Hot air circulation box type glue discharging furnace

Abstract

The utility model relates to the technical field of rubber discharging furnaces, in particular to a hot air circulation box type rubber discharging furnace which comprises an air inlet mechanism, an air outlet mechanism, a heating device and a hot air circulation mechanism, the hot air circulating mechanism comprises a fan cover which is arranged in the furnace and covers a product, and a circulating fan positioned above the fan cover; the fan cover comprises a top plate, and a first side plate and a second side plate which are arranged along the width direction of the furnace; a first side air duct, a top air duct and a second side air duct which are communicated in sequence are defined by the first side plate, the top plate and the second side plate and one side wall of the furnace body, the furnace top and the other side wall of the furnace body respectively; the heating device is mounted in the first side air duct and the second side air duct; a through hole is formed in a top plate of the fan cover, the circulating fan is arranged at the position corresponding to the through hole, and the circulating fan sucks air in the fan cover and then pushes the air towards the circumferential direction of the top air channel. The air outlet of the air inlet pipeline and the air inlet of the air outlet pipeline are both formed in the furnace top and matched with the circulating fan, so that the uniformity of the temperature in the hearth is guaranteed through the design.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of glue discharging furnace, especially relates to a hot air circulation box type glue discharging furnace. BACKGROUND

[0002] The glue discharging furnace is a key equipment in semiconductor manufacturing and electronic device production, and is mainly used for removing photoresist coated or remaining on a wafer surface. The photoresist is a photosensitive material used for forming a fine circuit pattern on a semiconductor wafer, and the task of the glue discharging furnace is to volatilize or decompose the unnecessary photoresist through high-temperature treatment, so as to prepare for the next process.

[0003] In the prior art, the common glue discharging furnace does not have a hot air circulation device, which leads to poor uniformity of the temperature in the furnace, uneven heating of the workpiece, and easy occurrence of local overheating or under-temperature phenomenon, thereby affecting the glue discharging quality. Some glue discharging furnaces have a hot air circulation device, but the air duct design is unreasonable, which leads to ineffective circulation of the hot air in the furnace, large temperature difference in the local area, and uneven temperature field distribution. The present application provides a hot air circulation box type glue discharging furnace to solve the problems in the prior art. SUMMARY

[0004] The utility model aims at providing a hot air circulation box type glue discharging furnace to solve the problem of unreasonable air duct design of the glue discharging furnace with a hot air circulation device in the prior art, which leads to ineffective circulation of the hot air in the furnace, large temperature difference in the local area, and uneven temperature field distribution.

[0005] The technical scheme of the utility model is a hot air circulation box type glue discharging furnace, which comprises an air inlet mechanism, an air outlet mechanism, and a heating device.

[0006] A hot air circulation mechanism is arranged in the furnace to cover the product, and a circulating fan is arranged above the air hood. The air hood comprises a top plate, a first side plate, and a second side plate arranged along the width direction of the furnace. The first side plate, the top plate, and the second side plate are respectively surrounded by a side wall of the furnace body, a furnace top, and another side wall of the furnace body to form a first side air duct, a top air duct, and a second side air duct in sequence. The heating device is installed in the first side air duct and the second side air duct.

[0007] A through hole is formed in the top plate of the air hood, and the circulating fan is arranged at the corresponding through hole. The circulating fan sucks the gas in the air hood and pushes it out in the circumferential direction of the top air duct.

[0008] A plurality of air inlets are uniformly arranged on the first side plate and the second side plate.

[0009] The air outlet of the air inlet mechanism is arranged above the first side air duct and the second side air duct, so that the gas flows into the first side air duct and the second side air duct. The air inlet of the air outlet mechanism is arranged in the top air duct.

[0010] Preferably, the air inlet mechanism comprises an air inlet pipe, an air heater connected with the air inlet pipe, and a first air inlet fan connected with the air heater.

[0011] The air outlet mechanism comprises an air outlet pipe and an air exhaust fan connected with the air outlet pipe.

[0012] Preferably, the circulating fan is arranged directly above the center of the top plate.

