Maintenance equipment for electron beam mirror

Abstract

The utility model discloses maintenance equipment for an electron beam mirror, relates to the technical field of electron beam measurement, and is used for solving the technical problem of relatively high maintenance cost of the electron beam mirror in the related technology. The maintenance equipment comprises a supporting piece, a bearing arm and a hoisting assembly, the bearing arm is rotatably connected to the supporting piece and can rotate between a first position and a second position relative to the supporting piece, and the rotating angle of the bearing arm is larger than 60 degrees and smaller than 300 degrees from the first position to the second position; the hoisting assembly is arranged on the bearing arm and used for lifting the electron beam mirror.

Description

Technical Field

[0001] This application relates to the field of electron beam measurement technology, and in particular to the design of a maintenance device for an electron beam mirror. Background Technology

[0002] As integrated circuit manufacturing processes enter the nanometer scale, the measurement of critical dimensions in the production line exceeds the coverage of optical measurement. Since the spatial resolution of electron beam measurement devices can reach about 1nm, electron beam measurement equipment plays an increasingly important role in semiconductor chip production.

[0003] The main function of electron beam metrology equipment is to perform wafer imaging using the principles of scanning electron microscopy and analyze the images to monitor key process parameters. As a core component, the electron beam mirror in electron beam metrology equipment is a key focus of maintenance solutions.

[0004] The electron beam mirror maintenance solution in related technologies uses a pre-installed slide rail and motor on the top of the machine's outer protective structure. When maintenance is needed, the slide rail is externally connected and extended, and the pre-installed slide rail and motor are used to lift and move the electron beam mirror. Because the slide rail is located on the top of the machine's outer protective structure, and because the slide rail and motor are relatively large, disassembly and installation of the slide rail and motor are inconvenient. Therefore, the existing maintenance solution requires pre-installing guide rails and motors on each machine to achieve maintenance of multiple machines, which undoubtedly leads to high maintenance costs. Utility Model Content

[0005] This application discloses a maintenance device for an electron beam mirror, which solves the technical problem that the maintenance process of electron beam mirrors is cumbersome and costly in the related art.

[0006] Based on this, this application provides a maintenance device for an electron beam mirror, including a support member, a support arm, and a hoisting assembly. The support arm is rotatably connected to the support member and can rotate relative to the support member between a first position and a second position. From the first position to the second position, the rotation angle of the support arm is greater than 60° and less than 300°. The hoisting assembly is disposed on the support arm and is used to raise and lower the electron beam mirror.

[0007] This embodiment of the application allows the support arm to be rotatably connected to the support member, enabling the support arm to rotate between a first position and a second position relative to the support member. A hoisting assembly for lifting the electron beam mirror is mounted on the support arm. Therefore, when maintenance of the electron beam mirror on the machine is required, the maintenance equipment can be mounted on the machine. After the hoisting assembly lifts the electron beam mirror, the support arm is rotated so that the side of the support arm with the hoisting assembly rotates towards the opening of the machine until the lifted electron beam mirror is rotated to the opening, facilitating maintenance by personnel. Furthermore, since this maintenance equipment consists of a support member, a support arm, and a hoisting assembly, its structure is simple and requires low installation precision, thus facilitating the disassembly and installation of the maintenance equipment. Based on this, when electron beam mirrors on multiple machines require maintenance, the hoisting equipment can be used to sequentially lift the electron beam mirrors from multiple machines, facilitating maintenance by personnel. Compared to related technologies that require guide rails and motors on each machine, the maintenance equipment of this embodiment does not need to be installed on each machine, thereby reducing the maintenance cost of the electron beam mirror.

[0008] Understandably, when the electron beam mirror's mounting position on the machine is a certain distance from the machine's opening, the arm length and rotation angle of the support arm must be coordinated when the maintenance equipment needs to hoist the electron beam mirror to the opening. That is, when the rotation angle range is large, such as greater than 60° and less than 300°, the support arm can cover a larger spatial area during rotation. While meeting the spatial requirements for electron beam mirror operation, compared to cases with smaller rotation angles, the arm length can be appropriately shortened. This facilitates the miniaturization of the maintenance equipment, reducing its weight and making installation, disassembly, and relocation easier.

[0009] For example, when the distance between the electron beam mirror's mounting position on the machine and the machine itself is M, if the rotation angle of the support arm is 60°, then theoretically, an arm length of M is sufficient to lift the electron beam mirror to the opening. However, if the rotation angle of the support arm is 90°, then theoretically, the arm length of the electron beam mirror would be... This allows the electron beam mirror to be lifted to the opening.

[0010] In one possible implementation, the rotation angle of the support arm is greater than 150° and less than 210°. This allows the support arm to cover a larger spatial area during rotation. While meeting the spatial requirements for electron beam mirror operation, the arm length can be appropriately shortened compared to a smaller rotation angle, thus facilitating miniaturization of the maintenance equipment, reducing its weight, and simplifying its installation, disassembly, and relocation. For example, when the distance from the electron beam mirror's mounting position on the machine is M, if the rotation angle of the support arm is 180°, then theoretically, an arm length of half M is sufficient to lift the electron beam mirror to the opening.

[0011] In one possible implementation, the maintenance equipment includes: a first connecting assembly connected to the support member, a first mating portion formed on the first connecting assembly, and a second mating portion formed on the support arm. The first mating portion and the second mating portion engage to allow the support arm to be rotatably connected to the support member. Thus, the first mating portion on the first connecting assembly and the second mating portion on the support arm engage with each other, enabling the support arm to be rotatably connected to the support member. Therefore, the support arm can cover a larger spatial area during rotation, facilitating the hoisting of the electron beam mirror on the machine platform.

[0012] In one possible implementation, the first connecting component includes: a first limiting portion and a second limiting portion spaced apart, both of which are connected to the support member; the first limiting portion has a first mounting hole on the side facing the second limiting portion, and the second limiting portion has a second mounting hole on the side facing the first limiting portion, the first mounting hole and the second mounting hole being coaxially arranged; the first mounting hole and the second mounting hole constitute the first mating portion; the second mating portion includes: a first protrusion and a second protrusion arranged opposite to each other, the first protrusion being rotatably disposed within the first mounting hole, and the second protrusion being disposed within the second mounting hole.

[0013] In this way, the engagement of the first protrusion with the first mounting hole and the engagement of the second protrusion with the second mounting hole allows the support arm to be rotatably connected to the support member. Since the first and second limiting parts are spaced apart and both connected to the support member, a positioning reference is provided for the installation of the support arm. Because the first and second mounting holes are coaxial, the first and second protrusions can be accurately installed in their respective holes (i.e., the first and second mounting holes), ensuring the accuracy and stability of the support arm's rotation axis. Furthermore, it reduces additional friction and wear caused by axial deviation, improving the flexibility and precision of the support arm's rotation.

