Two-dimensional galvanometer scanning device

Abstract

The utility model discloses a two-dimensional galvanometer scanning device which comprises a resonant scanning galvanometer and a non-resonant scanning galvanometer which are matched with each other for imaging, a reflector mounting frame of the resonant scanning galvanometer comprises a plurality of sub-frames which are sequentially arranged in a sleeving mode from inside to outside, and the sub-frames are rotatably connected through rotating shafts. The innermost sub-frame is provided with a first side face and a second side face which are opposite to each other, the first side face is provided with an inner reflecting mirror used for reflecting light source light from the interior of the scanning galvanometer, and the second side face is provided with an outer reflecting mirror used for reflecting light source light from the exterior of the scanning galvanometer. At least two adjacent sub-frames in the reflector mounting frame are made of metal elastic sheets, and the rotating shaft between the two adjacent sub-frames made of the metal elastic sheets and the metal elastic sheets are integrally formed. By using the two-dimensional galvanometer scanning device provided by the embodiment of the invention, the scanning range can be enlarged.

Description

Technical Field

[0001] This application relates to the field of galvanometers, and in particular to a two-dimensional galvanometer scanning device. Background Technology

[0002] The two-dimensional galvanometer scanning device can achieve scanning in both horizontal and vertical directions. By controlling the coordinated operation of the horizontal and vertical directions with electronic signals, it can achieve scanning of the beam at any position in a plane.

[0003] However, existing two-dimensional galvanometer scanning devices typically use a single mirror to scan in two directions (usually the vertical X and Y axes). During installation, the light source needs to be placed near the galvanometer scanning device, but not beyond a certain distance. Therefore, this type of galvanometer scanning device has strict requirements on the installation distance of the light source, making it unsuitable for applications where the light source needs to be installed far from the scanning area of ​​the galvanometer scanning device. Furthermore, the scanning in both directions in existing two-dimensional galvanometer scanning devices is in quasi-static mode, resulting in a relatively small scanning range. Utility Model Content

[0004] In view of the technical problems existing in the prior art, this application proposes a two-dimensional galvanometer scanning device. This two-dimensional galvanometer scanning device can achieve a longer optical path, and the light source can be installed at a greater distance. Moreover, since the scanning in one direction of the two-dimensional galvanometer scanning device is a resonant point vibration scanning, a larger scanning range can be achieved.

[0005] This application provides a two-dimensional galvanometer scanning device, including a resonant scanning galvanometer and a non-resonant scanning galvanometer that cooperate with each other for imaging. The resonant scanning galvanometer's reflector mounting frame includes multiple sub-frames nested sequentially from the inside out, rotatably connected by a pivot. The innermost sub-frame has a first side and a second side facing away from each other. The first side has an inner reflector for reflecting light from a light source inside the scanning galvanometer, and the second side has an outer reflector for reflecting light from a light source outside the scanning galvanometer. At least two adjacent sub-frames in the reflector mounting frame are made of metal springs, and the pivot between two adjacent sub-frames made of metal springs is integrally formed with the metal springs. A magnet is provided on the first side. Under the action of a preset magnetic field, the sub-frame made of metal springs that resonates is the target sub-frame. The reflective surface of the scanning lens of the non-resonant scanning galvanometer faces the reflective surface of the outer reflector. Light from outside the two-dimensional galvanometer scanning device reaches a preset position after passing through the scanning lens and the outer reflector.

[0006] Optionally, the direction of the rotation axis between the target subframe and its adjacent external subframe is perpendicular to the direction of the rotation axis of the scanning lens of the non-resonant scanning galvanometer.

[0007] Optionally, the reflector mounting frame includes an inner subframe and an outer subframe. The innermost subframe is the innermost subframe. Both the inner and outer subframes are made of metal springs. The pivot is a first shaft, which is a cantilever torsion beam. The portion of the first shaft located in the outer subframe is a hollow body. The inner subframe is the target subframe.

[0008] Optionally, the reflector mounting frame includes an inner sub-frame, a middle sub-frame, and an outer sub-frame nested from the inside out. The inner and middle sub-frames are made of metal springs. The pivot includes a second shaft located between the middle and inner sub-frames. The portion of the second shaft located in the middle sub-frame is hollow. A fixing frame is provided on the outer circumference of the hollow. A pin is provided between the fixing frame and the outer sub-frame. The fixing frame drives the middle sub-frame to rotate around the pin. The direction of the pin intersects with that of the second shaft. The inner sub-frame is the target sub-frame.

