Calibration device and coating equipment

Abstract

The utility model discloses a calibration device and coating equipment. Wherein the calibration device comprises a base, the base is arranged between the coating head and the mask roller, and at least one mounting hole is formed in the base; the standard block comprises a first surface and a second surface which are oppositely arranged, the first surface faces the coating head, and the second surface abuts against the top surface; the sensing assembly comprises a first sensor, a second sensor and a third sensor, the first sensor and the second sensor are both connected with the hole wall of the mounting hole, the first sensor detects the coordinates of the first surface, the second sensor detects the coordinates of the second surface, and the third sensor is used for detecting the coordinates of the coating head; the adjusting assembly comprises an adjusting screw, and the adjusting screw is connected with the side face so as to adjust the position of the base, so that the first sensor corresponds to and detects the highest point of the mask roller. According to the utility model, the position parameters of the base and the sensing assembly can be adjusted so as to meet the calibration requirements of coating heads and mask rollers with different sizes and shapes.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of coating calibration especially relates to a calibration device and coating equipment. BACKGROUND

[0002] In the field of solar cell manufacturing, slot coating method has become a key coating technology in batch manufacturing of various types of solar cells such as crystalline silicon perovskite laminated battery, single-junction perovskite battery, etc. due to its high efficiency and accuracy. However, accurate calibration of the coating die is crucial to ensure coating quality, which cannot be ignored in actual production process.

[0003] At present, mainstream slot coating equipment on the market, especially annular coating equipment for batch production of solar cells, has exposed some problems in the calibration of the coating die. Specifically, these devices generally lack a fixed and stable coating substrate carrier, resulting in a lack of reliable reference when calibrating the coating die. This not only significantly increases the difficulty of calibration, but also may negatively affect the precision and consistency of coating, thereby affecting the overall quality and performance of solar cells.

[0004] To address this challenge, the industry urgently needs a new type of calibration tool that can serve as a reference for coating die calibration to ensure accuracy and stability during coating. Unfortunately, however, existing calibration tools mostly have problems such as complex operation, insufficient precision, poor adaptability, etc., making it difficult to meet the high-precision calibration needs in the process of solar cell manufacturing.

[0005] Therefore, the present application proposes a calibration device and coating equipment. SUMMARY

[0006] The utility model aims at providing a calibration device and coating equipment, which can adjust the position parameters of the base and the sensing assembly to meet the calibration needs of coating heads and mask rollers of different sizes and shapes.

[0007] The utility model realizes the purpose by adopting the following technical solutions:

[0008] On the one hand, the utility model provides a calibration device, which is applied to coating head calibration, and comprises:

[0009] A base is arranged between the coating head and the mask roller, and comprises a side surface, a top surface and a bottom surface arranged opposite to each other, the top surface faces the coating head, the bottom surface faces the mask roller, at least one mounting hole is formed in the base, and the mounting hole penetrates the top surface and the bottom surface;

[0010] A standard block, comprising a first face and a second face arranged oppositely, the first face facing the coating head, and the second face abutting the top face;

[0011] A sensing assembly, comprising a first sensor, a second sensor and a third sensor, the first sensor and the second sensor are connected to the hole wall of the mounting hole, the first sensor detects the coordinates of the first face, the second sensor detects the coordinates of the second face, and the third sensor is used for detecting the coordinates of the coating head;

[0012] An adjusting assembly, comprising an adjusting screw connected to the side face, so as to adjust the position of the base, so that the first sensor corresponds to and detects the highest point of the mask roller.

[0013] The beneficial effects of the above scheme are: through the cooperative action of the base, the standard block, the sensing assembly and the adjusting assembly, the position of the coating head can be accurately calibrated, which helps to improve the coating precision and ensure the consistency of the coating quality.

[0014] Further, the calibration device further comprises:

[0015] A first leveling assembly, comprising a leveling screw connected to the base.

[0016] The beneficial effects of the above scheme are: through the setting of the first leveling assembly, the base can be placed more stably, and the calibration error caused by the unevenness of the base is reduced, which helps to improve the accuracy and stability of the calibration.

