Visual inspection device for substrate slice

Abstract

The utility model discloses a substrate slice visual inspection device which comprises a base, a rotating part, a carrying table, an adjusting part, a telescopic part and a control part, the rotating part is installed on the base, a shell is installed on the upper portion of the rotating part, and at least three first strip-shaped holes are evenly distributed in the side wall of the shell in the circumferential direction; the carrying table is installed on the top of the shell, at least three strip-shaped grooves are evenly distributed in the upper portion of the carrying table in the radial direction, and second strip-shaped holes are formed in the bottoms of the strip-shaped grooves. The adjusting part comprises an adjusting nut, an adjusting screw rod and a driving piece, the driving piece is installed on the rotating piece, and the adjusting nut is arranged on the adjusting screw rod in a sleeving mode; the telescopic part comprises a stretching rod and a sliding block, the sliding block is installed in the strip-shaped groove, a supporting column is installed at the top of the sliding block, one end of the stretching rod penetrates through the first strip-shaped hole to be hinged to the side wall of the adjusting nut, and the other end penetrates through the second strip-shaped hole to be hinged to the bottom of the sliding block; the control part is electrically connected with the driving part. According to the utility model, the substrate slices with various sizes can be carried, so that the surface and edge positions of the substrate slices can be checked.

Description

Technical Field

[0001] This utility model relates to a visual inspection device, specifically a substrate visual inspection device, belonging to the technical field of substrate inspection equipment. Background Technology

[0002] In the substrate manufacturing process, edge defect detection is a critical step, designed to ensure that the product is free from any issues that could affect subsequent production stages or the final product quality, such as edge breakage, scratches, missing corners, or surface unevenness. Currently, the common method is to place the substrate on an inspection stage, then use a microscope aligned with the stage, rotating the stage to inspect the surface and edge defects of the substrate. However, existing stages have fixed dimensions and cannot support substrates of different sizes. Therefore, companies need to customize stages of corresponding sizes for different substrate sizes, which to some extent leads to cost waste. Summary of the Invention

[0003] To address the problems existing in the prior art, this utility model provides a substrate inspection device that can carry substrates of various sizes for inspecting the surface and edge positions of the substrates.

[0004] To achieve the above objectives, this utility model provides a substrate inspection device, comprising a base, a rotating component, a stage, an adjusting component, a telescopic component, and a control component. The rotating component is mounted on the base and is rotatable relative to the base. A housing is mounted on the upper part of the rotating component, and at least three first strip-shaped holes are evenly distributed circumferentially on the sidewall of the housing. The stage is mounted on the top of the housing, and at least three strip-shaped grooves are evenly distributed radially on the upper part of the stage, with a second strip-shaped hole at the bottom of each groove. The adjusting component is placed inside the housing and includes an adjusting nut, an adjusting screw, and a driving component. The driving component is mounted on the rotating component, and the bottom of the adjusting screw is connected to the driving component. The adjusting nut is fitted onto the adjusting screw. The telescopic component includes a tension rod and a slider. The slider is mounted in the strip-shaped groove, and a support column for supporting the substrate is mounted on the top of the slider. One end of the tension rod passes through the first strip-shaped hole and is hinged to the sidewall of the adjusting nut, and the other end passes through the second strip-shaped hole and is hinged to the bottom of the slider. The control component is electrically connected to the driving component and a power source.

[0005] In some embodiments, the control component of this utility model includes a controller and a control panel, the control panel including an up button, a down button and a stop button, and the controller is electrically connected to the drive component and the control panel respectively.

[0006] In some embodiments, the control component of this utility model includes a controller and an input panel. The input panel includes a size key and a reset key. The controller has pre-stored different sizes and the corresponding number of rotations of the stepper motor. The controller is used to receive the size information transmitted by the input panel and control the stepper motor to work so that the support column reaches the position of the corresponding size.

[0007] In some embodiments, the rotating component of this utility model has a cylindrical structure, and the upper surface of the base is provided with a mounting groove, and the rotating component is mounted in the mounting groove by bearings.