[0014] In one possible implementation, the first connecting component further includes: a first body and a second body, the first body being connected to the first limiting portion and the support member, the first body having a through hole, and a portion of the support member passing through the through hole; the second body being connected to the second limiting portion and the support member, the second body having a receiving groove, and an end of the support member being disposed within the receiving groove.

[0015] Because the first body connects the first limiting part and the support member, and the support member partially passes through the through hole, a portion of the support member is nested within the first limiting part. This effectively distributes the load borne by the connection, preventing loosening or detachment under stress. Similarly, the second body engages with the end of the support member through a receiving groove, further enhancing the connection strength between the second limiting part and the support member. Thus, the cooperation between the first and second limiting parts and the support member improves the stability of the connection between the first connecting assembly and the support member, ensuring that the first connecting assembly can reliably transmit force during the rotation of the bearing arm, guaranteeing the stability and safety of the maintenance equipment.

[0016] In one possible implementation, the first limiting part includes: a first limiting part having a first mounting hole;

[0017] The second limiting part includes a second limiting part, which has a second mounting hole. Thus, both the first and second limiting parts are plate-shaped structures, avoiding complex structural forms and excessive redundant parts. Furthermore, the plate-shaped structure reduces the overall weight of the maintenance equipment.

[0018] In one possible implementation, the first connecting component further includes: a first reinforcing plate and a second reinforcing plate, disposed on the side of the first limiting portion opposite to the second limiting portion, and connected to the first limiting portion and the first body; the second reinforcing plate is disposed on the side of the second limiting portion opposite to the first limiting portion, and connected to the second limiting portion and the second body.

[0019] Since the first reinforcing plate connects the first limiting part and the first body, and the second reinforcing plate connects the second limiting part and the second body, the connection strength between the first limiting part and the first body, as well as the connection strength between the second limiting part and the second body, can be effectively improved. Therefore, during the operation of the maintenance equipment, when the bearing arm is subjected to external force, the reinforcing plate can share part of the force, reduce the stress on the connection between the first limiting part and the first body, and the connection between the second limiting part and the first body, and prevent the components from deforming, cracking or being damaged due to excessive force, thereby extending the service life of the first connecting assembly and ensuring the reliable operation of the maintenance equipment.

[0020] In one possible implementation, the support arm includes: an arm body and an extension, the arm body being connected to a lifting assembly; the extension is connected to the arm body, and a first protrusion and a second protrusion are provided on opposite sides of the extension. Thus, the extension can be rotatably connected to a first connecting assembly.

[0021] In one possible implementation, the support arm further includes a connecting portion located on the side of the extension opposite to the support member. The connecting portion is connected to the extension, and the arm body is rotatably connected to the connecting portion. Since the arm body is rotatably connected to the connecting portion, when maintenance equipment is not in use, the arm body can be rotated to fit close to the extension or support member, thereby reducing the extension length of the support arm, effectively saving horizontal space, and preventing it from occupying excessive space in limited spaces such as workshops, making the site layout more compact.

[0022] In one possible implementation, the maintenance equipment further includes a rotating shaft rotatably connected to the connecting portion, with the arm body fixedly connected to the rotating shaft. This allows the arm body to be rotatably connected to the connecting portion, saving space and facilitating the transportation and placement of the maintenance equipment.

[0023] In one possible implementation, the arrangement direction of the first and second limiting parts is consistent with the extension direction of the support member, and the axial direction of the rotating shaft is perpendicular to the arrangement direction of the first and second limiting parts. Since the axial direction of the rotating shaft is perpendicular to the arrangement direction of the first and second limiting parts, when the maintenance equipment is not in use, the arm can be rotated to make the arrangement direction of the arm consistent with the extension direction of the support member. In this way, the horizontal extension length of the support arm is reduced, effectively saving horizontal space and avoiding it occupying too much lateral space in limited spaces such as workshops, making the site layout more compact.

[0024] In one possible implementation, the connecting part includes: a first wall surface and a second wall surface arranged opposite to each other, the arrangement direction of the first wall surface and the second wall surface being consistent with the arrangement direction of the first limiting part and the second limiting part; a rotating shaft is provided on the first wall surface, and the rotating shaft is rotatably connected to the first wall surface, and the arm body is fixedly connected to the rotating shaft. In this way, the arm body can be rotatably connected to the first wall surface.

[0025] In one possible implementation, the arm body includes a main body and a connecting arm. The main body includes a third wall and a fourth wall arranged opposite to each other, and the arrangement direction of the third wall and the fourth wall is consistent with the arrangement direction of the first wall and the second wall. The connecting arm is fixedly connected to the third wall and the rotation shaft.

[0026] Since the connecting arm is fixedly connected to the third wall and the rotating shaft is rotatably connected to the first wall, the arm body can be rotatably connected to the lower wall of the connecting part. Thus, when the maintenance equipment is not in use, the arm body can rotate, allowing the arm body to abut against the support and share the vertical space occupied by the support. This helps to reduce the space occupied by the maintenance equipment in the horizontal and vertical directions, avoiding it from occupying too much space in limited spaces such as workshops, and making the site layout more compact.

[0027] In one possible implementation, the maintenance equipment includes a connecting assembly adapted to detachably connect the body to the connecting part. Thus, when the maintenance equipment is needed to suspend the electron beam mirror, the body can be connected to the connecting part via the connecting assembly, allowing the body to support the electron beam mirror. When the maintenance equipment is not needed, the arm can be rotated, reducing the space occupied by the maintenance equipment in both the horizontal and vertical directions.

[0028] In one possible implementation, the connecting assembly includes a connector fixedly connected to a fourth wall surface, a portion of which is located on the side of the second wall surface opposite to the first wall surface and is detachably connected to the second wall surface. In this way, when the body is subjected to an external force (i.e., the gravity of the electron beam mirror), the detachably connected second wall surface, when the connection is stable, can work in conjunction with the rotatable connection (i.e., the arm body is rotatably connected to the connecting part) to distribute the force throughout the entire structure, thereby improving the overall structure's ability to withstand external forces in different directions and enhancing its overall strength.

[0029] In one possible implementation, the support member includes: a first end and a second end disposed opposite to each other, the first end being connected to a first connecting assembly; the maintenance equipment further includes: a base connected to the second end. Thus, the first end and the second end, disposed opposite to each other, connect different components, giving the support member both a supporting and connecting function. That is, the support member can effectively connect the first connecting assembly and the base together, preventing relative displacement or swaying between them, thereby enhancing the stability of the entire maintenance equipment structure.