[0017] Further, the first leveling assembly further comprises a first leveling block and a second leveling block arranged oppositely;

[0018] The leveling screw comprises:

[0019] A first leveling screw, one end of the first leveling screw is connected to the middle part of the first leveling block, and the other end of the first leveling screw is connected to the middle part of the first side of the base;

[0020] A second leveling screw, one end of the second leveling screw is connected to the first end of the second leveling block, and the other end of the second leveling screw is connected to one end of the second side of the base opposite to the first side;

[0021] A third leveling screw, one end of the third leveling screw is connected to the second end of the second leveling block opposite to the first end, and the other end of the third leveling screw is connected to the other end of the second side of the base.

[0022] The beneficial effect of the above scheme is that the first leveling screw, the second leveling screw and the third leveling screw are arranged, the different positions of the base can be finely adjusted, and the stability of the base and the calibration accuracy are further improved.

[0023] Further, the adjusting assembly further comprises: oppositely arranged first and second bases; the two ends of each base are inwardly recessed to form an avoiding space, and the middle part of the base forms a protruding structure;

[0024] The two ends of each leveling block extend outward to form a supporting leg, and the middle part of the leveling block forms a receiving groove matched with the protruding structure.

[0025] The beneficial effect of the above scheme is that the protruding structure of the base and the receiving groove of the leveling block are matched, and the occupied space of the device can be reasonably reduced.

[0026] Further, the adjusting screw comprises:

[0027] The first adjusting screw is connected to the protruding structure of the first base at one end, and connected to one supporting leg of the first leveling block at the other end;

[0028] The second adjusting screw is connected to the protruding structure of the first base at one end, and connected to the other supporting leg of the first leveling block at the other end;

[0029] The third adjusting screw is connected to the protruding structure of the second base at one end, and connected to one supporting leg of the second leveling block at the other end;

[0030] The fourth adjusting screw is connected to the protruding structure of the second base at one end, and connected to the other supporting leg of the second leveling block at the other end.

[0031] The beneficial effect of the above scheme is that the first adjusting screw, the second adjusting screw, the third adjusting screw and the fourth adjusting screw are arranged, the position between the base and the mask roller can be accurately adjusted, and the calibration accuracy and flexibility are further improved.

[0032] Further, the calibration device further comprises:

[0033] The support assembly comprises a first support and a second support, the first support is used for mounting the first sensor, and the second support is used for mounting the second sensor.

[0034] The beneficial effects of the above scheme are that the bracket assembly is arranged to provide a stable mounting platform for the sensing assembly, and ensures that the sensing assembly can accurately detect the positions of the standard block and the coating head.

[0035] Further, the first bracket comprises:

[0036] The first ear and the second ear are connected to the top surface;

[0037] The groove structure is arranged in the mounting hole, and one end of the groove structure is connected to the first ear, and the other end of the groove structure is connected to the second ear, and the bottom of the groove structure is provided with a first fixing hole for mounting a cylinder of the first sensor;

[0038] The first sensor is a cylinder type displacement sensor.

[0039] Further, the second bracket comprises:

[0040] The third ear and the fourth ear are connected to the bottom surface;

[0041] The convex groove structure is arranged in the mounting hole, and one end of the convex groove structure is connected to the third ear, and the other end of the convex groove structure is connected to the fourth ear, and the top of the convex groove structure is provided with a second fixing hole for mounting a cylinder of the second sensor;

[0042] The second sensor is a cylinder type displacement sensor.

[0043] The beneficial effects of the above scheme are that the first bracket and the second bracket are arranged to stagger the installation height of the first sensor and the second sensor in the limited space, thereby expanding the detection range of the sensing assembly and improving the applicability of the calibration device.

[0044] Further, the sensor is a contact type measurement sensor.

[0045] The number of mounting holes is 2, and the number of sensing assemblies is 2.

[0046] The beneficial effects of the above scheme are that the two mounting holes and the two sensing assemblies are arranged to realize the calibration of the two coating holes of the coating head.