[0009] Optionally, the reflector mounting frame includes an inner sub-frame, a middle sub-frame, and an outer sub-frame nested from the inside out. The outer sub-frame, middle sub-frame, and inner sub-frame are all made of metal springs. The pivot includes a third axis disposed between the outer sub-frame and the middle sub-frame, which is a hollow body formed by the outer sub-frame and the middle sub-frame. The pivot also includes a fourth axis disposed between the middle sub-frame and the inner sub-frame, with the portion located in the middle sub-frame being a hollow body. The directions of the third axis and the fourth axis intersect, and the inner sub-frame and / or the middle sub-frame are the target sub-frames.

[0010] Optionally, the outer reflector has the same shape and area as the inner subframe.

[0011] Optionally, a mounting hole is provided in the middle of the innermost sub-frame, and the internal reflector is placed in the mounting hole.

[0012] Optionally, the preset magnetic field force is generated by an energized coil disposed opposite the magnet. When the target subframe resonates, the frequency of the current flowing through the energized coil is the same as the resonant frequency of the target subframe.

[0013] Optionally, the light emitted by the external light source of the two-dimensional galvanometer scanning device first passes through the scanning lens, then through the external reflecting mirror, and finally reaches the preset position.

[0014] Optionally, the number of magnets on the first side of the inner subframe is two, and the connection direction of the two magnets is perpendicular to the rotation axis direction between the inner subframe and the outer subframe.

[0015] The scanning galvanometer in one direction of the two-dimensional galvanometer scanning device proposed in this application embodiment can realize resonant point vibration scanning, thus improving the scanning range of the two-dimensional galvanometer scanning device. Furthermore, since the two-dimensional galvanometer scanning device in this application uses two galvanometers to achieve scanning in two directions, a longer optical path can be achieved, thereby allowing the light source that generates the light beam to be placed at a position far away from the scanning area. Attached Figure Description

[0016] The preferred embodiments of this application will now be described in further detail with reference to the accompanying drawings, wherein:

[0017] Figure 1 This is a two-dimensional galvanometer scanning device according to an embodiment of this application;

[0018] Figure 2 yes Figure 1 The structural view shown is along direction A.

[0019] Figure 3 yes Figure 1 An exploded view of the resonant scanning mirror in the structure shown.

[0020] Figure 4 yes Figure 3 The rear structural view of the mirror mounting frame of the resonant scanning mirror shown in the figure.

[0021] Figure 5 This is a three-dimensional structural schematic diagram of a non-resonant scanning mirror according to an embodiment of this application;

[0022] Figure 6 This is a three-dimensional structural schematic diagram of another resonant scanning mirror according to an embodiment of this application;

[0023] Figure 7 yes Figure 6 A three-dimensional structural diagram of the mirror mounting frame of the resonant scanning mirror shown.

[0024] Figure 8 yes Figure 6 Rear structural view of the structure shown;

[0025] Figure 9 This is a scanning pattern of a resonant scanning mirror in an embodiment of this application, where both scanning directions operate in a non-resonant state;

[0026] Figure 10 This application describes a first scanning pattern where one scanning direction of a resonant scanning mirror operates in a quasi-static state and the other scanning direction operates in a resonant state.

[0027] Figure 11This application describes a second scanning pattern where one scanning direction of a resonant scanning mirror operates in a quasi-static state and the other scanning direction operates in a resonant state.

[0028] Figure 12 This is a scanning pattern of a resonant scanning mirror according to an embodiment of this application, in which both scanning directions are in a resonant state;

[0029] Figure 13 This is a scanning pattern of a resonant scanning mirror according to an embodiment of this application, in which both scanning directions are in a resonant state;

[0030] Figure 14 This is a three-dimensional structural schematic diagram of another resonant scanning mirror according to an embodiment of this application;

[0031] Figure 15 yes Figure 14 Exploded structural view of the structure shown;

[0032] Figure 16 Figure 14 A three-dimensional structural diagram of the mirror mounting frame of the resonant scanning mirror shown.

