Bias device for PVD (Physical Vapor Deposition) coating

Abstract

The utility model provides a bias device for PVD (Physical Vapor Deposition) coating. The bias device comprises a bias lead-in cavity, a movable carrier and a conductive component, the mobile carrier is located in the bias voltage leading-in cavity and is connected with the bias voltage leading-in cavity in a sliding mode. A driving bracket is arranged on the moving carrier; the conductive assembly comprises a conductive bracket and a conductive roller, the two ends of the conductive bracket are rotationally connected with the driving support and the conductive roller respectively, and the outer rolling face of the conductive roller extends out of the conductive bracket and makes contact with the inner cavity wall of the bias voltage guide-in cavity for electric conduction. According to the utility model, the conductive roller is adopted to replace a traditional metal brush to apply voltage, so that the problem of board clamping caused by sliding friction between the conductive assembly and the bias voltage lead-in cavity is solved, the stability is high, and the service life is long.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of film preparation, and relates to a bias voltage device for PVD coating. BACKGROUND

[0002] The glass secondary product, namely, deep-processed glass, is a glass product with specific functions prepared by using flat plate glass (float glass, common flat plate glass, flat-drawn glass, and calendered glass) as a basic raw material and adopting different processing techniques according to different use requirements.

[0003] PVD (Physical Vapor Deposition) is a technology of converting a solid material into a gaseous state by a physical method and depositing a film on a substrate surface, which is commonly used in the field of glass processing. Coating of electrochromic glass is a technology of coating different film layers on a glass substrate in a certain order. The coating process requires bias voltage to be applied to the glass substrate to adsorb the metal film layer prepared in the previous process on the bottom layer. At present, the bias voltage function in the coating process of PVD processed glass is mainly realized by a copper brush. For example, CN113684463A discloses a flat plate continuous PVD equipment and a carrier plate bias voltage introduction device thereof, which includes a power supply, a connecting mechanism, and an electricity introduction mechanism. The electricity introduction mechanism includes a wire and loading and unloading switches. The number of the connecting mechanisms is set to at least three and arranged in sequence. The connecting mechanism includes a mounting seat for connecting the combined chamber and a flexible brush that is not in conduction with the combined chamber. The flexible brush is in conduction with the wire, which can avoid damage to the connection between the carrier plate and the connecting mechanism caused by excessive instantaneous current.

[0004] However, the traditional copper brush used in the bias voltage device has the following two problems: first, the copper wire is easy to fall off during the contact between the glass carrier plate and the copper brush, and the fallen copper wire is easy to enter the molecular pump and damage the equipment. Second, the glass carrier plate is advanced and retreated in the chamber multiple times, which can cause the copper brush to curl, resulting in the linear increase of the sliding friction between the glass carrier plate and the copper brush, and even causing the glass carrier plate to be stuck. It is very important to effectively solve the above problems for improving the coating quality and work efficiency. Utility model content

[0005] In view of the deficiencies in the prior art, the purpose of the utility model is to provide a bias voltage device for PVD coating, which applies voltage by using a conductive roller, solves the problem of sticking caused by sliding friction between the conductive component and the bias voltage introduction cavity, has high stability, and has a long service life.

[0006] To achieve this purpose, the utility model adopts the following technical solutions:

[0007] The utility model provides a kind of for PVD coating bias device, the bias device for PVD coating including bias introduction cavity, mobile carrier and conducting assembly;The mobile carrier is located in the bias introduction cavity, and slidingly connects the bias introduction cavity;Driving bracket is provided on the mobile carrier;The conducting assembly includes electrically-conductive bracket and conducting roller, and the both ends of the electrically-conductive bracket are rotatably connected with the driving bracket and the conducting roller respectively, and the outer rolling surface of the conducting roller extends the electrically-conductive bracket, and is in contact with the inner cavity wall of the bias introduction cavity and conducts electricity.

