Leveling device between imprinting head and workpiece table of nano-imprinting equipment

Abstract

The utility model provides a leveling device between an imprinting head and a workpiece table of nanoimprinting equipment, and belongs to the technical field of nanoimprinting. The leveling device between the imprinting head and the workpiece table of the nanoimprinting equipment comprises a lower pressing plate, the imprinting head and a spherical hinge mechanism, the imprinting head is connected with the lower pressing plate through the spherical hinge mechanism, an anti-rotation mechanism is arranged between the imprinting head and the lower pressing plate, an electric telescopic cylinder is arranged between the imprinting head and the lower pressing plate, and the spherical hinge mechanism is connected with the lower pressing plate. And a distance measuring sensor is arranged on the printing head. The automatic leveling device has the advantages that the distance measuring sensor is used for measuring the parallel condition of the printing head and the workpiece table, the three telescopic cylinders correspondingly act to adjust the levelness of the printing head, so that the automatic leveling effect is achieved, the anti-rotation mechanism is used for preventing rotation of the printing head during adjustment, and the direction accuracy is guaranteed.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of nanoimprint, in particular to a leveling device between a nanoimprint equipment imprint head and a workpiece table. BACKGROUND

[0002] Nanoimprint is an important micro-nano device processing technology, which can achieve the same effect as the well-known micro-nano lithography, that is, the pattern on the template is transferred to the glue surface coated on the substrate, so as to facilitate the subsequent transfer of these patterns to the substrate by etching. But nanoimprint is lower in cost and simpler in process flow than micro-nano lithography, and has more advantages in the manufacture of some micro-nano devices. An important factor affecting the performance of nanoimprint machine is the leveling problem of the imprint template during the nanoimprint process. That is, the imprint template is kept parallel to the underlying substrate before contacting.

[0003] Therefore, some nanoimprint machines use a hinge type flexible structure imprint head, so that when the imprint template and the substrate are in contact, as the imprint head gradually applies pressure to the imprint template, the imprint template also applies a counter force to the imprint head, at this time the hinge type flexible structure of the imprint head will be slightly deformed, so that the imprint template is tightly attached to the substrate through adaptive adjustment, thereby realizing the leveling of the imprint template. But the problem with this is that when the imprint template is leveled, the imprint template has already contacted the substrate, and the imprint template may scratch the substrate during adaptive adjustment, and the quality of the flexible structure of the imprint head is very high during adaptive adjustment, which can easily cause the flexible structure of the imprint head to irreversibly twist and deform, and if the inclination of the template is large, the flexible structure may even be directly broken during adjustment. CONTENT OF THE UTILITY MODEL

[0004] In order to make up for the above shortcomings, the present application provides a leveling device between a nanoimprint equipment imprint head and a workpiece table, which aims to improve the problems mentioned in the above background art.

[0005] The embodiment of the present application provides a leveling device between a nanoimprint equipment imprint head and a workpiece table, which comprises a lower pressing plate, an imprint head and a ball hinge mechanism, the imprint head is connected with the lower pressing plate through the ball hinge mechanism, a rotation prevention mechanism is arranged between the imprint head and the lower pressing plate, an electric telescopic cylinder is arranged between the imprint head and the lower pressing plate, and a distance measuring sensor is arranged on the imprint head.

[0006] In a specific embodiment, the ball hinge mechanism comprises a ball seat and a pressure plate, the ball seat is fixedly connected with the lower pressing plate, the inner and outer walls of the ball seat are arranged as concentric spherical surfaces, the outer wall of the ball seat is frictionally connected with the imprint head in a spherical shape, the pressure plate is frictionally connected with the inner wall of the ball seat in a spherical shape, and the pressure plate is adjustably connected with the imprint head at a distance.

[0007] In the implementation process, the platen and the print head are clamped on the ball seat and can rotate freely along the spherical surface to achieve horizontal adjustment.

[0008] In a specific embodiment, the ball hinge mechanism further comprises a pull rod, the lower end of the pull rod is fixedly connected with the print head, the upper end of the pull rod is movably penetrated through the platen, and a hydraulic cylinder is arranged between the pull rod and the platen.

[0009] In the implementation process, the hydraulic cylinder pulls the pull rod with the platen as the support, so that the platen and the print head clamp the ball seat, and the damping and locking of the ball hinge are adjusted by the force of the hydraulic cylinder.

[0010] In a specific embodiment, the lower end of the pull rod is a solid section, the upper end of the pull rod is a hollow section, the hollow section is movably penetrated through the platen, and the hydraulic cylinder is located inside the hollow section of the pull rod.

[0011] In the implementation process, the hydraulic cylinder is placed in the pull rod, which is beneficial to the coaxial force and resistance and avoids the deflection, and one hydraulic cylinder is also convenient for control.

[0012] In a specific embodiment, the telescopic cylinder is one of a pneumatic cylinder, an electric cylinder or an oil cylinder, and the telescopic cylinder is spherical articulated at both ends with the lower pressing plate and the platen respectively.

[0013] In the implementation process, in this embodiment, the telescopic cylinder adopts a telescopic rod driven by a voice coil motor, which has high precision and quick response.

[0014] In a specific embodiment, three telescopic cylinders are provided, and the telescopic cylinders are arranged in a Y shape around the platen.

[0015] In the implementation process, the three telescopic cylinders drive the platen to move in cooperation, thereby driving the print head to adjust horizontally.

[0016] In a specific embodiment, the anti-rotation mechanism comprises a support rod and a U-shaped seat, the U-shaped seat is fixedly connected with the lower pressing plate, the support rod is fixedly connected with the print head, the upper end of the support rod is fixedly connected with a round rod, and the round rod is movably clamped in the U-shaped seat.

[0017] In a specific embodiment, the four round rods are located in the same plane and are parallel to the print head, and the axes of the four round rods all intersect at the center of the ball seat.

[0018] In the above implementation process, when the printing head is horizontally adjusted, the four round rods can be clamped in the U-shaped seat to form a circumferential fixing effect, ensuring that the direction of the printing head does not change. The two round rods facing each other form a group, and the axes of the two groups of round rods are perpendicular to each other. In this way, when one group of round rods performs a pitching motion, the other group of round rods performs a rotating motion, and neither of them interferes with the U-shaped seat. The principle is similar to that of the automatic inclinometer of a helicopter.

[0019] