Alignment platform and electromechanical equipment

Abstract

The embodiment of the utility model provides an alignment platform and electromechanical equipment. The alignment platform and the electromechanical equipment are used for ensuring that two parts can be accurately aligned in machining, assembling or inspection. The first platform and the second platform are driven by a first driving device to move relatively in the first direction through a first rolling guide assembly, and the first rolling guide assembly comprises two sets of first sliding guide parts in rolling fit with the first rolling fit parts. The second platform and the third platform are driven by a second driving device to move relatively in the second direction through a second rolling guide assembly, and the second rolling guide assembly comprises two sets of second sliding guide parts in rolling fit with the second rolling fit parts. Through the arrangement, on one hand, the structure of the guiding device is optimized, compared with sliding guiding, rolling guiding can reduce power consumption, improve mechanical efficiency and facilitate maintenance and starting, on the other hand, the number and layout of the sliding guiding devices are optimized, deformation and vibration in the working process are reduced, and the alignment precision and working quality of electromechanical equipment are improved.

Description

Technical Field

[0001] This utility model relates to the field of linear motors, and in particular to a positioning platform and electromechanical equipment. Background Technology

[0002] Currently, with the rapid development of technologies in fields such as semiconductors and optics, the technical requirements for precision alignment platforms in these fields are constantly increasing. This not only reflects the high performance requirements of the alignment platform in terms of positioning accuracy and sensitivity, but also puts forward requirements for the low failure rate of the alignment platform.

[0003] In related technologies, alignment platforms are prone to deformation and vibration when subjected to large loads or high-speed movements, which affects alignment accuracy and production quality, and is not conducive to the long-term stable operation of the equipment. Utility Model Content

[0004] In view of the above problems, this utility model proposes a positioning platform and electromechanical equipment, aiming to provide a positioning platform with better mobility and smoothness, which is conducive to the long-term stable operation of the positioning platform when subjected to large loads or high-speed movement.

[0005] Firstly, this utility model proposes an alignment platform, comprising:

[0006] A first platform, a second platform, a third platform, a first rolling guide assembly, a second rolling guide assembly, a first drive device, and a second drive device;

[0007] At least one adapter is provided on the side of the first platform away from the second platform. The adapter is used to support or connect the target component.

[0008] The second platform is disposed between the first platform and the third platform, and the second platform is slidably connected to the first platform through the first rolling guide component, so that the first platform can move relative to the second platform in the first direction under the drive of the first driving device;

[0009] The second platform is slidably connected to the third platform through the second rolling guide component, so that the second platform can move relative to the third platform in the second direction under the drive of the second drive device, so as to synchronously drive the first platform to move relative to the third platform in the second direction, the second direction being perpendicular to the first direction;

[0010] The first rolling guide component is disposed in one of the first target platforms, and the other of the first target platforms has a first rolling adapter portion that is rollingly adapted to the first rolling guide component. The first target platform includes a first platform and a second platform. The first rolling guide component includes at least two sets of first sliding guide members, which are respectively located on opposite sides of the first target platform in a second direction. Each set of first sliding guide members has at least two first rolling contact portions, which are respectively located on opposite sides of the first sliding guide member in the second direction. The first sliding guide member is rollingly adapted to the first rolling adapter portion in the first direction through the at least two first rolling contact portions.

[0011] And / or, a second rolling guide component is disposed in one of the second target platforms, and the other of the second target platforms forms a second rolling adaptation portion that is rollingly adapted to the second rolling guide component. The second target platform includes a second platform and a third platform. Furthermore, the second rolling guide component includes at least two sets of second sliding guide members, the two sets of second sliding guide members being located on opposite sides of the second target platform in a first direction. Each set of second sliding guide members forms at least two second rolling contact portions, the at least two second rolling contact portions being located on opposite sides of the second sliding guide member in the first direction. The second sliding guide member is rollingly adapted to the second rolling adaptation portion in the second direction through the at least two second rolling contact portions.

[0012] In one embodiment, the first sliding guide component includes at least two first rolling guide modules arranged in a second direction;

[0013] Each first rolling guide module includes a first body and a plurality of first rolling elements. The first body forms a first rolling loop with a first notch. The plurality of first rolling elements are disposed in the first rolling loop and can be exposed in the first rolling loop through the first notch, so that the first rolling guide module forms a first rolling contact portion.

[0014] Furthermore, during the relative displacement between the first platform and the second platform, at least a portion of the first rolling elements roll relative to the first body.

[0015] In one embodiment, the first target platform is provided with a first limiting structure, which is adapted to the first body to limit the first body in at least a first direction and a second direction.

[0016] In one embodiment, the second sliding guide component includes at least two second rolling guide modules arranged in a first direction;

[0017] Each second rolling guide module includes a second body and a plurality of second rolling elements. The second body forms a second rolling loop with a second notch. The plurality of second rolling elements are disposed in the second rolling loop and can be exposed in the second rolling loop through the second notch portion, so that the second rolling guide module forms a second rolling contact portion.

[0018] Furthermore, during the relative displacement between the second platform and the third platform, at least a portion of the multiple second rolling elements roll relative to the second body.

[0019] In one embodiment, the second target platform is provided with a second limiting structure, which is adapted to the second body to limit the second body at least in the first and second directions.

[0020] In one embodiment, a first driving device is disposed on a first target platform and located between two sets of first sliding guide components. The first driving device includes a first stator and a first mover. The first stator is disposed on one of the first platform and the second platform, and the first mover corresponds to the first stator being disposed on the other of the first platform and the second platform.

