Electrostatic adsorption separation equipment

Abstract

The utility model belongs to the technical field of catalytic cracking oil slurry solid catalyst removal, and discloses electrostatic adsorption separation equipment which comprises a separator body, a raw material inlet, a purified raw material outlet, a high-voltage electricity inlet, a backwashing solvent outlet, a plurality of groups of backwashing solvent inlets and a hand hole, a transformer is also arranged at the top of the separator body close to the high-voltage lead-in port, and extends into the high-voltage lead-in port through a high-voltage flexible connector to be connected with the electrode; the electrode is hung on the electrode beam; a plurality of groups of filler supporting plates and backwashing devices are arranged in an array manner in the direction perpendicular to the length direction of the separator body; the backwashing device is connected with the backwashing solvent inlet; the electrode extends from the topmost filler support plate to the bottommost filler support plate. According to different heights and cleaning requirements of the electrostatic separator, the arrangement of the packed bed layers in the electrostatic separator is realized by adopting a mode of multiple layers of packing support plates and multiple layers of backwashing pipes, fluidization cleaning is realized, and the cleaning efficiency and effect are improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to catalytic cracking slurry oil removal solid catalyst technical field especially relates to a kind of electrostatic adsorption separation equipment. BACKGROUND

[0002] At present, the method of refinery to catalytic cracking slurry treatment mainly by recycling and throwing two kinds: recycling process is easy to make device coking and scaling, leading to device processing capacity decline;The oil slurry of throwing is mostly as fuel direct combustion, resource utilization rate is very low, causes great resource waste.Therefore, improve the added value of catalytic cracking slurry, realize value maximization, with very important economic benefits and social benefits.

[0003] Catalytic cracking slurry (FCCS) contains a large number of polycyclic aromatic hydrocarbons, which can be used to produce high value-added products such as needle coke, carbon black, carbon-based materials, etc., and can also be used as asphalt modifier, reinforcing agent, heat conducting oil and other high-quality raw materials, with very high comprehensive utilization value. However, the presence of catalyst particles in the oil slurry restricts the high-value utilization of the oil slurry, and the removal of catalyst particles becomes the key to the high-value utilization of the oil slurry. At present, the commonly used methods for removing solid particles from FCCS include sedimentation separation, filtration separation, cyclone separation, centrifugal separation and electrostatic separation. Among them, the electrostatic separation method has the advantages of good separation performance, large treatment capacity and small pressure drop, and has great advantages in the separation of small particle size particles or low solid phase concentration conditions.

[0004] Currently, the main design concept of electrostatic oil slurry desolidification is derived from two US patents: US3799857《ELECTROFILTER SYSTEM》and US5308586《ELECTROSTATIC SEPARATOR USING A BEAD BED》. Some domestic enterprises have further developed them. Chinese invention patent: announcement number "CN111303938B", name "a method for producing needle coke raw oil by effectively desolidifying catalytic oil slurry", discloses a method for producing needle coke raw oil by efficiently desolidifying catalytic oil slurry. The method solves the problem of Chinese catalytic oil slurry filtration difficulty that cannot be broken through by traditional electrostatic separation method and mechanical filtration method, realizes the process of refining the difficult-to-handle, low economic value-added catalytic oil slurry into low solid content, high value-added and high-quality catalytic oil slurry, and realizes long-period stable continuous and efficient production processing. The technical scheme provides a new method and technology for high value-added application of oil slurry, realizes efficient filtration of catalytic oil slurry, and at the same time realizes full use of backwash oil and optimized use of peripheral system supporting facilities, breaking through the bottleneck of electric filtration method in traditional electrostatic separation technology. Chinese invention patent: publication number "CN115851310A", name "oil slurry desolidification process and equipment integrating chemical sedimentation and electrostatic separation", discloses an oil slurry desolidification process and equipment integrating chemical sedimentation and electrostatic separation, belonging to the field of removing solid catalysts from catalytic cracking oil slurry. The oil slurry desolidification equipment integrates chemical sedimentation and electrostatic separation, including a static mixer, a primary sedimentation separation component, a two-stage electrostatic separation component, and a filter connected in sequence. The primary sedimentation separation includes a sedimentation separator, and the two-stage electrostatic separation includes electrostatic separators A, B, and C, which are connected in series. The electrostatic separators are internally provided with vertically suspended mesh electrode plates and spherical dosing devices to realize liquid-solid separation of oil slurry in a high-voltage electrostatic field. It can realize the process of combining primary additive sedimentation with secondary electrostatic separation to preliminarily remove large-sized impurities before electrostatic separation and deeply remove small-sized impurities, thereby improving the efficiency of oil slurry desolidification, increasing the removal rate of solid impurities, and reducing the power consumption of electrostatic separation and the cleaning frequency. The above-mentioned electrostatic separators all face the problem of backwashing, that is, the glass bead bed adsorbed with catalyst particles needs to be washed to have the ability to adsorb again. In order to achieve good cleaning effect, the diameter and height of a single electrostatic separator should not be too large. A large-diameter electrostatic separator will cause two problems: first, the cleaning of the filler bed is not convenient, and second, the electric field strength is limited, because traditional electrostatic separators are uniform electric field separators. The larger the diameter of the separator, the lower the electric field strength at the center of the separator, and the worse the electrostatic separation effect.However, the smaller separator diameter and height greatly limit the oil slurry processing capacity of a single separator, so the prior art often uses multiple parallel static separators to increase the oil slurry processing capacity, which causes the entire oil slurry dewatering system to be complex and large. However, the larger static separator diameter and thicker glass column bed layer make it difficult to achieve an ideal state in the backwashing process. Developing and designing a large static separator, improving the processing capacity of a unit device, solving the cleaning problem of the bed layer filler, and improving the static separation efficiency become a difficulty in limiting the use of the electrostatic method for the dewatering technology of catalytic cracking oil slurry. Practical new type content

