Mask cleaning jig
By designing a mask cleaning fixture, which uses top, side and bottom grids to fix the mask and uses a robotic arm to clean and dry it, the problem of low mask cleaning efficiency is solved, production efficiency is improved and costs are saved.
Patent Information
- Application Number
- CN202520331929.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-27
- Publication Date
- 2026-02-06
- Estimated Expiration
- 2035-02-27
AI Technical Summary
The low efficiency of mask cleaning in existing technologies leads to high production costs.
Design a mask cleaning fixture comprising a top grid, side grids and a bottom grid for fixing masks, and immerse them in a cleaning solution for rinsing and drying by a robotic arm, thereby improving batch cleaning efficiency.
This fixture enables efficient cleaning of batch masks, reducing production costs.
Smart Images
Figure CN223875752U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to a semiconductor technical field especially relates to a mask cleaning jig. BACKGROUND
[0002] In semiconductor production and manufacturing, the mask is usually contaminated during use, so it needs to be cleaned regularly, and how to clean the mask has become a key process. The existing mode is usually single piece cleaning, which is low in operation efficiency and is not conducive to saving production cost. UTILITY MODEL CONTENTS
[0003] In view of the above situation, it is necessary to provide a mask cleaning jig for the problem of low mask cleaning efficiency in the prior art.
[0004] A mask cleaning jig, comprising a cleaning body, a cavity is formed in the cleaning body, a plurality of grid parts are arranged in the cleaning body, the grid parts comprise top grids, bottom grids and side grids, a plurality of top grids are uniformly distributed on the top of the cleaning body, a plurality of bottom grids are uniformly distributed on the bottom of the cleaning body, and a plurality of side grids are uniformly distributed on the opposite sides of the cleaning body, the positions of the top grids, the side grids and the bottom grids correspond to each other, a mechanical hand receiving hole is arranged on the periphery of the inner wall of the cleaning body, the mechanical hand receiving hole penetrates through the opposite ends of the cleaning body, and the mechanical hand receiving hole is matched with a mechanical hand.
[0005] The utility model has the advantages of simple structure, convenient operation, high operation efficiency for batch mask cleaning, and low production cost.
[0006] A plurality of masks to be cleaned are placed in the cleaning body through the top grids, the position corresponding top grids, side grids and bottom grids separate adjacent masks, the mechanical hand receiving hole is grabbed by the mechanical hand, then the cleaning body with the masks to be cleaned is placed in the cleaning solution tank for washing, the mask surface is washed clean by the cleaning solution, the cleaning body is placed in the drying tank for drying by the mechanical hand, the utility model has the advantages of simple structure, convenient operation, high operation efficiency for batch mask cleaning, and low production cost.
[0007] Further, the interval distance of adjacent top grids, the interval distance of adjacent side grids and the interval distance of adjacent bottom grids are all 4mm-6mm.
[0008] Further, the side grids and the bottom grids are both arc-shaped.
[0009] Further, the diameter of the mechanical hand receiving hole is 30mm-40mm.
[0010] Further, the top grid comprises oppositely arranged first and second grids, the first and second grids are connected with two ends of the top of the cleaning body respectively, and a first hollow part is formed between the first and second grids and communicates with the cavity.
[0011] Further, the two side walls of the cleaning body are provided with second hollow parts, the second hollow parts communicate with the cavity through intervals between adjacent side grids.
[0012] Further, the second hollow part is circular, and the diameter of the circular shape is 90mm-100mm.
[0013] Further, the bottom of the cleaning body is provided with a third hollow part, and the third hollow part communicates with the cavity through intervals between adjacent bottom grids. BRIEF DESCRIPTION OF DRAWINGS
[0014] Figure 1 It is a structural schematic view of the mask cleaning jig of the utility model.
[0015] Figure 2 It is a bottom view of the mask cleaning jig of the utility model.