[0021] And / or,

[0022] The second drive device is disposed on the second target platform and located between the two sets of second sliding guide components. The second drive device includes a second stator and a second mover. The second stator is disposed on one of the second platform and the third platform, and the second mover corresponds to the second stator being disposed on the other of the second platform and the third platform.

[0023] In one embodiment, one of the first platform and the second platform has a first limiting stroke groove on its periphery along a first direction, and the other of the first platform and the second platform has a first limiting member corresponding to the first limiting stroke groove. The first limiting member and the first limiting stroke groove form a limiting fit and can limit the maximum stroke of the first platform and the second platform in the first direction.

[0024] And / or,

[0025] One of the second platform and the third platform has a second limiting stroke groove on its periphery along the first direction. The other of the second platform and the third platform has a second limiting member corresponding to the second limiting stroke groove. The second limiting member and the second limiting stroke groove form a limiting fit and can limit the maximum stroke of the second platform and the third platform in the second direction.

[0026] In one embodiment, one of the first platform and the second platform has a third limiting stroke groove formed on both sides or one side along the first direction in the second direction, and the other of the first platform and the second platform is provided with a third limiting member corresponding to the third limiting stroke groove, wherein the third limiting member and the third limiting stroke groove form a limiting fit, and can limit the maximum stroke of the first platform and the second platform in the first direction; and / or,

[0027] One of the second platform and the third platform has a fourth limiting stroke groove on both sides or one side of the second direction along the first direction. The other of the second platform and the third platform is provided with a fourth limiting member corresponding to the fourth limiting stroke groove. The fourth limiting member and the fourth limiting stroke groove form a limiting fit and can limit the maximum stroke of the second platform and the third platform in the second direction.

[0028] In one embodiment, the second platform has an oil injection hole for introducing lubricant into the first rolling guide assembly and the second rolling guide assembly.

[0029] Secondly, this utility model also proposes an electromechanical device, including any of the alignment platforms provided in the embodiments of this application.

[0030] This utility model provides an alignment platform in which a first platform and a second platform move relative to each other along a first direction under the drive of a first driving device via a first rolling guide assembly. The first rolling guide assembly includes two sets of first sliding guide components that are rolled to fit the first rolling adapter. The second platform and a third platform move relative to each other along a second direction under the drive of a second driving device via a second rolling guide assembly. The second rolling guide assembly includes two sets of second sliding guide components that are rolled to fit the second rolling adapter.

[0031] This design optimizes the structure of the guiding device by using rolling guides instead of sliding guides, reducing power loss and improving mechanical efficiency, and facilitating maintenance and startup. On the other hand, it optimizes the number and layout of sliding guide devices, reducing deformation and vibration during operation, and improving the alignment accuracy and working quality of electromechanical equipment. Attached Figure Description

[0032] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0033] Figure 1 This is a three-dimensional structural schematic diagram of the alignment platform provided in one or more embodiments of this application;

[0034] Figure 2 This is a first-view exploded view of the alignment platform provided in one or more embodiments of this application;

[0035] Figure 3 This is a second-view exploded view of the alignment platform provided in one or more embodiments of this application;

[0036] Figure 4 This is a three-dimensional structural schematic diagram of the first target platform provided in one or more embodiments of this application;

[0037] Figure 5 This is a three-dimensional structural schematic diagram of the second target platform provided in one or more embodiments of this application;

[0038] Figure 6 This is a three-dimensional structural diagram of the first sliding guide component and the second sliding guide component provided in one or more embodiments of this application;

[0039] Figure 7 This is a three-dimensional structural diagram of the first rolling guide module and the second rolling guide module provided in one or more embodiments of this application;

[0040] Figure 8 This is a cross-sectional structural schematic diagram of the first rolling guide module and the second rolling guide module provided in one or more embodiments of this application;

[0041] Figure 9 This is a partially enlarged schematic diagram of the first limiting mechanism provided in one or more embodiments of this application;

[0042] Figure 10 This is a partially enlarged schematic diagram of the second limiting mechanism provided in one or more embodiments of this application;

[0043] Figure 11 This is a three-dimensional structural diagram of a first platform and a second platform forming a limiting adaptation, and a second platform and a third platform forming a limiting adaptation, provided in one or more embodiments of this application;

[0044] Figure 12 This is a schematic block diagram of a module of an electromechanical device provided in one or more embodiments of this application.

[0045] Explanation of reference numerals in the attached figures:

[0046] 100 - Alignment platform; 200 - Electromechanical equipment; 300 - Grabbing equipment;

[0047] 10-First platform; 11-First limit travel groove; 12-First rolling adapter; 13-Third limit component; 14-Adapter position;

[0048] 20-Second platform; 21-First limiting structure; 22-Second limiting structure; 23-First limiting component; 24-Second limiting component; 25-Third limiting stroke groove; 26-Fourth limiting stroke groove; 27-Oil filling hole;

[0049] 30 - Third platform; 31 - Second limit travel groove; 32 - Second rolling adapter; 33 - Fourth limit component;

[0050] 40 - First drive unit; 41 - First mover; 42 - First stator;

[0051] 50 - Second drive unit; 51 - Second mover; 52 - Second stator;

[0052] 60 - First rolling guide assembly; 61 - First sliding guide component; 62 - First rolling guide module; 621 - First body; 622 - First rolling element; 623 - First notch; 624 - First rolling loop; 625 - First rolling contact portion;

[0053] 70 - Second rolling guide assembly; 71 - Second sliding guide component; 72 - Second rolling guide module; 721 - First body; 722 - Second rolling element; 723 - Second notch; 724 - Second rolling loop; 725 - Second rolling contact portion;

[0054] The realization of the objective, functional features and advantages of the present invention will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0055] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0056] In the description of this application, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0057] It is understood that descriptions involving "first," "second," etc., are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features.

