Tray taking and placing device

Abstract

The utility model relates to a material tray taking and placing device which is arranged on a crown block and used for carrying material trays and comprises a supporting frame with the top connected with the carrying crown block. A material tray supporting fork is arranged in the supporting frame and used for supporting and lifting up a material tray. The lifting mechanism is connected with the tray supporting fork and is used for controlling the lifting action of the tray supporting fork; the transverse moving mechanism is arranged on the supporting frame and used for driving the tray supporting forks to move transversely. The transverse moving mechanism is connected with the lifting mechanism through a transverse connecting plate; the transverse moving mechanism comprises a first transverse moving plate, a second transverse moving plate, a transverse moving driving mechanism and a linkage mechanism; the material disc pressing mechanism is arranged in the supporting frame and used for pressing the material disc. According to the material tray grabbing mechanism, the material tray can be transversely moved and grabbed, the material tray supporting forks can be adjusted in a lifting mode, the distance can be increased from the bottom when the material tray is taken and placed, then the material tray supporting forks stretch into the material tray for supporting, friction between the material tray supporting forks and the material tray is reduced, and the material tray pressing mechanism can press the material tray and prevent the material tray from inclining or falling off.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of crown block, especially a material tray taking and placing device. BACKGROUND

[0002] In the field of semiconductor manufacturing, wafer handling is a crucial link that directly affects production efficiency and wafer safety. During wafer handling, OHT (Overhead Hoist Transport) crown block is a commonly used equipment that moves on the track above the factory building to achieve automatic handling of wafer Tray. However, the existing OHT crown block system may cause Tray to tilt or fall during handling due to friction, vibration or improper operation, resulting in wafer damage; different production lines may need to handle Tray of different sizes and weights, and traditional OHT crown block often lacks sufficient flexibility to adapt to these changes. SUMMARY

[0003] Therefore, the utility model solves the technical problems in the prior art and provides a material tray taking and placing device that can horizontally move to grab the material tray, the material tray fork can be adjusted in height, the distance between the bottom can be pulled apart when taking and placing the material tray, and then the material tray fork is extended to lift it, reducing the friction between the material tray fork and the material tray. In addition, the material tray pressing mechanism can press the material tray, effectively preventing the material tray from tilting or falling during handling, ensuring the safety of the workpieces in the material tray and reducing the risk of accidents.

[0004] To solve the above technical problems, the utility model provides a material tray taking and placing device arranged on a crown block for handling a material tray, comprising a support frame connected to the handling crown block at the top; the support frame is internally provided with:

[0005] A material tray fork is arranged inside the support frame to support and lift the material tray.

[0006] A lifting mechanism is connected to the material tray fork to control the lifting action of the material tray fork.

[0007] A horizontal moving mechanism is arranged on the support frame to drive the horizontal movement of the material tray fork; the horizontal moving mechanism is connected to the lifting mechanism through a horizontal connecting plate; the horizontal moving mechanism comprises a first horizontal moving plate, a second horizontal moving plate, a horizontal moving drive mechanism and a linkage mechanism; the first horizontal moving plate is arranged on the lower side of the top plate of the support frame and is driven by the horizontal moving drive mechanism to realize first-level horizontal movement; the second horizontal moving plate is arranged on the lower side of the first horizontal moving plate and is driven by the linkage mechanism to realize second-level horizontal movement.

[0008] A material tray pressing mechanism is arranged in the support frame to press the material tray and prevent the workpieces in the material tray from falling.

[0009] In one embodiment of the present application, the first linear slide rail is arranged between the first horizontal moving plate and the top plate of the support frame; the horizontal moving driving mechanism drives the first horizontal moving plate to move back and forth along the first linear slide rail.

[0010] In one embodiment of the present application, the second linear slide rail is arranged between the first horizontal moving plate and the second horizontal moving plate, and the linkage mechanism drives the second horizontal moving plate to move back and forth along the second linear slide rail.

[0011] In one embodiment of the present application, the horizontal moving driving mechanism comprises a first servo motor, a first synchronous pulley assembly, a first screw rod and a first adjusting seat; the first servo motor and the first screw rod are arranged on the support frame through mounting seats respectively; the output shaft of the first servo motor is connected with one end of the first screw rod through the first synchronous pulley assembly; the first adjusting seat is arranged on the first screw rod, and the first adjusting seat is connected with one side of the first horizontal moving plate.

[0012] In one embodiment of the present application, the linkage mechanism comprises a second synchronous pulley assembly and a translation driving piece; the second synchronous pulley assembly is arranged on the other side of the first horizontal moving plate; the translation driving piece is arranged on the synchronous belt of the second synchronous pulley assembly, and the translation driving piece is connected with the second horizontal moving plate to drive the second horizontal moving plate to translate.