[0033] Figure 17 yes Figure 16 Rear structural view of the structure shown;

[0034] Explanation of reference numerals in the attached figures:

[0035] 100. Two-dimensional galvanometer scanning device; 101. Resonant scanning galvanometer; 1012. Mirror mounting frame; 1013. Inner sub-frame; 1014. Outer sub-frame; 105. Inner mirror; 1011. Outer mirror; 201. Light beam; 1021. Scanning lens; 202. Laser; 107. Magnet; 104. Rotating shaft; 1041. First shaft; 120. Mounting hole; 601. Base; 602. PCB board; 612. Protruding edge; 603. Light source; 604. Photocell; 605. Winding coil; 613. Light shield; 607. Washer; 608. Clamping frame; 6081. Circular hole; 609. Bolt; 102. Non-resonant scanning galvanometer; 1022. Galvanometer motor housing; 1023. Control board; 110. Third magnet; 1043. Third shaft; 1044. Fourth shaft; 111. Fourth magnet; 1042. Second shaft; 109. Pin; 1015. Intermediate subframe; 108. Fixing frame; 1071. First magnet; 1072. Second magnet; 6051. First winding coil. Detailed Implementation

[0036] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0037] In the following detailed description, reference can be made to the accompanying drawings, which form part of this application and illustrate specific embodiments of the present application. In the drawings, similar reference numerals describe substantially similar components in different figures. Specific embodiments of the present application are described in sufficient detail below to enable those skilled in the art to implement the technical solutions of the present application. It should be understood that other embodiments may also be utilized, or structural, logical, or electrical changes may be made to the embodiments of the present application.

[0038] Figure 1 This is a two-dimensional galvanometer scanning device according to an embodiment of this application. Figure 2 yes Figure 1 The structural view shown is along direction A. Combined with... Figure 1 and Figure 2 As shown, the two-dimensional galvanometer scanning device 100 includes a resonant scanning galvanometer 101 and a non-resonant scanning galvanometer 102. The reflective surface of the scanning lens 1021 of the non-resonant scanning galvanometer 102 faces the reflective surface of the outer reflector 1011 of the resonant scanning galvanometer 101. Light rays 201 from outside the two-dimensional galvanometer scanning device reach a preset position after passing through the scanning lens 1021 and the outer reflector 1011. In some embodiments of this application, the light ray 201 is a laser beam generated by a laser 202. This laser beam can reach the preset position under the reflection of the resonant and non-resonant scanning galvanometers. Optionally, in some embodiments of this application, the resonant scanning galvanometer can achieve scanning of the beam in the X-axis direction, and the non-resonant scanning galvanometer can achieve scanning of the beam in the Y-axis direction. Since the X-axis and Y-axis are perpendicular, scanning and positioning at any position on the plane defined by the X-axis and Y-axis can be achieved. Optionally, the light emitted by the external light source of the two-dimensional galvanometer scanning device first passes through the scanning lens, then through the external reflecting mirror, and finally reaches the preset position.

[0039] Figure 3 yes Figure 1 An exploded structural diagram of the resonant scanning mirror in the structure shown. Figure 4 yes Figure 3 The rear structural view of the mirror mounting frame of the resonant scanning mirror structure shown. (Combined with...) Figure 1-4As shown, the mirror mounting frame 1012 of the resonant scanning galvanometer 101 includes multiple sub-frames nested sequentially from the inside out, such as an inner sub-frame 1013 and an outer sub-frame 1014. The sub-frames are rotatably connected by a pivot 104. The innermost sub-frame has a first side and a second side facing away from each other. The first side is provided with an inner mirror 105 for reflecting light from the light source inside the resonant scanning galvanometer 101, and the second side is provided with an outer mirror 1011 for reflecting light from the light source outside the resonant scanning galvanometer 101. Optionally, the shape and area of ​​the outer mirror are the same as those of the inner sub-frame.

[0040] The reflector mounting frame has at least two adjacent sub-frames made of metal springs, and the pivot between the two adjacent sub-frames made of metal springs is integrally formed with the metal springs. A magnet 107 is provided on the first side. The sub-frame made of metal springs that resonates under the action of a preset magnetic field force is the target sub-frame. The metal springs refer to elastic metal components made of metal materials (such as stainless steel, spring steel, brass, titanium alloy, beryllium bronze, phosphor bronze, etc.). Two adjacent metal springs can be formed by hollowing out a single metal spring. In some embodiments of this application, a gap is formed between two adjacent metal springs through hollowing out. The pivot between two adjacent metal springs is a cantilever beam structure, which is also formed through hollowing out. Furthermore, the cantilever beam structure selects different materials, strengths, and stiffnesses according to different usage scenarios, exhibiting various structural forms to achieve different frequency and angle effects. In some embodiments of this application, optionally, the cantilever beam structure has a thickness of 0.2-0.5 mm and a width of 0.2-0.5 mm, and is made of titanium alloy. When the target subframe is circular with a diameter of 10-40 mm, its resonant frequency can reach 100-300 Hz. Optionally, the number of magnets on the first side of the inner subframe is two, and the connection direction of the two magnets is perpendicular to the rotation axis direction between the inner and outer subframes.

