Micro-light emitting diode display and manufacturing method thereof
A technology of micro-light-emitting diodes and manufacturing methods, applied in the direction of electric solid-state devices, semiconductor devices, electrical components, etc., can solve problems such as low reliability, complicated manufacturing process, and complicated structure of the transfer head, and achieve quality improvement, simple manufacturing process, and simple structure Effect
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[0045] In order to further illustrate the technical means adopted by the present invention and its effects, the following describes in detail in conjunction with preferred embodiments of the present invention and accompanying drawings.
[0046] see Figure 1 to Figure 9 , the present invention provides a kind of manufacturing method of micro light-emitting diode display, comprises the following steps:
[0047] Step S1, please refer to figure 2, providing a growth substrate 10 . A first insulating layer 20 is formed on the growth substrate 10 , and the first insulating layer 20 is patterned to form openings 21 .
[0048] Specifically, the material of the growth substrate 10 is sapphire, silicon or silicon carbide.
[0049] Specifically, in the step S1, the first insulating layer 20 is formed on the growth substrate 10 by atomic layer deposition (ALD) or plasma enhanced chemical vapor deposition (CVD).
[0050] Specifically, in the step S1, the opening 21 is formed by patte...
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