[0058] The following detailed description of some embodiments of this application is provided in conjunction with the accompanying drawings. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0059] Please see Figures 1 to 3 , Figure 1 This is a three-dimensional structural diagram of the alignment platform provided in one or more embodiments of this application. Figure 2 This is a first-view exploded view of the alignment platform provided in one or more embodiments of this application. Figure 3 An exploded view of the alignment platform provided in one or more embodiments for application purposes.

[0060] like Figures 1 to 3 As shown, the alignment platform 1000 includes a first platform 10, a second platform 20, a third platform 30, a first drive device 40 and a second drive device 50, a first rolling guide assembly 60 and a second rolling guide assembly 70.

[0061] Specifically, the second platform 20 is disposed between the first platform 20 and the third platform 30. The first driving device 40 is configured to drive the first platform 10 to move relative to the second platform 20 in a first direction, and the second driving device 50 is configured to drive the second platform 20 to move relative to the third platform 30 in a second direction, so that the first platform 10 moves relative to the third platform 30 in the second direction. The second direction and the first direction are set at an angle, which includes but is not limited to 90 degrees.

[0062] As one embodiment, the first direction and the second direction are perpendicular to each other. For example, the first direction is the X direction shown in the figure, and the second direction is the Y direction shown in the figure.

[0063] Specifically, the second platform 20 is slidably connected to the first platform 10 via the first rolling guide component 60, so that the first platform 10 can move relative to the second platform 20 in a first direction under the drive of the first driving device 40. Furthermore, the second platform 20 is slidably connected to the third platform 30 via the second rolling guide component 70, so that the second platform 20 can move relative to the third platform 30 in a second direction under the drive of the second driving device 50, thereby synchronously driving the first platform 10 to move relative to the third platform 30 in a second direction.

[0064] In some embodiments, a first rolling guide component 60 is disposed in one of the first target platforms, and the other of the first target platforms has a first rolling adapter portion 12 that is rollingly adapted to the first rolling guide component 60. The first target platform includes a first platform 10 and a second platform 20. Furthermore, the first rolling guide component 60 includes at least two sets of first sliding guide members 61, which are respectively located on opposite sides of the first target platform in a second direction. Each set of first sliding guide members 61 has at least two first rolling contact portions 625, which are respectively located on opposite sides of the first sliding guide member 61 in the second direction. The first sliding guide member 61 is rollingly adapted to the first rolling adapter portion 12 in the first direction through the at least two first rolling contact portions 625.

[0065] In some embodiments, the first rolling adapter 12 is a guide rail that acts during the relative movement of the first platform 10 and the second platform 20, and is disposed on the end face between the first platform 10 or the second platform 20 along a first direction. The number of first rolling adapters 12 can be set according to requirements. As one embodiment, the first rolling adapter 12 can be provided with four guide rails, arranged at opposite ends of the first platform 10 or the second platform 20 along a second direction. This arrangement improves the smoothness and alignment accuracy of the relative movement of the first platform 10 and the second platform 20 in the first direction.

[0066] For example, taking the first rolling guide component 60 disposed on the second platform 20 and the first rolling adapter 12 disposed on the first platform 10 as an example, under the drive of the first driving device 40, the second platform 20 is slidably connected to the first rolling adapter 12 of the first platform 10 through the first rolling guide component 60.

[0067] It is understood that the first scroll guide component 60 can also be set on the first platform 10, and the first scroll adapter 12 can be set on the second platform 20.

[0068] In some embodiments, the second rolling guide component 70 is disposed in one of the second target platforms, and the other of the second target platforms has a second rolling adapter portion 32 that is rollingly adapted to the second rolling guide component 70. The second target platform includes a second platform 20 and a third platform 30. Furthermore, the second rolling guide component 70 includes at least two sets of second sliding guide members 71, which are respectively located on opposite sides of the second target platform in a first direction. Each set of second sliding guide members 71 has at least two second rolling contact portions 725, which are respectively located on opposite sides of the second sliding guide member 71 in the first direction. The second sliding guide member 71 is rollingly adapted to the second rolling adapter portion 32 in the second direction through the at least two second rolling contact portions 725.

[0069] In some embodiments, the second rolling adapter 32 is a guide rail that acts during the relative movement of the second platform 20 and the third platform 30, and extends through the sides of both ends of the second platform 20 or the third platform 30 along the first direction. The number of second rolling adapters 32 can be set according to requirements. As one embodiment, four guide rails can be provided for the second rolling adapter 32, arranged at both ends in the second direction. This arrangement improves the smoothness and alignment accuracy of the relative movement of the second platform 20 and the third platform 30 in the second direction.

[0070] For example, taking the second rolling guide component 70 disposed on the second platform 20 and the second rolling adapter 32 disposed on the third platform 30 as an example, under the drive of the second driving device 50, the second platform 20 is slidably connected to the second rolling adapter 32 of the third platform 30 through the second rolling guide component 70.