[0030] In one possible implementation, the base includes a base plate, and the maintenance equipment further includes a third reinforcing plate and a fourth reinforcing plate disposed on opposite sides of the support member, both of which are connected to the support member and the base plate. Since reinforcing plates are provided on opposite sides of the support member, this effectively provides additional lateral support. This helps prevent lateral bending or deformation of the support member under stress, allowing it to more stably transfer force to the base plate, thereby enhancing the overall support stability of the maintenance equipment. Furthermore, by providing reinforcing plates, the rigidity of the connection between the support member and the base plate is increased; these plates can constrain the deformation of the support member and the base plate, making the entire structure more robust under stress and reducing elastic or plastic deformation caused by external forces.

[0031] In one possible implementation, the base plate is provided with connection holes adapted to connect to equipment mounting an electron beam mirror. Thus, the connection holes provide a reliable connection point between the machine base and the base plate. By using suitable connection structures (such as bolts, screws, etc.) passing through the connection holes, the base plate can be firmly fixed to the machine base, preventing loosening or displacement of the maintenance equipment during use and ensuring the stability and reliability of the maintenance equipment. Attached Figure Description

[0032] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0033] Figure 1 This is a schematic diagram of the structure of a maintenance device provided in an embodiment of this application;

[0034] Figure 2 A schematic diagram of the maintenance device provided in the embodiments of this application in a first position in a folded state;

[0035] Figure 3 A schematic diagram of the maintenance device provided in this application embodiment in a second position in a folded state;

[0036] Figure 4 Provided for the embodiments of this application Figure 1 A magnified view of a portion of the image;

[0037] Figure 5 Provided for the embodiments of this application Figure 1 Main view of the maintenance equipment;

[0038] Figure 6 Provided for the embodiments of this application Figure 1 A schematic diagram of the maintenance equipment;

[0039] Figure 7 Provided for the embodiments of this application Figure 5 The diagram shows the structure of the maintenance equipment after it has been folded.

[0040] Figure 8 Provided for the embodiments of this application Figure 1 A top view of the maintenance equipment.

[0041] Explanation of reference numerals in the attached figures:

[0042] 100 - Maintenance equipment;

[0043] 10-Support component; 11-First end; 12-Second end;

[0044] 20-Bearing arm; 20A-Second mating part; 20A1-First protrusion; 20A2-Second protrusion; 21-Arm body; 211-Main body; 2111-Third wall surface; 2112-Fourth wall surface;

[0045] 212-Connecting arm; 22-Extension; 23-Connecting part; 231-First wall surface; 232-Second wall surface;

[0046] 30 - Lifting assembly;

[0047] 40-First connecting assembly; 40A-First mating part; 41-First limiting part; 41A-First limiting part; 411-First mounting hole; 42-Second limiting part; 42A-Second limiting part; 421-Second mounting hole; 43-First body; 431-Through hole; 441-Receiving groove; 44-Second body; 45-First reinforcing plate; 46-Second reinforcing plate;

[0048] 50 - Rotation axis;

[0049] 60 - Connection component; 61 - Connector;

[0050] 70 - Base; 70A - Base plate; 71 - Connection hole;

[0051] 80 - Third reinforcing plate;

[0052] 90 - Fourth Reinforcing Plate. Detailed Implementation

[0053] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0054] In the description of this application, the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0055] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, unless otherwise stated, "a plurality of" means two or more.

[0056] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "connected" and "linked" should be interpreted broadly, for example, they can refer to a fixed connection, a detachable connection, or an integral connection. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0057] In the embodiments of this application, the terms "exemplary" or "for example" are used to indicate that something is an example, illustration, or description. Any embodiment or design that is described as "exemplary" or "for example" in the embodiments of this application should not be construed as being more preferred or advantageous than other embodiments or design. Specifically, the use of the terms "exemplary" or "for example" is intended to present the relevant concepts in a specific manner.

[0058] In the description of this specification, specific features, structures, materials, or characteristics may be combined in any suitable manner in one or more embodiments or examples.

[0059] To facilitate understanding of the electron beam mirror maintenance equipment provided in the embodiments of this application, some technical terms involved in the embodiments of this application will be briefly explained below.

[0060] Electron beam microscopes operate on the principle of wave motion of electrons and the focusing effect of electromagnetic lenses on the electron beam. An electron gun emits a high-energy electron beam, which, after acceleration, is focused and imaged by a series of electromagnetic lenses. The sample lies in the path of the electron beam; the electrons interact with the sample, generating various signals, such as secondary electrons, backscattered electrons, and transmitted electrons. These signals are collected by a detector and converted into images or other data, enabling the observation and analysis of the sample. Electron beam microscopes include transmission electron beam microscopes (TEM) and scanning electron beam microscopes (SEM). TEM is primarily used to observe the internal structure of samples. SEM uses a scanning electron beam to scan the sample surface point by point, collecting signals such as secondary electrons or backscattered electrons emitted from the sample surface to form an image.

[0061] Electron beam metrology equipment utilizes the various signals generated by the interaction between an electron beam and the object under test for measurement. The electron gun in the equipment emits a high-energy electron beam, which is focused by an electromagnetic lens and then irradiates the surface of the object under test. The interaction between electrons and the object produces various signals, such as secondary electrons, backscattered electrons, and transmitted electrons. By detecting the intensity, energy, and time-of-flight characteristics of these signals, electron beam metrology equipment can obtain information such as the morphology, composition, and structure of the object's surface.

[0062] In an electron beam mirror, the electron gun emits the electron beam, and the electromagnetic lens focuses it. If the electron gun cathode ages or becomes contaminated, or if the electromagnetic lens is unstable, problems can arise in the emission and focusing of the electron beam, leading to uneven energy distribution, a larger beam spot, and other issues that affect image resolution and measurement accuracy. Therefore, regular maintenance of the electron beam mirror is necessary. Regular maintenance allows for the timely detection and resolution of these problems, such as replacing aging cathodes and calibrating electromagnetic lens parameters, ensuring proper electron beam transmission and precise focusing.

[0063] However, the machine tools typically occupy a large area. Therefore, maintenance equipment is needed to lift the electron beam mirror from the machine tool to the opening in the machine tool's protective plate. Current electron beam mirror maintenance solutions involve pre-installing slide rails and motors on the top of the machine tool's outer protective plate. When maintenance is required, the slide rails are externally connected and extended, using the pre-installed slide rails and motors to lift and move the electron beam mirror. Because the slide rails are located on the top of the machine tool's outer protective plate, and because the slide rails and motors are large, disassembly and installation of the slide rails and motors are inconvenient. Therefore, existing maintenance solutions require pre-installing guide rails and motors on each machine tool to maintain multiple machines, which undoubtedly leads to high maintenance costs.