[0008] The bias introduction cavity in the utility model is used for interfacing to be coated substrate, and by the movement of mobile carrier in bias introduction cavity, conducting assembly is driven to compress the inner cavity wall of bias introduction cavity and slide friction, realizes contact conduction, and then pressure is applied to be coated substrate, avoids the problem of card board, and improves overall stability.

[0009] As a preferred technical scheme of the utility model, the driving bracket is provided with a contact connecting plate, the contact connecting plate is provided with a first rotating shaft, and the end of the electrically-conductive bracket away from the conducting roller is rotatably connected with the first rotating shaft;The electrically-conductive bracket is provided with a second rotating shaft, the conducting roller is sleeved on the second rotating shaft, and the outer rolling surface of the conducting roller extends the electrically-conductive bracket.

[0010] As a preferred technical scheme of the utility model, the electrically-conductive bracket is further provided with a spring inside.

[0011] The utility model is provided with spring inside conducting assembly, guarantees that conducting roller is always compressed bias introduction cavity in the movement process of mobile carrier, and improves pressure stability.

[0012] As a preferred technical scheme of the utility model, the electrically-conductive bracket includes first support plate and second support plate arranged in parallel, and the opposite ends of the first support plate and the second support plate are rotatably connected with the both ends of the first rotating shaft respectively, and the second rotating shaft penetrates the opposite ends of the first support plate and the second support plate in turn.

[0013] As a preferred technical scheme of the utility model, the first support plate is movably connected with the second support plate through connecting pin, the connecting pin is located between the first rotating shaft and the second rotating shaft, and the spring is further wound between the connecting pin and the first rotating shaft.

[0014] As an optimal technical scheme of the utility model, the electrically-conductive bracket is positively rotated or reversely rotated with the first rotating shaft as the center, the rotating range of the electrically-conductive bracket is 5°-175°, for example, can be 5°, 10°, 20°, 30°, 45°, 60°, 70°, 80°, 90°, 100°, 120°, 150°, 170° or 175°, but is not limited to the listed values, and other values not listed in the range are also applicable.

[0015] When the mobile carrier advances, the electrically-conductive bracket is positively rotated to compress the biasing lead-in cavity by the electrically-conductive roller, when the mobile carrier retreats, the electrically-conductive bracket is reversely rotated, the frequent advancing or retreating operation of the mobile carrier is met, the flexibility is high, the biasing lead-in cavity is not easily damaged, and the service life of the device is improved.

[0016] As an optimal technical scheme of the utility model, the driving support includes an inverted "L" type support and a "U" type support, one end of the inverted "L" type support is connected to the mobile carrier, the other end is detachably connected to the "U" type support, and the contact connecting plate is arranged on the "U" type support.

[0017] As an optimal technical scheme of the utility model, the material of the electrically-conductive roller is copper.

[0018] As an optimal technical scheme of the utility model, the mobile carrier is internally provided with an electrically-conductive lead, and the electrically-conductive lead is electrically connected to the electrically-conductive assembly.

[0019] As an optimal technical scheme of the utility model, the vertical section of the biasing lead-in cavity is in a "U" type structure.

[0020] Compared with the prior art, the utility model has the beneficial effects that:

[0021] The utility model provides a biasing device for PVD coating, adopts an electrically-conductive roller to replace a traditional electrically-conductive brush to apply voltage to a biasing lead-in cavity, thereby realizing pressure application to a to-be-coated substrate, enabling a film layer to be adsorbed on a bottom layer, helping to improve film layer performance, simultaneously solving the problem of plate jamming caused by sliding friction between an electrically-conductive assembly and the biasing lead-in cavity, and improving pressure application stability and service life of the device. ACCURACY OF DRAWINGS

[0022] Figure 1 The utility model provides a biasing device for PVD coating for the structure schematic drawing of embodiment 1.

[0023] Figure 2 The utility model provides an electrically-conductive assembly for the structure schematic drawing of embodiment 1.