[0047] In the second aspect, the utility model provides a kind of coating equipment, and the coating equipment includes the calibration device described above.

[0048] The calibration device is applied to the coating equipment, so that the coating precision and stability of the coating equipment can be remarkably improved, the quality and production efficiency of products are improved, and the production cost is reduced.

[0049] Compared with the prior art, the calibration device has at least the following beneficial effects:

[0050] The calibration device can adjust the position parameters of the base and the sensing assembly to adapt to the calibration requirements of coating heads and mask rollers with different sizes and shapes. Specifically, the base is arranged between the coating head and the mask roller to provide a stable reference surface, which provides a specific reference for calibration, so that the calibration process is more accurate. The sensing assembly can perform multi-point detection to further improve the calibration accuracy and ensure the relative positional relationship between the coating head and the mask roller and the base is accurate. The adjusting assembly can conveniently adjust the height and inclination of the base to adapt to the calibration requirements of different coating heads and mask rollers. Further, the adjusting screw is also used to adjust the first sensor to accurately correspond to and detect the highest point of the mask roller, which not only improves the calibration accuracy, but also enhances the flexibility of the calibration process. BRIEF DESCRIPTION OF DRAWINGS

[0051] Figure 1 is a sectional view of the calibration device of the embodiment of the present application.

[0052] Figure 2 is a structural schematic view of the calibration device of the embodiment of the present application.

[0053] Figure 3 is a structural schematic view of the support assembly of the embodiment of the present application.

[0054] Figure 4 is a structural schematic view of the positional relationship between the coating head and the mask roller of the embodiment of the present application.

[0055] In the figure: 1, standard block; 11, first surface; 12, second surface; 2, base; 21, side surface; 22, top surface; 23, bottom surface; 24, mounting hole; 25, base frame; 3, adjustment assembly; 311, first adjustment screw; 313, third adjustment screw; 314, fourth adjustment screw; 321, first base; 322, second base; 323, avoiding space; 324, protruding structure; 4, first leveling assembly; 411, first leveling screw; 412, second leveling screw; 413, third leveling screw; 421, first leveling block; 422, second leveling block; 423, foot; 424, accommodating groove; 5, support assembly; 51, first support; 511, first ear; 512, second ear; 513, recess structure; 52, second support; 521, third ear; 522, fourth ear; 523, protruding groove structure; 6, coating head; 61, coating hole; 71, first sensor; 72, second sensor; 8, mask roller. DETAILED DESCRIPTION

[0056] Example implementations will now be described more fully with reference to the accompanying drawings. Example implementations can be implemented in any number of manners, and are not limited to the embodiments described herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the inventive concept of example implementations to those skilled in the art. Like reference numerals refer to like or similar structures throughout the drawings, and repeated description of them will be omitted.

[0057] The words expressing position and direction described in the present application are explained by taking the drawings as an example, but changes can also be made as needed, and the changes made are included in the protection scope of the present application.

[0058] The coating equipment of the present application is a slit coating equipment. The thickness and uniformity of the coating layer are not only related to the flow rate of the coating liquid, the temperature of the coating liquid, and the flatness of the coating slit, but also related to the accuracy of the calibration of the coating head 6 and the mask roller 8. However, accurate calibration of the coating head 6 and the mask roller 8 is a prerequisite for ensuring that the thickness and uniformity of the coating layer meet the requirements.

[0059] Since the existing coating workshop is provided with a coating loop, in order to avoid increasing the load of the loop and avoiding increasing the size of the loop to ensure the portability of the loop, the coating equipment of the present application can include a calibration device. The calibration between the coating head 6 and the mask roller 8 is realized through the calibration device, and Figure 4 After calibration using the calibration device, the calibration device is removed, the coating liquid is injected into the coating head, and coating begins.

[0060] The utility model discloses a calibration device, including: pedestal 2, standard block 1, sensing assembly and adjusting assembly 3.

