Sample fixing device for scanning electron microscope
By improving the clamping device, and utilizing the rotating component and the elastic reset component, the scanning electron microscope sample fixation device can stably clamp samples of different sizes, thus avoiding sample damage.
Patent Information
- Application Number
- CN202520466898.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-18
- Publication Date
- 2026-02-03
- Estimated Expiration
- 2035-03-18
AI Technical Summary
Existing scanning electron microscope sample clamping devices can only clamp samples of the same size. When clamping larger samples, the sample clamp is prone to impacting the sample and causing damage when it resets under the drive of the spring.
The clamping device includes a moving plate, a clamping plate, an abutment rod, a rotating rod, and an elastic reset assembly. Through the cooperation of the rotating assembly and the elastic reset assembly, the clamping plate can slowly clamp the sample and avoid impact.
It effectively avoids impact on the sample by the clamping plate, prevents sample damage, and adapts to the fixation needs of samples of different sizes.
Smart Images
Figure CN223871442U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor technology, and in particular to a sample fixing device for scanning electron microscopes. Background Technology
[0002] The working principle of a scanning electron microscope (SEM) is to scan a sample with an extremely fine electron beam, exciting secondary electrons on the sample surface. The number of secondary electrons is related to the incident angle of the electron beam, that is, to the surface structure of the sample. The secondary electrons are collected by a detector, where they are converted into light signals by a scintillator, and then converted into electrical signals by a photomultiplier tube and amplifier to control the intensity of the electron beam on the fluorescent screen, displaying a scanning image synchronized with the electron beam. However, conventional sample fixation is usually achieved using conductive adhesive, but conductive adhesive easily attracts dust, which can contaminate the vacuum chamber of the SEM.
[0003] Existing patent CN214174205U describes a device for fixing samples for scanning electron microscopes. By using a sample clamp to clamp the sample around its periphery, this physical fixing method eliminates the need for conductive adhesive. It ensures a relatively stable sample fixation while facilitating removal and preventing sample damage. The device also features a guide rail to guide the movement of the sample clamp and prevent it from deviating. Furthermore, the device includes a fixing plate that cooperates with the guide rail and spring to ensure the sample clamp is firmly secured while allowing for easy adjustment of the clamping degree, thus preventing sample damage.
[0004] However, when using a sample fixing device for a scanning electron microscope with an existing patent, the device can only fix samples of the same size. For larger samples, when the sample clamp is reset under the drive of the spring, the sample clamp cannot be tightly attached to the protrusion. At this time, the flange on the sample clamp will be reset instantly under the action of the elastic potential energy stored in the spring and impact the sample, which can easily damage the sample. Utility Model Content
[0005] The purpose of this invention is to provide a sample fixing device for scanning electron microscopes, which solves the problem that the aforementioned devices can only fix samples of the same size. For larger samples, when the sample clamp is reset under the drive of the spring, the sample clamp cannot fit tightly with the protrusion. At this time, the flange on the sample clamp will be reset instantly under the action of the elastic potential energy stored in the spring and impact the sample, which can easily damage the sample.
[0006] To achieve the above objectives, this utility model provides a scanning electron microscope sample fixing device, including a base and a protrusion, the protrusion being fixedly mounted on the base, and a clamping device, the clamping device including a movable plate, a clamping plate, an abutment rod, a rotating rod, a rotating assembly, and an elastic reset assembly, the movable plate being mounted on the protrusion via the elastic reset assembly, the clamping plate being fixedly mounted on the movable plate, a mounting groove being provided on one side of the protrusion, the rotating rod being rotatably mounted on the protrusion via the rotating assembly and located within the mounting groove, and the abutment rod being fixedly mounted on the rotating rod.
[0007] The elastic reset assembly includes a guide rod and a reset spring. The guide rod is fixedly installed on the protrusion and slides with the moving plate. The reset spring is sleeved on the guide rod, and its two ends are fixedly connected to the protrusion and the moving plate, respectively.
[0008] The rotating assembly includes a gear, a tooth block, and a push-pull member. The gear is fixedly mounted on the rotating rod. The protrusion is also provided with a sliding groove on the side near the mounting groove. The tooth block is slidably mounted on the protrusion through the push-pull member and is located in the sliding groove. At the same time, the tooth block also meshes with the gear.
[0009] The push-pull component includes a vertical rod and a horizontal rod, with the vertical rod fixedly mounted on the toothed block and the horizontal rod fixedly mounted on the vertical rod.
[0010] The abutment rod is also provided with a first anti-collision pad and a second anti-collision pad. The first anti-collision pad is fixedly installed on the abutment rod, and the second anti-collision pad is fixedly installed on the end of the abutment rod away from the first anti-collision pad.