[0024] 1-bias voltage introduction cavity; 2-moving carrier; 3-inverted "L" type support; 4-"U" type support; 5-contact connecting plate; 6-first rotating shaft; 7-second rotating shaft; 8-first supporting plate; 9-second supporting plate; 10-conductive roller; 11-connecting pin; 12-spring. DETAILED DESCRIPTION

[0025] It should be understood that, in the description of the present application, the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second" and the like are only for the purpose of description and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first", "second" and the like can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "a plurality of" is two or more, unless otherwise specified.

[0026] It should be noted that, in the description of the present application, unless otherwise specified and limited, the terms "set", "connected", "connected" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication between two elements inside. For those skilled in the art, the specific meaning of the above terms in the present application can be understood through specific circumstances.

[0027] The technical solutions of the present application will be further illustrated below in conjunction with the drawings and through specific embodiments.

[0028] In one specific embodiment, the utility model provides a kind of bias voltage device for PVD coating, including bias voltage introduction cavity, mobile carrier and conducting component.The bias voltage introduction cavity is used to butt joint substrate to be coated.The mobile carrier is located in the bias voltage introduction cavity, and slidingly connects the bias voltage introduction cavity, so that mobile carrier can advance or retract sliding in bias voltage introduction cavity.The mobile carrier is provided with driving bracket, and the conducting component includes conducting bracket and conducting roller, two ends of the conducting bracket are rotationally connected with the driving bracket and the conducting roller respectively, the conducting roller moves along bias voltage introduction cavity along with the sliding of mobile carrier, and the outer rolling surface of the conducting roller extends the conducting bracket and is in contact with the inner cavity wall of the bias voltage introduction cavity to realize the voltage applied to substrate to be coated.

[0029] In some embodiments, the vertical section of the bias voltage introduction cavity is in a "U" type structure, and the mobile carrier slides along the inner axis of the "U" type groove. The bias voltage introduction cavity is made of conductive metal material, which can conduct electricity with the conducting roller, and then transmit voltage to the substrate to be coated connected thereto, so that the film layer is adsorbed on the substrate bottom layer.

[0030] The utility model does not make specific limitation to the sliding connection mode of the mobile carrier and the bias voltage introduction cavity, and any mode commonly used in the art can be used. Moreover, the inner cavity wall of the "U" type groove of the bias voltage introduction cavity is smooth and flat, which does not hinder the movement of the mobile carrier, and the mobile carrier can be provided with an additional driving assembly to provide driving force for the sliding of the mobile carrier. It should be noted that the utility model does not make specific limitation to the driving assembly, and any driving assembly that can realize the axial movement of the mobile carrier along the bias voltage introduction cavity can be applied to the utility model.

[0031] The utility model does not make specific limitation to the structure of the mobile carrier, and the skilled person in the art can adjust it according to the actual process requirements and the shape and size of the bias voltage introduction cavity. For example, the mobile carrier includes a driving shaft and two chucks located at the top and bottom of the driving shaft respectively, wherein the driving shaft is perpendicular to the axial direction of the mobile carrier, the shape and size of the chuck at the bottom of the driving shaft are adapted to the bias voltage introduction cavity, and the chuck at the top of the driving shaft is provided with necessary fasteners and connectors, etc. for connection with the conducting component and external equipment.

[0032] In addition, the mobile carrier is externally connected with a bias power supply necessary for completing the process, and the bias power supply is used for providing a bias voltage to the mobile carrier. The mobile carrier is internally provided with a conductive lead, the conductive lead is electrically connected with the conductive assembly, and then the bias voltage is transmitted to the conductive roller, the conductive roller is used for applying pressure to the bias introduction cavity, and the poor contact and the friction loss are avoided. The bias power supply is not specifically limited, and a constant voltage or a pulse voltage can be used.