[0061] The utility model discloses a pedestal 2 sets up between coating head 6 and mask roll 8. Mask roll 8, also known as template roll, is one of the components in the slit coating equipment, usually has specific pattern or shape, is used to shield or cover specific area on the substrate in the coating process, thereby accurately controls the coating range and shape of coating material. Coating head 6 is fixed on gantry crane, and mask roll 8 is arranged below coating head 6 and corresponds with coating hole 61 on coating head 6, preferably, coating head 6 is equipped with two coating holes 61.

[0062] When applying, reference Figure 1 , pedestal 2 includes side surface 21 and oppositely arranged top surface 22 and bottom surface 23, and top surface 22 is towards coating head 6, and bottom surface 23 is towards mask roll 8, and at least one mounting hole 24 is set up on pedestal 2, and mounting hole 24 is through top surface 22 and bottom surface 23.

[0063] When actually applying, in order to increase the stability and accuracy of calibration, the number of mounting hole 24 is 2. When actually applying, in order to further improve the stability and precision of calibration device, pedestal 2 is arranged on a pedestal frame 25, and the pedestal frame 25 is fixed on mounting seat, and it is ensured that the calibration device can keep horizontal, stable and easily adjusted after installation.

[0064] The utility model discloses a standard block 1 for providing the datum plane of calibration. Standard block 1 includes oppositely arranged first face 11 and second face 12, and first face 11 is towards coating head 6, and second face 12 is connected to top surface 22.

[0065] When applying, standard block 1 and pedestal 2 all need to provide very high upper and lower surface flatness and parallelism and deformation resistance, and generally use granite to process and manufacture.

[0066] In order to correspond with mounting hole 24, the number of sensing assembly of the utility model is 2. In order to realize the accurate measurement and calibration of the relative position between coating head 6, mask roll 8 and standard block 1, the sensing assembly of the utility model includes first sensor 71, second sensor 72 and third sensor.

[0067] In application, the first sensor 71 and the second sensor 72 are both connected to the hole wall of the mounting hole 24, the first sensor 71 is used for detecting the coordinates of the first face 11 of the standard block 1, and the second sensor 72 is used for detecting the coordinates of the second face 12. In order to maintain consistent measurement accuracy and stability during measurement, the first sensor 71 and the second sensor 72 are both cylinder displacement sensors, which realize accurate measurement of the positions of the first face 11 and the second face 12 of the standard block 1 through the extension and retraction movement of the cylinder.

[0068] In addition, the third sensor is installed on the gantry crane and is used for detecting the coordinates of the coating head 6. Unlike the first sensor 71 and the second sensor 72, the third sensor may need to be custom designed according to the specific shape and size of the coating head 6 to ensure that the position of the coating head 6 can be accurately measured. In actual application, the third sensor can adopt high-precision measurement equipment such as laser ranging sensor and photoelectric displacement sensor to realize accurate perception and feedback of the position of the coating head 6.

[0069] In order to stagger the installation height of the first sensor 71 and the second sensor 72 in a limited space, thereby expanding the detection range of the sensing assembly, the support assembly 5 of the utility model comprises a first support 51 and a second support 52. Among them, the first support 51 is used for installing the first sensor 71, and the second support 52 is used for installing the second sensor 72.

[0070] Specifically, referring to Figure 3 The first support 51 of the utility model comprises a groove structure 513, a first ear 511 and a second ear 512. Specifically, the groove structure 513 is arranged in the mounting hole 24, one end of the groove structure 513 is connected to the first ear 511, the other end of the groove structure 513 is connected to the second ear 512, and the first ear 511 and the second ear 512 are both connected to the top surface 22. In addition, the bottom of the groove structure 513 is provided with a first fixing hole, and the first fixing hole is used for installing the cylinder of the first sensor 71. The second support 52 of the utility model comprises a convex groove structure 523, a third ear 521 and a fourth ear 522. Specifically, the convex groove structure 523 is arranged in the mounting hole 24, one end of the convex groove structure 523 is connected to the third ear 521, the other end of the convex groove structure 523 is connected to the fourth ear 522, and the third ear 521 and the fourth ear 522 are both connected to the bottom surface 23. In addition, the top of the convex groove structure 523 is provided with a second fixing hole, and the second fixing hole is used for installing the cylinder of the second sensor 72.