[0041] exist Figures 1-4In the illustrated embodiment, the reflector mounting frame 1012 of the resonant scanning galvanometer includes an inner sub-frame 1013 and an outer sub-frame 1014. The innermost sub-frame 1013 is the innermost sub-frame. Both the inner and outer sub-frames 1013 are made of metal springs. The pivot 104 is a first shaft 1041, which is a cantilever torsion beam. The portion of the first shaft 1041 located on the outer sub-frame is hollow. The inner sub-frame 1013 is the target sub-frame. A mounting hole 120 is provided in the middle of the inner sub-frame through a hollow design, and an inner reflector 105 is installed in the mounting hole 120. In this embodiment, the first shaft 1041 is elongated and comprises two opposing parts. The axial connecting line of these two parts passes through the inner sub-frame 1013. The portion of the first shaft 1041 located on the outer sub-frame can be formed by removing a portion of the metal spring. Magnet 107, under the influence of a magnetic field, causes the internal subframe 1013 to resonate. Since the amplitude of the metal spring is at its maximum during resonance, the reflection angle of the light source reflected by the external mirror 1011 can be increased, thus improving the scanning angle. When the internal subframe resonates, the light reflected by the resonant scanning mirror can scan rapidly along the X-axis, typically at a frequency of several hundred hertz; the light reflected by the non-resonant scanning mirror can vibrate along the Y-axis at a non-resonant frequency point, typically at a frequency of tens of hertz.

[0042] See also Figure 3 As shown, the resonant scanning mirror 101 includes at least a light-emitting component, a coil assembly, and a base 601. The light-emitting component and the coil assembly are mounted on a PCB board 602, which is fixed to the base 601. The base has a raised edge 612 for fixing the resonant scanning mirror 101 to an external structure. A mirror rotation assembly is disposed opposite to the PCB board 602. The light-emitting component includes a light source 603 and multiple photocells 604 surrounding the light source 603. The coil assembly includes multiple winding coils 605 surrounding the photocells 604. The winding coils 605 can also be referred to as energized coils. In some embodiments of this application, optionally, a light shield 613 is provided between the photocells 604 and the winding coils 605 to reduce interference from external light on the photocells 604. In this embodiment, the resonant scanning mirror 101 further includes a mirror mounting frame 1012, which is disposed on the opposite side of the photovoltaic cell 604 and fixed to the base 601 by a connector (e.g., bolt). The inner mirror 105 is opposite to the light source 603 in the light-emitting component. The magnet 107 disposed on the sub-frame of the mirror mounting frame 1012 is opposite to the winding coil. The Ampere force generated by the winding coil interacts with the magnet to cause the sub-frame to resonate and form the target sub-frame.

[0043] Furthermore, the resonant scanning galvanometer 101 also includes a washer 607 and a clamping frame 608. The washer 607 is disposed between the mirror mounting frame 1012 and the PCB board 602. The clamping frame 608 and the outermost sub-frame of the mirror mounting frame 1012 have the same shape. A circular hole 6081 is provided on the clamping frame 608, and a bolt 609 is provided in the circular hole 6081. The bolt 609 passes through the clamping frame 608, the mirror mounting frame 1012, the washer 607, the PCB board 602 and the base 601.

[0044] Optionally, in this embodiment, the direction of the rotation axis between the target subframe and its adjacent external subframe of the resonant scanning galvanometer is perpendicular to the direction of the rotation axis of the scanning lens of the non-resonant scanning galvanometer. To achieve resonance in the target subframe, the frequency of the current flowing through the winding coil corresponding to the target subframe is the same as the natural frequency of the target subframe.

[0045] and Figure 3 The corresponding operating modes of the resonant scanning mirror include the following two:

[0046] (1) Resonance mode: the internal subframe is driven by a sine wave to vibrate at its inherent resonant frequency, usually several hundred hertz, so that the reflected beam can scan rapidly along the direction perpendicular to the first axis. The scanning pattern is usually a straight line feature pattern, and the resonant frequency can reach 300 Hz.

[0047] (2) Non-resonant mode: the internal subframe is driven to vibrate at a non-resonant frequency point by a low-frequency triangular wave or sawtooth wave. The frequency is usually tens of hertz, and the scanning pattern is a point feature pattern.

[0048] Figure 5 This is a three-dimensional structural schematic diagram of a non-resonant scanning mirror according to an embodiment of this application. Figure 5 As shown, the non-resonant scanning galvanometer 102 includes a scanning lens 1021, a galvanometer motor housing 1022, and a control board 1023, etc. The galvanometer motor housing contains a motor, which can drive the scanning lens 1021 to rotate around the motor shaft.