[0064] Based on this, embodiments of this application provide a maintenance device for an electron beam mirror, which solves the technical problem of high maintenance costs for electron beam mirrors in related technologies.

[0065] Please see Figure 1 , Figure 2 and Figure 3 , Figure 1 This illustration shows a structural schematic diagram of a maintenance device provided in an embodiment of this application. Figure 2 This is a schematic diagram of the maintenance device provided in the embodiment of this application in a first position in a folded state. Figure 3 This is a schematic diagram showing the maintenance device provided in this application in a second position when folded. The electron beam mirror maintenance device 100 provided in this application includes: a support member 10, a support arm 20, and a hoisting assembly 30. Optionally, the support member 10 can be a columnar structure; alternatively, the support member 10 can also be a rod-shaped structure with a circular or polygonal cross-section; this application does not limit this. For ease of description, this application embodiment uses a support column with a columnar structure as an example.

[0066] Please continue reading. Figure 2 and Figure 3 The bearing arm 20 is rotatably connected to the support member 10 and can rotate relative to the support member 10 between a first position and a second position. From the first position to the second position, the rotation angle of the bearing arm 20 is greater than 60° and less than 300°.

[0067] It is understood that the extension direction of the rotation axis of the bearing arm 20 is consistent with the extension direction of the central axis of the support column. The consistency of the extension direction of the rotation axis of the bearing arm 20 with the extension direction of the central axis of the support column includes: the rotation axis of the bearing arm 20 is parallel to the central axis of the support column, and the rotation axis of the bearing arm 20 intersects the central axis of the support column, and the angle between the rotation axis of the bearing arm 20 and the central axis of the support column is less than or equal to 20°.

[0068] In addition, at least a portion of the hoisting assembly 30 is mounted on the support arm 20 for raising and lowering the electron beam mirror.

[0069] In one possible structural design, the lifting assembly 30 includes a pulley, a winch, and a sling. The pulley is rotatably mounted on the support arm 20. For example, the end of the support arm 20 away from the support member 10 has a through hole, and connecting shafts are connected to opposite side walls of the through hole. The center hole of the pulley is clearance-fitted with the connecting shaft, thus allowing the pulley to be rotatably connected to the connecting shaft, and consequently, the pulley can be rotatably mounted on the support arm 20.

[0070] A winch is a device used for pulling and towing objects. Based on the lever principle, the winch transmits rotational motion to the object being pulled through a transmission mechanism to achieve the towing function. Optionally, the winch can be manually powered; for example, it may include a handle, allowing maintenance personnel to pull the electron beam mirror by turning the handle. Alternatively, the winch can also be powered by a motor, which is connected to the winch drive and is suitable for storing or releasing the sling within the winch. In this way, maintenance personnel can pull the electron beam mirror simply by starting the motor, without needing to apply force, making maintenance of the electron beam mirror convenient.

[0071] Optionally, the winch can be fixedly connected to the support arm 20 or the support member 10. In this way, when the maintenance equipment 100 maintains electron beam mirrors on multiple machines, the disassembly and assembly of the maintenance equipment 100 is more convenient, that is, only the support member 10 needs to be connected to the machine.

[0072] Optionally, the winch can also be detachably connected to the machine tool, so that the winch can be detachably connected to the opening of the machine tool's protective plate, thus facilitating the operation of the winch by maintenance personnel.

[0073] In addition, the winch can also have a release self-locking function. In this way, when the winch stops operating (i.e., when the maintenance personnel release the hand), the winch can automatically lock the drum to prevent the electron beam mirror from reversing due to its own weight or other external forces, thus avoiding the sling from coming loose and the electron beam mirror from slipping and colliding with the machine and being damaged.

[0074] Optionally, the winch can have a ratchet and pawl mechanism. The ratchet is a wheel with a toothed surface, connected to the winch drum or drive shaft, and the pawl is a component that meshes with the ratchet teeth. When the winch is in operation, the maintenance personnel rotate the ratchet using a handle or other driving method, causing the drum to wind or release the cable. When the operation is stopped by releasing the handle, the pawl, under the action of spring force or gravity, quickly engages with the ratchet teeth. Since the pawl can only prevent the ratchet from rotating in one direction, the drum is locked and cannot be reversed by the weight of the load or other external forces, thus achieving a self-locking function.

[0075] Optionally, the winch can have a threaded self-locking structure, that is, it utilizes the self-locking characteristic of the thread to achieve self-locking upon release. For example, a special threaded structure is provided on the winch's drive shaft or drum. When the winch rotates, the threaded transmission lifts or lowers heavy objects. When rotation stops, because the helix angle of the thread is less than the friction angle, the frictional force generated between the threads under the pressure of the heavy object prevents the shaft or drum from rotating in the opposite direction, thus achieving self-locking.

[0076] Additionally, the sling is a flexible component such as a rope or chain used to connect the winch and the object being lifted. It primarily transmits the traction force of the winch to achieve lifting or traction of the object. A portion of the sling contacts the circumferential groove of the pulley, and this contact portion is located between the sling and winch connection, and between the sling and the electron beam mirror connection. That is, the winch and sling achieve vertical movement of the electron beam mirror via the pulley. Thus, by incorporating the pulley, the friction between the sling and the support arm 20 is reduced, thereby increasing the sling's service life and making it easier for maintenance personnel to lift the electron beam mirror.

[0077] In another possible structural design, the hoisting assembly 30 includes: a drive unit, a transmission unit, a drum, a pulley block, a lifting device, and a braking device. The drive unit can be powered by an electric motor connected to a reducer via a coupling, providing power to the hoisting assembly 30. The hoisting assembly 30 can also be equipped with a brake to stop the drum rotation when needed, preventing the electron beam mirror from slipping.

[0078] The transmission device includes a reducer, a drive shaft, and a gear coupling. The reducer converts the high-speed, low-torque motor into a low-speed, high-torque configuration suitable for the drum; the drive shaft transmits torque; and the gear coupling connects the various transmission components and compensates for installation errors and displacements. The drum is typically a cylindrical component made of cast iron or cast steel with rope grooves on its surface for winding the wire rope. Rotation of the drum raises and lowers the electron beam mirror. The pulley system may consist of fixed pulleys and / or movable pulleys. The fixed pulleys change the direction of the wire rope, while the movable pulleys reduce effort. The combination of these two pulleys is connected to the drum and the lifting device via the wire rope, achieving both effort reduction and force direction change. The lifting device can be a hook, grab, electromagnetic chuck, or other structure suitable for connection to the electron beam mirror; this application does not limit its application to this. Additionally, the braking device may include a brake in the drive unit. Thus, controlling the brake in the drive unit controls the start or stop of the lifting assembly 30. Optionally, the braking device may also include additional braking devices such as disc brakes or band brakes mounted on the drum, so that the drum can be quickly braked in an emergency to ensure the safety of maintenance operations.