[0005] In order to solve the problem that the increase of the oil slurry processing capacity caused by the parallel connection of multiple static separators in the prior art makes the entire oil slurry dewatering system complex and large, and the larger static separator diameter and thicker glass column bed layer make it difficult to achieve an ideal state in the backwashing process, the utility model provides a static adsorption separation device, which aims to realize the stability of the electrostatic field strength in the entire separator under the condition of a large static separator with more diameter and greater height, realize the high efficiency of the cleaning of the filler bed layer, process more oil slurry by a single static separator device, reduce the number of devices and system complexity, and make the cleaning of the filler bed layer more convenient and effective.

[0006] The utility model is realized through the following technical schemes: including separator body, raw material inlet and purified raw material outlet which are arranged respectively at the top and bottom of separator body and high voltage electricity introduction entrance and back flushing solvent outlet which are arranged respectively at the both sides of the top of separator body, still include several groups of back flushing solvent inlet and hand hole, separator body is long strip and is arranged vertically, still be provided with transformer on the top of separator body near high voltage electricity introduction entrance, and the electrode in the inside of separator body is connected with electrode beam through high voltage electricity soft connection which extends into high voltage electricity introduction entrance, electrode is hung on electrode beam and is connected through insulating material, several groups of filler support plate and back flushing device are arranged perpendicularly to the length direction of separator body, and the filler is laid on filler support plate and forms filler bed layer, back flushing device is connected with back flushing solvent inlet, electrode extends from the topmost filler support plate to the bottommost filler support plate.

[0007] As a further optimization, a filler cover plate is arranged above the filler support plate near the top of the inside of the separator body, and a gap is left between the filler cover plate and the filler support plate.

[0008] As a further optimization, the filler support plate is a perforated plate, and the diameter of the holes in the perforated plate is smaller than the diameter of the filler.

[0009] As a further optimization, the filler is made of a material with electrostatic adsorption effect.

[0010] As a further preference, the filler is glass beads.

[0011] As a further preference, the electrode is a rod electrode, which is regular or irregular cylindrical and made of metal material.

[0012] As a further preference, the electrode is a ring electrode, which is a metal cylinder with both ends open and with the axis being the axis of the separator body.

[0013] As a further preference, the electrode is a plate electrode, which is one or more metal grid plates.

[0014] As a further preference, the backwashing device is H-shaped backwashing, which is composed of four straight pipelines, namely pipeline one, pipeline two, pipeline three and pipeline four; one end of the pipeline one is connected with the backwashing solvent inlet, the other end is connected with the center of the pipeline two, and the pipeline one and the pipeline two are perpendicular to each other; the two ends of the pipeline two are connected with the pipeline three and the pipeline four respectively, and the pipeline three and the pipeline four are arranged in parallel with the pipeline one; a plurality of nozzles are arranged on the pipeline three and the pipeline four.

