Shielding jig for lower electrode sand blasting

Abstract

The utility model discloses a shielding jig for lower electrode sand blasting, which comprises a lower electrode and a plurality of strip-shaped shielding plates, the lower electrode comprises a base plate and a wing plate which are integrally connected, the wing plate surrounds the periphery of the base plate and sinks relative to the base plate, the plurality of strip-shaped shielding plates are laid on the upper surface of the wing plate, and every two strip-shaped shielding plates abut against each other end to end. The two ends of each strip-shaped shielding plate are each provided with an adsorption component, and the adsorption components are used for adsorbing the corresponding strip-shaped shielding plate to the upper surface of the corresponding wing plate. According to the utility model, the adsorption component is adopted, the shielding plate is fixed on the upper surface of the wing plate through adsorption, so that the shielding plate is firm, reliable and convenient to disassemble, and the shielding plate cannot be damaged, so that the reutilization of the shielding plate is realized, the cost is effectively reduced, the lower electrode cannot be damaged, and the normal use of the lower electrode is ensured.

Description

TECHNICAL FIELD

[0001] The utility model relates to the surface treatment technical field of PECVD equipment lower electrode, specifically is a kind of lower electrode sandblasting with shielding jig. BACKGROUND

[0002] Plasma enhanced chemical vapor deposition (PECVD) technology is a kind of semiconductor thin film material preparation and other material thin film preparation method using glow discharge to ionize in deposition chamber and deposit on substrate, which enhances the activity of chemical vapor phase reaction substance by plasma activation, improves the surface reaction rate, and significantly reduces the thin film deposition temperature by high-energy ion. Under the action of plasma, gas is dissociated in vacuum chamber to form strong reaction material containing gas molecules, high-energy ions, electrons and active radicals.

[0003] At present, lower electrode is used in the vacuum chamber of PECVD equipment, and a certain roughness is built, so the surface of lower electrode needs to be sandblasted. The existing lower electrode mainly includes a base plate and a wing plate connected integrally, wherein the wing plate surrounds the periphery of the base plate and sinks relative to the base plate.

[0004] In actual operation, the surface of the base plate is usually sandblasted, and the wing plate does not need roughness, i.e. does not need to be sandblasted. Therefore, the wing plate needs to be shielded before sandblasting. The conventional method is to bond the shielding plate to the wing plate by glue or tape to fix the shielding plate. However, whether bonding by glue or bonding by tape will cause difficulty in subsequent removal of the shielding plate. Moreover, even destructive means are used for removal, which not only damages the shielding plate and cannot be reused, increasing the cost, but also scratches the lower electrode. In addition, residual glue is inevitably left on the side surface of the base plate and the surface of the wing plate, affecting the normal use of the lower electrode. TECHNICAL CONTENT

[0005] The utility model aims at overcoming the defects and deficiencies of the prior art, and provides a shielding jig for sandblasting of lower electrode, which realizes fixation of the shielding plate on the upper surface of the wing plate by adsorption, is firm and reliable, is easy to remove, does not damage the shielding plate to realize reuse of the shielding plate and reduce cost, and does not damage the lower electrode to ensure normal use of the lower electrode.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical scheme:

[0007] A kind of lower electrode sandblasting with shielding tool, including lower electrode and several strip-shaped shielding plates, the lower electrode includes integrally connected base plate and wing plate, the wing plate is around the periphery of the base plate, and sink relative to base plate, characterized by: several strip-shaped shielding plates are laid on the upper surface of the wing plate, and two two end-to-end abut, for shielding wing plate, the two ends of each strip-shaped shielding plate are equipped with suction component, for the strip-shaped shielding plate of being located is adsorbed on the upper surface of the wing plate.

[0008] Further, the two ends of each strip-shaped shielding plate are provided with through holes.

[0009] Further, the suction component includes cylinder, vertical rod and rubber suction cup, the cylinder is fixedly connected to the upper surface of the strip-shaped shielding plate, and is coaxially arranged with the corresponding through hole, the inner wall of the cylinder is provided with internal thread, the upper part of the vertical rod is provided with external thread, which is installed in the inside of the cylinder by thread cooperation, the lower end of the vertical rod extends into the corresponding through hole, and the rubber suction cup is rotatably connected to the bottom end of the vertical rod.