[0049] Figure 6 This is a three-dimensional structural schematic diagram of another resonant scanning mirror according to an embodiment of this application. Figure 7 yes Figure 6 A three-dimensional structural diagram of the mirror mounting frame of the resonant scanning mirror is shown. Figure 8 yes Figure 6 The rear structural view of the structure shown. (See diagram) Figures 6-8As shown, the reflector mounting frame 1012 includes an inner sub-frame 1013, a middle sub-frame 1015, and an outer sub-frame 1014, which are sequentially nested from the inside out. The outer sub-frame 1014, middle sub-frame 1015, and inner sub-frame 1013 are all made of metal springs. The rotating shaft 104 includes a third shaft 1043 disposed between the outer sub-frame 1014 and the middle sub-frame 1015, which is a hollow structure formed by the outer sub-frame 1014 and the middle sub-frame 1015. The rotating shaft 104 also includes a fourth shaft 1044 disposed between the middle sub-frame 1015 and the inner sub-frame 1013, with the portion located in the middle sub-frame 1015 being a hollow structure. The directions of the third shaft 1043 and the fourth shaft 1044 intersect, and the inner sub-frame and / or the middle sub-frame is the target sub-frame. In this embodiment, the frame that resonates can be either the inner sub-frame 1013 or the middle sub-frame 1015. The third magnet 110 is subjected to a magnetic force, causing the intermediate sub-frame 1015 to vibrate around the axis of the third axis 1043. This causes the light reflected by the outer mirror 1011 to scan in a direction perpendicular to the axis of the third axis 1043. The fourth magnet 111 is subjected to a magnetic force, causing the inner sub-frame 1013 to vibrate along the axis of the fourth axis 1044. This causes the light reflected by the outer mirror 1011 to scan in a direction perpendicular to the axis of the fourth axis 1044. In some embodiments of this application, optionally, the axes of the third axis 1043 and the fourth axis 1044 are perpendicular to each other. In some embodiments of this application, optionally, when both the inner sub-frame 1013 and the intermediate sub-frame 1015 are target sub-frames, the ratio of their resonant frequencies is an integer. When the ratio of the resonant frequencies of the inner sub-frame 1013 and the intermediate sub-frame 1015 is an integer ratio, the scanning trajectory of the light reflected by the outer mirror 1011 is stable and the scanning line is closed, forming a Lissajous figure.

[0050] Figure 6 The corresponding three-dimensional structure of the resonant scanning mirror and Figure 1 and Figure 3 The three-dimensional structure of the resonant scanning mirror shown is identical except for the structure of the mirror mounting frame. For the sake of brevity, it will not be described in detail here. Figure 6 The corresponding operating modes of the resonant scanning mirror include the following three:

[0051] (1) The scanning mode operates in a non-resonant state on both axes. The working bandwidth of the galvanometer in both directions is adjustable from DC drive to a certain frequency, and it does not operate at the resonant frequency (the internal subframe and the middle subframe vibrate at the non-resonant frequency point, with a frequency of 10-30 Hz). When driven by DC voltage, the light spot reflected by the external mirror can be maintained at a fixed position, thus achieving a point-to-point scanning effect. The scanning pattern in this working mode is as follows: Figure 9 As shown.

[0052] (2) Vibration around the third axis adopts a resonant mode (scan line corresponds to the vertical axis), driven by a sine wave at the inherent resonant frequency of the galvanometer, typically several hundred hertz, allowing the reflected beam to scan rapidly along the axis perpendicular to the third axis. Then, vibration around the fourth axis is in a quasi-static mode (scan line corresponds to the horizontal axis), driven by a low-frequency triangular or sawtooth wave, typically tens of hertz. In this mode, the middle subframe vibrates at the resonant frequency, while the inner subframe vibrates at the non-resonant frequency. The scanning pattern in this mode is as follows: Figure 10 and Figure 11 As shown. Among them, Figure 10 The frequency ratio of the horizontal axis to the vertical axis corresponding to the graph shown is 10:66, and the phase difference is 90°. Figure 11 The horizontal-to-vertical axis frequency ratio shown is 11:155, with a phase difference of 90°.