[0013] The air inlet pipe comprises a first air inlet pipe and a second air inlet pipe symmetrically arranged with the center line of the width direction of the furnace body as the symmetry line, the first air inlet pipe and the second air inlet pipe are respectively connected with the air heater, and the first air inlet pipe and the second air inlet pipe are respectively connected with a second air inlet fan; the outlet of the first air inlet pipe and the second air inlet pipe is a vertical pipe with the opening downward.

[0014] The air outlet pipe comprises a first air outlet pipe and a second air outlet pipe symmetrically arranged with the center line of the width direction of the furnace body as the symmetry line, the first air outlet pipe and the second air outlet pipe are respectively connected with the air exhaust fan; the air inlet of the first air outlet pipe and the second air outlet pipe is in the same straight line with the circulating fan in the width direction of the furnace body.

[0015] Preferably, a plurality of air outlets are arranged on the first side plate and the second side plate at equal intervals from top to bottom, each air outlet is a rectangular port with the length direction being horizontal; a plurality of adjusting components for adjusting the air outlet amount of each air outlet are arranged on the inner wall of the first side plate and the second side plate.

[0016] Preferably, the heating device is a plurality of heating vertical rods fixed on the top plate.

[0017] Preferably, each adjusting component comprises a baffle with a waist-shaped hole arranged at the two ends in the length direction, the length direction of the waist-shaped hole is vertical, and a screw is arranged in the waist-shaped hole to fix the baffle on the first side plate or the second side plate.

[0018] Preferably, the length direction of the furnace body is provided with a sealing door at each end, and the sealing door and the furnace body are sealed by a sealing strip.

[0019] Preferably, the utility model further comprises a moving loading trolley and a trolley running guide arranged below the moving loading trolley.

[0020] The moving loading trolley and the furnace body are sealed by a graphite packing.

[0021] Compared with the prior art, the utility model has the advantages that:

[0022] (1) The hot air circulation box type glue discharging furnace of the utility model, including intake mechanism, air outlet mechanism, heating device, hot air circulation mechanism, circulating fan drives gas to flow from bottom to top in the air baffle, then pushes the gas to the circumferential edge of the top air duct, opens the gas, and makes the airflow in the whole furnace cavity flow; the air outlet of the air inlet pipeline and the air inlet of the air outlet pipeline are arranged on the furnace top, cooperate with the circulating fan, and can form more uniform hot air circulation; this design makes the hot air flow more uniformly through each corner in the hearth, thereby guaranteeing the uniformity of the temperature in the hearth.

[0023] (2) In the utility model, the setting of the air heater makes the air supplied to the furnace body hot air, so that the overall temperature in the hearth is not significantly reduced, which helps to maintain the uniformity and stability of the temperature in the hearth

[0024] (3) In the utility model, the air inlets of the first air outlet pipeline and the second air outlet pipeline are located on the furnace top, because the waste gas rises in the hearth and gathers on the furnace top, so that the setting of the glue discharging port on the furnace top can more directly capture these waste gases. In the traditional design, the glue discharging port is arranged on the side of the furnace body, which is easy to cause heat loss from the side of the furnace body to the environment. The setting of the glue discharging port on the furnace top can more effectively retain the heat in the hearth, improve the energy utilization efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0025] The utility model will be further described in connection with the drawings and examples:

[0026] Figure 1 It is the internal structure and airflow direction schematic view of the hot air circulation box type glue discharging furnace described in the embodiment;

[0027] Figure 2 It is the structure schematic view of the air port and adjusting assembly of the air baffle described in the embodiment;

[0028] Figure 3 It is the partial structure schematic view of the hot air circulation mechanism described in the embodiment.

