Connecting structure of target material and target holder
By designing annular grooves on the target support and extending their width, the problems of insufficient welding strength and excessively rapid backsplash buildup of titanium targets during magnetron sputtering are solved, enabling controllable growth of backsplash thickness, which is suitable for industrial applications.
Patent Information
- Application Number
- CN202520041000.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-08
- Publication Date
- 2026-02-06
- Estimated Expiration
- 2035-01-08
AI Technical Summary
During magnetron sputtering, insufficient welding strength of the titanium target can lead to desoldering, and excessively rapid accumulation of backsputtered material can cause particles to fall off, affecting the performance.
A ring groove is designed on the target support, and the width of the ring groove is extended to increase the accumulation space of the anti-sputtering material, slow down the thickness growth rate, and a connection structure between the target body and the target support is adopted.
It effectively reduces the problem of abnormal particle falling off titanium sputtering targets in advanced processes, increases the accumulation space of anti-sputtering materials, controls the thickness growth, and is suitable for industrial promotion.
Smart Images
Figure CN223879822U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model belongs to target material technical field relates to a kind of connecting structure of target material and target holder. BACKGROUND
[0002] In magnetron sputtering physical vapor deposition process, under certain process conditions, if product welding strength is not enough in the process of being continuously bombarded, it can lead to the situation of welding-off in use process, affect subsequent normal use;And in high-order process sputtering process, titanium target sandblasting groove is accumulated too much anti-sputtering material, which can be peeled off to form particle drop phenomenon on target holder.
[0003] The prior art discloses a connecting method of metal target material and target holder, which mainly comprises the steps of processing connecting surface, applying welding filler metal, extruding, bonding and the like;The target material and the target holder are matched by corresponding bosses and grooves, the target holder is heated to be higher than the liquidus line of the filler metal by 10-50℃, the filler metal is applied on the joint surface of the target material and the target holder, pressure is applied in the axial direction to make the target material and the target holder closely cooperate, and the residual air is discharged when the filler metal in the target holder groove melts and flows to fill each part of the joint surface during extrusion.
[0004] The prior art discloses a manufacturing method of a nested sputtering target, which comprises the following steps: taking high-purity metal as raw material, vacuum smelting into ingot, then forging and rolling the ingot according to a deformation of 50-80%, to prepare a slab with a thickness of 2-10 mm, and flattening after annealing for 0.5-2 hours;The slab is heated to be lower than the recrystallization temperature of the material, and the mold is preheated to 100-300℃, then the slab is precisely die forged to prepare a target material with a boss structure at the bottom;A target holder is machined to cooperate with the target material, and the inner diameter of the target holder is slightly smaller than the outer diameter of the bottom of the target material.
[0005] However, in the existing technical scheme, there are more anti-sputtering materials in the titanium target of high-order process during sputtering process, and the cavity wall of the sputtering cavity blocks the anti-sputtering materials, so that the space for accumulating the anti-sputtering materials is very small, and the anti-sputtering materials are quickly accumulated. In the middle and later stages of target material use, the anti-sputtering materials reach a certain thickness and are prone to particle drop phenomenon. Therefore, it is urgent to design a connecting structure of target material and target holder to overcome the defects of the prior art and meet the actual application requirements. UTILITY MODEL CONTENTS
[0006] The utility model discloses a target material and target support's connecting structure, especially relates to a titanium target material and target support's connecting structure, in the utility model, through the design ring groove on the target support body along the circumference of target material body, and the width of ring groove is extended, can reduce the problem that titanium target material drops abnormal particle in high -order process use process, mainly is to increase the accumulation space of back sputtering object to slow down the growth of thickness, makes back sputtering object thickness accumulation rate controllable, simple structure, is suitable for industrialization popularization.
[0007] In order to achieve this purpose, the utility model adopts the following technical scheme:
[0008] The utility model provides a target material and target support's connecting structure, connecting structure includes the coaxial arrangement of target material body and target support body,
[0009] One side on the target material body is provided with recess, one side on the target support body is provided with lug, and the lug is embedded in the recess,
[0010] The surface area of the target support body is greater than the surface area of the target material body, and the target support body is provided with a ring groove along the edge circumference of the target material body,
[0011] The ring groove is close to the side of the target material body, and is extended to the axis direction of the target support body.