[0015] As a further preference, the backwashing device is ring-shaped backwashing, which is composed of three pipelines, namely pipeline five, pipeline six and pipeline seven, the pipeline five and the pipeline six are straight pipelines, and the pipeline seven is a ring-shaped pipeline; one end of the pipeline five is connected with the backwashing solvent inlet, the other end is connected with the center of the pipeline six, and is perpendicular to the pipeline six; the two ends of the pipeline six are connected with the pipeline seven, and a plurality of nozzles are arranged on the pipeline seven.

[0016] Compared with the prior art, the utility model has the advantages of:

[0017] 1. The utility model discloses a single electrode, a plurality of electrodes, a ring electrode, a plate electrode and the like are used to power the electrostatic separator, according to different electrostatic separator diameters and separation requirements, a plurality of electrodes or a plurality of layers of ring electrodes or a plurality of plate electrodes are arranged, so that the high-voltage electrostatic field in the electrostatic separator is as uniform and stable as possible, and does not decay too fast with the increase of the electrostatic separator size.

[0018] 2. The utility model discloses a plurality of layers of filler support plates and a plurality of layers of backwashing pipes are used to realize the arrangement of the filler bed in the electrostatic separator, according to different electrostatic separator heights and cleaning requirements, a plurality of layers of filler support plates and backwashing pipes are arranged, so that each layer of filler bed can realize fluidized cleaning as much as possible under the premise of meeting the separation requirements, and the cleaning efficiency and effect are improved. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1The whole structure schematic diagram of the utility model.

[0020] Figure 2 The whole internal structure schematic diagram of the utility model.

[0021] Figure 3 The electrode type schematic diagram of the utility model in pole electrode.

[0022] Figure 4 The electrode type schematic diagram of the utility model in ring electrode.

[0023] Figure 5 The electrode type schematic diagram of the utility model in plate electrode.

[0024] Figure 6 The H type backwashing device schematic diagram of the utility model.

[0025] Figure 7 The ring type backwashing device schematic diagram of the utility model.

[0026] Indicated in the drawing:

[0027] 1, separator body;2, raw material import;3, purified raw material export;4, high voltage electricity import;5, backwash solvent import one;6, backwash solvent import two;7, backwash solvent import three;8, backwash solvent export;9, hand hole one;10, hand hole two;11, hand hole three;12, transformer;13, high voltage electricity soft connection;14, electrode beam;15, electrode;16, filler support plate one;17, filler bed one;18, backwash device one;19, filler support plate two;20, filler bed two;21, backwash device two;22, filler support plate three;23, filler bed three;24, backwash device three;25, filler cover plate;26, pole electrode;27, ring electrode;28, plate electrode;29, H type backwash;30, nozzle;31, ring type backwash. Specific implementation

[0028] The advantages and characteristics of the utility model will be illustrated and explained by the following non-restrictive preferred embodiment description, and these embodiments are given only as examples with reference to the drawings.

[0029] Embodiment 1

[0030] As Figure 1 And Figure 2As shown, it is embodiment 1 of the utility model, the utility model provides a kind of electrostatic adsorption separation equipment, including separator body 1, raw material import 2, purified raw material outlet 3 and high voltage electric introduction port 4.The raw material import 2 is used to catalytic cracking oil slurry raw material enters electrostatic adsorption separation equipment, the purified raw material outlet 3 is used to remove solid catalyst after catalytic cracking oil slurry leaves electrostatic adsorption separation equipment, the high voltage electric introduction port 4 is used to the high voltage electric generated by transformer 12 is introduced to electrode plate in electrostatic adsorption separation equipment.The separation equipment further includes backwash solvent outlet 8 and at least one backwash solvent import and at least one hand hole.The number of backwash solvent import is determined according to the height of electrostatic adsorption separation equipment, and this example is three backwash solvent imports, respectively backwash solvent import one 5, backwash solvent import two 6 and backwash solvent import three 7.The number of hand hole is determined according to the number of backwash solvent import, and it is consistent with the number of backwash solvent import.The hand hole is used to fill and unload of packing bed in different positions.This embodiment is three hand holes, respectively hand hole one 9, hand hole two 10 and hand hole three 11.The backwash solvent outlet 8 is used to clean backwash solvent to leave electrostatic adsorption separation equipment.The separator body 1 is long strip, and vertically arranged.The raw material import 2 is arranged at the top of separator body 1, and the purified raw material outlet 3 is arranged at the bottom of separator body 1.The high voltage electric introduction port 4 and backwash solvent outlet 8 are respectively arranged at the two sides of the top of separator body 1.Several backwash solvent imports are arranged on one side of separator body 1, and several hand holes are arranged on the side adjacent to backwash solvent import.In this embodiment, backwash solvent import one 5, backwash solvent import two 6 and backwash solvent import three 7 are sequentially arranged from the bottom to the top of separator body 1, and similarly, hand hole one 9, hand hole two 10 and hand hole three 11 are sequentially arranged from the bottom to the top of separator body 1.