[0029] Among them: 1, air heater, 2, first air inlet fan, 3, second air inlet fan, 4, circulating fan, 5, air extractor, 6, air baffle, 7, top plate, 8, first side plate, 9, second side plate, 10, first side air duct, 11, top air duct, 12, second side air duct, 13, air port, 14, baffle, 15, heating vertical rod, 16, door, 17, transfer trolley, 18, trolley running guide rail, 19, first air outlet pipeline, 20, second air outlet pipeline. DETAILED DESCRIPTION

[0030] The content of the utility model will be further described in detail in connection with specific examples:

[0031] In the description of the utility model, it is understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise" and the like indicate the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the utility model.

[0032] As shown in Figures 1-3 A hot air circulation box type glue removing furnace, comprising an air inlet mechanism, an air outlet mechanism, a heating device, a hot air circulation mechanism, a moving trolley 17 and a trolley running guide rail 18 arranged below the moving trolley 17. The air inlet mechanism comprises an air inlet pipeline, an air heater 1 connected with the air inlet pipeline and a first air inlet fan 2 connected with the air heater 1. In this embodiment, the air heater 1 is arranged to supply hot air to the furnace body, so that the overall temperature in the furnace chamber will not be significantly reduced, which helps to maintain the uniformity and stability of the temperature in the furnace chamber. The air inlet pipeline comprises a first air inlet pipeline and a second air inlet pipeline arranged symmetrically with the center line of the furnace body width direction as the symmetry line. The first air inlet pipeline and the second air inlet pipeline are respectively connected with the air heater 1 and also respectively connected with a second air inlet fan 3. The outlets of the first air inlet pipeline and the second air inlet pipeline are vertical pipelines with downward openings, so as to ensure that the gas of the air inlet mechanism flows vertically downward to the first side air duct 10 and the second side air duct 12 respectively.

[0033] The hot air circulation mechanism comprises a wind cover 6 arranged to cover the product in the furnace, and a circulating fan 4 arranged above the wind cover 6. The wind cover 6 comprises a top plate 7, a first side plate 8 and a second side plate 9 arranged in the furnace width direction. The first side plate 8, the top plate 7 and the second side plate 9 are respectively surrounded by one side wall of the furnace body, the furnace top and the other side wall of the furnace body to form a first side air duct 10, a top air duct 11 and a second side air duct 12 in sequence. The air outlets of the air inlet mechanism are arranged above the first side air duct 10 and the second side air duct 12, so that the gas flows to the first side air duct 10 and the second side air duct 12. The air inlets of the air outlet mechanism are arranged in the top air duct 11. The heating device is installed in the first side air duct 10 and the second side air duct 12. The top plate 7 of the wind cover 6 is provided with a through hole, and the circulating fan 4 is arranged at the corresponding through hole. The circulating fan 4 sucks the gas in the wind cover 6 and pushes it out to the circumferential edge of the top air duct 11. In this embodiment, the circulating fan 4 is arranged directly above the center of the top plate 7. In this embodiment, the circulating fan 4 drives the gas to flow from bottom to top in the wind cover 6, then pushes the gas to the circumferential edge of the top air duct 11, opens the gas and makes the airflow in the entire furnace chamber flow.

[0034] A plurality of air inlets 13 are evenly arranged on the first side plate 8 and the second side plate 9; the plurality of air inlets 13 are arranged at equal intervals from top to bottom on the first side plate 8 and the second side plate 9, and each air inlet 13 is a rectangular opening with a length direction being horizontal; a plurality of adjusting assemblies for adjusting the air volume of each air inlet 13 are arranged on the inner walls of the first side plate 8 and the second side plate 9. Each adjusting assembly comprises a baffle 14 provided with a waist-shaped hole at both ends in the length direction, the length direction of the waist-shaped hole is vertical, and a screw is arranged in the waist-shaped hole to fix the baffle 14 on the first side plate 8 or the second side plate 9; the adjusting assembly is adjusted before the transfer trolley 17 enters the furnace body, the screw is loosened first, then the baffle 14 is moved to a suitable position in the up-down direction, and the screw is tightened, so that the adjusting assembly is simple in structure and convenient to use.

