Flying probe tester two-wire probe mechanism

Abstract

The utility model relates to the technical field of semiconductor testing, and provides a two-wire probe mechanism of a flying probe testing machine, which is arranged on an internal cantilever support of the flying probe testing machine and comprises an installation substrate and a probe assembly arranged on the installation substrate. The two-wire probe mechanism further comprises a recognition assembly used for sensing that the probe is in a downward pressing and pricking state or a rising and lifting state. The whole two-wire probe mechanism is small and compact, the two groups of the two-wire probe mechanisms do not interfere with each other, tiny pads can be tested at the same time, the application range of the flying probe testing machine is expanded, the testing efficiency of the tiny pads is improved, whether the probes are in a downward pressing and pricking state or a rising and lifting state is identified through the identification assembly, and the testing efficiency of the tiny pads is improved. Misoperation or test result deviation in the test process is avoided, and the test reliability and accuracy are guaranteed.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor test, specifically a flying probe testing machine two line probe mechanism. BACKGROUND

[0002] In the modern semiconductor test field, flying probe testing machine as an important test equipment is widely used in the electrical performance test of integrated circuit (IC) chip, contacts with the pad on the chip through the high-speed moving probe to detect the electrical connection performance and functional integrity of the chip, wherein, two line probe mechanism is the key component of flying probe testing machine, is used for transmitting test signal and power supply, realizes the test to the chip.

[0003] The overall size of the existing two line probe mechanism is relatively large, which leads to mutual interference between the two groups of two line probe mechanisms during the test process, and the micro pad (such as 30um small pad) cannot be tested at the same time, thereby limiting the application range of the tester and the test efficiency of the micro pad, in addition, the existing two line probe mechanism cannot accurately identify the probe in the down needle state and the rising state during the test process, which may cause misoperation or deviation of the test result during the test process, and reduces the reliability and accuracy of the test.

[0004] Therefore, the utility model provides a flying probe testing machine two line probe mechanism to solve the above problems. UTILITY MODEL CONTENTS

[0005] The embodiment of the utility model aims at providing a flying probe testing machine two line probe mechanism to solve the above problems.

[0006] In order to achieve the above object, the utility model provides the following technical scheme:

[0007] A flying probe testing machine two line probe mechanism is arranged on a cantilever support in the flying probe testing machine, comprising a mounting base plate and a probe assembly arranged on the mounting base plate, the probe assembly comprising a probe, the two line probe mechanism further comprising an identification assembly for sensing the probe in the down needle state or the rising state.

[0008] In an optional scheme: the two line probe mechanism and the cantilever support are detachably assembled, and the mounting base plate is provided with a dovetail groove matched with the cantilever support.

[0009] In an optional scheme: the probe assembly further comprises a probe signal plate.

[0010] In an alternative, the recognition component comprises a sensor fixing plate arranged on the mounting base, a sensor circuit board arranged on the sensor fixing plate, a photoelectric sensor arranged on the sensor circuit board, and a reflector arranged on the mounting base for reflecting the light emitted by the photoelectric sensor, the mounting base is provided with a spring, the probe is arranged at the end of the spring away from the mounting base, and the probe part needle segment is located between the photoelectric sensor and the reflector.

[0011] In an alternative, the recognition component further comprises a light shield plate for avoiding interference of reflected light caused by external light, and the light shield plate is located at the side of the reflector away from the photoelectric sensor.

[0012] In an alternative, the sensor fixing plate is provided with a slot hole for the light emitted by the photoelectric sensor to pass through.

[0013] In an alternative, the sensor fixing plate is provided with a plurality of waist-shaped holes, the mounting base is provided with a bolt hole corresponding to each of the waist-shaped holes, and the sensor fixing plate and the mounting base are assembled through the bolt.

[0014] Compared with the prior art, the embodiments of the utility model have the following beneficial effects:

[0015] 1. The two-wire probe mechanism is small and compact as a whole, the two groups of the two-wire probe mechanism do not interfere with each other, the micro pads can be tested at the same time, the application range of the flying probe tester is expanded, and the test efficiency on the micro pads is improved.

[0016] 2. The recognition component is used for recognizing whether the probe is in the pressed and needled state or the lifted state, the misoperation or the test result deviation in the test process is avoided, and the reliability and the accuracy of the test are ensured.