[0053] (3) Both axes operate in resonant scanning mode. In this mode, both axes work within their respective narrow frequency ranges and are driven by high-frequency sine waves (both the middle subframe and the outer subframe vibrate at the resonant frequency). Because the mirror deformation and scanning angle are significant in resonant mode, the amplitude of the input sine wave is controlled within a certain range to avoid excessive shaft deformation and damage. The scanning effect of the reflected beam in this mode is a Lissajous figure. The Lissajous figure trajectory can be adjusted by changing the ratio and / or phase difference of the operating frequencies (vibration frequencies of the metal springs) of the two axes. The scanning pattern in this working mode is as follows: Figure 12-13 As shown, where, Figure 12 The frequency ratio of the horizontal axis to the vertical axis of the scan pattern shown is 32:47, with a phase difference of 90°. Figure 13 The frequency ratio of the horizontal axis to the vertical axis of the scan pattern shown is 33:98, and the phase difference is 90°.

[0054] and Figure 6 The operating mode of the two-dimensional galvanometer scanning device corresponding to the resonant scanning galvanometer shown can be:

[0055] (1) The resonant scanning device scans along the X-axis at the resonant frequency, while the non-resonant scanning mirror vibrates along the Y-axis.

[0056] (2) The resonant scanning device scans along the Y-axis at the resonant frequency, while the non-resonant scanning device scans along the X-axis.

[0057] Figure 14 This is a three-dimensional structural schematic diagram of another resonant scanning mirror according to an embodiment of this application. Figure 15 yes Figure 14 Exploded structural view of the structure shown. Figure 16 Figure 14 A three-dimensional structural diagram of the mirror mounting frame of the resonant scanning mirror is shown. Figure 17 yes Figure 16 The rear structural view of the structure shown. Wherein, Figure 14 The resonant scanning mirror shown is Figure 1 and Figure 3 The structures of most of the resonant scanning mirrors shown are the same; the differences lie in... Figure 14 The mirror mounting frame in the illustrated embodiment is Figure 16 and Figure 17 The mirror mounting frame shown is further illustrated in this embodiment, where the outer sub-frame 1014 of the mirror mounting frame 1012 also serves as the clamping frame 608 for the resonant scanning mirror 101. The operating mode of the two-dimensional galvanometer scanning device corresponding to this embodiment is as follows: the inner sub-frame 1013 of the resonant scanning device is driven by a sine wave at its inherent resonant frequency, typically several hundred hertz, causing the beam reflected by the outer mirror 1011 to scan rapidly along the axis perpendicular to the second axis 1042, while the non-resonant scanning device scans along the axis of the second axis. For the inner sub-frame 1013 to resonate, the frequency of the current flowing through the first winding coil 6051 is the same as the inherent frequency of the inner sub-frame 1013. In some embodiments of this application, optionally, a 200 Hz alternating current flows through the first winding coil 6051, and the inherent frequency of the metal spring vibrating around the second axis 1042 is 200 Hz, causing the inner sub-frame 1013 to resonate.

[0058] See also Figure 16 and Figure 17As shown, in this embodiment, the reflector mounting frame 1012 includes an inner sub-frame 1013, a middle sub-frame 1015, and an outer sub-frame 1014, which are sequentially nested from the inside out. The inner sub-frame 1013 and the middle sub-frame 1015 are made of metal springs. The rotating shaft 104 includes a second shaft 1042 and a pin 109. The second shaft is located between the middle sub-frame 1015 and the inner sub-frame 1013. The portion of the second shaft 1042 located in the middle sub-frame is a hollow body. A fixing frame 108 is provided on the outer circumference of the hollow body. The pin 109 is located between the fixing frame 108 and the outer sub-frame 1014. The fixing frame 108 drives the middle sub-frame 1015 to rotate around the pin 109. The direction of the pin 109 intersects with that of the second shaft 1042. The inner sub-frame 1013 is the target sub-frame. In this embodiment, both the intermediate subframe 1015 and the inner subframe 1013 are made of metal spring sheets. The edge of the intermediate subframe 1015 is provided with a fixing frame 108, which is fixedly connected to the intermediate subframe 1015. The fixing frame 108 and the outer subframe 1014 are rotatably connected by a pin 109. Under the action of the magnetic force of the first magnet 1071, the intermediate subframe 1015 and the inner subframe 1013 rotate together around the pin 109. Under the action of the magnetic force of the second magnet 1072, the inner subframe 1013 can resonate around the second axis 1042.

[0059] In some embodiments of this application, optionally, the axial direction of the second shaft 1042 is perpendicular to the axial direction of the pin 109. The pin 109 is also called a quasi-static shaft, and the operating frequency along the quasi-static shaft is typically tens of hertz; the second shaft 1042 is also called a resonant shaft, and the resonant frequency along the shaft is hundreds of hertz.