[0008] In some embodiments, the driving component of this invention is a stepper motor, and the support column is a conical structure.

[0009] Compared with the prior art, this utility model achieves stepless adjustment. Through the combined action of the control component, adjustment component and telescopic component, the position of the support column is adjusted to adapt to substrates of different sizes. The adjustment method is simple and convenient, and it is easy to perform 360° inspection of the surface and edges of the substrate. Attached Figure Description

[0010] Figure 1 This is a schematic diagram of the structure of a substrate inspection device according to an embodiment of the present invention;

[0011] Figure 2 This is a schematic diagram of the structure of a substrate inspection device according to an embodiment of the present invention;

[0012] Figure 3 This is a top view of the stage of a substrate inspection device according to an embodiment of the present invention;

[0013] Figure 4 This is a side view of the housing of a substrate inspection device according to an embodiment of the present invention;

[0014] Figure 5 This is a schematic diagram of the connection between the tensioning component and the slider in a substrate inspection device according to an embodiment of this utility model;

[0015] Figure 6 This is a schematic diagram of the control panel of a substrate inspection device according to an embodiment of the present invention;

[0016] Figure 7 This is a schematic diagram of the input panel of a substrate inspection device according to an embodiment of the present invention.

[0017] In the picture:

[0018] 1000: Substrate inspection device;

[0019] 100: Base;

[0020] 200: Adjusting component; 210: Driving component; 220: Adjusting screw; 230: Adjusting nut

[0021] 300: Telescopic component; 301: Tension rod; 302: Slider;

[0022] 400: Stage; 401: Strip groove; 4011: Second strip hole;

[0023] 500: Support column;

[0024] 600: Controller; 601: Control Panel; 602: Input Panel;

[0025] 700: Rotating component;

[0026] 800: Housing; 801: First strip hole;

[0027] 900: Substrate. Detailed Implementation

[0028] The embodiments of this utility model are described in detail below. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this utility model, and should not be construed as limiting this utility model.

[0029] The following disclosure provides numerous different embodiments or examples for implementing various structures of the present invention. To simplify the disclosure, specific examples of components and arrangements are described below. These are merely examples and are not intended to limit the scope of the invention. Furthermore, reference numerals and / or letters may be repeated in different examples. Such repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed. In addition, examples of various specific processes and materials are provided in this invention; however, those skilled in the art will recognize the applicability of other processes and / or the use of other materials.

[0030] Example 1

[0031] The following is for reference. Figures 1-7 The substrate wafer 900 visual inspection device 1000 according to an embodiment of the present invention includes a base 100, a rotating component 700, a stage 400, an adjusting component 200, a telescopic component 300, and a control component. The rotating component 700 is mounted on the base 100 and is rotatable relative to the base 100. A housing 800 is mounted on the upper part of the rotating component 700. Referring to Figure 4, three first strip-shaped holes 801 are evenly distributed circumferentially on the side wall of the housing 800. The stage 400 is mounted on the top of the housing 800. Figure 3 As shown, the upper part of the stage 400 has three radially evenly distributed strip-shaped grooves 401. Each strip-shaped groove 401 has a second strip-shaped hole 4011 at its bottom. The adjusting component 200 is placed inside the housing 800. The adjusting component 200 includes an adjusting nut 230, an adjusting screw 220, and a driving component 210. The driving component 210 is mounted on the rotating component 700. The bottom of the adjusting screw 220 is connected to the driving component 210, and the adjusting nut 230 is fitted onto the adjusting screw 220. Specifically, in this embodiment, the driving component 210 is a stepper motor. The stepper motor drives the adjusting screw 220 to rotate, thereby causing the adjusting nut 230 to move on the adjusting screw 220. The telescopic component 300 includes a tension rod 301 and a slider 302. The slider 302 is installed in the strip-shaped groove 401. A support column 500 for supporting the substrate 900 is installed on the top of the slider 302. (Refer to...) Figure 1 and Figure 5 As shown, one end of the tension rod 301 passes through the first strip hole 801 and is hinged to the side wall of the adjusting nut 230, and the other end passes through the second strip hole 4011 and is hinged to the bottom of the slider 302. The control component is connected to the drive component 210 and the power supply respectively. The control component is used to control the drive component 210 to work or stop working.

