Probe assembly used for flying probe testing machine and capable of identifying needle tip in vertical direction

Abstract

The utility model relates to the technical field of semiconductor testing, and provides a probe assembly used for a flying probe testing machine and capable of identifying a needle point in the vertical direction, which comprises a main support, a cantilever support arranged on the main support, a probe arranged on the cantilever support, and a camera identification assembly arranged horizontally and used for identifying the position of the needle point of the probe in the vertical direction. The camera identification assembly comprises a mounting bracket arranged on the main bracket, an identification camera arranged on the mounting bracket, a lens matched with the identification camera and a prism matched with the lens; the camera identification assembly and the probe are always in a relative static state, the problem of interference and shielding of image acquisition does not exist, the needle point position of the probe in the vertical direction can be accurately and clearly identified through the camera identification assembly, so that debugging alignment operation is accurately carried out, the problem of mutual interference and influence does not exist among a plurality of structures, and the debugging precision is improved. Therefore, small bonding pad testing work can be carried out, and the application range of the flying probe testing machine is expanded.

Description

TECHNICAL FIELD

[0001] The utility model relates to a semiconductor test technical field, concretely is a kind of probe assembly for vertical direction needle point of flying probe testing machine can be identified. BACKGROUND

[0002] In the field of semiconductor testing, flying probe testing machine as an important testing equipment, is widely used in the insulation and on value test of printed circuit board.

[0003] Flying probe testing machine will be set in the inside specific position of cabinet identification camera to capture the contact situation of needle point and test point in testing process, when flying probe testing machine is actually operated, since probe support is constantly moved and transformed position in X, Y, Z direction, and probe support is often set multiple groups (a probe support corresponds to a detection probe), it is inevitable to form the obstruction to identification camera at certain angle, the accurate position of needle point cannot be clearly identified, the difficulty of debugging alignment is increased;And identification camera is vertically set in probe support (a probe support corresponds to an identification camera), the space occupied is larger, the problem of mutual interference of probe assembly is prone to occur, cannot test small pad (such as 30um pad below), reduce the application range of flying probe testing machine.Therefore, the utility model provides a kind of probe assembly for vertical direction needle point of flying probe testing machine can be identified to solve the above problems. UTILITY MODEL CONTENTS

[0004] The embodiment of the utility model is aimed at providing a kind of probe assembly for vertical direction needle point of flying probe testing machine can be identified to solve the above problems.

[0005] To achieve the above object, the utility model provides the following technical scheme:

[0006] A kind of probe assembly for vertical direction needle point of flying probe testing machine can be identified, including total support, cantilever support on total support and probe on cantilever support, it further includes camera identification component for identifying the needle point position of probe vertical direction, which is horizontally arranged, the camera identification component includes mounting bracket on total support, identification camera on mounting bracket, lens matched with identification camera and prism matched with lens, the prism is used to refract the position image of probe into lens.

[0007] In an alternative: the prism is located above the probe.

[0008] In an alternative: the probe assembly further includes light supplementing component for light supplementing when camera identification component works.

[0009] In an alternative: the light supplementing component includes lamp plate fixing cover and lamp plate on lamp plate fixing cover.

[0010] In an alternative, the lamp plate fixing cover is arranged on the mounting bracket, and the lamp plate fixing cover semi-encloses the lens, and the lamp plate is arranged below the prism side.

[0011] In an alternative, the angle-adjustable lamp plate is arranged on the lamp plate fixing cover.

[0012] Compared with the prior art, the beneficial effects of the embodiments of the utility model are as follows:

[0013] The camera recognition assembly and the probe are always in a relatively static state, and there is no problem of interference and shielding of image acquisition, when the total bracket stays at any position, the needle tip position in the vertical direction of the probe can be accurately and clearly recognized by the camera recognition assembly, so that accurate debugging and alignment operation can be performed, the camera recognition assembly arranged horizontally protrudes only part of the prism outside the probe, and there is no problem of mutual interference between the plurality of structures, so that small pad testing work can be performed, and the application range of the flying probe tester is expanded. It should be understood that the above general description and the following detailed description are only exemplary and explanatory, and cannot limit the application. BRIEF DESCRIPTION OF DRAWINGS

[0014] The drawings incorporated into the specification and forming part of the specification, illustrate embodiments consistent with the present application and, together with the description, serve to explain the principles of the application. The drawings and text are not intended to limit the scope of the inventive concepts in any way, but to illustrate the inventive concepts for the skilled in the art by reference to specific embodiments.

[0015] Figure 1 The structure of the embodiments of the utility model is shown in the figure.

[0016] Figure 2 The exploded structure of the embodiments of the utility model is shown in the figure (part). The figure mark annotation: 1-total bracket, 2-camera recognition assembly, 201-mounting bracket, 202-recognition camera, 203-lens, 204-prism, 3-light supplement assembly, 301-lamp plate fixing cover, 302-lamp plate, 4-cantilever bracket, 5-probe. DETAILED DESCRIPTION

[0017] The application will be described in further detail below with reference to the drawings, and it is necessary to point out here that the following detailed description is only used to further illustrate the application, and cannot be understood as limiting the protection scope of the application, and the skilled in the art can make some non-essential improvements and adjustments to the application according to the above application content.