[0035] The air outlet mechanism comprises an air outlet pipeline and an air extractor 5 connected with the air outlet pipeline; the air outlet pipeline comprises a first air outlet pipeline 19 and a second air outlet pipeline 20 which are symmetrically arranged with the center line of the furnace body width direction as the symmetry line and are connected with the air extractor 5; the air inlets of the first air outlet pipeline 19 and the second air outlet pipeline 20 are on the same straight line in the furnace body width direction with the circulating fan 4. In this embodiment, the air inlets of the first air outlet pipeline 19 and the second air outlet pipeline 20 are located on the furnace top, and since the exhaust gas rises in the hearth and gathers on the furnace top, the setting of the glue discharge port on the furnace top can more directly capture these exhaust gases. In the traditional design, the glue discharge port is arranged on the side of the furnace body, which is easy to cause heat loss from the side of the furnace body to the environment. However, the setting of the glue discharge port on the furnace top can more effectively retain the heat in the hearth, thereby improving the energy utilization efficiency.

[0036] In this embodiment, the air inlet pipeline and the air outlet pipeline are symmetrically arranged with the center line of the furnace body width direction as the symmetry line, and the circulating fan 4 is arranged directly above the center position of the top plate 7 of the air hood 6 and on the center line of the furnace body width direction; the symmetric design can ensure that the fluid is evenly distributed in the pipeline, and the hot air can uniformly flow through the materials to be treated, thereby achieving uniform heating and glue discharge effect, which is helpful to improve the quality and consistency of the products.

[0037] The heating device is a plurality of heating vertical rods 15 fixedly arranged on the furnace top, and the heating vertical rods 15 heat the first side air duct 10, the second side air duct 12 and the products. The ends of the furnace body in the length direction are both provided with sealing doors 16 which are sealed with sealing strips between the sealing doors 16 and the furnace body. The transfer trolley 17 is sealed with a graphite packing between the transfer trolley 17 and the furnace body.

[0038] In this embodiment, the working principle of the gas in the hot air circulating box-type glue discharge furnace is as follows:

[0039] (1) Place the product on the transfer trolley 17, push the transfer trolley 17 into the furnace body along the trolley travel guide rail 18, limit the transfer trolley 17 by the stop block on the trolley travel guide rail 18, and close the sealing doors 16 at both ends of the furnace body.

[0040] (2) One-button start of the first air intake fan 2, air outlet mechanism, heating device, and hot air circulation mechanism, such as Figure 1 The arrows indicate the direction of gas flow. The first air intake fan 2 heats the air through the air heater 1 and then delivers it to the first air intake pipe and the second air intake pipe. The air in the first air intake pipe and the second air intake pipe flows downward into the first side air duct 10 and the second side air duct 12, respectively. After being heated by the heating rod 15, it passes through the air outlet 13 of the first side plate 8 and the air outlet 13 of the second side plate 9 and enters the interior of the air hood 6. After flowing through the product, it flows upward. The circulating fan 4 then pushes the airflow to the circumferential edge of the top air duct 11. Subsequently, a portion of the air is extracted by the exhaust fan 5 through the first exhaust pipe 19 and the second exhaust pipe 20 (discharging the colloid), while the other portion of the air continues to circulate, entering the first side air duct 10 and the second side air duct 12, respectively. This cycle continues until the colloid in the product is completely discharged. During the discharge process, the heating temperature, duration, heating rate, air intake volume, and exhaust volume are controlled by an electrical program.

[0041] (3) During the product cooling stage, turn off the heating rod 15 and the first air intake fan 2, and start the second air intake fan 3. The second air intake fan 3 sends room temperature air into the first side air duct 10 and the second side air duct 12 through the first air intake pipe and the second air intake pipe. The room temperature air passes through the air outlet 13 of the first side plate 8 and the air outlet 13 of the second side plate 9 and enters the interior of the air hood 6. After flowing through the product, it flows upward and takes away the product's temperature. The circulating fan 4 then pushes the airflow to the circumferential edge of the top air duct 11. A portion of the air is drawn out by the exhaust fan 5 through the first air outlet pipe 19 and the second air outlet pipe 20. The other portion of the air continues to circulate and flows into the first side air duct 10 and the second side air duct 12. This cycle continues until the product cooling is completed. Open the sealing door 16, pull out the transfer trolley 17, and remove the product.