[0010] Further, the bottom surface of each strip-shaped shielding plate is provided with recess corresponding to the through hole, for accommodating the rubber suction cup.

[0011] Further, the two ends of each strip-shaped shielding plate are provided with notches, for exposing the edge of the corresponding rubber suction cup.

[0012] Further, the upper end of the vertical rod is provided with an insertion hole penetrating the vertical rod in the radial direction, for inserting a pin.

[0013] Further, each strip-shaped shielding plate is made of Teflon plate.

[0014] Further, the inner side surface of each strip-shaped shielding plate is abutted to the outer side surface of the corresponding base plate, and the upper surface of each strip-shaped shielding plate is flush with the upper surface of the base plate.

[0015] Compared with the prior art, the beneficial effects of the present application are:

[0016] The present application uses suction component to fix the shielding plate on the upper surface of the wing plate by suction, which is firm and reliable, and easy to remove, without damaging the shielding plate, so as to realize the reuse of the shielding plate, effectively reduce the cost, without damaging the lower electrode, so as to ensure the normal use of the lower electrode. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 It is a structural schematic diagram of the present application.

[0018] Figure 2 It isFigure 1 Structure of the A part is enlarged.

[0019] Figure 3 The utility model discloses a local structure schematic diagram.

[0020] Figure 4 The utility model discloses a local structure sectional view of single strip shielding plate in the utility model.

[0021] Figure 5 The utility model discloses a local structure schematic diagram when using. EMBODIMENTS

[0022] The technical solutions in the embodiments of the utility model will be apparently and completely described in conjunction with the drawings in the embodiments of the utility model, and apparently, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by the person skilled in the art without making creative efforts are within the protection scope of the utility model.

[0023] Referring to Figures 1-5 A shielding jig for sandblasting of lower electrode, including lower electrode 1 and four strip shielding plate 2, lower electrode 1 includes the base plate 11 and the wing plate 12 of integral connection, and the wing plate 12 is around the four around base plate 11, and relative to the base plate 11 subsidence, four strip shielding plate 2 is laid on the upper surface of wing plate 12, and two two head-to-head abut, for shielding wing plate 12, and the both ends of each strip shielding plate 2 are equipped with suction component 3, for the strip shielding plate 2 of being in suction on the upper surface of wing plate 12.

[0024] In the utility model, the both ends of each strip shielding plate 11 are equipped with through hole 4.

[0025] In the utility model, suction component 3 includes cylinder 31, vertical rod 32 and rubber suction cup 33, cylinder 31 fixedly connected on the upper surface of the strip shielding plate 2 of being, and with the through hole 4 of corresponding and coaxial arrangement, the inner wall on cylinder 31 is equipped with internal thread, and the upper part of vertical rod 32 is equipped with external thread, and is installed in the inside of cylinder 31 by thread cooperation, and the lower end of vertical rod 32 extends into the through hole 4 of corresponding, and rubber suction cup 33 is rotatably connected to the bottom end of vertical rod 32.

[0026] Therefore, by rotating vertical rod 32, it is moved downward along cylinder 31 and corresponding through hole 4, and rubber suction cup 33 is extruded, so that rubber suction cup 33 is deformed under pressure and firmly adsorbed on the upper surface of wing plate 12, so as to fix each strip shielding plate 1 on wing plate 12 and shield wing plate 12.

[0027] In this utility model, each strip shielding plate 2 has a groove 5 at both ends of its bottom surface that communicates with the corresponding through hole 4, so as to accommodate the rubber suction cup 33.

[0028] In this invention, each strip shielding plate 3 has a notch 6 at both ends to expose the edge of the corresponding rubber suction cup 33.

[0029] Therefore, when removing each strip shielding plate 2, the exposed edge of the rubber suction cup 53 can be pulled upward through the notch 6, which helps to release the suction effect of the rubber suction cup 53.

[0030] In this invention, the upper end of the vertical rod 32 is provided with an insertion hole 7 that passes through the vertical rod radially, for inserting a pin.

[0031] Therefore, after inserting the pin into the socket 7, the vertical rod 32 can be turned by operating the pin.

[0032] In this invention, each strip shielding plate 2 is made of Teflon sheet, which has excellent high temperature resistance, corrosion resistance and insulation properties.