[0071] It is understood that the second scroll guide component 70 can also be set on the third platform 30, and the second scroll adapter 32 can be set on the second platform 20.

[0072] In some embodiments, at least one adapter position 14 is provided on the side of the first platform 10 away from the second platform 20. The adapter position 14 is used to support or connect a target component. For example, the first platform 10 has a snap-fit ​​structure or a threaded structure at the adapter position 14, and forms a detachable connection with the target component through the snap-fit ​​structure or the threaded structure. As one embodiment, the first platform 10 forms a detachable connection with the target component through the threaded structure at the adapter position 14, making the disassembly connection between the adapter position 14 and the target component more convenient. The target component includes, but is not limited to, a load, or a relay for connecting a load.

[0073] Specifically, when the adapter 14 carries or connects the target component, the first platform 10 can be moved relative to the second platform 20 in the first direction by the first driving device 40 to adjust the position of the target component in the first direction. The first platform 10 and the second platform 20 can be moved relative to the third platform 30 in the second direction by the second driving device 50 to adjust the position of the target component in the second direction, thereby achieving flexible alignment in two-dimensional space.

[0074] This configuration, on the one hand, improves the stability and smoothness of relative movement between platforms by utilizing the rolling cooperation between the guide components and the rolling adapter. On the other hand, it optimizes the number and layout of the sliding guide devices, increases the rigidity of the alignment platform 100 and reduces deformation and vibration during operation, thereby improving the alignment accuracy and working quality of the electromechanical equipment. Furthermore, the layout of the sliding guide devices makes the alignment platform 100 more compact while achieving precise alignment.

[0075] In some embodiments, the first drive device 40 is disposed on the first target platform and located between two sets of first sliding guide members 61, wherein the first drive device 40 includes a first stator 42 and a first mover 41, the first stator 42 being disposed on one of the first platform 10 and the second platform 20, and the first mover 41 corresponding to the first stator 42 being disposed on the other of the first platform 10 and the second platform 20.

[0076] Specifically, the first stator 42 and the first mover 41 form a linear engagement in the first direction. For example, the first stator 42 and the first mover 41 are the mover and stator of a linear motor.

[0077] As one embodiment, the first stator 42 is disposed on the second platform 20, and the first mover 41 is disposed on the first platform 10. When at least one of the first stator 42 and the first mover 41 is driven by a driving current, the first stator 42 drives the first mover 41 to move relative to the first stator 42 in a first direction, thereby causing the first platform 10 and the second platform 20 to move relative to each other in the first direction.

[0078] In another embodiment, a first stator 42 is disposed on a first platform 10, and a first mover 41 is disposed on a second platform 20. When a driving current is input to at least one of the first stator 42 and the first mover 41, the first stator 42 drives the first mover 41 to move relative to the first stator 42 in a first direction, thereby causing the first platform 10 and the second platform 20 to move relative to each other in the first direction. For example, the first mover 41 is provided with a coil, and the first stator 42 is provided with a magnetic component. When a driving current is input to the coil of the first mover 41, the first mover 41 can be displaced relative to the first stator 42 in a preset direction.

[0079] In some embodiments, the second drive device 50 is disposed on the second target platform and located between two sets of second sliding guide members 71, wherein the second drive device 50 includes a second stator 52 and a second mover 51, the second stator 52 being disposed on one of the second platform 20 and the third platform 30, and the second mover 51 corresponding to the second stator 52 being disposed on the other of the second platform 20 and the third platform 30.

[0080] Specifically, the second stator 52 and the second mover 51 form a linear engagement in the second direction. For example, the second stator 52 and the second mover 51 are the mover and stator of a linear motor.

[0081] As one embodiment, the second stator 52 is disposed on the second platform 20, and the second mover 51 is disposed on the first platform 10. When a driving current is input to at least one of the second stator 52 and the second mover 51, the second stator 52 drives the mover to move relative to each other in the second direction, thereby causing the second platform 20 and the third platform 30 to move relative to each other in the second direction.

[0082] In another embodiment, a second stator 52 is disposed on a first platform 10, and a second mover 51 is disposed on a second platform 20. When a driving current is input to at least one of the second stator 52 and the second mover 51, the second stator 52 drives the mover to move relative to each other in a second direction, thereby causing the second platform 20 and the third platform 30 to move relative to each other in the second direction. For example, the second mover 51 is provided with a coil, and the second stator 52 is provided with a magnetic component. When a driving current is input to the coil of the second mover 51, the second mover 51 can be displaced relative to the second stator 52 in a predetermined direction.

[0083] This configuration not only makes the positional relationship between the drive device and the guide components more reasonable, but also makes the structure of the alignment platform 100 more compact. On the other hand, it makes the drive process smoother and more stable, reducing deformation and vibration during operation.

[0084] Please see Figure 4 and Figure 5 , Figure 4 This is a three-dimensional structural diagram of the first target platform provided in one or more embodiments of this application. Figure 5 This is a three-dimensional structural diagram of the second target platform provided in one or more embodiments of this application.

[0085] like Figure 4 and Figure 5 As shown, in some embodiments, the first target platform is provided with a first limiting stroke groove 11 and a first limiting member 23. One of the first platform 10 and the second platform 20 is provided with the first limiting stroke groove 11 on the periphery of the platform along a first direction. The other of the first platform 10 and the second platform 20 is provided with the first limiting stroke groove 11 corresponding to the first limiting stroke groove 11. The first limiting member 23 and the first limiting stroke groove 11 form a limiting fit and can limit the maximum stroke of the first platform 10 and the second platform 20 in the first direction.