[0018] Please refer to Figure 1 and Figure 2A probe assembly for a flying probe testing machine that can identify vertically oriented needle tips includes a main support 1, a cantilever support 4 mounted on the main support 1, and a probe 5 mounted on the cantilever support 4. It also includes a horizontally positioned camera recognition assembly 2 for identifying the vertical position of the needle tip of the probe 5. The camera recognition assembly 2 includes a mounting bracket 201 mounted on the main support 1, a recognition camera 202 mounted on the mounting bracket 201, a lens 203 adapted to the recognition camera 202, and a prism 204 adapted to the lens 203 (the prism 204 is located at the end of the lens 203 away from the recognition camera 202). The prism 204 refracts the position image of the probe 5 into the lens 203.

[0019] It should be noted that the main support 1 is driven by a corresponding drive mechanism (not shown in the figure) to move in the X, Y, and Z directions to perform detection actions.

[0020] Both the camera recognition component 2 and the probe 5 are fixedly mounted on the main support 1, meaning that the camera recognition component 2 and the probe 5 are always in a relatively static state, eliminating any interference or obstruction of image acquisition. When the main support 1 is at any position, the camera recognition component 2 can accurately and clearly identify the vertical tip position of the probe 5, thus enabling precise adjustment and alignment operations. The horizontally mounted camera recognition component 2 protruding from the outer side of the probe 5 is only a part of the prism 204 (made from...). Figure 1 As can be seen intuitively, the position image of probe 5 enters the lens 203 through the refraction of prism 204, and is then transmitted to the recognition camera 202 to complete image capture. In actual testing, there is no problem of mutual interference between several of these structures, thus enabling small pad testing and expanding the application range of the flying probe tester.

[0021] Furthermore, the prism 204 is located above the probe 5, and the prism 204 is perpendicular to the probe 5.

[0022] Please see Figure 1 and Figure 2 In one embodiment of the present invention, the probe assembly further includes a supplementary lighting assembly 3 for providing supplementary lighting when the camera recognition assembly 2 is working;

[0023] The supplementary lighting component 3 includes a lamp plate fixing cover 301 and a lamp plate 302 disposed on the lamp plate fixing cover 301. The lamp plate fixing cover 301 is disposed on the mounting bracket 201 and the lamp plate fixing cover 301 partially covers the lens 203. The lamp plate 302 is located below the side of the prism 204 to avoid obstructing the prism 204.

[0024] In the embodiment, the light board 301 plays a role of light supplement by lighting towards the probe 5, ensuring that the needle tip position in the vertical direction of the probe 5 is accurately and clearly identified, and the lens 203 is half-covered by the light board fixing cover 301, playing a certain protection role on the lens 203.

[0025] Based on the previous embodiment, in another embodiment of the utility model, the light board 302 is adjustably arranged on the light board fixing cover 301, the light board 302 is arranged on the light board fixing cover 301 in a hinged manner, and a corresponding knob is arranged at the hinge, after the angle of the light board 302 is adjusted, the knob is tightened to position the light board 302, of course, the angle of the light board 302 can also be adjusted through other structural settings, which will not be limited and described here in the embodiment, and the light board 302 is adaptively adjusted in the light angle to meet the testing requirements according to the actual layout inside the flying probe tester case. In addition, it should be understood that although the present specification is described in terms of embodiments, not every embodiment contains only one independent technical solution, and the specification is described in this way only for the sake of clarity, and those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that those skilled in the art can understand.

Claims

1. A probe assembly capable of recognizing the vertical direction of a needle tip for a flying probe tester, comprising a total bracket (1), a cantilever bracket (4) provided on the total bracket (1), and a probe (5) provided on the cantilever bracket (4), characterized in that, The application also comprises a horizontally arranged camera recognition component (2) for recognizing the position of the needle tip of the probe (5) in the vertical direction, wherein the camera recognition component (2) comprises a mounting bracket (201) arranged on the general bracket (1), a recognition camera (202) arranged on the mounting bracket (201), a lens (203) matched with the recognition camera (202), and a prism (204) matched with the lens (203), wherein the prism (204) is used for refracting the position image of the probe (5) into the lens (203).

2. The probe assembly for identifying a vertical direction needle tip of a flying probe tester according to claim 1, wherein The prism (204) is located above the probe (5).

3. The probe assembly for identifying the vertical direction of the tip of the flying probe tester according to claim 1, wherein The probe component further comprises a light supplement component (3) for supplementing light when the camera recognition component (2) is working.

4. The probe assembly of claim 3, wherein the probe assembly is configured to identify the vertical direction of the tip of the flying probe test machine. The light supplement component (3) comprises a lamp plate fixing cover (301) and a lamp plate (302) arranged on the lamp plate fixing cover (301).

5. The flying probe test machine's probe assembly capable of identifying the vertical direction of the needle tip according to claim 4, wherein, The lamp plate fixing cover (301) is arranged on the mounting bracket (201), and the lamp plate fixing cover (301) semi-encapsulates the lens (203), and the lamp plate (302) is located below the prism (204).

6. The probe assembly of claim 4, wherein the probe assembly is configured to identify the vertical orientation of the probe tip. The lamp plate (302) is arranged on the lamp plate fixing cover (301) in an angle-adjustable manner.

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