[0012] In the utility model, by designing the ring groove on the target support body along the circumference of the target material body, and extending the width of the ring groove, the problem of abnormal particle falling of titanium target material in high-order process use process can be reduced, mainly to increase the accumulation space of back sputtering object to slow down the growth of thickness, so that the back sputtering object thickness accumulation rate is controllable, simple structure, is suitable for industrialization popularization.
[0013] It should be noted that the material, size and quality of the target material body and the target support body in the utility model are not specially limited, and those skilled in the art can make adaptive adjustment according to the actual situation. The material of the target material body and the target support body can be titanium material.
[0014] It should be noted that the width of the ring groove in the utility model is originally flush with the outer edge of the target material body, and in the utility model, the flush part of the ring groove is extended to the axis of the target support body, which can reduce the problem of abnormal particle falling of titanium target material in high-order process use process, so that the back sputtering object thickness accumulation rate is controllable.
[0015] As a preferred technical scheme of the utility model, the extension length of the extension setting of the annular groove is 0.5mm-5mm, for example, can be 0.5mm, 0.6mm, 0.7mm, 0.8mm, 0.9mm, 1mm, 2mm, 3mm, 4mm, 5mm etc., but is not only limited to the enumerated numerical value, and other unenumerated numerical value in the numerical value range is also applicable.
[0016] The extension length of the extension setting of the annular groove in the utility model is 0.5mm-5mm, because the adsorption capacity of the annular groove to the falling particles is best in this range, and less than this range can weaken the effect of adsorbing particles, and greater than this range can make the target material too difficult in the processing process, and the effect of adsorbing particles also does not enhance.
[0017] As a preferred technical scheme of the utility model, the depth of the annular groove is 4mm-5mm, for example, can be 4mm, 4.1mm, 4.2mm, 4.3mm, 4.4mm, 4.5mm, 4.6mm, 4.7mm, 4.8mm, 4.9mm, 5mm etc., but is not only limited to the enumerated numerical value, and other unenumerated numerical value in the numerical value range is also applicable.
[0018] The depth of the annular groove in the utility model is 4mm-5mm, because the adsorption capacity of the annular groove to the falling particles is best in this range, and the convex fittings on the machine table are best adapted.
[0019] As a preferred technical scheme of the utility model, the flatness of the annular groove is less than or equal to 0.1mm, for example, can be 1mm, 0.9mm, 0.8mm, 0.6mm, 0.5mm, 0.4mm, 0.3mm, 0.2mm, 0.1mm etc., but is not only limited to the enumerated numerical value, and other unenumerated numerical value in the numerical value range is also applicable.
[0020] The flatness of the annular groove in the utility model is less than or equal to 0.1mm, because the adsorption capacity of the annular groove to the falling particles is best in this range, and the convex fittings on the machine table are best adapted.
[0021] It should be noted that the annular groove in the utility model refers to the groove arranged around the outer edge of the target material body, which can be a regular annular groove or an irregular annular groove.
[0022] As a preferred technical scheme of the utility model, the depth of the groove is 0.5mm-1mm, for example, can be 0.5mm, 0.6mm, 0.7mm, 0.8mm, 0.9mm, 1mm etc., but is not only limited to the enumerated numerical value, and other unenumerated numerical value in the numerical value range is also applicable.
[0023] The depth of the groove is 0.5mm-1mm, because the welding of the target body and the target holder is stable, and the uniformity of the surface processing of the target body is ensured.
[0024] As a preferred technical scheme of the utility model, the groove is a trapezoidal groove.
[0025] It should be noted that the trapezoidal groove is designed instead of a square groove or an arc-shaped groove because it is easy to process, can reduce cost and increase efficiency, and makes the welding of the target body and the target holder more stable.
[0026] As a preferred technical scheme of the utility model, the trapezoidal groove comprises a large-diameter end and a small-diameter end, and the large-diameter end is arranged towards the target holder.
[0027] As a preferred technical scheme of the utility model, the width of the large-diameter end is 4mm-5mm, for example, can be 4mm, 4.1mm, 4.2mm, 4.3mm, 4.4mm, 4.5mm, 4.6mm, 4.7mm, 4.8mm, 4.9mm, 5mm, etc., but is not limited to the listed values, and other values not listed in the range are also applicable.
[0028] As a preferred technical scheme of the utility model, the width of the small-diameter end is 2mm-3mm, for example, can be 2mm, 2.1mm, 2.2mm, 2.3mm, 2.4mm, 2.5mm, 2.6mm, 2.7mm, 2.8mm, 2.9mm, 3mm, etc., but is not limited to the listed values, and other values not listed in the range are also applicable.