[0079] In this embodiment, the support arm 20 is rotatably connected to the support member 10, allowing the support arm 20 to rotate relative to the support member 10 between a first position and a second position. A hoisting assembly 30 for raising and lowering the electron beam mirror is mounted on the support arm 20. Therefore, when maintenance of the electron beam mirror on the machine is required, the maintenance equipment 100 can be mounted on the machine. After the hoisting assembly 30 lifts the electron beam mirror, the support arm 20 is rotated so that the support arm 20, with the hoisting assembly 30, rotates towards the opening of the machine until the lifted electron beam mirror is at the opening, facilitating maintenance by personnel. Furthermore, since the maintenance equipment 100 consists of the support member 10, the support arm 20, and the hoisting assembly 30, its structure is simple and requires low installation precision, thus facilitating the disassembly and installation of the maintenance equipment 100. Based on this, when electron beam mirrors on multiple machines require maintenance, the hoisting equipment can sequentially lift the electron beam mirrors from multiple machines, facilitating maintenance by personnel. Therefore, compared to the related technologies that set guide rails and motors on each machine, the maintenance equipment 100 of this application embodiment does not need to be set on each machine, thereby reducing the maintenance cost of the electron beam mirror.

[0080] Understandably, when the distance between the electron beam mirror's mounting position on the machine and the machine's opening is fixed, the arm length and rotation angle of the support arm 20 must be coordinated when the maintenance equipment 100 needs to hoist the electron beam mirror to the opening. That is, when the rotation angle range is large, such as greater than 60° and less than 300°, the support arm 20 can cover a larger spatial area during rotation. While meeting the spatial requirements for electron beam mirror operation, compared to cases with smaller rotation angles, the arm length can be appropriately shortened. This facilitates the miniaturization of the maintenance equipment 100, thereby reducing its weight and making its installation, disassembly, and relocation easier.

[0081] For example, when the distance between the electron beam mirror's mounting position on the machine and the machine is M, if the rotation angle of the support arm 20 is 60°, then theoretically, an arm length of M is sufficient to lift the electron beam mirror to the opening. However, if the rotation angle of the support arm 20 is 90°, then theoretically, the arm length of the electron beam mirror would be... This allows the electron beam mirror to be lifted to the opening.

[0082] In some embodiments of this application, the rotation angle of the support arm 20 is greater than 150° and less than 210°. This allows the support arm 20 to cover a larger spatial area during rotation. While meeting the spatial requirements for operating the electron beam mirror, the arm length can be appropriately shortened compared to a smaller rotation angle, thus facilitating the miniaturization of the maintenance equipment 100, reducing its weight, and simplifying its installation, disassembly, and relocation. For example, when the distance from the electron beam mirror's mounting position on the machine is M, if the rotation angle of the support arm 20 is 180°, then theoretically, an arm length of half M is sufficient to lift the electron beam mirror to the opening.

[0083] Please see Figure 1 , Figure 4 and Figure 5 , Figure 4 Provided for the embodiments of this application Figure 1 A magnified view of a portion of the image. Figure 5 Provided for the embodiments of this application Figure 1The front view of the maintenance equipment is shown. In some embodiments of this application, the maintenance equipment 100 further includes: a first connecting component 40 connected to the support member 10; a first mating portion 40A formed on the first connecting component 40; and a second mating portion 20A formed on the support arm 20. The first mating portion 40A and the second mating portion 20A engage to rotatably connect the support arm 20 to the support member 10. Thus, by engaging the first mating portion 40A on the first connecting component 40 and the second mating portion 20A on the support arm 20, the support arm 20 is rotatably connected to the support member 10. Therefore, the support arm 20 can cover a larger spatial area during rotation, facilitating the hoisting of the electron beam mirror on the machine platform.

[0084] In some embodiments of this application, the first connecting component 40 includes: a first limiting portion 41 and a second limiting portion 42 spaced apart, both of which are connected to the support member 10. The connection methods between the first limiting portion 41 and the second limiting portion 42 and the support member 10 can be the same or different; this application does not address this. Optionally, the first limiting portion 41 and the second limiting portion 42 can be fixedly connected to the support member 10 by means of adhesion, threaded connection, welding, snap-fit, etc. Optionally, the first limiting portion 41 and the second limiting portion 42 can also be integrally formed with the support member 10, that is, the first limiting portion 41 and the second limiting portion 42 and the support member 10 are a single structural component.

[0085] In addition, the first limiting part 41 has a first mounting hole 411 on the side facing the second limiting part 42, and the second limiting part 42 has a second mounting hole 421 on the side facing the first limiting part 41. The first mounting hole 411 and the second mounting hole 421 are coaxially arranged; the first mounting hole 411 and the second mounting hole 421 constitute the first mating part 40A. The axial direction of the first mounting hole 411 and the second mounting hole 421 can be consistent with the axial direction of the support column (i.e., the support member 10), that is, the central axis of the first mounting hole 411 and the second mounting hole 421 can be parallel to the central axis of the support column, or the central axis of the first mounting hole 411 and the second mounting hole 421 can intersect with the central axis of the support column, and the included angle is less than or equal to 20°.

[0086] In addition, the second mating part 20A includes a first protrusion 20A1 and a second protrusion 20A2 disposed opposite to each other. The first protrusion 20A1 is rotatably disposed in the first mounting hole 411, and the second protrusion 20A2 is disposed in the second mounting hole 421. That is, the first protrusion 20A1 is in clearance fit with the first mounting hole 411, and the second protrusion 20A2 is in clearance fit with the second mounting hole 421.

[0087] In this way, the engagement of the first protrusion 20A1 with the first mounting hole 411 and the engagement of the second protrusion 20A2 with the second mounting hole 421 allows the support arm 20 to be rotatably connected to the support member 10. Since the first limiting part 41 and the second limiting part 42 are spaced apart and both connected to the support member 10, a positioning reference is provided for the installation of the support arm 20. Because the first mounting hole 411 and the second mounting hole 421 are coaxially arranged, the first protrusion 20A1 and the second protrusion 20A2 can be accurately installed in the corresponding holes (i.e., the first mounting hole 411 and the second mounting hole 421), ensuring the accuracy and stability of the rotation axis of the support arm 20. Furthermore, it reduces additional friction and wear caused by axis deviation, improving the flexibility and precision of the rotation of the support arm 20.