[0033] In this invention, the inner side of each strip-shaped shielding plate 2 abuts against the outer side of the corresponding substrate 11, and the upper surface of each strip-shaped shielding plate 2 is flush with the upper surface of the substrate 11, thereby further improving the shielding effect.

[0034] The present invention will be further described below with reference to the accompanying drawings:

[0035] Before sandblasting, four strip-shaped shielding plates 2 are laid on the upper surface of the wing plate 12, with each pair abutting each other end to end, to shield the wing plate 12.

[0036] Then, rotate the vertical rod 32 so that it moves down along the cylinder 31 and the corresponding through hole 4, squeezing the rubber suction cup 33, so that the rubber suction cup 33 is deformed by pressure and firmly adsorbed onto the upper surface of the wing plate 12, thereby fixing each strip shielding plate 1 onto the wing plate 12.

[0037] It should be noted that in actual use, a Teflon column 8 (quarter-cylinder shape) that is compatible with its structure can be inserted into the gap 6 to fill the gap 6 and completely cover the wing plate 12.

[0038] Specifically, the Teflon column 8 can be bonded to the inner wall of the notch 6 using adhesives such as CA400 quick-drying adhesive.

[0039] After sandblasting, pull the exposed edge of the rubber suction cup 33 upward through the notch 6 to help release the adsorption effect of the high-temperature resistant suction cup 53. At the same time, rotate the vertical rod 32 in the opposite direction to move it upward along the cylinder 31 and the corresponding through hole 4, and then remove each strip shielding plate 2.

[0040] Although the present specification is described in terms of embodiments, not every embodiment exhibits every characteristic or implements every combination of features described in the specification. In addition, the description of the specification is not to be understood as an entire list of independent technical solutions, but rather the specification is to be understood as a whole, and the technical solutions in each embodiment can be appropriately combined to form other embodiments that can be understood by those skilled in the art.

[0041] The above description is merely a preferred embodiment of the present application, and is not intended to limit the scope of the present application. Any equivalent variation made within the scope of the claims of the present application should be within the scope of protection of the claims of the present application.

Claims

1. A masking jig for sandblasting of a lower electrode, comprising a lower electrode and a plurality of strip-shaped masking plates, said lower electrode comprising a base plate and a wing plate integrally connected, said wing plate being arranged around the periphery of said base plate and being sunken with respect to the base plate, characterized in that: The several strip-shaped shielding plates are arranged on the upper surface of the wing plate and abut against each other, and are used for shielding the wing plate.

2. The masking jig for sandblasting of a lower electrode according to claim 1, characterized in that: The two ends of each strip-shaped shielding plate are provided with through holes.

3. The masking jig for sandblasting of a lower electrode according to claim 2, characterized in that: The absorbing part comprises a cylinder, a vertical rod and a rubber suction cup, the cylinder is fixedly connected to the upper surface of the strip-shaped shielding plate, and is coaxially arranged with the corresponding through hole, the inner wall of the cylinder is provided with an internal thread, the upper part of the vertical rod is provided with an external thread, and the vertical rod is installed in the cylinder through thread cooperation, the lower end of the vertical rod extends into the corresponding through hole, and the rubber suction cup is rotationally connected to the bottom end of the vertical rod.

4. The masking tool for sandblasting of a lower electrode according to claim 3, characterized in that: The bottom surface of each strip-shaped shielding plate is provided with a groove at each end, which is communicated with the corresponding through hole and used for accommodating the rubber suction cup.

5. The masking tool for sandblasting of a lower electrode according to claim 3, characterized in that: Each end of each strip-shaped shielding plate is provided with a notch, which is used for exposing the edge of the corresponding rubber suction cup.

6. The masking tool for sandblasting of a lower electrode according to claim 3, characterized in that: The upper end of the vertical rod is provided with an insertion hole penetrating the vertical rod along the radial direction, which is used for inserting a pin.

7. The masking tool for sandblasting of a lower electrode according to claim 1, characterized in that: Each strip-shaped shielding plate is made of Teflon plate.

8. The masking tool for sandblasting of a lower electrode according to claim 1 or 7, characterized in that: The inner side surface of each strip-shaped shielding plate abuts against the outer side surface of the corresponding base plate, and the upper surface of each strip-shaped shielding plate is flush with the upper surface of the base plate.

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