[0086] In one embodiment, the first platform 10 has a first limiting travel groove 11 formed on its periphery along a first direction, and the first limiting travel groove 11 has an opening formed in the first direction of the first platform 10. The second platform 20 is provided with a first limiting member 23 corresponding to the first limiting travel groove 11. Specifically, the first limiting travel groove 11 extends along the first direction, the first limiting member 23 can move relative to the first platform 10 in the first limiting travel groove 11 along the first direction, and the side of the first limiting travel groove 11 away from the opening is configured to limit the movement range of the first limiting member 23 in the first limiting travel groove 11.

[0087] In another embodiment, the second platform 20 has a first limiting travel groove 11 formed on its periphery along a first direction, and the first limiting travel groove 11 has an opening formed in the first direction of the first platform 10. The first platform 10 is provided with a first limiting member 23 corresponding to the first limiting travel groove 11. Specifically, the first limiting travel groove 11 extends along the first direction, the first limiting member 23 can move relative to the first platform 20 in the first limiting travel groove 11 along the first direction, and the side of the first limiting travel groove 11 away from the opening is configured to limit the range of movement of the first limiting member 23 in the first limiting travel groove 11.

[0088] In some embodiments, the second target platform is provided with a second limiting stroke groove 31 and a second limiting member 24. One of the second platform 20 and the third platform 30 has a second limiting stroke groove 31 opened on the periphery of the platform along a first direction, and the other of the second platform 20 and the third platform 30 is provided with a second limiting member 24 corresponding to the second limiting stroke groove 31. The second limiting member 24 and the second limiting stroke groove 31 form a limiting fit, and can limit the maximum stroke of the second platform 20 and the third platform 30 in the second direction.

[0089] In one embodiment, the third platform 30 has a second limiting travel groove 31 formed on its periphery along the second direction, and the second limiting travel groove 31 penetrates the side of the third platform 30 closest to it in the second direction. The second platform 20 is provided with a second limiting member 24 corresponding to the second limiting travel groove 31. Specifically, the second limiting travel groove 31 extends along the second direction, and the second limiting member 24 can move relative to the third platform 30 in the second limiting travel groove 31 along the first direction. The side of the second limiting travel groove 31 away from the groove opening is configured to limit the movement range of the second limiting member 24 in the second limiting travel groove 31.

[0090] In another embodiment, the second platform 20 has a second limiting travel groove 31 formed on its periphery along a second direction, and the second limiting travel groove 31 penetrates the side of the second platform 20 closest to it in the second direction. The third platform 30 is provided with a second limiting member 24 corresponding to the second limiting travel groove 31. Specifically, the second limiting travel groove 31 extends along the second direction, and the second limiting member 24 can move relative to the second platform along a first direction in the second limiting travel groove 31. The side of the second limiting travel groove 31 away from the groove opening is configured to limit the movement range of the second limiting member 24 in the second limiting travel groove 31.

[0091] This configuration ensures that the displacement distance in the first and second directions is fixed. Furthermore, by positioning the first limit stroke groove 11 and the first limit member 23, and the second limit stroke groove 31 and the second limit member 24 close to the side of the alignment platform 100, if a fault occurs between the limit structures, it can be observed and repaired through the first limit stroke groove 11 and the second limit stroke groove 31 that penetrate the side, thus improving the maintenance convenience of the alignment platform 100.

[0092] In some embodiments, the second platform 20 is provided with an oil injection hole 27 for introducing lubricant into the first rolling guide assembly 60 and the second rolling guide assembly 70.

[0093] Specifically, the second platform 20 has two oil injection holes 27 on one side along the second direction. The positioning platform 100 is also provided with a pipeline. For example, the pipeline is provided in at least one of the first, second, and third pipelines. When the second platform is provided with a pipeline, the oil injection holes 27 are connected to the first rolling contact part 625 and the second rolling contact part 725 through the pipeline in the second platform. It can be understood that the oil injection holes 27 can also be provided on one side of the second platform 20 along the second direction.

[0094] With this configuration, lubricant can be introduced into the first rolling contact portion 625 and the second rolling contact portion 725 through the oil injection hole 27, thereby increasing the smoothness of the relative movement of the alignment platform 100 in the first and second directions and improving the alignment accuracy.

[0095] Please see Figures 6 to 8 , Figure 6 A three-dimensional structural diagram of the first sliding guide component and the second sliding guide component provided in one or more embodiments of this application. Figure 7 A three-dimensional structural diagram of a first rolling guide module and a second rolling guide module provided in one or more embodiments of this application. Figure 8 A cross-sectional view of a first rolling guide module and a second rolling guide module provided in one or more embodiments of this application.

[0096] like Figures 6 to 8As shown, the first sliding guide component 61 includes at least two first rolling guide modules 62. Each first rolling guide module 62 includes a first body 621, a first rolling element 62, and a first rolling contact portion 625. The first body 621 includes a first notch 623 and a first rolling loop 624.

[0097] The second sliding guide component 71 includes at least two second rolling guide modules 72. Each second rolling guide module 72 includes a second body 721, a second rolling element 722, and a second rolling contact portion 725. The second body 721 includes a second notch 723 and a second rolling loop 724.