[0029] As a preferred technical scheme of the utility model, the groove is provided with at least two, for example, can be 2, 3, 4, 5, 6, etc., but is not limited to the listed values, and other values not listed in the range are also applicable.
[0030] Preferably, the distance between the centers of adjacent grooves is 2mm-3mm, for example, can be 2mm, 2.1mm, 2.2mm, 2.3mm, 2.4mm, 2.5mm, 2.6mm, 2.7mm, 2.8mm, 2.9mm, 3mm, etc., but is not limited to the listed values, and other values not listed in the range are also applicable.
[0031] In the utility model, the distance between the centers of adjacent grooves is 2mm-3mm, and the distance between adjacent grooves is too close, which will result in weak strength of the two grooves, is not conducive to processing, and is prone to deformation during processing; and the distance is too far, which will result in interference with other parts on the machine table.
[0032] Compared with the prior art, the target material and the target holder are connected through the connecting structure, so that the target material and the target holder are connected in a stable and reliable manner.
[0033] In the utility model, through design annular groove on target material support body along the circumference of target material body, and the width of annular groove is extended, can reduce the problem that titanium target material falls in abnormal particle in high order process use process, mainly is for increasing the accumulation space of back sputtering object to slow down the growth of thickness, makes back sputtering object thickness accumulation rate controllable, simple structure, is suitable for industrialization popularization. BRIEF DESCRIPTION OF DRAWINGS
[0034] Figure 1 It is the schematic view of the connecting structure of target material and target holder provided in one specific embodiment of the utility model;
[0035] Figure 2 It is the schematic view of the connecting structure of target material and target holder provided in one specific embodiment of the utility model; Figure 1
[0036] Wherein, 1-target body;2-target support body;3-ring groove. DETAILED DESCRIPTION
[0037] It should be understood that, in the description of the utility model, the orientation or positional relationship indicated by the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the utility model and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements indicated must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the utility model. In addition, the terms "first", "second" and the like are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features limited by "first", "second" and the like can be explicitly or implicitly included one or more. In the description of the utility model, the meaning of "a plurality of" is two or more, unless otherwise specified.
[0038] It should be noted that, in the description of the utility model, unless otherwise specified and limited, the terms "set", "connected", "connected" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected;It can be mechanically connected, or it can be electrically connected;It can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be connected inside two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood through specific circumstances.
[0039] The technical scheme of the utility model is further illustrated below in combination with the drawings and through specific embodiments.
[0040] In one embodiment, the utility model provides a kind of target and target holder's connecting structure, as shown in Figure 1 And Figure 2 Connecting structure includes coaxially arranged target body 1 and target holder body 2;
[0041] One side of target body 1 is provided with recess, and one side of target holder body 2 is provided with lug, and lug is embedded in recess;
[0042] The surface area of target holder body 2 is greater than the surface area of target body 1, and ring groove 3 is circumferentially arranged along the edge of target body 1;
[0043] Ring groove 3 is arranged to extend towards the axis direction of target holder body 2 on the side close to target body 1.
[0044] It should be noted that the material, size and mass of target body 1 and target holder body 2 in the utility model are not specially limited, and those skilled in the art can make adaptive adjustment according to actual conditions.The material of target body 1 and target holder body 2 can be titanium material.
[0045] It should be noted that the width of ring groove 3 in the utility model is originally flush with the outer edge of target body 1, and in the utility model, the flush part of ring groove 3 is further extended towards the axis of target holder body 2, which can reduce the problem of abnormal particle falling of titanium target during high-level process use, so that the thickness accumulation rate of back sputtering can be controlled.
[0046] In one embodiment, the extension length of the extension arrangement of ring groove 3 is 0.5mm-5mm, for example, it can be 0.5mm, 0.6mm, 0.7mm, 0.8mm, 0.9mm, 1mm, 2mm, 3mm, 4mm, 5mm, etc., but not limited to the listed values, and other values not listed in the value range are also applicable.
[0047] In one embodiment, the depth of ring groove 3 is 4mm-5mm, for example, it can be 4mm, 4.1mm, 4.2mm, 4.3mm, 4.4mm, 4.5mm, 4.6mm, 4.7mm, 4.8mm, 4.9mm, 5mm, etc., but not limited to the listed values, and other values not listed in the value range are also applicable.