[0013] In one embodiment of the present application, the lifting mechanism comprises a lifting plate, a third servo motor, a third screw rod and a third adjusting seat; the lifting plate is connected with the transverse connecting plate, and the lifting plate is perpendicular to the transverse connecting plate; the third servo motor and the third screw rod are arranged on the lifting plate through mounting seats respectively; the output shaft of the third servo motor is connected with one end of the third screw rod; the third adjusting seat is arranged on the third screw rod, and the tray supporting fork is connected with the third adjusting seat.

[0014] In one embodiment of the present application, the third linear slide rail is arranged on the lifting plate, and the sliding block matched with the third linear slide rail is arranged on the tray supporting fork.

[0015] In one embodiment of the present application, the tray pressing mechanism comprises a second servo motor, a third synchronous pulley assembly, a second screw rod, a second adjusting seat and a pressing rack; the output shaft of the second servo motor is connected with one end of the second screw rod through the third synchronous pulley assembly; the second adjusting seat is arranged on the second screw rod, and the pressing rack is connected with the second adjusting seat.

[0016] In one embodiment of the present invention, the pressing frame includes an L-shaped side baffle and a transverse pressing plate, and the top plate of the support frame is provided with a clearance groove for avoiding the transverse pressing plate.

[0017] In one embodiment of the present invention, positioning pins for positioning the material tray are respectively provided on both sides of the bottom plate of the support frame.

[0018] Compared with the prior art, the above-mentioned technical solution of this utility model has the following beneficial effects:

[0019] The fluorescence signal detection device of this utility model Attached Figure Description

[0020] To make the content of this utility model easier to understand, the present utility model will be further described in detail below with reference to specific embodiments and accompanying drawings.

[0021] Figure 1 This is a schematic diagram of the material tray loading and unloading device in a preferred embodiment of the present invention;

[0022] Figure 2 for Figure 1 The diagram shows the internal structure of the tray loading and unloading device.

[0023] Figure 3 for Figure 2 A schematic diagram of the internal structure of the tray loading and unloading device from another angle;

[0024] Figure 4 for Figure 1 A schematic diagram of the material clamping mechanism of the material tray loading and unloading device shown;

[0025] Figure 5 for Figure 1 The diagram shows the material tray loading and unloading device and the overhead crane structure.

[0026] Explanation of reference numerals in the accompanying drawings: 1. Support frame; 11. Clearance groove; 12. Positioning pin; 2. Tray support fork; 3. Lifting mechanism; 31. Lifting plate; 32. Third servo motor; 33. Third lead screw; 34. Third adjusting seat; 4. Horizontal movement mechanism; 41. First horizontal movement plate; 42. Second horizontal movement plate; 43. Horizontal movement drive mechanism; 44. Linkage mechanism; 45. First linear slide rail; 46. Second linear slide rail; 5. Tray pressing mechanism; 6. Horizontal connecting plate; 51. Second servo motor; 52. Third synchronous pulley assembly; 53. Second lead screw; 54. Second adjusting seat; 55. Pressing frame; 551. Shaped side baffle; 552. Horizontal pressing plate; 100. Transport crane; 200. Tray; Detailed Implementation

[0027] The present invention will be further described below with reference to the accompanying drawings and specific embodiments, so that those skilled in the art can better understand and implement the present invention. However, the embodiments are not intended to limit the present invention.

[0028] Reference Figures 1-5 As shown, the present invention discloses a material tray handling device, which is installed on an overhead crane for transporting material trays. It includes a support frame 1, the top of which is connected to the overhead crane 100. The support frame 1 contains:

[0029] The material tray support fork 2 is disposed inside the support frame 1 and is used to support and lift the material tray 200;

[0030] The lifting mechanism 3 is connected to the material tray support fork 2 and is used to control the lifting action of the material tray support fork 2;

[0031] A lateral movement mechanism 4 is mounted on the support frame 1 to drive the material tray fork 2 to move laterally. The lateral movement mechanism 4 is connected to the lifting mechanism 3 via a lateral connecting plate. The lateral movement mechanism 4 includes a first lateral movement plate 41, a second lateral movement plate 42, a lateral movement drive mechanism 43, and a linkage mechanism 44. The first lateral movement plate 41 is located on the lower side of the top plate of the support frame 1 and is driven by the lateral movement drive mechanism 43 to achieve a first-level lateral movement. The second lateral movement plate 42 is located on the lower side of the first lateral movement plate 41 and is driven by the linkage mechanism 44 to achieve a second-level lateral movement.