[0033] In some embodiments, a contact connecting plate is arranged on the driving support, a first rotating shaft is arranged on the contact connecting plate, one end of the conductive bracket away from the conductive roller is rotationally connected with the first rotating shaft, the conductive bracket rotates forward or reversely with the first rotating shaft as the center, and the rotating range of the conductive bracket is 5°-175°. When the mobile carrier advances, the conductive bracket rotates forward to compress the bias introduction cavity, and when the mobile carrier retreats, the conductive bracket reversely rotates, and the frequent advancing or retreating operation of the mobile carrier is met.

[0034] Specifically, the driving support comprises an inverted "L" type support and a "U" type support, one end of the inverted "L" type support is connected with the mobile carrier, the other end of the inverted "L" type support is detachably connected with the "U" type support, and the contact connecting plate is arranged on the "U" type support.

[0035] A second rotating shaft is arranged on the conductive bracket, the conductive roller is sleeved on the second rotating shaft, and an outer rolling surface of the conductive roller extends out of the conductive bracket. With the sliding of the mobile carrier, the outer rolling surface of the conductive roller and the inner cavity wall of the bias introduction cavity slide and rub to conduct electricity. Specifically, the material of the conductive roller is copper.

[0036] Further, the inside of the conductive bracket is further provided with a spring. Specifically, the conductive bracket comprises first and second parallel arranged supporting plates, opposite ends of the first and second supporting plates are rotationally connected with two ends of the first rotating shaft respectively, and the second rotating shaft penetrates through the other ends of the first and second supporting plates in sequence. The first supporting plate is movably connected with the second supporting plate through a connecting pin, the connecting pin is located between the first and second rotating shafts, and the spring is further wound between the connecting pin and the first rotating shaft.

[0037] Embodiment 1

[0038] The utility model provides a kind of bias device for PVD coating, including bias introduction cavity 1, mobile carrier 2 and conductive assembly. Figure 1As shown in the figure, the vertical section of the bias introduction cavity 1 is in a "U" structure, the moving carrier 2 is located in the bias introduction cavity 1 and is slidingly connected to the bias introduction cavity 1 to move axially along the bias introduction cavity 1. The moving carrier 2 is provided with an inverted "L" bracket 3 and a "U" bracket 4, one end of the inverted "L" bracket 3 is connected to the moving carrier 2, and the other end is bolted to the "U" bracket 4, the "U" bracket 4 is provided with a contact connecting plate 5, and the contact connecting plate 5 is provided with a first rotating shaft 6. As shown in the figure, Figure 2 As shown in the figure, the conductive assembly includes a conductive bracket and a conductive roller 10, the conductive bracket is provided with a second rotating shaft 7, the conductive roller 10 is sleeved on the second rotating shaft 7, and the outer rolling surface of the conductive roller 10 extends out of the conductive bracket. The conductive bracket includes a first supporting plate 8 and a second supporting plate 9 arranged in parallel, the opposite ends of the first supporting plate 8 and the second supporting plate 9 are respectively rotatably connected to the two ends of the first rotating shaft 6, and the second rotating shaft 7 penetrates the opposite ends of the first supporting plate 8 and the second supporting plate 9 in sequence. The first supporting plate 8 is movably connected to the second supporting plate 9 through a connecting pin 11, the connecting pin 11 is located between the first rotating shaft 6 and the second rotating shaft 7, and a spring 12 is further wound between the connecting pin 11 and the first rotating shaft 6. The conductive bracket rotates forward or reversely around the first rotating shaft 6 as the center, and the rotation range of the conductive bracket is 5°-175°. The material of the conductive roller 10 is pure copper, the moving carrier 2 is internally provided with a conductive lead wire, the conductive lead wire is electrically connected to the conductive roller 10, and the outer rolling surface of the conductive roller 10 is in contact with the inner cavity wall of the bias introduction cavity 1 for electric conduction.

