Multi-shaft clamping table

Abstract

The utility model discloses a multi-shaft clamping table which can reliably move a probe frame away from a material disc, can carry out lifting and rotating operation, and facilitates multi-angle observation and detection of a detection mechanism on a probe. The apparatus comprises: a bottom turntable; the placing platform is provided with a material tray placing area and a vertical plate which is vertically arranged, and the vertical plate is located on the outer side of the material tray placing area and is vertically arranged; the clamping assembly comprises a vertically-arranged rotating disc, a first lifting mechanism, a second horizontal moving mechanism and a clamping jaw mechanism, and the clamping jaw mechanism comprises a fixed clamping jaw arm and a movable clamping jaw arm; the placing platform is arranged at the output end of the bottom rotary table, a material disc is placed on the material disc placing area, probe frames which are arranged in an arrayed mode are inserted in a material groove of the material disc, and the material disc is driven by external power or manual work, so that each set of probe frames are correspondingly arranged below the clamping jaw structure.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor device test, concretely to a multi -shaft clamping platform. BACKGROUND

[0002] The probe holder is arranged on the tray after the semiconductor device is completed, and then the probe holder on the tray needs to be transferred to the detection area of the detection device for detection of the probes arranged on the probe holder. The existing probe holder transfer is all through manual handling, which has low work efficiency, and the probes on the probe holder are easily damaged during the transfer process. Therefore, there is an urgent need to develop a transfer clamping platform to reliably transfer the probe holder. SUMMARY

[0003] To solve the above problems, the utility model provides a multi -shaft clamping platform, which reliably removes the probe holder from the tray and can be lifted and rotated, facilitating multi -angle observation and detection of the probes by the detection mechanism.

[0004] A multi -shaft clamping platform, characterized in that it comprises:

[0005] A bottom turntable;

[0006] A placement platform, which is provided with a tray placement area and a vertical plate arranged vertically on the tray placement area;

[0007] And a clamping assembly, which comprises a vertical turntable, a first lifting mechanism, a second horizontal moving mechanism and a clamping jaw mechanism, wherein the clamping jaw mechanism comprises a fixed clamping jaw arm and a movable clamping jaw arm.

[0008] The output end of the bottom turntable is provided with the placement platform, the tray placement area is provided with a tray, the grooves of the tray are provided with probe holders arranged in an array, and the tray is driven by external power or manually, so that each group of probe holders is arranged below the clamping jaw mechanism.

[0009] The seat of the turntable is fixed to the upper part of the vertical plate, the rotating output end of the turntable is connected to the seat of the first lifting mechanism, the output end of the first lifting mechanism is connected to the seat of the second horizontal moving mechanism, the output end of the second horizontal moving mechanism is fixed with a first connecting vertical plate, the non -driven end of the seat of the second horizontal moving mechanism is also fixed with a second connecting vertical plate, the bottom of the second connecting vertical plate is fixed with the fixed clamping jaw arm arranged horizontally in front of the protrusion, and the bottom of the first connecting vertical plate is fixed with the movable clamping jaw arm arranged horizontally in front of the protrusion. The movable clamping jaw arm is driven by the second horizontal moving mechanism to move away from or close to the fixed clamping jaw arm.

[0010] Further characterized in that:

[0011] The fixed clamping jaw arm is provided with a first clamping jaw protruding downward at each end corresponding to the length direction of the probe rack, and the movable clamping jaw arm is provided with an inner recessed mounting cavity at each end corresponding to the length direction of the probe rack, and each group of inner recessed mounting cavities is provided with a clamping block, and each group of clamping blocks is fixed to the corresponding position of the movable clamping jaw arm through a guide bolt and a pressing spring, and in the initial state, the exposed vertical surface of the clamping block protrudes outward from the corresponding vertical surface of the movable clamping jaw arm, so that the clamping block first adheres to the corresponding vertical surface of the probe rack when clamping the probe rack, and then is flexibly pressed by the pressing spring, thereby ensuring that the probe rack is not damaged by pressing;

[0012] Each clamping block is further provided with a second clamping jaw protruding downward, and the second clamping jaw is arranged one-to-one corresponding to the position of the first clamping jaw, thereby ensuring reliable clamping of the probe rack;

[0013] The fixed clamping jaw arm is further provided with a height stop limiting position corresponding to the position of the surrounding frame of the tray, and the height stop limiting position adheres to the surrounding frame of the tray when clamping the probe rack, thereby ensuring that the downward process will not be pressed to the probe rack;

[0014] The bottom turntable is provided with a first rotation locking mechanism, which ensures stable and reliable positioning of the placement platform;

[0015] The outer periphery of the turntable is provided with a locking bolt, and the locking bolt is locked after the output end of the turntable is rotated into position.