[0016] In the figure: 1, cleaning body; 11, cavity; 12, grid part; 13, top grid; 131, first grid; 132, second grid; 14, bottom grid; 15, side grid; 16, mechanical hand receiving hole; 17, first hollow part; 18, second hollow part; 19, third hollow part. DETAILED DESCRIPTION
[0017] In order to facilitate understanding of the utility model, the utility model will be described more fully below with reference to the relevant drawings. The drawings show embodiments of the utility model. However, the utility model can be realized in many different forms, and is not limited to the embodiments described herein. On the contrary, the purpose of providing the embodiments is to make the disclosure of the utility model more thorough and comprehensive.
[0018] It should be noted that when an element is referred to as being "fixed" to another element, it can be directly on the other element or there can be a middle element. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or there can be a middle element. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only.
[0019] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in the description herein is for describing particular embodiments only and is not intended to be limiting of the application. The use herein of the terms "including", "comprising", "having" and the like are specifically intended to be equivalent to the term "consisting of". Also, the use herein of the terms "comprise", "comprising", "comprises", "include", "including", "includes" and the like are specifically intended to be inclusive or open-ended and do not exclude additional, unrecited elements or method steps. The various embodiments, features, and embodiments of features of the present application may, in all cases, be freely combined with each other.
[0020] A mask cleaning jig comprises a cleaning body 1, a cavity 11 is formed in the cleaning body 1, a plurality of grid parts 12 are arranged in the cleaning body 1, the grid parts 12 comprise top grid parts 13, bottom grid parts 14 and side grid parts 15, the top of the cleaning body 1 is provided with a plurality of top grid parts 13 which are uniformly distributed, the bottom of the cleaning body 1 is provided with a plurality of bottom grid parts 14 which are uniformly distributed, the opposite sides of the cleaning body 1 are provided with a plurality of side grid parts 15 which are uniformly distributed, and the positions of the top grid parts 13, the side grid parts 15 and the bottom grid parts 14 correspond to each other. The interval distance between adjacent top grid parts 13, the interval distance between adjacent side grid parts 15 and the interval distance between adjacent bottom grid parts 14 are all 5mm. The side grid parts 15 and the bottom grid parts 14 are both in the shape of a circular arc. By using the position correspondence of the plurality of top grid parts 13, the plurality of side grid parts 15 and the plurality of bottom grid parts 14, a plurality of masks are placed in the cleaning body 1 of the cavity 11, the interval distance between the plurality of masks is the same, the masks are convenient to take and place, and the cleaning solution and the masks are in full contact, and the side grid parts 15 and the bottom grid parts 14 are both in the shape of a circular arc, which forms a relative fixation to the sides and the bottoms of the plurality of masks, so that the plurality of masks are not easy to incline, and the stability is improved.
[0021] Specifically, the top grid 13 includes oppositely arranged first grid 131 and second grid 132, which are respectively connected with the two ends of the top of the cleaning body, and the interval between the first grid 131 and the second grid 132 forms a first hollow part 17, which is communicated with the cavity 11. The second hollow part 18 is arranged on the two side walls of the cleaning body 1, and is communicated with the cavity 11 through the interval between the adjacent side grids 15. The second hollow part 18 is circular, and the diameter of the circle is 96mm. The third hollow part 19 is arranged on the bottom of the cleaning body 1, and is communicated with the cavity 11 through the interval between the adjacent bottom grids 14. The operator can put a plurality of masks into the cavity 11 through the first hollow part 17 one by one, and the plurality of masks are separated by the grid part 12 composed of the top grid 13, the side grid 15 and the bottom grid 14. The cleaning body provided with a plurality of masks is placed in the cleaning solution, and the cleaning solution will enter the cavity 11 of the cleaning body 1 through the first hollow part 17, the interval between the adjacent top grids 13, the second hollow part 18, the interval between the adjacent side grids 15, the third hollow part 19 and the interval between the adjacent bottom grids 14, so that the cleaning solution and the mask are in sufficient contact. It can be understood that after cleaning is completed, the cleaning body 1 leaves the cleaning liquid, and the liquid will also be discharged from the cleaning body 1 through the first hollow part 17, the interval between the adjacent top grids 13, the second hollow part 18, the interval between the adjacent side grids 15, the third hollow part 19 and the interval between the adjacent bottom grids 14. The second hollow part 18 is circular, and the diameter of the circle is 96mm, so that the cleaning liquid enters or discharges more fully through the second hollow part 18.