[0011] This invention relates to a sample fixing device for a scanning electron microscope. In use, the two movable plates on both sides are pulled in opposite directions, and the sample is placed on the protrusion. Then, driven by the spring force of the return spring, the movable plates move closer together and abut against the abutment rod. Subsequently, the horizontal and vertical rods push the toothed block, which meshes with the gear, causing the gear to rotate. The gear drives the rotating rod to rotate, which in turn drives the abutment rod to rotate. As the abutment rod rotates, it slides along the side of the movable plate, gradually ceasing to abut against it. The movable plate then slowly returns to its original position, and the clamping plate slowly clamps the sample, preventing impact and damage. Attached Figure Description
[0012] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the accompanying drawings used in the description of the embodiments or the prior art will be briefly introduced below.
[0013] Figure 1 This is a schematic diagram of the overall structure of a scanning electron microscope sample fixing device according to the present invention.
[0014] Figure 2 This is a schematic diagram of the rotating component of this utility model.
[0015] In the diagram: 101-base, 102-protrusion, 103-moving plate, 104-clamping plate, 105-abutment rod, 106-rotating rod, 107-mounting groove, 108-guide rod, 109-reset spring, 111-gear, 112-tooth block, 113-slide groove, 114-vertical rod, 115-horizontal rod, 116-first anti-collision pad, 117-second anti-collision pad. Detailed Implementation
[0016] The embodiments of the present invention are described in detail below. Examples of the embodiments are shown in the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, but should not be construed as limiting the present invention.
[0017] The embodiment of this application is as follows:
[0018] Please see Figure 1-2 , Figure 1 This is a schematic diagram of the overall structure of a scanning electron microscope sample fixing device according to the present invention. Figure 2 This is a schematic diagram of the rotating component of this utility model.
[0019] This utility model provides a sample fixing device for scanning electron microscopes, including a base 101 and a protrusion 102, and a clamping device. The clamping device includes a moving plate 103, a clamping plate 104, an abutment rod 105, a rotating rod 106, a rotating assembly, and an elastic reset assembly. The elastic reset assembly includes a guide rod 108 and a reset spring 109. The rotating assembly includes a rotating shaft, a gear 111, a toothed block 112, and a push-pull component. The push-pull component includes a vertical rod 114 and a horizontal rod 115. The abutment rod 105 is also provided with a first anti-collision pad 116 and a second anti-collision pad 117. The aforementioned solution solves the problem that the aforementioned device can only fix samples of the same size. For larger samples, when the sample clamp is reset under the drive of the spring, the sample clamp cannot be tightly attached to the protrusion. At this time, the flange on the sample clamp will be instantly reset under the action of the elastic potential energy stored in the spring and impact the sample, which can easily damage the sample. The aforementioned solution can be used in the scenario of sample fixing for scanning electron microscopes.
[0020] In this embodiment, the rotating rod 106 drives the abutment rod 105 to gradually disengage from the moving plate 103, so that the clamping plate 104 slowly clamps the sample, thereby avoiding the clamping plate 104 from impacting the sample and preventing the sample from being damaged by collision.
[0021] The movable plate 103 is mounted on the protrusion 102 via the elastic reset assembly. The clamping plate 104 is fixedly mounted on the movable plate 103. A mounting groove 107 is provided on one side of the protrusion 102. The rotating rod 106 is rotatably mounted on the protrusion 102 via the rotating assembly and is located within the mounting groove 107. The abutting rod 105 is fixedly mounted on the rotating rod 106. The movable plate 103 is disposed on both sides of the base 101. The clamping plate 104 is welded to the movable plate 103, and the abutting rod 105 is welded to the rotating rod 106. The abutment rod 105 is perpendicular to the axis of the rotating rod 106. The rotating assembly can drive the rotating rod 106 to rotate. The elastic reset assembly facilitates the reset of the moving plate 103 after it moves in the opposite direction. After the sample is placed on the protrusion 102, the moving plate 103 is reset under the drive of the elastic reset assembly and abuts against the abutment rod 105. The rotating rod 106 drives the abutment rod 105 to gradually disengage from the moving plate 103, so that the clamping plate 104 slowly clamps the sample, thereby avoiding the clamping plate 104 from impacting the sample and preventing the sample from being damaged by collision.
[0022] Secondly, the guide rod 108 is fixedly installed on the protrusion 102 and slides in cooperation with the moving plate 103; the reset spring 109 is sleeved on the guide rod 108, and the two ends of the reset spring 109 are fixedly connected to the protrusion 102 and the moving plate 103 respectively. There are four sets of guide rods 108, two in a group, and they are symmetrically arranged on both sides of the base 101. The axis of the guide rod 108 and the reset spring 109 coincides. Driven by the elastic force of the reset spring 109, the moving plate 103 can automatically reset after moving in the opposite direction.