[0071] In application, in order to ensure the stability and durability of the structure, the first support 51 and the second support 52 are made of high-strength lightweight materials (such as aluminum alloy or stainless steel). In actual application, the first support 51 and the second support 52 are arranged in a mirror image structure, achieving a high staggered installation in a limited space, effectively avoiding space conflicts between sensors, and improving the space utilization. The high staggered installation enables the first sensor 71 and the second sensor 72 to cover a wider detection area, improving the detection capability and accuracy of the device. Those skilled in the art can adjust the size of the first support 51 and the second support 52 according to different application scenarios, improving the applicability and flexibility of the calibration device.

[0072] The first leveling assembly 4 of the utility model includes a leveling screw connected to the base 2 and oppositely arranged first and second leveling blocks 421 and 422.

[0073] In application, the first and second leveling blocks 421 and 422 are arranged at the two ends of the base 2, respectively. Preferably, the first and second leveling blocks 421 and 422 are arranged at the two ends of the base frame 25, respectively, and below the base frame 25.

[0074] The leveling screw includes a first leveling screw 411, a second leveling screw 412, and a third leveling screw 413, which are arranged in a triangular shape to ensure stability and leveling accuracy in three-dimensional space. Specifically, one end of the first leveling screw 411 is connected to the middle of the first leveling block 421, and the other end of the first leveling screw 411 is connected to the middle of the first side of the base 2 or the base frame 25; one end of the second leveling screw 412 is connected to the first end of the second leveling block 422, and the other end of the second leveling screw 412 is connected to one end of the second side of the base 2 or the base frame 25 opposite the first side; one end of the third leveling screw 413 is connected to the second end of the second leveling block 422 opposite the first end, and the other end of the third leveling screw 413 is connected to the other end of the second side of the base 2 or the base frame 25. In actual application, the first leveling screw 411 can accurately adjust the height of the equipment in the vertical direction (Z-axis), and at the same time, since it is connected to the middle of the first leveling block 421, it can also provide a certain anti-rollover torque to enhance stability. The second leveling screw 412 and the third leveling screw 413 not only achieve accurate leveling of the equipment in the horizontal direction (X-axis and Y-axis), but also can adjust the height difference between the two screws to achieve leveling of the equipment on an inclined surface, further improving the flexibility and accuracy of leveling.

[0075] The adjusting assembly 3 of the utility model includes an adjusting screw and oppositely arranged first and second bases 321 and 322.

[0076] In application, the first base 321 is arranged below the first leveling block 421, and the second base 322 is arranged below the second leveling block 422. In addition, with reference toFigure 2 Two ends of each base are inwardly recessed to form an avoiding space 323, and a middle part of the base forms a convex structure 324; two ends of each leveling block are outwardly extended to form a supporting leg 423, and a middle part of the leveling block forms an accommodating groove 424 matched with the convex structure 324.

[0077] The adjusting screw is connected with the side surface 21, and the extension length thereof is adjusted by rotation, so that the position of the leveling block relative to the base is changed, the position of the base 2 is adjusted, and the first sensor 71 corresponds to and detects the highest point of the mask roller 8.

[0078] The use method of the adjusting device is also introduced.

[0079] The use method of the adjusting device is also introduced.

[0080] Step SS100: zero calibration.

[0081] In application, the standard block 1 is placed on the base 2, and zero initialization operation is performed on each sensor, and meanwhile, it is ensured that the first sensor 71 detects the coordinates of the first surface 11 and the second sensor 72 detects the coordinates of the second surface 12.

[0082] Step SS200: horizontal adjustment and mask roller 8 measurement.

[0083] In application, step SS200 includes steps SS201-SS203.

[0084] Step SS201: Place the calibration device between the coating head 6 and the mask roller 8, measure with the level, and adjust the standard block 1 to be horizontal by adjusting the first leveling screw 411, the second leveling screw 412, and the third leveling screw 413.