[0088] In one possible structural design, the first connecting assembly 40 further includes: a first body 43 and a second body 44. The first body 43 is connected to the first limiting part 41 and the support member 10. The first body 43 has a through hole 431, and a portion of the support member 10 passes through the through hole 431. The second body 44 is connected to the second limiting part 42 and the support member 10. The second body 44 has a receiving groove, and the end of the support member 10 is located in the receiving groove. The receiving groove on the second body 44 faces the first body 43.

[0089] Since the first body 43 connects the first limiting part 41 and the support member 10, and part of the support member 10 passes through the through hole 431, a portion of the support member 10 is nested within the first limiting part 41. This effectively distributes the load borne by the connection part, preventing loosening or detachment under stress. Similarly, the second body 44 engages with the end of the support member 10 through a receiving groove, further enhancing the connection strength between the second limiting part 42 and the support member 10. Thus, the cooperation between the first limiting part 41, the second limiting part 42, and the support member 10 improves the connection stability between the first connecting assembly 40 and the support member 10, ensuring that the first connecting assembly 40 can reliably transmit force during the rotation of the bearing arm 20, thus guaranteeing the stability and safety of the maintenance equipment 100.

[0090] Optionally, the first body 43 and the second body 44 are spaced apart, thus providing the necessary space for the rotation of the support arm 20. The support arm 20 is not interfered with by the first body 43 and the second body 44 during rotation, and can freely adjust its angle around the rotation axis, ensuring that the support arm 20 can flexibly achieve its predetermined rotation function. Optionally, the first body 43 and the second body 44 can also be in contact, which is not limited in this application.

[0091] In another possible structural design, the first connecting assembly 40 further includes a connecting body, which has a groove suitable for accommodating the end of a support column. The end of the support column is disposed within the groove, and the support column is connected to the connecting body. The connecting body is connected to the first limiting part 41 and the second limiting part 42. In this way, the connection strength between the connecting body and the support column is high, which is beneficial to improving the overall strength of the maintenance equipment 100.

[0092] To reduce the overall weight of the maintenance setup and facilitate the disassembly, installation, and relocation of the maintenance equipment 100, in one possible structural design, the first limiting part 41 includes a first limiting part 41A, which has a first mounting hole 411. The second limiting part 42 includes a second limiting part 42A, which has a second mounting hole 421. Thus, both the first limiting part 41A and the second limiting part 42A are plate-like structures, avoiding complex structural forms and excessive redundant parts. Furthermore, the plate-like structure reduces the overall weight of the maintenance equipment 100.

[0093] In other possible structural designs, the first limiting part 41 and the second limiting part 42 may also be block-shaped, column-shaped, spherical or tubular, etc., and this application does not limit them.

[0094] To improve the connection strength between the first limiting part 41A and the first body 43, and between the second limiting part 42A and the second body 44, in some embodiments of this application, the first connecting assembly 40 may further include: a first reinforcing plate 45 and a second reinforcing plate 46. The first reinforcing plate 45 is disposed on the side of the first limiting part 41A opposite to the second limiting part 42A, and is connected to the first limiting part 41A and the first body 43. The second reinforcing plate 46 is disposed on the side of the second limiting part 42A opposite to the first limiting part 41A, and is connected to the second limiting part 42A and the second body 44.

[0095] It should be noted that one or more of the first reinforcing plate 45 and the second reinforcing plate 46 can be provided. This application does not limit this. For example, Figure 4 As shown, there are two first reinforcing plates 45, and the two first reinforcing plates 45 are spaced apart.

[0096] Since the first reinforcing plate 45 connects the first limiting part 41A and the first body 43, and the second reinforcing plate 46 connects the second limiting part 42A and the second body 44, the connection strength between the first limiting part 41A and the first body 43 and the connection strength between the second limiting part 42A and the second body 44 can be effectively improved. Therefore, during the operation of the maintenance equipment 100, when the bearing arm 20 is subjected to external force, the reinforcing plate can share part of the force, reduce the stress at the connection between the first limiting part 41A and the first body 43 and the connection between the second limiting part 42A and the first body 43, prevent the components from deforming, cracking or being damaged due to excessive force, thereby extending the service life of the first connecting assembly 40 and ensuring the reliable operation of the maintenance equipment 100.

[0097] In some other embodiments of this application, the first connecting assembly 40 includes a fixed shaft connected to the support column. The extension direction of the fixed shaft may be consistent with the extension direction of the support shaft, that is, the central axes of the fixed shaft and the support shaft may be parallel to the central axis of the support column, or the central axis of the fixed shaft may intersect with the central axis of the central support, with an included angle less than or equal to 20°. The fixed shaft includes a first end and a second end disposed opposite to each other, the first end and the second end constituting at least a portion of the first mating part 40A. The bearing arm 20 includes: a first fixing plate and a second fixing plate disposed at intervals, the first fixing plate having a first limiting hole on the side facing the second fixing plate, and the second limiting part 42 having a second limiting hole on the side facing the first limiting part 41. The first limiting hole and the second limiting hole are coaxially disposed, and the first limiting hole and the second limiting hole constitute at least a portion of the second mating part 20A. The first end is clearance-fitted with the first limiting hole, and the second end is clearance-fitted with the second limiting hole, so that the bearing arm 20 is rotatably connected to the first connecting assembly 40.

[0098] Figure 6 The embodiments provided in this application are shown. Figure 1 A schematic diagram of the structure of the maintenance equipment is shown below. Figure 2 , Figure 4 , Figure 5 and Figure 6As shown, in some embodiments of this application, the support arm 20 includes an arm body 21 and an extension 22. The arm body 21 is connected to the lifting assembly 30. For example, the arm body 21 can be rotatably connected to the pulley of the lifting assembly 30 via a connecting shaft. The extension 22 is connected to the arm body 21. A first protrusion 20A1 and a second protrusion 20A2 are provided on opposite sides of the extension 22. The first protrusion 20A1 is clearance-fitted with a first mounting hole 411, and the second protrusion 20A2 is clearance-fitted with a second mounting hole 421, thereby allowing the extension 22 to be rotatably connected to the first connecting assembly 40. The arm body 21 and the extension 22 can be plate-like, block-like, strip-like, or irregular three-dimensional structures; this application does not limit their specific features.

[0099] The supporting arm 20 may further include a connecting portion 23, which is located on the side of the extension 22 opposite to the support member 10. The connecting portion 23 is connected to the extension 22. The extension 22 and the connecting portion 23 can be fixedly connected by means of adhesive bonding, threaded connection, welding, snap-fit, etc. Optionally, the extension 22 and the connecting portion 23 can also be an integrally formed structure, that is, the extension 22 and the connecting portion 23 are a single structural component. In addition, the arm body 21 is rotatably connected to the connecting portion 23. Optionally, the connecting portion 23 can be a plate-like structure, a block-like structure, a strip-like structure, or an irregular three-dimensional structure; this application does not limit this.