[0023] Furthermore, the gear 111 is fixedly mounted on the rotating rod 106; the protrusion 102 is also provided with a sliding groove 113 on the side near the mounting groove 107, the tooth block 112 is slidably mounted on the protrusion 102 through the push-pull member and is located in the sliding groove 113, and the tooth block 112 also meshes with the gear 111, the gear 111 is keyed to the rotating rod 106, the tooth block 112 is provided with teeth, and the push-pull member can push the tooth block 112. In use, the push-pull member pushes the tooth block 112 to move in the sliding groove 113, and the tooth block 112 drives the gear 111 to rotate through meshing with the gear 111, thereby causing the gear 111 to drive the rotating rod 106 to rotate.
[0024] Furthermore, the vertical rod 114 is fixedly installed on the toothed block 112; the horizontal rod 115 is fixedly installed on the vertical rod 114, the vertical rod 114 is welded to the toothed block 112, and the horizontal rod 115 is perpendicular to the axis of the vertical rod 114. Through the cooperation of the horizontal rod 115 and the vertical rod 114, it is convenient to push the toothed block 112.
[0025] Finally, the first anti-collision pad 116 is fixedly installed on the abutment rod 105; the second anti-collision pad 117 is fixedly installed on the end of the abutment rod 105 away from the first anti-collision pad 116. The first anti-collision pad 116 and the second anti-collision pad 117 are made of rubber. By setting the first anti-collision pad 116 and the second anti-collision pad 117, the moving plate 103 can be buffered.
[0026] In this embodiment, during use, the two movable plates 103 on both sides are pulled in opposite directions, and the sample is placed on the protrusion 102. Subsequently, driven by the elastic force of the return spring 109, the movable plates 103 move closer to each other and abut against the abutment rod 105. Then, the horizontal bar 115 and the vertical bar 114 push the toothed block 112. The toothed block 112 meshes with the gear 111, driving the gear 111 to rotate. The gear 111 drives the rotating rod 106 to rotate, and the rotating rod 106 drives the abutment rod 105 to rotate. As the abutment rod 105 rotates, it slides on the side of the movable plate 103. The abutment rod 105 gradually stops abutting against the movable plate 103, and the movable plate 103 slowly returns to its original position. The clamping plate 104 slowly clamps the sample, avoiding impact and damage to the sample.
[0027] The above-disclosed embodiments are merely one or more preferred embodiments of this application and should not be construed as limiting the scope of this application. Those skilled in the art can understand that all or part of the processes for implementing the above embodiments and equivalent changes made in accordance with the claims of this application still fall within the scope of this application.
Claims
1. A sample fixing device for a scanning electron microscope, comprising a base and a protrusion, wherein the protrusion is fixedly mounted on the base, characterized in that, It also includes a clamping device; The clamping device includes a movable plate, a clamping plate, an abutment rod, a rotating rod, a rotating assembly, and an elastic reset assembly. The movable plate is mounted on the protrusion via the elastic reset assembly. The clamping plate is fixedly mounted on the movable plate. A mounting groove is provided on one side of the protrusion. The rotating rod is rotatably mounted on the protrusion via the rotating assembly and is located within the mounting groove. The abutment rod is fixedly mounted on the rotating rod.
2. The scanning electron microscope sample fixing device as described in claim 1, characterized in that, The elastic reset assembly includes a guide rod and a reset spring. The guide rod is fixedly installed on the protrusion and slides with the moving plate. The reset spring is sleeved on the guide rod, and its two ends are fixedly connected to the protrusion and the moving plate, respectively.
3. The scanning electron microscope sample fixing device as described in claim 1, characterized in that, The rotating assembly includes a gear, a tooth block, and a push-pull member. The gear is fixedly mounted on the rotating rod. The protrusion is also provided with a sliding groove on the side near the mounting groove. The tooth block is slidably mounted on the protrusion through the push-pull member and is located in the sliding groove. At the same time, the tooth block also meshes with the gear.
4. The scanning electron microscope sample fixing device as described in claim 3, characterized in that, The push-pull component includes a vertical rod and a horizontal rod, with the vertical rod fixedly mounted on the toothed block and the horizontal rod fixedly mounted on the vertical rod.
5. The scanning electron microscope sample fixing device as described in claim 1, characterized in that, The abutment rod is also provided with a first anti-collision pad and a second anti-collision pad. The first anti-collision pad is fixedly installed on the abutment rod; the second anti-collision pad is fixedly installed on the end of the abutment rod away from the first anti-collision pad.