[0085] Step SS202: Adjust the position of the first sensor 71 above the mask roller 8 by adjusting the first adjustment screw 311, the second adjustment screw, the third adjustment screw 313, and the fourth adjustment screw 314 to ensure that the first sensor 71 can measure the coordinates of the highest point of the mask roller 8.

[0086] Step SS203: Adjust the height of the mask roller 8 so that the coordinates of the highest point of the mask roller 8 detected by each first sensor 71 are equal. In application, the measurement values of each first sensor 71 are equal, for example, a. In practical application, at this time, the surface where the highest point of the mask roller 8 is located is parallel to the reference block.

[0087] Step SS300: Coating head 6 calibration.

[0088] In application, step SS300 includes steps SS301-SS303.

[0089] Step SS301: Lower the coating head 6 to the vicinity of the first face 11 of the standard block 1.

[0090] Step SS302: Measure the coordinates of the coating hole 61 on the coating head 6 using the second sensor 72, and finely adjust the height of the coating head 6 so that the measurement values of each second sensor 72 are equal, for example, b. In application, b=0.3mm. In practical application, at this time, the coating head 6 is parallel to the reference block.

[0091] Step SS303: Measure the coordinates of the standard block 1 using the third sensor on the gantry crane. In application, the number of third sensors is equal to the number of standard blocks 1, and they are one-to-one corresponding. In practical application, the measurement values of each third sensor are equal, for example, c, to verify that the coating head 6 is parallel to the reference block.

[0092] Step SS400: Coating gap adjustment.

[0093] In application, step SS400 includes steps SS401-SS403.

[0094] Step SS401: Remove the calibration device, lower the gantry crane, and make the distance of the downward movement of the gantry crane equal to the thickness of the standard block 1. In application, at this time, the distance between the coating hole 61 and the highest point of the mask roller 8 is a+b.

[0095] Step SS402: replace the mask roller 8 with the substrate to be coated, adjust the substrate to be coated, and make the height of the substrate to be coated equal to the height of the highest point of the mask roller 8.

[0096] Step SS403: adjust the pose of the coating head 6 and the substrate to be coated, so that the gap between the coating hole 61 and the substrate to be coated is a predetermined value.

[0097] In summary, during the coating process, the distance between the coating hole 61 and the mask roller 8 or the substrate to be coated needs to be accurately controlled within the micron level. In order to avoid the collision between the cutter head of the coating head 6 and the mask roller 8 during the calibration process and damage the coating head 6 and the mask roller 8 when calibrating the positions of multiple coating holes 61 and corresponding mask rollers 8, the present application introduces a standard block 1 to calibrate the coating hole 61 and the mask roller 8 multiple times to achieve preliminary calibration, coarse calibration and fine calibration of the coating hole 61 and the mask roller 8, and ensure that the distance between each coating hole 61 and the corresponding mask roller 8 meets the predetermined requirements, thereby improving the precision, uniformity and efficiency of the coating.

[0098] Although the embodiments of the present application have been shown and described above, it should be understood that the above-mentioned embodiments are exemplary and should not be construed as limiting the present application. Those skilled in the art can make changes, modifications, replacements and variations to the above-mentioned embodiments without departing from the principles and purposes of the present application within the scope of the present application. All these changes should be within the protection scope of the present application.

Claims

1. A calibration device, characterized by The calibration device is applied to coating head (6) calibration, and the calibration device comprises: a base (2) arranged between the coating head (6) and the mask roller (8), the base (2) comprising a side surface (21) and oppositely arranged top surface (22) and bottom surface (23), the top surface (22) faces the coating head (6), the bottom surface (23) faces the mask roller (8), and at least one mounting hole (24) is formed in the base (2), the mounting hole (24) penetrates the top surface (22) and the bottom surface (23); a standard block (1) comprising oppositely arranged first surface (11) and second surface (12), the first surface (11) faces the coating head (6), and the second surface (12) is connected to the top surface (22); a sensing assembly comprising first sensor (71), second sensor (72) and third sensor, the first sensor (71) and the second sensor (72) are connected to the hole wall of the mounting hole (24), the first sensor (71) detects the coordinates of the first surface (11), the second sensor (72) detects the coordinates of the second surface (12), and the third sensor is used for detecting the coordinates of the coating head (6); an adjusting assembly (3) comprising an adjusting screw, the adjusting screw is connected to the side surface (21) to adjust the position of the base (2), so that the first sensor (71) corresponds to and detects the highest point of the mask roller (8).