[0098] In some embodiments, the first sliding guide component 61 includes two first rolling guide modules 62 arranged in a second direction. Each first rolling guide module 62 includes a first body 621 and a plurality of first rolling elements 62. The first body 621 forms a first rolling loop 624 with a first notch 623. The plurality of first rolling elements 62 are disposed in the first rolling loop 624 and roll in contact with the first rolling loop 624, and are partially exposed outside the first rolling loop 624 through the first notch 623, so that the first rolling guide module 62 forms a first rolling contact portion 625. Furthermore, during the relative displacement of the first platform 10 and the second platform 20, at least a portion of the plurality of first rolling elements 62 rolls relative to the first body 621 and the first rolling adapter portion 12.

[0099] In some embodiments, the second sliding guide component 71 includes two second rolling guide modules 72 arranged in a first direction. Each second rolling guide module 72 includes a second body 721 and a plurality of second rolling elements 722. The second body 721 forms a second rolling loop 724 with a second notch 723. The plurality of second rolling elements 722 are disposed in the second rolling loop 724 and roll in contact with the second rolling loop 724, and are partially exposed in the second rolling loop 724 through the second notch 723, so that the second rolling guide module 72 forms a second rolling contact portion 725. Furthermore, during the relative displacement between the second platform 20 and the third platform 30, at least a portion of the plurality of second rolling elements 722 rolls relative to the second body 721 and the second rolling adapter portion 32.

[0100] This configuration not only increases the number and optimizes the layout of the guiding devices in the alignment platform 100, achieving higher alignment accuracy and a smoother guiding process, but also makes the structure more compact. Furthermore, the use of rolling guides instead of sliding guides in the guiding devices reduces power consumption and improves mechanical efficiency of the alignment platform 100, making it easier to maintain and start up. This allows the guiding devices to achieve a smoother guiding effect during the alignment process.

[0101] Please see Figure 9 and Figure 10 , Figure 9 This is a partially enlarged schematic diagram of the first limiting mechanism provided in one or more embodiments. Figure 10 This is a partially enlarged schematic diagram of a second limiting mechanism provided in one or more embodiments.

[0102] like Figure 7 , Figure 9 and Figure 10 As shown, in some embodiments, the first target platform is provided with a first limiting structure 21, which is matched with the first body 621 to limit the first body 621 at least in the first direction and the second direction.

[0103] For example, the first limiting structure 21 is disposed on the end face of the second platform 20 near the first platform 10 and is positioned corresponding to the first rolling guide component 60. The first limiting structure 21 includes both a block structure that engages with the first body 621 and a threaded engagement structure between the first body 621 and the second platform 20. The first limiting structure 21 and the first body 621 in the first rolling guide module 62 form a limiting engagement to restrict the first body 621 from moving in any direction, including the first direction and the second direction.

[0104] It is understood that the first limiting structure 21 can be set on the end face of the first platform 10 near the second platform 20 and form a limiting cooperation with the first body 621.

[0105] In some embodiments, the second target platform is provided with a second limiting structure 22, which is adapted to limit the second body 721 in at least the first and second directions.

[0106] For example, the second limiting structure 22 is disposed on the end face of the second platform 20 near the third platform 30 and is positioned corresponding to the second rolling guide component 70. The second limiting structure 22 includes both a block structure that engages with the second body 721 and a threaded engagement structure between the second body 721 and the second platform 20. The second limiting structure 22 and the second body 721 in the second rolling guide module 72 form a limiting engagement to restrict the movement of the second body 721 in any direction, including the first direction and the second direction.

[0107] It is understood that the second limiting structure 22 can be set on the end face of the third platform 30 near the second platform 20, and form a limiting cooperation with the first body 621.

[0108] This configuration ensures that the first and second rolling guide modules are fixed on the platform, that the first rolling body 2122 can roll and contact the first rolling adapter 16 along the first rolling loop 2124, and that the second rolling body 222 can roll and contact the second rolling adapter 35 along the second rolling loop 2224. This also enhances the fixation of the rolling guide components, thereby increasing the guiding stability of the alignment platform 100.

[0109] Please see Figure 11 , Figure 11 This is a three-dimensional structural diagram of a first platform and a second platform forming a limiting adaptation, and a second platform and a third platform forming a limiting adaptation, provided in one or more embodiments of this application;

[0110] like Figure 11 As shown, in some embodiments, the first target platform is provided with a third limiting stroke groove 25 and a third limiting member 13. One of the first platform 10 and the second platform 20 is provided with a third limiting stroke groove 25 on both sides or one side of the second direction along the first direction. The other of the first platform 10 and the second platform 20 is provided with a third limiting member 13 corresponding to the third limiting stroke groove 25, and the third limiting member 13 and the third limiting stroke groove 25 form a limiting fit.

[0111] As one embodiment, the second platform 20 has a third limiting stroke groove 25 on one side of the second direction along the first direction, and the first platform 10 is provided with a third limiting member 13 corresponding to the third limiting stroke groove 25. The third limiting member 13 and the third limiting stroke groove 25 form a limiting fit, and can limit the maximum stroke of the first platform 10 and the second platform 20 in the first direction.

[0112] In another embodiment, the first platform 10 has a third limiting stroke groove 25 on one side of the second direction along the first direction, and the second platform 20 is provided with a third limiting member 13 corresponding to the third limiting stroke groove 25. The third limiting member 13 and the third limiting stroke groove 25 form a limiting fit, and can limit the maximum stroke of the first platform 10 and the second platform 20 in the first direction.