[0022] Specifically, the mechanical hand receiving hole 16 is arranged along the inner wall of the cleaning body 1, and the mechanical hand receiving hole 16 penetrates through the opposite ends of the cleaning body 1. The mechanical hand receiving hole 16 is matched with the mechanical hand. The diameter of the mechanical hand receiving hole 16 is 33mm. The mechanical hand receiving hole 16 with appropriate diameter is grabbed by the clamping jaw of the mechanical hand, so that the cleaning body 1 is placed in or separated from the cleaning solution with corrosion. In addition, after cleaning, the mechanical hand receiving hole 16 is grabbed by the clamping jaw of the mechanical hand, so that the cleaning body 1 is placed in the drying tank for drying. For batch mask cleaning, the operation efficiency can be greatly improved, so as to save production cost.
[0023] The utility model discloses, a plurality of to be washed mask passes through top grid 13 and is placed into the cleaning body 1, and the position corresponding top grid 13, side grid 15 and bottom grid 14, the mask of adjacent separation is grabbed through the mechanical hand's clamping jaw mechanical hand receiving hole 16, then the cleaning body 1 of placing to be washed mask is washed, is placed into the cleaning solution groove and is washed, the mask surface is washed clean by cleaning solution, and the cleaning body 1 is placed into the drying groove and is dried by the mechanical hand, the utility model discloses, simple structure, convenient operation, for batch mask cleaning, can greatly improve the operation efficiency, thereby saving production cost.
[0024] In the description of the present specification, the description of the terms "one embodiment", "some embodiments", "example", "specific example" or "some examples" means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.
[0025] The above-described embodiments only express the implementation of the present application, and the description is more specific and detailed, but it cannot be understood as a limitation on the scope of the present application. It should be noted that for ordinary skilled in the art, without departing from the concept of the present application, a number of variations and improvements can be made, which are within the scope of the present application. Therefore, the scope of protection of the present application should be subject to the appended claims.
Claims
1. A mask cleaning tool, comprising: The utility model provides a kind of cleaning body, cavity is opened in the cleaning body, a plurality of grid parts are equipped in the cleaning body, the grid part includes top grid, bottom grid and side grid, the top of the cleaning body is equipped with a plurality of the top grid of uniform distribution, the bottom of the cleaning body is equipped with a plurality of the bottom grid of uniform distribution, the opposite two sides of the cleaning body are equipped with a plurality of the side grid of uniform distribution, the position of the top grid, the side grid and the bottom grid corresponds, and along the inner wall four around sides of the cleaning body, mechanical hand receiving hole is equipped, the mechanical hand receiving hole penetrates the opposite two ends of the cleaning body, and the mechanical hand receiving hole is adapted with mechanical hand.
2. The mask cleaning tool of claim 1, wherein: The interval distance of adjacent top grid, the interval distance of adjacent side grid and the interval distance of adjacent bottom grid are all 4mm-6mm.
3. The mask cleaning tool of claim 1, wherein: The side grid and the bottom grid are all circular arc shape.
4. The mask cleaning tool of claim 1, wherein: The diameter of the mechanical hand receiving hole is 30mm-40mm.
5. The mask cleaning tool of claim 1, wherein: The top grid includes oppositely arranged first grid and second grid, the first grid and the second grid are connected with the opposite two ends of the top of the cleaning body respectively, and the interval between the first grid and the second grid forms first hollow part, and the first hollow part is communicated with the cavity.
6. The mask cleaning tool of claim 1, wherein: Second hollow part is arranged on the two side walls of the cleaning body, and the second hollow part is communicated with the cavity through the interval between adjacent side grid.
7. The mask cleaning tool of claim 6, wherein: The second hollow part is circular, and the diameter of the circular is 90mm-100mm.
8. The mask cleaning tool of claim 1, wherein: Third hollow part is arranged on the bottom of the cleaning body, and the third hollow part is communicated with the cavity through the interval between adjacent bottom grid.