[0017] 3. The sensor fixing plate is provided with a plurality of waist-shaped holes, the mounting base is provided with a bolt hole corresponding to each of the waist-shaped holes, and the sensor fixing plate and the mounting base are assembled through the bolt, the relative position of the sensor fixing plate and the mounting base can be adjusted within a certain range during assembly through the waist-shaped holes, and thus the influence of the machining error of the sensor fixing plate and the mounting base on the overall assembly is reduced.

[0018] It should be understood that the foregoing general description and the following detailed description are only exemplary and explanatory, and cannot limit the application. BRIEF DESCRIPTION OF DRAWINGS

[0019] The accompanying drawings, which are incorporated into and constitute a part of this specification, illustrate embodiments consistent with the present application and serve to explain the principles of the present application together with the specification. At the same time, these drawings and the written description are not intended to restrict the scope of the concept of the present application in any way, but to illustrate the concept of the present application for those skilled in the art by referring to specific embodiments.

[0020] Figure 1 An exploded view of the embodiment of the present application.

[0021] Figure 2 A front view of the embodiment of the present application.

[0022] Reference sign annotation: 1 - mounting base plate, 2 - probe assembly, 201 - probe, 202 - probe signal plate, 3 - identification assembly, 301 - sensor fixing plate, 302 - sensor circuit board, 303 - light shielding plate, 304 - photoelectric sensor, 305 - slot hole, 306 - reflective sheet, 307 - spring, 4 - dovetail groove. DETAILED DESCRIPTION

[0023] The present application will be described in further detail below with reference to the drawings. It is necessary to point out here that the following detailed description is only used to further illustrate the present application and cannot be understood as limiting the scope of protection of the present application. Those skilled in the art can make some non-essential improvements and adjustments to the present application according to the above application content.

[0024] Please refer to Figure 1 and Figure 2 A two-wire probe mechanism of a flying probe tester is arranged on a cantilever support inside the flying probe tester, comprising a mounting base plate 1 and a probe assembly 2 arranged on the mounting base plate 1, the probe assembly 2 comprising a probe 201, and the two-wire probe mechanism further comprising an identification assembly 3 for identifying whether the probe 201 is in a pressed needle state or a lifted state.

[0025] It should be noted that the present application is installed as a whole on the cantilever support inside the flying probe tester, and the cantilever support is driven by a corresponding driving mechanism to drive the two-wire probe mechanism to move in the X, Y and Z directions for detection action.

[0026] The two-wire probe mechanism is small and compact as a whole, and there is no mutual interference problem between the two groups of the two-wire probe mechanism, which can simultaneously test the tiny pads, expand the application range of the flying probe tester and improve the test efficiency of the tiny pads. The identification assembly 3 identifies whether the probe 201 is in a pressed needle state or a lifted state, avoids misoperation or test result deviation during the test process, and ensures the reliability and accuracy of the test.

[0027] Further, the two-wire probe mechanism is detachably assembled with the cantilever support, the mounting base plate 1 is provided with a dovetail groove 4 matched with the cantilever support, the dovetail groove 4 is clamped to the cantilever support, and then the mounting base plate 1 is fixedly assembled with the cantilever support through bolts or other fixing modes such as buckles and latches, as long as the two-wire probe mechanism can be fixedly assembled with the cantilever support and can be detached when needed, which is not limited in the application. The setting of the dovetail groove 4 can improve the assembly stability between the mounting base plate 1 and the cantilever support, thereby ensuring that the two-wire probe mechanism has high precision and high stability during movement.

[0028] Further, the probe assembly 2 further comprises a probe signal plate 202 for transmitting and receiving test signals.

[0029] Please refer to Figure 1 and Figure 2 In an embodiment of the utility model, the identification assembly 3 comprises a sensor fixed plate 301 arranged on the mounting base plate 1, a sensor circuit board 302 arranged on the sensor fixed plate 301, a photoelectric sensor 304 arranged on the sensor circuit board 302 and a reflective sheet 306 arranged on the mounting base plate 1 for reflecting the light emitted by the photoelectric sensor 304, the mounting base plate 1 is provided with a spring 307, the probe 201 is arranged at the end of the spring 307 away from the mounting base plate 1, and the partial needle segment of the probe 201 is located between the photoelectric sensor 304 and the reflective sheet 306.