[0113] In some embodiments, the second target platform is provided with a fourth limiting travel groove 26 and a fourth limiting member 33. One of the second platform 20 and the third platform 30 has a fourth limiting travel groove 26 on both sides or one side in the second direction along the first direction. The other of the second platform 20 and the third platform 30 is provided with a fourth limiting member 33 corresponding to the fourth limiting travel groove 26, and the fourth limiting member 33 and the fourth limiting travel groove 26 form a limiting fit.

[0114] As one embodiment, the second platform 20 has a fourth limiting stroke groove 26 on one side of the first direction along the second direction, and the third platform 30 is provided with a fourth limiting member 33 corresponding to the fourth limiting stroke groove 26. The fourth limiting member 33 and the fourth limiting stroke groove 26 form a limiting fit, and can limit the maximum stroke of the second platform 20 and the third platform 30 in the second direction.

[0115] In another embodiment, the third platform 30 has a fourth limiting stroke groove 26 on one side of the first direction along the second direction, and the second platform 20 is provided with a fourth limiting member 33 corresponding to the fourth limiting stroke groove 26. The fourth limiting member 33 and the fourth limiting stroke groove 26 form a limiting fit, and can limit the maximum stroke of the second platform 20 and the third platform 30 in the second direction.

[0116] It is understood that the limiting structure composed of the third limiting member 13 and the third limiting stroke groove 25 can be set on one or both sides of the first target platform in the second direction; the limiting structure composed of the fourth limiting member 33 and the fourth limiting stroke groove 26 can be set on one or both sides of the second target platform in the first direction.

[0117] It can also be understood that the first target platform can simultaneously have a limiting structure composed of the third limiting member 13 and the third limiting stroke groove 25, and a limiting structure composed of the first limiting stroke groove 11 and the first limiting member 23, or it can only have one of them. Similarly, the second target platform can simultaneously have a limiting structure composed of the fourth limiting member 33 and the fourth limiting stroke groove 26, and a limiting structure composed of the second limiting stroke groove 31 and the second limiting member 24, or it can only have one of them.

[0118] This configuration ensures that the displacement distance in the first and second directions is fixed. Furthermore, the positions of the third limit stroke groove 25 and the third limit member 13, and the positions of the fourth limit stroke groove 26 and the fourth limit member 33 are located on the side of the alignment platform 100. If a fault occurs between the limit structures, they can be directly observed and repaired, thus improving the maintenance convenience of the alignment platform 100.

[0119] Please see Figure 12 , Figure 12 This is a schematic block diagram of an electromechanical device provided for one or more embodiments of this application.

[0120] like Figure 12 As shown, this application also provides an electromechanical device 200, including any of the alignment platforms 100 provided in the embodiments of this application.

[0121] Specifically, when the adapter 14 in the alignment platform 100 carries or connects the target component, the first driving device 40 in the alignment platform 100 can drive the first platform 10 to move relative to the second platform 20 in the first direction to adjust the position of the target component in the first direction. The second driving device 50 in the alignment platform 100 can drive the first platform 10 and the second platform 20 to move relative to the third platform 30 in the second direction to adjust the position of the target component in the second direction, thereby achieving flexible alignment in two-dimensional space.

[0122] As one embodiment, the electromechanical equipment also includes a gripping device 300 for gripping a target component, and an alignment platform 100 for moving one of the target object and the gripping device in a first direction and a second direction to align with the other of the target object and the gripping device so that the two can be precisely aligned during processing, assembly or inspection.

[0123] This invention provides an alignment platform and electromechanical equipment. A first platform and a second platform move relative to each other along a first direction via a first rolling guide assembly driven by a first driving device. The first rolling guide assembly includes two sets of first sliding guide components that are rolled and adapted to the first rolling adapter portion. The second platform and a third platform move relative to each other along a second direction via a second rolling guide assembly driven by a second driving device. The second rolling guide assembly includes two sets of second sliding guide components that are rolled and adapted to the second rolling adapter portion. This configuration optimizes the number and layout of the sliding guide devices, improves the rigidity of the alignment platform, and reduces deformation and vibration during operation, thereby improving the alignment accuracy and working quality of the electromechanical equipment. Furthermore, the layout of the sliding guide devices allows the alignment platform to achieve precise alignment while maintaining a more compact structure.

[0124] It should be understood that the terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to limit the scope of the application. As used in this specification and the appended claims, the singular forms “a,” “an,” and “the” are intended to include the plural forms unless the context clearly indicates otherwise.

[0125] It should also be understood that the term "and / or" as used in this specification and the appended claims refers to any combination and all possible combinations of one or more of the associated listed items, and includes such combinations. It should be noted that, herein, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or system that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or system. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or system that includes that element.