[0032] The material tray clamping mechanism 5 is installed inside the support frame 1 to clamp the material tray 200 and prevent the workpieces in the material tray from tilting or falling.

[0033] In this embodiment, the integrated design of the support frame 1, the tray support fork 2, the lifting mechanism 3 and the lateral movement mechanism 4 enables precise handling and positioning of the tray 200. This design improves the automation level of the tray 200 handling and reduces manual operation. The tray clamping mechanism 5 can clamp the tray, effectively preventing the tray from tilting or falling during handling, ensuring the safety of the workpieces in the tray and reducing the risk of accidents.

[0034] Furthermore, a first linear slide rail 45 is provided between the first transverse plate 41 and the top plate of the support frame 1; the transverse drive mechanism 43 drives the first transverse plate 41 to reciprocate along the first linear slide rail 45. By setting the first linear slide rail 45 and the transverse drive mechanism 43, the precise reciprocating movement of the first transverse plate is realized, enhancing the stability and reliability of the transverse mechanism 4 and improving the accuracy of the material tray 200 handling.

[0035] A second linear slide rail 46 is provided between the first transverse plate 41 and the second transverse plate 42. The linkage mechanism 44 drives the second transverse plate 42 to reciprocate along the second linear slide rail 46. By using the linkage mechanism 44 to drive the second transverse plate 42 to reciprocate on the second linear slide rail 46, a two-stage transverse movement function is realized, further improving the flexibility and adaptability of the material tray 200 handling.

[0036] Preferably, the lateral movement drive mechanism 43 includes a first servo motor, a first synchronous pulley assembly, a first lead screw, and a first adjusting seat. The first servo motor and the first lead screw are respectively mounted on the support frame 1 via mounting bases. The output shaft of the first servo motor is connected to one end of the first lead screw via the first synchronous pulley assembly. The first adjusting seat is mounted on the first lead screw and connected to one side of the first lateral movement plate. By having the first servo motor drive the first synchronous pulley assembly to rotate the first lead screw, and the first adjusting seat moves laterally on the first lead screw, the accuracy and synchronization of the lateral movement are ensured, improving the efficiency and safety of the material tray 200 handling.

[0037] Furthermore, the linkage mechanism 44 includes a second synchronous pulley assembly and a translation drive component. The second synchronous pulley assembly is disposed on the other side of the first transverse plate, and the translation drive component is disposed on the synchronous belt of the second synchronous pulley assembly and connected to the second transverse plate for driving the second transverse plate to translate. The design of the second synchronous pulley assembly and the translation drive component enables precise translation of the second transverse plate, thereby achieving two-stage translation of the material tray fork 2 and improving the flexibility of material tray 200 handling.

[0038] like Figure 2 As shown, the lifting mechanism 3 includes a lifting plate 31, a third servo motor 32, a third lead screw 33, and a third adjusting seat 34. The lifting plate 31 is connected to the transverse connecting plate 6 and is perpendicular to the transverse connecting plate 6. The third servo motor 32 and the third lead screw 33 are both mounted on the lifting plate via mounting seats. The output shaft of the third servo motor 32 is connected to one end of the third lead screw 33. The third adjusting seat 34 is mounted on the third lead screw 33, and the material tray support fork 2 is connected to the third adjusting seat 34. The design of the lifting mechanism 3 enables precise lifting control of the material tray support fork 2, improving the vertical positioning accuracy of the material tray 200 handling.

[0039] The lifting plate 31 is equipped with a third linear slide rail, and the material tray fork 2 is equipped with a slider that matches the third linear slide rail. The third linear slide rail and the slider that matches the material tray fork 2 improve the smoothness and reliability of the lifting mechanism 3 and reduce friction and wear during the lifting process.

[0040] likeFigure 3 As shown, the material tray clamping mechanism 5 includes a second servo motor 51, a third synchronous pulley assembly 52, a second lead screw 53, a second adjusting seat 54, and a pressing frame 55. The output shaft of the second servo motor 51 is connected to one end of the second lead screw 53 through the third synchronous pulley assembly 52. ​​The second adjusting seat 54 is mounted on the second lead screw 53, and the pressing frame 55 is connected to the second adjusting seat 54. The second servo motor 51 serves as a power source, providing power through its output shaft. It drives the second lead screw 53 to rotate through the third synchronous pulley assembly 52. ​​The second adjusting seat 54 converts the rotational motion of the second lead screw 53 into linear motion. The second adjusting seat 54 is connected to the pressing frame 55, and the pressing frame 55 follows the second adjusting seat 54 in linear motion, thereby achieving the clamping action on the material tray 200, which can meet the material level requirements of various specifications.

