The handheld wafer inspection device according to claim 1, characterized in that: The arm body and the base are separate components, and the material density of the base is less than that of the arm body.
3. The handheld wafer inspection device according to claim 2, characterized in that: The arm body is made of aluminum alloy, and the base is made of POM material.
4. The handheld wafer inspection device according to claim 1, characterized in that: One end of the arm body is provided with a first tenon, and the handle assembly is provided with a first mortise. The first tenon is inserted into the first mortise, and the first tenon and the first mortise are subjected to an interference fit or a transition fit.
5. The handheld wafer inspection device according to claim 4, characterized in that: The first tenon includes a first segment and a second segment sequentially connected to the first segment. The opposite sides of the second segment extend obliquely from the intersection with the first segment in a direction away from the first segment and outward from the first tenon.
6. The handheld wafer inspection device according to claim 5, characterized in that: The handle assembly includes a handle base and a handle rod disposed on the handle base. The handle base includes a base and a cover. The cover has a first slot on the side facing the base that mates with the first segment. The base has a second slot on the side facing the cover that mates with the second segment. The base and the cover are fixedly connected. The first slot and the second slot are opposite to each other to form the first mortise.
7. The handheld wafer inspection device according to claim 1, characterized in that: The other end of the arm body is provided with a second tenon, and the base is provided with a second mortise. The second tenon is inserted into the second mortise, and the second tenon and the second mortise are fitted with an interference fit or a transition fit.
8. The handheld wafer inspection device according to claim 1, characterized in that: The handle assembly includes a handle base and a handle rod disposed on the handle base. The handle rod is detachably disposed on the handle base, and the material density of the handle rod is less than that of the handle base.
9. The handheld wafer inspection device according to claim 8, characterized in that: The handle base is made of aluminum alloy, and the handle rod is made of POM material.
10. The handheld wafer inspection device according to claim 1, characterized in that: The clamping assembly includes a clamping base and clamping wheels fixedly disposed at both ends of the clamping base. Each clamping wheel is provided with a slot that is recessed inward from the wheel surface to clamp the wafer.