[0032] Specifically, in some embodiments, the control component of this utility model includes a controller 600 and a control panel 601. The control panel 601 includes an up button, a down button, and a stop button. (See reference...) Figure 6 As shown, the up button controls the adjusting nut 230 to rise, the down button controls the adjusting nut 230 to fall, and the stop button controls the drive component 210 to stop working. In this embodiment, the drive component 210 is a stepper motor, and the output end of the stepper motor is connected to the bottom of the adjusting screw 220. The controller 600 is electrically connected to both the stepper motor and the control panel 601. To facilitate the movement of the support column 500 to a designated position, markings indicating common substrate sheet 900 sizes such as 4-inch, 6-inch, and 8-inch can be made next to the strip groove 401. Since the tension rod 301, slider 302, and adjusting nut 230 in this embodiment are all connected by hinges, the tension rod 301 can rotate flexibly relative to the slider 302 or adjusting nut 230. Furthermore, for aesthetic purposes, the rotating component 700 in this embodiment can be a hollow structure, and the controller 600 is installed inside the rotating component 700.

[0033] For example, if an operator needs to inspect the surface defects of an 8-inch substrate 900, the support column 500 is moved to the 8-inch position. The operator presses the up button, and the controller 600 controls the stepper motor to rotate, causing the adjusting nut 230 to rise. The extension rod rises accordingly, pushing the slider 302 outwards (towards the edge of the stage 400) during the ascent. When the slider 302 reaches the 8-inch mark, the stop button is pressed, and the controller 600 stops the stepper motor. At this point, the support column 500 above the slider 302 also reaches the 8-inch mark. (Reference) Figure 1 As shown, the 8-inch substrate 900 to be inspected is then placed on the support column 500, and the operator then inspects the surface of the substrate 900. The edge of the substrate 900 can be inspected 360° by rotating the stage 400 to check for edge defects.

[0034] When inspecting the 6-inch substrate 900, press the down button. The controller 600 will control the stepper motor to rotate, causing the adjusting nut 230 to move downwards. The tension rod 301 will then move downwards, thereby moving the slider 302 inwards (towards the center of the stage 400). When the slider 302 reaches the 6-inch mark, press the stop button. The controller 600 will stop the stepper motor. At this point, the support column 500 will be at the 6-inch mark. (Refer to...) Figure 2 As shown, the 6-inch substrate 900 to be inspected is placed on the support column 500, and the operator then inspects the 6-inch substrate 900. Since the stage 400 is mounted on the rotating component 700 through the housing 800, the substrate 900 can be inspected 360° by rotating the stage 400.

[0035] refer to Figure 1 and Figure 2 As shown, in some embodiments, the rotating component 700 of this invention has a cylindrical structure, and the upper surface of the base 100 is provided with a mounting groove. The rotating component 700 is mounted in the mounting groove by bearings. In this embodiment, the rotating component 700 is mounted in the mounting groove by bearings, which reduces the friction between the rotating component 700 and the side wall of the mounting groove. This extends the service life of the rotating component 700 and makes the rotation of the rotating component 700 smoother.

[0036] In some embodiments, the support column 500 of this invention has a conical structure, which reduces the contact area with the substrate 900, thereby reducing damage to the substrate 900.

[0037] This invention can support substrates 900 of multiple sizes, enabling surface defect inspection of substrates 900 of different sizes without requiring a separate inspection stage 400 for each size of substrate 900, thus effectively saving production costs for enterprises.