[0039] The working principle of the embodiment includes: assembling the moving carrier 2, the inverted "L" bracket 3, the "U" bracket 4 and the conductive assembly; using the bias introduction cavity 1 to abut the substrate to be plated, ensuring that the voltage applied to the bias introduction cavity 1 can be conducted to the substrate to be plated; placing the moving carrier 2 in the inner cavity of the bias introduction cavity 1, and rotating the conductive assembly forward to press the inner cavity wall of the bias introduction cavity 1 with the conductive roller 10; then applying voltage to the moving carrier 2 and making the moving carrier 2 advance along the inner cavity of the bias introduction cavity 1, the conductive roller 10 and the inner cavity wall of the bias introduction cavity 1 slidingly rub for electric conduction, thereby realizing pressure application to the substrate to be plated. The moving carrier 2 continuously slides to the tail end of the bias introduction cavity 1, and then the conductive assembly is reversely rotated to press the inner cavity wall of the bias introduction cavity 1 with the conductive roller 10, the moving carrier 2 retreats along the inner cavity of the bias introduction cavity 1 for voltage application, until the moving carrier 2 continuously slides to the head end of the bias introduction cavity 1.

[0040] The applicant declares that the above description is only a specific embodiment of the present application, but the protection scope of the present application is not limited to this. It should be understood by those skilled in the art that any changes or replacements within the technical scope disclosed by the present application can be easily thought out by any person skilled in the art, and all of them fall within the protection scope and disclosure scope of the present application.

Claims

1. A biasing device for PVD coating, characterized in that, The biasing device for PVD coating comprises a biasing introduction cavity, a moving carrier and a conductive assembly; the moving carrier is located in the biasing introduction cavity and is slidingly connected to the biasing introduction cavity; a driving support is arranged on the moving carrier; the conductive assembly comprises a conductive bracket and a conductive roller, two ends of the conductive bracket are respectively rotationally connected to the driving support and the conductive roller, and an outer rolling surface of the conductive roller extends out of the conductive bracket and is in contact with the inner cavity wall of the biasing introduction cavity.

2. The biasing device for PVD coating according to claim 1, wherein, A contact connecting plate is arranged on the driving support, a first rotating shaft is arranged on the contact connecting plate, and one end of the conductive bracket away from the conductive roller is rotationally connected to the first rotating shaft; a second rotating shaft is arranged on the conductive bracket, the conductive roller is sleeved on the second rotating shaft, and the outer rolling surface of the conductive roller extends out of the conductive bracket.

3. The biasing device for PVD coating according to claim 2, wherein, The conductive bracket is further provided with a spring inside.

4. The biasing device for PVD coating according to claim 3, wherein, The conductive bracket comprises a first supporting plate and a second supporting plate arranged in parallel, opposite ends of the first supporting plate and the second supporting plate are respectively rotationally connected to two ends of the first rotating shaft, and the second rotating shaft penetrates through the opposite ends of the first supporting plate and the second supporting plate in sequence.

5. The biasing device for PVD coating according to claim 4, wherein, The first supporting plate is movably connected to the second supporting plate through a connecting pin, the connecting pin is located between the first rotating shaft and the second rotating shaft, and the spring is further wound between the connecting pin and the first rotating shaft.

6. The biasing device for PVD coating according to claim 4, wherein, The conductive bracket is rotationally driven forward or reversely around the first rotating shaft, and the rotation range of the conductive bracket is 5°-175°.

7. The biasing device for PVD coating according to claim 2, wherein, The driving support comprises an inverted "L" type support and a "U" type support, one end of the inverted "L" type support is connected to the moving carrier, and the other end is detachably connected to the "U" type support, and the contact connecting plate is arranged on the "U" type support.

8. The biasing device for PVD coating according to claim 2, wherein, The material of the conductive roller is copper.

9. The biasing device for PVD coating according to claim 1, wherein, A conductive lead wire is built in the moving carrier, and the conductive lead wire is electrically connected to the conductive assembly.

10. The biasing device for PVD coating according to claim 1, wherein, The vertical section of the biasing introduction cavity is in a "U" type structure.

Images