[0126] The sequence numbers of the embodiments in this application are for descriptive purposes only and do not represent the superiority or inferiority of the embodiments. The above descriptions are merely specific implementations of this application, but the scope of protection of this application is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in this application, and these modifications or substitutions should all be covered within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A positioning platform, characterized in that, include: A first platform, a second platform, a third platform, a first rolling guide assembly, a second rolling guide assembly, a first drive device, and a second drive device; At least one adapter position is provided on the side of the first platform away from the second platform, and the adapter position is used to carry or connect the target component; The second platform is disposed between the first platform and the third platform, and the second platform is slidably connected to the first platform through the first rolling guide component, so that the first platform can move relative to the second platform in a first direction under the drive of the first driving device; The second platform is slidably connected to the third platform via the second rolling guide component, so that the second platform can move relative to the third platform in a second direction under the drive of the second driving device, so as to synchronously drive the first platform to move relative to the third platform in a second direction, wherein the second direction is perpendicular to the first direction; The first rolling guide component is disposed in one of the first target platforms, and the other of the first target platforms has a first rolling adaptation portion that is rollingly adapted to the first rolling guide component. The first target platform includes the first platform and the second platform. Furthermore, the first rolling guide component includes at least two sets of first sliding guide members, the two sets of first sliding guide members are respectively located on opposite sides of the first target platform in the second direction, each set of first sliding guide members has at least two first rolling contact portions, the at least two first rolling contact portions are respectively located on both sides of the first sliding guide member in the second direction, and the first sliding guide member is rollingly adapted to the first rolling adaptation portion in the first direction through the at least two first rolling contact portions. And / or, the second rolling guide component is disposed in one of the second target platforms, and the other of the second target platforms forms a second rolling adaptation portion that is rollingly adapted to the second rolling guide component. The second target platform includes the second platform and the third platform. Furthermore, the second rolling guide component includes at least two sets of second sliding guide members, the two sets of second sliding guide members being located on opposite sides of the second target platform in the first direction. Each set of second sliding guide members forms at least two second rolling contact portions, the at least two second rolling contact portions being located on opposite sides of the second sliding guide member in the first direction. The second sliding guide member is rollingly adapted to the second rolling adaptation portion in the second direction through the at least two second rolling contact portions.

2. The alignment platform as described in claim 1, characterized in that, The first sliding guide component includes at least two first rolling guide modules arranged in the second direction; Each of the first rolling guide modules includes a first body and a plurality of first rolling elements. The first body forms a first rolling loop with a first notch. The plurality of first rolling elements are disposed in the first rolling loop and can be exposed in the first rolling loop through the first notch, so that the first rolling guide module forms the first rolling contact portion. Furthermore, during the relative displacement between the first platform and the second platform, at least a portion of the first rolling elements roll relative to the first body.

3. The alignment platform as described in claim 2, characterized in that, The first target platform is provided with a first limiting structure, which is adapted to the first body to limit the first body at least in the first direction and the second direction.

4. The alignment platform as described in claim 1, characterized in that, The second sliding guide component includes at least two second rolling guide modules arranged in the first direction; Each of the second rolling guide modules includes a second body and a plurality of second rolling elements. The second body forms a second rolling loop with a second notch. The plurality of second rolling elements are disposed in the second rolling loop and can be exposed in the second rolling loop through the second notch portion, so that the second rolling guide module forms the second rolling contact portion. Furthermore, during the relative displacement between the second platform and the third platform, at least a portion of the second rolling elements roll relative to the second body.

5. The alignment platform as described in claim 4, characterized in that, The second target platform is provided with a second limiting structure, which is adapted to the second body to limit the second body at least in the first direction and the second direction.

6. The alignment platform as described in any one of claims 1-5, characterized in that, The first driving device is disposed on the first target platform and located between the two sets of the first sliding guide components. The first driving device includes a first stator and a first mover. The first stator is disposed on one of the first platform and the second platform, and the first mover corresponds to the first stator being disposed on the other of the first platform and the second platform. And / or, The second drive device is disposed on the second target platform and located between the two sets of the second sliding guide components. The second drive device includes a second stator and a second mover. The second stator is disposed on one of the second platform and the third platform, and the second mover corresponds to the second stator being disposed on the other of the second platform and the third platform.

7. The alignment platform as described in any one of claims 1-5, characterized in that, One of the first platform and the second platform has a first limiting stroke groove on its periphery along the first direction. The other of the first platform and the second platform is provided with a first limiting member corresponding to the first limiting stroke groove. The first limiting member and the first limiting stroke groove form a limiting fit and can limit the maximum stroke of the first platform and the second platform in the first direction. And / or, One of the second platform and the third platform has a second limiting stroke groove on its periphery along the first direction. The other of the second platform and the third platform has a second limiting member corresponding to the second limiting stroke groove. The second limiting member and the second limiting stroke groove form a limiting fit and can limit the maximum stroke of the second platform and the third platform in the second direction.

8. The alignment platform as described in any one of claims 1-5, characterized in that, One of the first platform and the second platform has a third limiting stroke groove on one or both sides of the second direction along the first direction. The other of the first platform and the second platform is provided with a third limiting member corresponding to the third limiting stroke groove. The third limiting member and the third limiting stroke groove form a limiting fit and can limit the maximum stroke of the first platform and the second platform in the first direction. And / or, One of the second platform and the third platform has a fourth limiting stroke groove on both sides or one side of the second direction along the first direction. The other of the second platform and the third platform is provided with a fourth limiting member corresponding to the fourth limiting stroke groove. The fourth limiting member and the fourth limiting stroke groove form a limiting fit and can limit the maximum stroke of the second platform and the third platform in the second direction.

9. The alignment platform as described in any one of claims 1-5, characterized in that, The second platform has an oil injection hole, which is used to introduce lubricant into the first rolling guide assembly and the second rolling guide assembly.

10. An electromechanical device, characterized in that, The electromechanical equipment includes the alignment platform as described in any one of claims 1-9.

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