[0042] In this embodiment, the air outlet of the air inlet pipe and the air inlet of the air outlet pipe are both located on the top of the furnace. Together with the circulating fan 4, a more uniform hot air circulation can be formed. This design allows the hot air to flow more evenly through all corners of the furnace, thereby ensuring the uniformity of the temperature inside the furnace.

[0043] The above examples are only for illustrating the technical concept and characteristics of the present application, and the purpose is to enable those skilled in the art to understand the content of the present application and to implement it, and cannot limit the protection scope of the present application. For those skilled in the art, it is obvious that the present application is not limited to the details of the above exemplary embodiments, and the present application can be implemented in other specific forms without departing from the spirit or basic characteristics of the present application, therefore, from any point of view, the examples should be regarded as exemplary and non-limiting, the scope of the present application is defined by the appended claims rather than the above description, therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present application.

Claims

1. A hot air circulating box-type degumming furnace, characterized by, The application relates to a hot air circulation box-type degreasing furnace. The hot air circulation mechanism comprises a wind cover arranged to cover the product in the furnace, and a circulating fan arranged above the wind cover. The wind cover comprises a top plate, a first side plate and a second side plate arranged along the width direction of the furnace. The first side plate, the top plate and the second side plate are respectively surrounded by a first side air duct, a top air duct and a second side air duct in sequence. The heating device is arranged in the first side air duct and the second side air duct. A through hole is arranged on the top plate of the wind cover.

2. The hot air circulating box-type degreasing furnace according to claim 1, characterized in that: The circulating fan is arranged above the through hole. A plurality of air outlets are uniformly arranged on the first side plate and the second side plate. The air outlet of the air inlet mechanism is arranged above the first side air duct and the second side air duct. The air inlet of the air outlet mechanism is arranged in the top air duct. The air inlet mechanism comprises an air inlet pipeline, an air heater connected with the air inlet pipeline and a first air inlet fan connected with the air heater. The air outlet mechanism comprises an air outlet pipeline and an air exhaust fan connected with the air outlet pipeline.

4. The hot air circulating box-type degreasing furnace according to claim 1, characterized in that:

3. The hot air circulation box-type degreasing furnace according to claim 2, wherein:

5. The hot air circulating box-type degreasing furnace according to claim 1, characterized in that: The circulating fan is arranged above the center of the top plate.

6. The hot air circulating box-type degreasing furnace according to claim 4, characterized in that: The air inlet pipeline comprises a first air inlet pipeline and a second air inlet pipeline which are symmetrically arranged along the center line of the width direction of the furnace body.

7. The hot air circulating box-type degreasing furnace according to claim 1, characterized in that: The first air inlet pipeline and the second air inlet pipeline are respectively connected with the air heater and the second air inlet fan.

8. The hot air circulating box-type degreasing furnace according to claim 1, characterized in that: The air outlet pipeline comprises a first air outlet pipeline and a second air outlet pipeline which are symmetrically arranged along the center line of the width direction of the furnace body. The first air outlet pipeline and the second air outlet pipeline are respectively connected with the air exhaust fan. The air inlets of the first air outlet pipeline and the second air outlet pipeline are arranged on the same straight line in the width direction of the furnace body. The air outlets are arranged on the first side plate and the second side plate. The air outlets are arranged on the inner wall of the first side plate and the second side plate. The heating device comprises a plurality of heating vertical rods which are uniformly arranged on the top plate of the furnace body. Each adjusting assembly comprises a baffle with a waist-shaped hole arranged at the lengthwise two ends of the adjusting assembly. The lengthwise direction of the waist-shaped hole is vertical. The waist-shaped hole is arranged in the baffle. The furnace body is sealed by a sealing strip. The furnace body is sealed by a graphite packing. The application further relates to a moving loading trolley and a trolley running guide arranged below the moving loading trolley.

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