[0030] The sensor fixed plate 301 is provided with a slot hole 305 for the light emitted by the photoelectric sensor 304 to pass through.

[0031] It should be noted that in the embodiment, the photoelectric sensor 304 is integrated with a light emitting device such as an LED.

[0032] In the embodiment, the light emitted by the photoelectric sensor 304 passes through the slot hole 305 and hits the reflective sheet 306, the reflective sheet 306 reflects the light, and the photoelectric sensor 304 receives the reflected light, when the probe 201 is in the pressed and needled state, the probe 201 will move within a certain range (non-translational), the movement of the probe 201 causes the amount of light shielding to change, that is, the amount of reflected light changes, thereby triggering the photoelectric sensor 304 to determine that the probe 201 is in the pressed and needled state, on the contrary, when the probe 201 is in the raised and lifted state, it is reset under the action of the spring 307, the amount of light received by the photoelectric sensor 304 returns to the initial value, thereby determining that the probe 201 is in the raised and lifted state, and the photoelectric sensor 304 realizes accurate identification of the state of the probe 201.

[0033] Further, in the embodiment, the recognition component 3 further comprises a light shield plate 303 for avoiding interference of reflected light caused by external light, the light shield plate 303 is located on the side of the reflector 306 far away from the photoelectric sensor 304.

[0034] Further, in the embodiment, the sensor fixing plate 301 is provided with a plurality of waist-shaped holes, the mounting base plate 1 is provided with bolt holes corresponding to the waist-shaped holes one by one, the sensor fixing plate 301 and the mounting base plate 1 are assembled through bolts, the relative position of the sensor fixing plate 301 and the mounting base plate 1 can be adjusted within a certain range when they are assembled, thereby reducing the influence of the processing error of the sensor fixing plate 301 and the mounting base plate 1 on the overall assembly,

[0035] In addition, it should be understood that, although the present specification is described in terms of embodiments, not every embodiment contains only one independent technical solution, and the description of the specification is only for the sake of clarity, and those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can be appropriately combined to form other embodiments that those skilled in the art can understand.

Claims

1. A flying probe tester two-wire probe mechanism, provided on a cantilever support inside a flying probe tester, characterized in that, The two-wire probe mechanism comprises a mounting substrate (1) and a probe assembly (2) arranged on the mounting substrate (1), the probe assembly (2) comprises a probe (201), and the two-wire probe mechanism further comprises a recognition assembly (3) for sensing whether the probe (201) is in a pressed state or a lifted state.

2. The flying probe tester two-wire probe mechanism of claim 1, wherein, The two-wire probe mechanism is detachably assembled with the cantilever support, and the mounting substrate (1) is provided with dovetail grooves (4) adapted to the cantilever support.

3. The flying probe tester two-wire probe mechanism of claim 1, wherein, The probe assembly (2) further comprises a probe signal plate (202).

4. The flying probe tester two-wire probe mechanism of claim 1, wherein, The recognition assembly (3) comprises a sensor fixing plate (301) arranged on the mounting substrate (1), a sensor circuit board (302) arranged on the sensor fixing plate (301), a photoelectric sensor (304) arranged on the sensor circuit board (302), and a reflective sheet (306) arranged on the mounting substrate (1) for reflecting light emitted by the photoelectric sensor (304), the mounting substrate (1) is provided with a spring (307), the probe (201) is arranged at an end of the spring (307) away from the mounting substrate (1), and a part of a needle segment of the probe (201) is located between the photoelectric sensor (304) and the reflective sheet (306).

5. The flying probe tester two-wire probe mechanism of claim 4, wherein, The recognition assembly (3) further comprises a light shielding plate (303) for avoiding interference of reflected light caused by external light, and the light shielding plate (303) is located on a side of the reflective sheet (306) away from the photoelectric sensor (304).

6. The flying probe tester two-wire probe mechanism of claim 4, wherein, The sensor fixing plate (301) is provided with a slot hole (305) for light emitted by the photoelectric sensor (304) to pass through.

7. The flying probe tester two-wire probe mechanism of claim 4, wherein, The sensor fixing plate (301) is provided with a plurality of waist-shaped holes, the mounting substrate (1) is provided with bolt holes corresponding to the waist-shaped holes one by one, and the sensor fixing plate (301) and the mounting substrate (1) are assembled through bolts.

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