[0060] and Figure 14 The corresponding operating modes of the resonant scanning mirror include the following two:

[0061] (1) The vibration frequency of the subframe corresponding to the X-axis (horizontal axis) of the two axes (the light reflected by the external mirror moves along two axes, which are in the same direction as the rotation axis of the mirror mounting frame; if the light moves along the X-axis, the axis around which the mirror vibrates is perpendicular to the X-axis; if the light moves along the Y-axis, the axis around which the mirror vibrates is perpendicular to the Y-axis; where the X-axis and Y-axis are perpendicular, the two axes refer to the X-axis and Y-axis) is 10-30 Hz, and it operates in quasi-static mode. The Y-axis (vertical axis) operates at a non-resonant frequency, for example, 10-30 Hz. Through the control system, the scanning is a point-to-point vector graphic, for example... Figure 9 The diagram shows that the operating bandwidth in both directions is adjustable from DC drive to a certain frequency, and it does not operate at the resonant frequency. When driven by DC voltage, the light spot reflected by the mirror can be maintained in a fixed position, thus achieving a point-to-point scanning effect.

[0062] (2) The Y-axis (vertical axis) adopts a resonant mode, using a sine wave to drive the internal sub-frame at its inherent resonant frequency, typically several hundred hertz, allowing the beam reflected by the mirror to scan rapidly along the axis perpendicular to the second axis 1042. Then, the X-axis is in quasi-static mode, using a low-frequency triangular wave or sawtooth wave to drive the intermediate sub-frame to vibrate, typically at a frequency of tens of hertz, allowing the beam reflected by the mirror to scan along the axis perpendicular to the pin 109. The scanning pattern is as follows: Figure 10 and Figure 11 As shown.

[0063] and Figure 14 The operating mode of the two-dimensional galvanometer scanning device corresponding to the resonant scanning galvanometer shown can be as follows: the internal subframe of the resonant scanning galvanometer resonates, causing the light beam reflected by the external mirror to scan along the X-axis, while the non-resonant scanning galvanometer vibrates in a quasi-static mode, causing the light beam reflected by the scanning lens to scan along the Y-axis. Optionally, the positions of the resonant and non-resonant scanning galvanometers can be changed so that the resonant scanning galvanometer scans along the X-axis and the non-resonant scanning galvanometer scans along the Y-axis.

[0064] In summary, when both axes are in quasi-static scanning mode, the operating bandwidth of the resonant scanning mirror in both directions is adjustable from DC drive to a certain frequency, and it does not operate at the resonant frequency. When driven by DC voltage, the emitted light spot can be maintained at a fixed position, thus achieving a point-to-point scanning effect, and the scanned image can be obtained as shown in the diagram. Figure 9 The graph shown illustrates this. When the x-axis is in resonant mode, driven by a sine wave at the inherent resonant frequency of the resonant scanning mirror, typically several hundred hertz, the reflected beam scans rapidly in the horizontal direction. Then, in quasi-static mode, the y-axis is driven by a low-frequency triangular or sawtooth wave, typically tens of Hz, producing a scan as shown. Figure 10 Or the graphic shown in Figure 11, its coverage area is relatively... Figure 9 Larger. When both the x-axis and y-axis are in resonant scanning mode, each axis operates within its own narrow frequency range, driven by a high-frequency sine wave. Because the deformation and scanning angle of the resonant scanning mirror are very significant in resonant mode, careful control of the input sine wave amplitude is crucial. Exceeding a certain range may damage the resonant scanning mirror due to excessive deformation of the mirror's support beam. In this mode, the scanning effect of the reflected beam is a Lissajous figure, such as... Figure 12 As shown in Figure 13, the trajectory of the Lissajous figure can be adjusted by the ratio of the operating frequencies of the x-axis and y-axis.

[0065] For a two-dimensional galvanometer scanning device, when one axis of the resonant scanning galvanometer in the device adopts a resonant scanning mode, the scanned pattern of the two-dimensional galvanometer scanning device is similar to... Figure 10 Or the scanned image shown in 11, compared to Figure 9 The two axes shown in the figure both use a quasi-static scanning method, which can increase the density of the scanning trajectory lines, thereby allowing the scanning trajectory lines to cover most of the area within the scanning pattern range, and also reduce energy consumption.

[0066] Furthermore, compared to a single two-dimensional galvanometer, the two-dimensional galvanometer scanning device proposed in this application has the following advantages under the same swing angle:

[0067] 1. A longer optical path, with a light source such as a laser, allows the laser to be positioned further away from the scanning area by adjusting the distance between the resonant and non-resonant scanning devices.