[0016] After the structure of the utility model is adopted, the tray is placed on the tray placement area, the probe racks are arranged in the trough of the tray, the tray is driven by external power or manually, each group of probe racks is arranged below the clamping jaw mechanism, the first lifting mechanism drives the second horizontal moving mechanism and the clamping jaw mechanism to descend, at this time, according to the preset positioning on the tray placement area, the lower part of the fixed clamping jaw arm is tightly attached to the corresponding position of one side of the probe rack, then the second horizontal moving mechanism drives the clamping jaw arm to move close to the fixed clamping jaw arm, so that the probe rack is reliably clamped, then the first lifting mechanism rises to the set position, the turntable rotates to the appropriate angle, so that the probe rack can be reliably moved away from the tray, and can be operated by lifting and rotating, which is convenient for the multi-angle observation and detection of the detection mechanism on the probe. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model Figure One ;

[0018] Figure 2 It is a schematic diagram of the three-dimensional structure of the utility model Figure Two ;

[0019] The names corresponding to the serial numbers in the drawings are as follows:

[0020] The bottom rotary table 10, the first rotary locking mechanism 11, the placing platform 20, the tray placing area 21, the tray positioning interval gap groove 211, the vertical plate 22, the clamping assembly 30, the tray 40, the frame 401, the rotary disc 50, the locking bolt 51, the first lifting mechanism 60, the second horizontal moving mechanism 70, the first connecting vertical plate 71, the second connecting vertical plate 72, the clamping jaw mechanism 80, the fixed clamping jaw arm 81, the first clamping jaw 811, the height stop 812, the movable clamping jaw arm 82, the probe rack 90, the clamping block 100, the guide bolt 101, the pressing spring 102, the second clamping jaw 103. DETAILED DESCRIPTION

[0021] A multi-axis clamping table, see Figure 1 , Figure 2 , which comprises a bottom rotary table 10, a placing platform 20, and a clamping assembly 30.

[0022] The placing platform 20 is provided with a tray placing area 21 and a vertically arranged vertical plate 22, which is vertically arranged outside the tray placing area. The tray placing area 21 is provided with a tray positioning interval gap groove 211, so that at least one tray corresponds to the directly below of the clamping jaw mechanism 80 when the tray 40 is positioned.

[0023] The clamping assembly 30 comprises a vertically arranged rotary disc 50, a first lifting mechanism 60, a second horizontal moving mechanism 70, and a clamping jaw mechanism 80, which comprises a fixed clamping jaw arm 81 and a movable clamping jaw arm 82.

[0024] The output end of the bottom rotary table 10 is provided with the placing platform 20. The tray 40 is placed on the tray placing area 21. The probe racks 90 are arranged in the trough of the tray 40. The tray 40 is driven by external power or manually, so that each group of probe racks 90 is arranged below the clamping jaw mechanism 80.

[0025] The seat body of the rotary disc 50 is fixed to the upper part of the vertical plate 22. The rotary output end of the rotary disc 50 is connected to the seat body of the first lifting mechanism 60. The output end of the first lifting mechanism 60 is connected to the seat body of the second horizontal moving mechanism 70. The output end of the second horizontal moving mechanism 70 is fixed with the first connecting vertical plate 71. The non-driven end of the seat body of the second horizontal moving mechanism 70 is also fixed with the second connecting vertical plate 72. The bottom of the second connecting vertical plate 72 is fixed with the horizontally protruding fixed clamping jaw arm 81. The bottom of the first connecting vertical plate 71 is fixed with the horizontally protruding movable clamping jaw arm 82. The movable clamping jaw arm 82 is driven by the second horizontal moving mechanism 70 to move away from or close to the fixed clamping jaw arm 81.

[0026] In specific implementation: the fixed clamping jaw arm 81 is respectively provided with a first clamping jaw 811 protruding downward at both ends corresponding to the length direction of the probe rack 90, and the movable clamping jaw arm 82 is respectively provided with a concave mounting cavity at both ends corresponding to the length direction of the probe rack 90, a clamping block 100 is arranged in each group of concave mounting cavities, each group of clamping blocks 100 is fixed to the corresponding position of the movable clamping jaw arm 82 through a guide bolt 101 and a pressing spring 102, and in the initial state, the exposed vertical surface of the clamping block 100 protrudes outwardly from the corresponding vertical surface of the movable clamping jaw arm 82, so that the clamping block 100 first adheres to the corresponding vertical surface of the probe rack 90 when clamping the probe rack 90, and then is flexibly pressed by the pressing spring 102, thereby ensuring that the probe rack 90 will not be damaged by pressing;

[0027] Each clamping block 100 is also provided with a second clamping jaw 103 protruding downward, and the second clamping jaw 103 is arranged in one-to-one correspondence with the position of the first clamping jaw 811, thereby ensuring reliable clamping of the probe rack 90;

[0028] The fixed clamping jaw arm 81 is also provided with a height stop limiting portion 812 corresponding to the position of the frame 401 of the tray 40, and the height stop limiting portion 812 adheres to the frame 401 of the tray 40 when clamping the probe rack 90, thereby ensuring that the probe rack 90 will not be pressed downward during the downward process;

[0029] The bottom turntable 10 is provided with a first rotation locking mechanism 11, which ensures stable and reliable positioning of the placement platform 20;

[0030] The outer periphery of the turntable 50 is provided with a locking bolt 51, and the locking bolt 51 is locked after the output end of the turntable 50 is rotated into position.