[0031] The electrostatic adsorption separation equipment further comprises a transformer 12, the transformer 12 is installed at the position close to the high-voltage electricity inlet 4 on the top of the separator body 1, the transformer 12 is used for boosting industrial electricity to high-voltage electricity (25kV and above), and is used for providing power supply for the electrostatic separator, and can be an alternating current transformer, a direct current transformer, a pulse transformer or other new transformers. The transformer 12 is connected with the high-voltage electricity leading-in device, the high-voltage electricity leading-in device is arranged in the separator body 1, the high-voltage electricity leading-in device is used for leading in the high-voltage electricity generated by the transformer 12 into the separator body 1, and comprises a high-voltage electricity soft connection 13 and an electrode beam 14. The transformer 12 is connected with the high-voltage electricity soft connection 13, the high-voltage electricity soft connection 13 extends into the high-voltage electricity inlet 4, and then enters the separator body 1. The electrode beam 14 is arranged close to the top in the separator body 1, and the electrode beam 14 is used for suspending the electrode 15 in the separator body 1. The electrode beam 14 is connected with the electrode 15 through insulation material. The high-voltage electricity soft connection 13 extending into the separator body 1 is connected with the electrode 15, and the high-voltage electricity generated by the transformer 12 is connected to the electrode 15 through the high-voltage electricity soft connection 13. Under the action of high-voltage electricity, the electrode 15 generates a high-voltage electric field in the separator body 1. The electrode 15 can be a single-rod electrode, a multi-rod electrode, a single-layer ring electrode, a multi-layer ring electrode, a plate electrode and the like, and the specific form of the electrode 15 is selected according to the diameter of the actual separator body, the required electric field intensity of liquid-solid separation. Various electrodes 15 constitute the high-voltage electrode system of the utility model, and are used for generating a high-voltage electrostatic field in the separator body 1 when electrified.

[0032] The separator body 1 is also provided with filler support plates for supporting the filler for electrostatic separation. According to the actual height of the separator body 1, multiple layers of filler support plates can be arranged in the separator body 1. The filler support plates are arranged vertically to the length direction of the separator body 1. The electrode 15 extends from the topmost filler support plate to the bottommost filler support plate. The present embodiment is provided with three layers of filler support plates, namely, the filler support plate one 16, the filler support plate two 19 and the filler support plate three 22 arranged from bottom to top of the separator body 1. The electrode 15 extends from the filler support plate three 22 to the filler support plate one 16. The filler support plates are perforated plates with holes having a diameter smaller than that of the filler for supporting the filler. The filler is loaded through the holes, and the loaded filler forms filler bed layers under the support of the filler support plates. In the present embodiment, the filler forms the filler bed layer one 17 on the filler support plate one 16, the filler bed layer two 20 on the filler support plate two 19, and the filler bed layer three 23 on the filler support plate three 22. The top of each layer of the filler support plates is provided with a backwashing device connected with a backwashing solvent inlet for the backwashing solvent to enter the separator body 1 to backwash the filler in the filler bed layer. The backwashing device for backwashing the filler bed layer includes a cleaning liquid distributor and a nozzle 30, and one layer of the backwashing device is arranged above each layer of the filler support plates. In the present embodiment, there are three backwashing devices, namely, the backwashing device one 18 connected with the backwashing solvent inlet one 5, the backwashing device two 21 connected with the backwashing solvent inlet two 6, and the backwashing device three 24 connected with the backwashing solvent inlet three 7. The top of the uppermost filler bed layer is provided with a filler cover plate 25. In the present embodiment, the filler cover plate 25 is arranged above the filler bed layer three 23. The filler cover plate 25 is used to prevent the filler in the uppermost layer from being carried out of the separator by the backwashing solvent during backwashing. The filler support plate of the upper layer can serve as the filler cover plate 25 of the lower filler bed layer. In the present embodiment, the filler support plate three 22 serves as the filler cover plate 25 of the filler bed layer two 20, and the filler support plate two 19 serves as the filler cover plate 25 of the filler bed layer one 17.