[0068] 2. Larger FOV (Field of View), meaning a larger scanning range;

[0069] 3. Non-resonant scanning mirrors have high rigidity and strong vibration resistance.

[0070] The above embodiments are for illustrative purposes only and are not intended to limit the scope of this application. Those skilled in the art can make various changes and modifications without departing from the scope of this application. Therefore, all equivalent technical solutions should also fall within the scope of this application.

Claims

1. A two-dimensional galvanometer scanning device, characterized in that, The system includes resonant scanning galvanometers and non-resonant scanning galvanometers that work together to form an image. The resonant scanning galvanometer's mirror mounting frame comprises multiple sub-frames nested sequentially from the inside out. These sub-frames are rotatably connected by a pivot. The innermost sub-frame has a first side and a second side that are opposite to each other. The first side has an inner mirror for reflecting light from a light source inside the scanning galvanometer, and the second side has an outer mirror for reflecting light from a light source outside the scanning galvanometer. At least two adjacent sub-frames in the mirror mounting frame are made of metal springs, and the pivot between two adjacent sub-frames made of metal springs is integrally formed with the metal springs. A magnet is provided on the first side. When the magnet is subjected to a preset magnetic field, the sub-frame made of metal springs that resonates is the target sub-frame. The reflective surface of the scanning lens of the non-resonant scanning galvanometer faces the reflective surface of the external mirror. Light from outside the two-dimensional galvanometer scanning device passes through the scanning lens and the external mirror and reaches a preset position.

2. The two-dimensional galvanometer scanning device according to claim 1, characterized in that, The direction of the rotation axis between the target subframe and its adjacent external subframe is perpendicular to the direction of the rotation axis of the scanning lens of the non-resonant scanning galvanometer.

3. The two-dimensional galvanometer scanning device according to claim 1, characterized in that, The reflector mounting frame includes an inner subframe and an outer subframe. The inner subframe is the innermost subframe. Both the inner and outer subframes are made of metal springs. The pivot is a first shaft, which is a cantilever torsion beam. The portion of the first shaft located in the outer subframe is hollow. The inner subframe is the target subframe.

4. The two-dimensional galvanometer scanning device according to claim 1, characterized in that, The reflector mounting frame includes an inner sub-frame, a middle sub-frame, and an outer sub-frame nested sequentially from the inside out. The inner sub-frame and the middle sub-frame are made of metal springs. The rotating shaft includes a second shaft located between the middle sub-frame and the inner sub-frame. The portion of the second shaft located in the middle sub-frame is hollow. A fixing frame is provided on the outer circumference of the hollow. A pin is provided between the fixing frame and the outer sub-frame. The fixing frame drives the middle sub-frame to rotate around the pin. The direction of the pin intersects with that of the second shaft. The inner sub-frame is the target sub-frame.

5. The two-dimensional galvanometer scanning device according to claim 1, characterized in that, The mirror mounting frame includes an inner sub-frame, a middle sub-frame, and an outer sub-frame nested sequentially from the inside out. All three sub-frames are made of metal springs. The pivot includes a third axis disposed between the outer and middle sub-frames, which is a hollow structure formed by the outer and middle sub-frames. The pivot also includes a fourth axis disposed between the middle and inner sub-frames, with the portion located in the middle sub-frame being a hollow structure. The third and fourth axes intersect in direction, and the inner and / or middle sub-frames are the target sub-frames.

6. The two-dimensional galvanometer scanning device according to claim 3, characterized in that, The outer reflector has the same shape and area as the inner subframe.

7. The two-dimensional galvanometer scanning device according to claim 4, characterized in that, A mounting hole is provided in the middle of the innermost sub-frame, and the inner reflector is disposed in the mounting hole.

8. The two-dimensional galvanometer scanning device according to claim 1, characterized in that, The preset magnetic field force is generated by an energized coil located opposite the magnet. When the target subframe resonates, the frequency of the current flowing through the energized coil is the same as the resonant frequency of the target subframe.

9. The two-dimensional galvanometer scanning device according to claim 1, characterized in that, The light emitted by the external light source of the two-dimensional galvanometer scanning device first passes through the scanning lens, then through the external reflecting mirror, and finally reaches the preset position.

10. The two-dimensional galvanometer scanning device according to claim 2, characterized in that, The number of magnets on the first side of the inner subframe is two, and the connection direction of the two magnets is perpendicular to the rotation axis direction between the inner subframe and the outer subframe.

Images