[0048] In one embodiment, the flatness of the annular groove 3 is less than or equal to 0.1 mm, for example, it can be 1 mm, 0.9 mm, 0.8 mm, 0.6 mm, 0.5 mm, 0.4 mm, 0.3 mm, 0.2 mm, 0.1 mm, etc., but not limited to the listed values, other values not listed in the range are also applicable.
[0049] It should be noted that the annular groove 3 in the utility model refers to the groove arranged around the outer edge of the target body 1, which can be a regular annular groove or an irregular annular groove 3.
[0050] In one embodiment, the depth of the groove is 0.5 mm to 1 mm, for example, it can be 0.5 mm, 0.6 mm, 0.7 mm, 0.8 mm, 0.9 mm, 1 mm, etc., but not limited to the listed values, other values not listed in the range are also applicable.
[0051] In one embodiment, the groove is a trapezoidal groove.
[0052] In one embodiment, the trapezoidal groove includes a large-diameter end and a small-diameter end, and the large-diameter end is arranged towards the target holder 2.
[0053] In one embodiment, the width of the large-diameter end is 4 mm to 5 mm, for example, it can be 4 mm, 4.1 mm, 4.2 mm, 4.3 mm, 4.4 mm, 4.5 mm, 4.6 mm, 4.7 mm, 4.8 mm, 4.9 mm, 5 mm, etc., but not limited to the listed values, other values not listed in the range are also applicable.
[0054] In one embodiment, the width of the small-diameter end is 2 mm to 3 mm, for example, it can be 2 mm, 2.1 mm, 2.2 mm, 2.3 mm, 2.4 mm, 2.5 mm, 2.6 mm, 2.7 mm, 2.8 mm, 2.9 mm, 3 mm, etc., but not limited to the listed values, other values not listed in the range are also applicable.
[0055] In one embodiment, the groove is provided with at least two, for example, it can be 2, 3, 4, 5, 6, etc., but not limited to the listed values, other values not listed in the range are also applicable.
[0056] In one embodiment, the distance between the centers of adjacent grooves is 2 mm to 3 mm, for example, it can be 2 mm, 2.1 mm, 2.2 mm, 2.3 mm, 2.4 mm, 2.5 mm, 2.6 mm, 2.7 mm, 2.8 mm, 2.9 mm, 3 mm, etc., but not limited to the listed values, other values not listed in the range are also applicable. In one embodiment, the distance between the centers of adjacent grooves is 2 mm to 3 mm, for example, it can be 2 mm, 2.1 mm, 2.2 mm, 2.3 mm, 2.4 mm, 2.5 mm, 2.6 mm, 2.7 mm, 2.8 mm, 2.9 mm, 3 mm, etc., but not limited to the listed values, other values not listed in the range are also applicable.
[0057] Embodiment 1
[0058] The embodiment provides a connecting structure of a target material and a target holder, and relates to the technical field of target materials.
[0059] The connecting structure comprises a target material body 1 and a target holder body 2 which are coaxially arranged; a recess is arranged on one side of the target material body 1, a protrusion is arranged on one side of the target holder body 2, and the protrusion is embedded in the recess; the surface area of the target holder body 2 is greater than that of the target material body 1, and the target holder body 2 is circumferentially provided with a ring groove 3 along the edge of the target material body 1; the ring groove 3 is arranged to extend towards the axis direction of the target holder body 2 at the side close to the target material body 1.
[0060] The extension length of the extension arrangement of the ring groove 3 is 0.5 mm, the depth of the ring groove 3 is 4 mm, and the flatness of the ring groove 3 is 0.1 mm.
[0061] The depth of the recess is 0.5 mm, the recess is a trapezoidal groove, the trapezoidal groove comprises a large-diameter end and a small-diameter end, the large-diameter end is arranged towards the target holder body 2, the width of the large-diameter end is 4 mm, the width of the small-diameter end is 2 mm, and two recesses are arranged, and the distance between the centers of the adjacent recesses is 2 mm.
[0062] Embodiment 2
[0063] The embodiment provides a connecting structure of a target material and a target holder, and relates to the technical field of target materials.
[0064] The connecting structure comprises a target material body 1 and a target holder body 2 which are coaxially arranged; a recess is arranged on one side of the target material body 1, a protrusion is arranged on one side of the target holder body 2, and the protrusion is embedded in the recess; the surface area of the target holder body 2 is greater than that of the target material body 1, and the target holder body 2 is circumferentially provided with a ring groove 3 along the edge of the target material body 1; the width of the ring groove 3 is arranged to extend towards the axis direction of the target holder body 2 at the side close to the target material body 1.