[0041] like Figure 5 As shown, the pressing frame 55 includes an L-shaped side baffle 551 and a transverse pressing plate 552. The top plate of the support frame 1 is provided with a clearance groove 11 to avoid the transverse pressing plate. This structural design of the pressing frame 55 allows it to press the tray 200 from the side and top. The pressing frame 55 achieves stable pressing of the tray, effectively preventing the tray 200 from tilting or falling during handling, thus improving the safety of handling the tray 200. The design of the clearance groove 11 allows the transverse pressing plate to move without interfering with the support frame 1, ensuring smooth pressing action.

[0042] Furthermore, the bottom plate of the support frame 1 is provided with positioning pins 12 on both sides for positioning the tray 200. The design of the positioning pins 12 can ensure that the tray 200 remains stable during handling and storage, and prevent the tray 200 from tilting.

[0043] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the protection scope of this invention.

Claims

1. A tray handling device, installed on an overhead crane for transporting trays, characterized in that: Includes a support frame, the top of which is connected to the overhead crane; the support frame contains: The tray support fork is located inside the support frame and is used to support and lift the tray. The lifting mechanism is connected to the material tray support fork and is used to control the lifting and lowering action of the material tray support fork; A lateral movement mechanism is mounted on the support frame to drive the material tray fork to move laterally. The lateral movement mechanism is connected to the lifting mechanism via a lateral connecting plate. The lateral movement mechanism includes a first lateral movement plate, a second lateral movement plate, a lateral movement drive mechanism, and a linkage mechanism. The first lateral movement plate is located on the lower side of the top plate of the support frame and is driven by the lateral movement drive mechanism to achieve a first-level lateral movement. The second lateral movement plate is located on the lower side of the first lateral movement plate and is driven by the linkage mechanism to achieve a second-level lateral movement. The tray clamping mechanism is located within the support frame and is used to clamp the tray to prevent the workpieces inside the tray from tilting or falling.

2. The material tray loading and unloading device according to claim 1, characterized in that: A first linear slide rail is provided between the first transverse plate and the top plate of the support frame; the transverse drive mechanism drives the first transverse plate to reciprocate along the first linear slide rail.

3. The material tray loading and unloading device according to claim 2, characterized in that: A second linear slide rail is provided between the first and second transverse plates, and the linkage mechanism drives the second transverse plate to reciprocate along the second linear slide rail.

4. The material tray loading and unloading device according to claim 3, characterized in that: The lateral movement drive mechanism includes a first servo motor, a first synchronous pulley assembly, a first lead screw, and a first adjusting seat. The first servo motor and the first lead screw are respectively mounted on the support frame via mounting seats. The output shaft of the first servo motor is connected to one end of the first lead screw via the first synchronous pulley assembly. The first adjusting seat is mounted on the first lead screw and is connected to one side of the first lateral movement plate.

5. A tray loading and unloading device according to claim 4, characterized in that: The linkage mechanism includes a second synchronous pulley assembly and a translation drive component. The second synchronous pulley assembly is disposed on the other side of the first transverse plate, and the translation drive component is disposed on the synchronous belt of the second synchronous pulley assembly and is connected to the second transverse plate to drive the second transverse plate to translate.

6. The material tray handling device according to claim 1, characterized in that: The lifting mechanism includes a lifting plate, a third servo motor, a third lead screw, and a third adjusting seat. The lifting plate is connected to the transverse connecting plate and is perpendicular to the transverse connecting plate. The third servo motor and the third lead screw are both mounted on the lifting plate via mounting seats. The output shaft of the third servo motor is connected to one end of the third lead screw. The third adjusting seat is mounted on the third lead screw, and the material tray support fork is connected to the third adjusting seat.

7. A tray loading and unloading device according to claim 6, characterized in that: The lifting plate is provided with a third linear slide rail, and the material tray support fork is provided with a slider that is adapted to the third linear slide rail.

8. A tray handling device according to claim 7, characterized in that: The material tray clamping mechanism includes a second servo motor, a third synchronous belt pulley assembly, a second lead screw, a second adjusting seat, and a pressing frame; the output shaft of the second servo motor is connected to one end of the second lead screw through the third synchronous belt pulley assembly, the second adjusting seat is disposed on the second lead screw, and the pressing frame is connected to the second adjusting seat.

9. A tray loading and unloading device according to claim 8, characterized in that: The pressing frame includes an L-shaped side baffle and a transverse pressing plate, and the top plate of the support frame is provided with a clearance groove for avoiding the transverse pressing plate.

10. A tray handling device according to claim 1, characterized in that: The bottom plate of the support frame is provided with positioning pins on both sides for positioning the material tray.

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