The invention relates to the field of
flying probe testing, and discloses a five-cycle reference-locked four-terminal low-resistance
data processing method, which comprises the following steps of: 1, acquiring continuous five-frame initial data of a
flying probe machine four-terminal test, restarting cycle if single-frame data exceeds a preset tolerance, and screening to obtain effective reference data; 2, carrying out abnormal value
elimination on the effective reference data, calculating a data mean value, completing benchmark calibration, and generating a calibration reference value of a target
test point; 3, based on the calibration reference value, establishing a mapping relation between the probe contact parameter of the
flying probe machine and a test resistance value, and compensating a resistance value error caused by contact deviation; and step 4, adjusting test parameters such as probe pressure and staying duration of the flying probe
machine according to a deviation compensation result, and outputting an optimized test scheme. The method has the following beneficial effects that the test precision is obviously improved, the robustness is strong, the cost is low, the method is easy to land, the consistency is good, and the production efficiency is improved.