[0065] The extension length of the extension arrangement of the ring groove 3 is 2 mm, the depth of the ring groove 3 is 4.2 mm, and the flatness of the ring groove 3 is 0.08 mm.
[0066] The depth of the recess is 1 mm, the recess is a trapezoidal groove, the trapezoidal groove comprises a large-diameter end and a small-diameter end, the large-diameter end is arranged towards the target holder body 2, the width of the large-diameter end is 4.5 mm, the width of the small-diameter end is 2.5 mm, four recesses are arranged, and the distance between the centers of the adjacent recesses is 2.2 mm.
[0067] Embodiment 3
[0068] The embodiment provides a connecting structure of a target material and a target holder, and relates to the technical field of target materials.
[0069] The connecting structure comprises a target body 1 and a target holder 2 coaxially arranged; a groove is arranged on one side of the target body 1, a protrusion is arranged on one side of the target holder 2, and the protrusion is embedded in the groove; the surface area of the target holder 2 is greater than that of the target body 1, and the target holder 2 is circumferentially provided with a ring groove 3 along the edge of the target body 1; the width of the ring groove 3 is arranged to extend towards the axis of the target holder 2 from the side close to the target body 1.
[0070] The extension length of the extended ring groove 3 is 5 mm, the depth of the ring groove 3 is 4.5 mm, and the flatness of the ring groove 3 is 0.05 mm.
[0071] The depth of the groove is 0.8 mm, the groove is a trapezoidal groove, the trapezoidal groove comprises a large-diameter end and a small-diameter end, the large-diameter end is arranged towards the target holder 2, the width of the large-diameter end is 5 mm, the width of the small-diameter end is 3 mm, the groove is provided with six, and the distance between the centers of adjacent grooves is 2.6 mm.
[0072] In summary, the present application discloses a titanium target connecting structure, which comprises a target body 1 and a target holder 2 coaxially arranged; a groove is arranged on one side of the target body 1, a protrusion is arranged on one side of the target holder 2, and the protrusion is embedded in the groove; the surface area of the target holder 2 is greater than that of the target body 1, and the target holder 2 is circumferentially provided with a ring groove 3 along the edge of the target body 1; the width of the ring groove 3 is arranged to extend towards the axis of the target holder 2 from the side close to the target body 1.
[0073] The above is only a specific embodiment of the present application, but the protection scope of the present application is not limited thereto, and those skilled in the art should understand that any changes or replacements within the technical range disclosed by the present application can be easily thought of by those skilled in the art, and all fall within the protection scope and disclosure range of the present application.
Claims
1. A connection structure for a target material and a target holder, characterized in that, The connecting structure comprises a target body and a target holder arranged coaxially; One side of the target body is provided with a groove, and one side of the target holder is provided with a protrusion embedded in the groove; The surface area of the target holder is greater than that of the target body, and the target holder is provided with a ring groove along the edge of the target body in the circumferential direction; The ring groove is arranged to extend towards the axis of the target holder near one side of the target body.
2. The connecting structure of a target and a target holder according to claim 1, wherein The extension length of the ring groove is 0.5mm-5mm.
3. The connecting structure of a target and a target holder according to claim 1, wherein The depth of the ring groove is 4mm-5mm.
4. The connecting structure of a target and a target holder according to claim 1, wherein The flatness of the ring groove is less than or equal to 0.1mm.
5. The target and target holder connecting structure according to claim 1, wherein The depth of the groove is 0.5mm-1mm.
6. The connection structure of a target and a target holder according to Claim 1, wherein The groove is a trapezoidal groove.
7. The target and target holder connecting structure according to claim 6, wherein The trapezoidal groove comprises a large-diameter end and a small-diameter end, and the large-diameter end is arranged towards the target holder.
8. The connecting structure of a target and a target holder according to claim 7, wherein The width of the large-diameter end is 4mm-5mm.
9. The connecting structure of a target and a target holder according to claim 7 or 8, characterized in that, The width of the small-diameter end is 2mm-3mm.
10. The structure of the connection of the target and the target holder according to Claim 1, wherein The groove is provided with at least two, and the distance between the centers of adjacent grooves is 2mm-3mm.