[0033] The filler cover plate 25 leaves a certain space with the filler bed layer for fluidization of the filler bed layer by the high-pressure backwashing during backwashing. That is, the filler bed layer is compact during normal liquid-solid separation, and the raw material liquid moves downward. During backwashing, the filler bed layer should be loose, and the backwashing solvent moves upward to drive the filler in the filler bed layer to flow in the space between the filler cover plate 25 and the filler support plate, thereby enhancing the cleaning effect.

[0034] The filler is preferably glass beads, and can also be spherical or non-spherical fillers capable of producing electrostatic adsorption. The backwashing solvent can be diesel, kerosene, toluene or other solvents, and can also include phosphoric acid, nitric acid and other additives.

[0035] Embodiment 2

[0036] As Figures 3 to 5 shown, several types of electrodes 15 in the utility model are shown in the schematic diagram.

[0037] The same parts of this embodiment and embodiment 1 are not described herein, and the difference between this embodiment and embodiment 1 is that, as Figure 3 shown, the electrode 15 in the separator body 1 can be a rod electrode 26, the structure of the rod electrode 26 is a regular or irregular cylinder, which is made of metal material, and the number of the rod electrode 26 can be adjusted according to the size of the diameter of the electrostatic adsorption separator body 1, the voltage of the high-voltage electricity output by the transformer 12 and the field strength of the high-voltage electrostatic field required for liquid-solid separation, which can be one or multiple, and the multiple rod electrodes 26 can be arranged in a straight line or in a star shape.

[0038] As Figure 4 shown, the electrode 15 of the separator body 1 can be a ring electrode 27, the structure of the ring electrode 27 is a cylinder with both ends open, which can be made of metal plate or frame grid, and the metal material, the number of the ring electrode 27 and the spacing of different ring electrodes 27 can be adjusted according to the size of the diameter of the electrostatic adsorption separator body 1, the voltage of the high-voltage electricity output by the transformer 12 and the field strength of the high-voltage electrostatic field required for liquid-solid separation.

[0039] As Figure 5 shown, the electrode 15 of the separator body 1 can be a plate electrode 28, the structure of the plate electrode 28 is one or more grid plates, which is made of metal material, and the number of the plate electrode 28 and the spacing of different plate electrodes 28 can be adjusted according to the size of the diameter of the electrostatic adsorption separator body 1, the voltage of the high-voltage electricity output by the transformer 12 and the field strength of the high-voltage electrostatic field required for liquid-solid separation.

[0040] Regardless of the type of electrode 15, it is connected with the high-voltage electricity soft connection 13 for leading in the high-voltage electricity generated by the transformer 12, and it is connected with the electrode beam 14 through the insulating part for stably suspending the electrode 15 in the separator body 1, and it passes through the filler support plate, the filler bed layer, the filler cover plate and the backwashing device, and when it intersects with the filler support plate, the filler cover plate and the backwashing device, safe insulation measures are adopted, such as wrapping the electrode 15 with a protective sleeve made of PTFE (polytetrafluoroethylene) material to avoid direct contact between the electrode 15 and the metal parts in the separator body 1 except the high-voltage electricity soft connection 13.

[0041] Embodiment 3

[0042] As Figure 6 and Figure 7As shown, it is several backwashing device schematic diagram of the utility model. The same part of this embodiment and embodiment 1 and embodiment 2 is not repeated, and the difference between this embodiment and embodiment 1 and embodiment 2 is that the structure type of the backwashing device can be H type, or annular. As Figure 6 As shown, the H type backwashing 29 of this embodiment is arranged in the separator body 1 above the packing support plate. The H type backwashing 29 is composed of four straight pipelines, which are pipeline one, pipeline two, pipeline three and pipeline four. One end of the pipeline one is connected with the backwashing solvent inlet, and the other end is connected with the center of the pipeline two, and the pipeline one and the pipeline two are perpendicular to each other. The two ends of the pipeline two are connected with the pipeline three and the pipeline four respectively, and the pipeline three and the pipeline four are arranged in parallel with the pipeline one. A plurality of nozzles 30 are arranged on the pipeline three and the pipeline four, which are used for high-pressure spraying of the solvent into the packing bed.