[0100] Since the arm 21 is rotatably connected to the connecting part 23, when the maintenance equipment 100 is not in use, the arm 21 can be rotated to fit close to the extension part 22 or the support member 10, thereby reducing the extension length of the load-bearing arm 20, effectively saving horizontal space, avoiding it from occupying too much space in limited spaces such as workshops, and making the site layout more compact.

[0101] In one possible structural design, the maintenance device 100 further includes a rotating shaft 50, which is rotatably connected to the connecting part 23, and the arm body 21 is fixedly connected to the rotating shaft 50.

[0102] For example, the maintenance device 100 may include a first limiting plate and a second limiting plate connected to the connecting portion 23. The first limiting plate and the second limiting plate are spaced apart. The first limiting plate has a first limiting groove on the side facing the second limiting plate, and the second limiting plate has a second limiting groove on the side facing the second limiting plate. The opposite ends of the rotating shaft 50 are respectively clearance-fitted with the first limiting groove and the second limiting groove, so that the rotating shaft 50 is rotatably connected to the first limiting plate and the second limiting plate. In this way, the arm body 21 can be rotatably connected to the connecting portion 23, saving the space occupied by the maintenance device 100 and facilitating the transportation and placement of the maintenance device 100.

[0103] In another possible structural design, the maintenance device 100 further includes a rotating shaft 50, which is fixedly connected to the connecting portion 23, and the arm body 21 is rotatably connected to the rotating shaft 50. For example, the arm body 21 may be provided with a through hole, through which the rotating shaft 50 passes, and the rotating shaft 50 is clearance-fitted with the through hole, thereby allowing the arm body 21 to be rotatably connected to the connecting portion 23.

[0104] In some embodiments of this application, the arrangement direction of the first limiting part 41 and the second limiting part 42 is consistent with the extension direction of the support member 10. That is, the arrangement direction of the first limiting part 41 and the second limiting part 42 can be parallel to the extension direction of the support member 10 (i.e., the axial direction of the support column), or the arrangement direction of the first limiting part 41 and the second limiting part 42 can intersect with the extension direction of the support column, and the included angle is less than or equal to 20°. The axial direction of the rotating shaft 50 is perpendicular to the arrangement direction of the first limiting part 41 and the second limiting part 42. Specifically, the axial direction of the rotating shaft 50 being perpendicular to the arrangement direction of the first limiting part 41 and the second limiting part 42 includes: the axial direction of the rotating shaft 50 being perpendicular to the arrangement direction of the first limiting part 41 and the second limiting part 42, and the axial direction of the rotating shaft 50 being approximately perpendicular to the arrangement direction of the first limiting part 41 and the second limiting part 42. Wherein, the axial direction of the rotating shaft 50 being approximately perpendicular to the arrangement direction of the first limiting part 41 and the second limiting part 42 means that the axial direction of the rotating shaft 50 is less than 100° and greater than 80° from the arrangement direction of the first limiting part 41 and the second limiting part 42.

[0105] Since the axis of the rotating shaft 50 is perpendicular to the arrangement direction of the first limiting part 41 and the second limiting part 42, when the maintenance equipment 100 is not in use, the arm body 21 can be rotated so that the arrangement direction of the arm body 21 is consistent with the extension direction of the support member 10. In this way, the extension length of the bearing arm 20 in the horizontal direction is reduced, effectively saving horizontal space and avoiding it from occupying too much lateral space in limited spaces such as workshops, making the site layout more compact.

[0106] Figure 7 The embodiments provided in this application are shown. Figure 5 The diagram shown is a schematic of the folded maintenance equipment. Figure 5 , Figure 6 and Figure 7 As shown, in some embodiments of this application, the connecting part 23 includes a first wall surface 231 and a second wall surface 232 arranged opposite to each other. The arrangement direction of the first wall surface 231 and the second wall surface 232 is consistent with the arrangement direction of the first limiting part 41 and the second limiting part 42. The consistency of the arrangement direction can be referred to the above description of the consistency of the arrangement direction, which will not be repeated in this application.

[0107] For example, along the extension direction (vertical direction) of the support column, the first limiting part 41 and the second limiting part 42 are arranged sequentially from bottom to top, and the first wall surface 231 and the second wall surface 232 are also arranged sequentially from bottom to top.

[0108] Additionally, a rotating shaft 50 is provided on the first wall surface 231, and the rotating shaft 50 is rotatably connected to the first wall surface 231. The arm body 21 is fixedly connected to the rotating shaft 50. The arm body 21 includes a main body 211 and a connecting arm 212. The main body 211 includes a third wall surface 2111 and a fourth wall surface 2112 arranged opposite to each other. The arrangement direction of the third wall surface 2111 and the fourth wall surface 2112 is consistent with the arrangement direction of the first wall surface 231 and the second wall surface 232. The connecting arm 212 is fixedly connected to the third wall surface 2111 and the rotating shaft 50.

[0109] For example, along the extension direction (vertical direction) of the support column, the first wall surface 231 and the second wall surface 232 are also arranged from bottom to top, and the third wall surface 2111 and the fourth wall surface 2112 are also arranged from bottom to top.

[0110] Since the connecting arm 212 is fixedly connected to the third wall surface 2111 and the rotating shaft 50 is rotatably connected to the first wall surface 231, the arm body 21 is rotatably connected to the lower wall surface of the connecting part 23. Thus, when the maintenance equipment 100 is not in use, the arm body 21 can rotate, allowing the arm body 21 to abut against the support member 10 and share the vertical space occupied by the support member 10. This helps to reduce the space occupied by the maintenance equipment 100 in the horizontal and vertical directions, avoiding it from occupying too much space in limited spaces such as workshops, and making the site layout more compact.

[0111] In some embodiments of this application, the maintenance device 100 further includes a connecting assembly 60, adapted to detachably connect the body 211 to the connecting portion 23. Thus, when the maintenance device 100 is needed to suspend the electron beam mirror, the body 211 can be connected to the connecting portion 23 via the connecting assembly 60, allowing the body 211 to support the electron beam mirror. When the maintenance device 100 is not needed, the arm 21 can be rotated, reducing the space occupied by the maintenance device 100 in both the horizontal and vertical directions.

[0112] In one possible structural design, the connecting assembly 60 includes a connector 61, which is fixedly connected to the fourth wall surface 2112. A portion of the connector 61 is located on the side of the second wall surface 232 opposite to the first wall surface 231 and is detachably connected to the second wall surface 232. For example, the connector 61 can be a plate-like structure, a block-like structure, etc., and this application does not limit this. In another possible structural design, the connector 61 can also be fixedly connected to the first wall surface 231 and detachably connected to the fourth wall surface 2112.

