The invention relates to the technical field of
MicroLED display, and particularly discloses a nanocrystalline color conversion layer for a
MicroLED and a preparation method of the nanocrystalline color conversion layer. A nanocrystalline color conversion layer is formed at a low temperature of 150-400 DEG C by co-evaporating a
perovskite precursor and an
organic matrix material containing a P = O / S = O / C = O group. A magnetic
metal mask is adopted, the distance between the
mask and a substrate is controlled to be smaller than or equal to 0.5 mm, and a high-resolution patterned nanocrystalline color conversion layer is achieved. The dynamic vacuum degree of 5 * 10 <-4 > to 5 * 10 <-5 > Pa is maintained in the
evaporation process, the
deposition rate is 0.01-5 nm / s, the thickness of the obtained color conversion layer is 500-3000 nm, and the interface roughness Ra is smaller than 10 nm. The
optical property of the
nanocrystal is improved in situ through the matrix material, so that the
fluorescence quantum yield reaches 85% or above, and the color
gamut is gt; a 120%
NTSC;
mask design and process parameters are optimized, blockage is avoided, and pattern precision is improved; the full-dry process is compatible with
mass production, and the yield is greater than 95%. The color conversion layer solves the problems of efficiency and stability in
MicroLED full-color conversion.