[0038] Example 2

[0039] Example 2 is largely the same as Example 1, except that: (Refer to...) Figure 7 As shown, the control component in this embodiment includes an input panel 602, which is a touchscreen panel. The input panel 602 has size keys for commonly used 4-inch, 6-inch, 8-inch, and 12-inch substrates 900, as well as a reset button. The input panel 602 is electrically connected to a controller 600. The controller 600 pre-stores different sizes and their corresponding stepper motor rotation counts. The controller 600 receives the size information transmitted from the input panel 602 and controls the stepper motor to operate, causing the support column 500 to reach the corresponding size position. Specifically, when an operator needs to inspect an 8-inch substrate 900, they first press the reset button to reset the stepper motor, returning it to its initial state. (Refer to...) Figure 3 As shown, then click the 8-inch button on the input panel 602. After receiving the size information, the controller 600 controls the stepper motor to rotate. When it rotates to the number of revolutions corresponding to 8 inches, it stops rotating. At this time, the support column 500 stops at the 8-inch position. Place the 8-inch substrate 900 on the support column 500, and the staff can check the surface defects of the substrate 900.

[0040] When the staff needs to inspect the 6-inch substrate 900, the steps are the same as above. First, click the reset button on the input panel 602, and then click the 6-inch button on the input panel 602. After receiving the size information, the controller 600 controls the stepper motor to rotate. When the support column 500 reaches the 6-inch position, the controller 600 controls the stepper motor to stop working. The staff can then place the 6-inch substrate 900 on the support column 500 to inspect the surface defects of the substrate 900.

[0041] This embodiment is simpler. Each time the stage 400 is adjusted to support different substrates 900, it only needs to be reset first, and then the corresponding size is clicked on the input panel 602. Under the combined action of the stepper motor, adjusting screw 220, adjusting nut 230, tension rod 301, and slider 302, the corresponding size position can be reached. Compared with Embodiment 1, the adjustment method of this embodiment is simpler and faster, requiring no manual control and improving the accuracy of adjustment.

[0042] Other components of the substrate 900 inspection device 1000 according to embodiments of the present invention, such as the stage 400, rotating component 700, stepper motor and bearings, as well as their operation, are known to those skilled in the art and will not be described in detail here.

[0043] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0044] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0045] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a communication connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0046] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0047] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0048] Although embodiments of the present invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A substrate inspection device, characterized in that, include Base; A rotating component is mounted on the base and is rotatable relative to the base. A housing is mounted on the upper part of the rotating component, and at least three first strip-shaped holes are evenly distributed around the side wall of the housing. A platform is mounted on the top of the housing. At least three strip-shaped grooves are radially evenly distributed on the upper part of the platform, and a second strip-shaped hole is provided at the bottom of the strip-shaped grooves. An adjusting component is disposed within the housing. The adjusting component includes an adjusting nut, an adjusting screw, and a driving component. The driving component is mounted on the rotating component. The bottom of the adjusting screw is connected to the driving component. The adjusting nut is fitted onto the adjusting screw. The telescopic component includes a tension rod and a slider. The slider is installed in the strip groove. A support column for supporting the substrate is installed on the top of the slider. One end of the tension rod passes through the first strip hole and is hinged to the side wall of the adjusting nut. The other end passes through the second strip hole and is hinged to the bottom of the slider. A control component, which is electrically connected to both the drive component and the power supply.

2. The substrate inspection device according to claim 1, characterized in that, The control component includes a controller and a control panel. The control panel includes an up button, a down button, and a stop button. The controller is electrically connected to the drive component and the control panel, respectively.

3. The substrate inspection device according to claim 1, characterized in that, The control component includes a controller and an input panel. The input panel includes a dimension key and a reset key. The controller has pre-stored different dimensions and their corresponding number of rotations of the stepper motor. The controller is used to receive dimension information transmitted from the input panel and control the stepper motor to work so that the support column reaches the position of the corresponding dimension.

4. A substrate inspection device according to claim 2 or 3, characterized in that, The rotating component has a cylindrical structure, and the upper surface of the base has a mounting groove. The rotating component is mounted in the mounting groove by bearings.

5. A substrate inspection device according to claim 2 or 3, characterized in that, The driving component is a stepper motor, and the support column is a conical structure.

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