[0113] In this way, when the main body 211 is subjected to external force (i.e., the gravity of the electron beam mirror), the detachable second wall surface 232, when the connection is stable, can work together with the rotatable connection (i.e., the arm body 21 can be rotatably connected to the connection part 23) to distribute the force to the entire structure, thereby improving the overall structure's ability to withstand external forces in different directions and enhancing the overall strength.

[0114] In some embodiments of this application, the support member 10 includes a first end 11 and a second end 12 disposed opposite to each other, the first end 11 being connected to the first connecting component 40; the maintenance device 100 also includes a base 70, the base 70 being connected to the second end 12.

[0115] Thus, the first end 11 and the second end 12, which are positioned opposite each other, are connected to different components, giving the support member 10 the function of support and connection. That is, the support member 10 can effectively connect the first connecting component 40 and the base 70 together, preventing relative displacement or shaking between the two, thereby enhancing the stability of the entire maintenance equipment 100 structure.

[0116] In some embodiments of this application, the base 70 includes a base plate 70A, and the maintenance device 100 further includes a third reinforcing plate 80 and a fourth reinforcing plate 90 disposed on opposite sides of the support member 10, wherein the third reinforcing plate 80 and the fourth reinforcing plate 90 are both connected to the support member 10 and the base plate 70A.

[0117] Because reinforcing plates are provided on both sides of the support member 10, they effectively provide additional lateral support for the support member 10. This helps prevent the support member 10 from bending or deforming laterally under stress, allowing it to transmit force to the base plate 70A more stably, thereby enhancing the overall support stability of the maintenance equipment 100. Furthermore, the reinforcing plates increase the rigidity of the connection between the support member 10 and the base plate 70A, restraining deformation of both components and making the entire structure more robust under stress, reducing elastic or plastic deformation caused by external forces.

[0118] Figure 8 The embodiments provided in this application are shown. Figure 1 A top view of the maintenance equipment. In some embodiments of this application, the base plate 70A is provided with a connection hole 71, which is adapted to connect with the equipment for mounting the electron beam mirror. For example, the connection hole 71 can be connected to the vacuum chamber cover of the machine tool. For example, the vacuum chamber cover is provided with a threaded hole, and the threaded hole and the connection hole 71 of the base 70 are arranged opposite to each other, and the two can be fixedly connected by a structure such as screws or bolts.

[0119] Thus, the connection hole 71 provides a reliable connection point between the machine base and the base plate 70A. By using a suitable connection structure (such as bolts, screws, etc.) through the connection hole 71, the base plate 70A can be firmly fixed to the machine base, preventing the maintenance equipment 100 from loosening or shifting during use, and ensuring the stability and reliability of the maintenance equipment 100.

[0120] The above examples of preferred embodiments have further detailed the purpose, technical solution and advantages of this utility model. It should be understood that the above description is only a preferred embodiment of this utility model and is not intended to limit this utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A maintenance device for an electron beam microscope, characterized in that, include: Support components; The support arm is rotatably connected to the support member and can rotate relative to the support member between a first position and a second position. The rotation angle of the support arm from the first position to the second position is greater than 60° and less than 300°. A hoisting assembly, at least a portion of which is mounted on the support arm, for raising and lowering the electron beam mirror.

2. The maintenance equipment according to claim 1, characterized in that, The rotation angle of the bearing arm is greater than 150° and less than 210°.

3. The maintenance equipment according to claim 1 or 2, characterized in that, include: A first connecting component is connected to the support member. A first mating portion is formed on the first connecting component, and a second mating portion is formed on the bearing arm. The first mating portion and the second mating portion engage to allow the bearing arm to be rotatably connected to the support member.

4. The maintenance equipment according to claim 3, characterized in that, The first connecting component includes: a first limiting part and a second limiting part spaced apart, both the first limiting part and the second limiting part being connected to the support member; The first limiting part has a first mounting hole on the side facing the second limiting part, and the second limiting part has a second mounting hole on the side facing the first limiting part. The first mounting hole and the second mounting hole are coaxially arranged; the first mounting hole and the second mounting hole constitute the first mating part. The second mating part includes: a first protrusion and a second protrusion disposed opposite to each other, the first protrusion being rotatably disposed in the first mounting hole, and the second protrusion being disposed in the second mounting hole.

5. The maintenance equipment according to claim 4, characterized in that, The first connection component further includes: A first body is connected to the first limiting part and the support member. A through hole is provided on the first body, and a portion of the support member passes through the through hole. The second body is connected to the second limiting part and the support member. The second body is provided with a receiving groove, and the end of the support member is located in the receiving groove.

6. The maintenance equipment according to claim 5, characterized in that, The first connection component further includes: A first reinforcing plate is disposed on the side of the first limiting portion away from the second limiting portion, and is connected to the first limiting portion and the first body; The second reinforcing plate is disposed on the side of the second limiting portion away from the first limiting portion, and is connected to the second limiting portion and the second body.

7. The maintenance equipment according to claim 4, characterized in that, The support arm includes: The boom body is connected to the lifting assembly; An extension portion is connected to the arm body, and a first protrusion and a second protrusion are provided on opposite sides of the extension portion.

8. The maintenance equipment according to claim 7, characterized in that, The support arm further includes a connecting part, which is located on the side of the extension away from the support member. The connecting part is connected to the extension, and the arm body is rotatably connected to the connecting part.

9. The maintenance equipment according to claim 8, characterized in that, The maintenance equipment also includes a rotating shaft, which is rotatably connected to the connecting part, and the arm body is fixedly connected to the rotating shaft.

10. The maintenance equipment according to claim 9, characterized in that, The connecting part includes: a first wall surface and a second wall surface arranged opposite to each other, wherein the arrangement direction of the first wall surface and the second wall surface is consistent with the arrangement direction of the first limiting part and the second limiting part; A rotating shaft is provided on the first wall surface, and the rotating shaft is rotatably connected to the first wall surface, and the arm body is fixedly connected to the rotating shaft.

11. The maintenance equipment according to claim 10, characterized in that, The arm body includes: The body includes a third wall and a fourth wall arranged opposite to each other, and the arrangement direction of the third wall and the fourth wall is consistent with the arrangement direction of the first wall and the second wall. A connecting arm is fixedly connected to the third wall and the rotating shaft.

12. The maintenance equipment according to claim 11, characterized in that, Also includes: A connector is fixedly connected to the fourth wall surface, with a portion of the connector located on the side of the second wall surface opposite to the first wall surface, and is detachably connected to the second wall surface.

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