[0043] As shown, Figure 7 The annular backwashing 31 of this embodiment is composed of three pipelines, which are pipeline five, pipeline six and pipeline seven. The pipeline five and the pipeline six are straight pipelines, and the pipeline seven is an annular pipeline. One end of the pipeline five is connected with the backwashing solvent inlet, and the other end is connected with the center of the pipeline six, and is perpendicular to the pipeline six. The two ends of the pipeline six are connected with the pipeline seven, that is, the pipeline six is connected with the pipeline seven as the diameter of the pipeline seven, or the pipeline six is in the position of the diameter of the pipeline seven. A plurality of nozzles 30 are arranged on the pipeline seven.

[0044] Whether the H type backwashing 29 or the annular backwashing 31, a certain number of small holes can be directly opened in the backwashing device for the ejection of the backwashing solvent, or a certain number of nozzles 30 can be installed.

[0045] In addition to the above embodiments, the utility model can also have other implementation manners, and any technical solution formed by equivalent replacement or equivalent transformation falls within the protection scope required by the utility model.

Claims

1. An electrostatic adsorption separation device, comprising a separator body (1), a raw material inlet (2) and a purified raw material outlet (3) arranged at the top and bottom of the separator body (1) respectively, and a high-voltage electric lead-in (4) and a backwash solvent outlet (8) arranged at the two sides of the top of the separator body (1) respectively, characterized in that: It also includes several groups of backwash solvent inlets and hand holes; the separator body (1) is long and vertically arranged; the separator body (1) is provided with a transformer (12) near the high-voltage electric inlet (4) at the top, the transformer (12) is connected with the electrode (15) inside the separator body (1) through the high-voltage electric soft connection (13) extending into the high-voltage electric inlet (4); the electrode (15) is hung on the electrode beam (14) and connected with the electrode beam (14) through insulation material; several groups of packing support plates and backwash devices are arranged perpendicularly to the length direction of the separator body (1), and the packing is laid on the packing support plates to form a packing bed layer; the backwash device is connected with the backwash solvent inlet; the electrode (15) extends from the topmost packing support plate to the bottommost packing support plate.

2. The electrostatic chucking separation apparatus according to claim 1, wherein: A packing cover plate (25) is arranged above the packing support plate near the top inside the separator body (1), and a gap is left between the packing cover plate (25) and the packing support plate.

3. The electrostatic chucking separation apparatus according to claim 2, wherein: The packing support plate is a perforated plate, and the diameter of the holes on the perforated plate is smaller than the diameter of the packing.

4. The electrostatic chucking separation apparatus according to claim 2, wherein: The packing is made of a material with electrostatic adsorption effect.

5. The electrostatic chucking separation apparatus according to claim 3, wherein: The packing is glass beads.

6. The electrostatic chucking separation apparatus according to claim 2, wherein: The electrode (15) is a rod electrode (26), which is a regular or irregular cylinder made of metal material.

7. The electrostatic chucking separation apparatus according to claim 2, wherein: The electrode (15) is a ring electrode (27), which is a metal cylinder with openings at the upper and lower ends of the axis in the separator body (1).

8. The electrostatic chucking separation apparatus according to claim 2, wherein: The electrode (15) is a plate electrode (28), which is one or more metal grid plates.

9. The electrostatic chucking separation apparatus according to claim 2, wherein: The backwash device is an H-shaped backwash (29), which is composed of four straight pipelines, namely pipeline one, pipeline two, pipeline three and pipeline four; one end of the pipeline one is connected with the backwash solvent inlet, the other end is connected with the center of the pipeline two, and the pipeline one and the pipeline two are perpendicular to each other; the two ends of the pipeline two are connected with the pipeline three and the pipeline four respectively, and the pipeline three and the pipeline four are arranged in parallel with the pipeline one; a plurality of nozzles (30) are arranged on the pipeline three and the pipeline four.

10. The electrostatic chucking separation apparatus according to claim 2, wherein: The backwash device is a ring-shaped backwash (31), which is composed of three pipelines, namely pipeline five, pipeline six and pipeline seven, the pipeline five and the pipeline six are straight pipelines, and the pipeline seven is a ring-shaped pipeline; one end of the pipeline five is connected with the backwash solvent inlet, the other end is connected with the center of the pipeline six, and is perpendicular to the pipeline six; the two ends of the pipeline six are connected with the pipeline seven, and a plurality of nozzles (30) are arranged on the pipeline seven.

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