2. The calibration device of claim 1, wherein, The calibration device further comprises: a first leveling assembly (4) comprising a leveling screw, the leveling screw is connected to the base (2).

3. The calibration device of claim 2, wherein, The first leveling assembly (4) further comprises oppositely arranged first leveling block (421) and second leveling block (422); The leveling screw comprises: a first leveling screw (411), one end of the first leveling screw (411) is connected to the middle part of the first leveling block (421), and the other end of the first leveling screw (411) is connected to the middle part of the first side of the base (2); a second leveling screw (412), one end of the second leveling screw (412) is connected to the first end of the second leveling block (422), and the other end of the second leveling screw (412) is connected to one end of the second side of the base (2) opposite to the first side; a third leveling screw (413), one end of the third leveling screw (413) is connected to the second end of the second leveling block (422) opposite to the first end, and the other end of the third leveling screw (413) is connected to the other end of the second side of the base (2).

4. The calibration device of claim 3, wherein, The adjusting assembly (3) further comprises: oppositely arranged first base (321) and second base (322); the two ends of each base are recessed inward to form an avoiding space (323), and the middle part of the base forms a protruding structure (324); The two ends of each leveling block extend outward to form a supporting leg (423), and the middle part of the leveling block forms a containing groove (424) matched with the protruding structure (324).

5. The calibration device of claim 4, wherein, The adjusting screw comprises: A first adjusting screw (311) has one end connected to the protruding structure (324) of the first base (321) and the other end connected to one leg (423) of the first leveling block (421); A second adjusting screw has one end connected to the protruding structure (324) of the first base (321) and the other end connected to the other leg (423) of the first leveling block (421); A third adjusting screw (313) has one end connected to the protruding structure (324) of the second base (322) and the other end connected to one leg (423) of the second leveling block (422); A fourth adjusting screw (314) has one end connected to the protruding structure (324) of the second base (322) and the other end connected to the other leg (423) of the second leveling block (422).

6. The calibration device of claim 1, wherein, The calibration device further comprises: A bracket assembly (5) comprising a first bracket (51) for mounting the first sensor (71) and a second bracket (52) for mounting the second sensor (72).

7. The calibration device of claim 6, wherein, The first bracket (51) comprises: A first ear (511) and a second ear (512) both connected to the top surface (22); A groove structure (513) disposed in the mounting hole (24), one end of the groove structure (513) connected to the first ear (511), the other end of the groove structure (513) connected to the second ear (512), and a first fixing hole opened at the bottom of the groove structure (513) for mounting the air cylinder of the first sensor (71); The first sensor (71) is an air cylinder type displacement sensor.

8. The calibration device of claim 6, wherein, The second bracket (52) comprises: A third ear (521) and a fourth ear (522) both connected to the bottom surface (23); A convex groove structure (523) disposed in the mounting hole (24), one end of the convex groove structure (523) connected to the third ear (521), the other end of the convex groove structure (523) connected to the fourth ear (522), and a second fixing hole opened at the top of the convex groove structure (523) for mounting the air cylinder of the second sensor (72); The second sensor (72) is an air cylinder type displacement sensor.

9. The calibration device of claim 1, wherein, The sensor is a contact type measurement sensor; The number of mounting holes (24) is 2, and the number of sensor assemblies is 2.

10. A coating apparatus characterized by comprising: The coating device comprises the calibration device according to any one of claims 1-9. The coating device comprises the calibration device according to any one of claims 1-9.

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