[0031] The working principle is as follows: the tray is placed on the tray placement area, the probe racks are arranged in the grooves of the tray, the tray is driven by external power or manually, each group of probe racks is arranged below the clamping jaw mechanism, the first lifting mechanism drives the second horizontal moving mechanism and the clamping jaw mechanism to descend, at this time, according to the pre-set positioning on the tray placement area, the first clamping jaw of the fixed clamping jaw arm is guided to adhere to the corresponding position on one side of the probe rack, then the second clamping jaw of the clamping jaw arm is driven by the second horizontal moving mechanism to move close to the first clamping jaw of the fixed clamping jaw arm, under the action of the pressing spring, the probe rack is reliably clamped and will not be damaged, then the first lifting mechanism is raised to a set position, the turntable is rotated to a suitable angle, so that the probe rack can be reliably moved away from the tray and can be operated by lifting and rotating, thereby facilitating the multi-angle observation and detection of the probe by the detection mechanism.

[0032] It is apparent for a person skilled in the art that the present application is not limited to the details of the above-described exemplary embodiments, but that it can be implemented in other concrete forms without departing from the spirit or the essential characteristics of the present application. Therefore, the embodiments should be considered as exemplary and non-limiting, the scope of the present application being defined by the claims appended hereto rather than by the above description, and all the changes which fall within the meaning and the scope of the equivalent elements of the claims are intended to be embraced therein. Any reference signs in the claims should not be construed as limiting the claims to the figures in which the reference signs are used.

[0033] Furthermore, it should be understood that although the present specification describes exemplary embodiments, not every embodiment contains only one independent technical solution, and the present specification is described in this way only for the sake of clarity, and a person skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that a person skilled in the art can understand.

Claims

1. A multi-axis clamping table, characterized by, It comprises: a bottom turntable; a placing platform, which is provided with a tray placing area and a vertical plate arranged vertically outside the tray placing area; and a clamping assembly, which comprises a rotating disc arranged vertically, a first lifting mechanism, a second horizontal moving mechanism, and a clamping jaw mechanism, the clamping jaw mechanism comprising a fixed clamping jaw arm and a movable clamping jaw arm. The output end of the bottom turntable is provided with the placing platform, a tray is placed on the tray placing area, a probe rack arranged in an array is inserted into the trough of the tray, and the tray is driven by external power or manually, so that each group of probe racks is arranged below the clamping jaw mechanism. The seat body of the rotating disc is fixed to the upper part of the vertical plate, the rotating output end of the rotating disc is connected to the seat body of the first lifting mechanism, the output end of the first lifting mechanism is connected to the seat body of the second horizontal moving mechanism, the output end of the second horizontal moving mechanism is fixed with a first connecting vertical plate, the non-driven end of the seat body of the second horizontal moving mechanism is also fixed with a second connecting vertical plate, the bottom of the second connecting vertical plate is fixed with the fixed clamping jaw arm arranged horizontally and protruding forward, and the bottom of the first connecting vertical plate is fixed with the movable clamping jaw arm arranged horizontally and protruding forward; the movable clamping jaw arm is driven by the second horizontal moving mechanism to move away from or close to the fixed clamping jaw arm.

2. A multi-axis clamping table according to claim 1, characterized in that: The fixed clamping jaw arm is respectively provided with a first clamping jaw protruding downward at both ends corresponding to the length direction of the probe rack, the movable clamping jaw arm is respectively provided with an inner recessed mounting cavity at both ends corresponding to the length direction of the probe rack, each inner recessed mounting cavity is provided with a clamping block, and each group of clamping blocks is fixed to the corresponding position of the movable clamping jaw arm by a guide bolt and a pressing spring; in the initial state, the exposed vertical surface of the clamping block protrudes outward from the corresponding vertical surface of the movable clamping jaw arm, so that the clamping block first adheres to the corresponding vertical surface of the probe rack when clamping the probe rack, and then is flexibly pressed by the pressing spring.

3. A multi-axis clamping table according to claim 2, wherein: Each clamping block is also provided with a second clamping jaw protruding downward, and the second clamping jaw is arranged one-to-one corresponding to the position of the first clamping jaw.

4. A multi-axis chuck table according to claim 1, wherein: The fixed clamping jaw arm is also provided with a height stop limiting position corresponding to the position of the surrounding frame of the tray, and the height stop limiting position adheres to the surrounding frame of the tray when clamping the probe rack.

5. A multi-axis chuck table according to claim 1, wherein: The bottom turntable is provided with a first rotation locking mechanism.

6. A multi-axis chuck table according to claim 1, wherein: The outer periphery of the rotating disc is provided with a locking bolt, and the locking bolt is locked after the output end of the rotating disc is rotated into position.

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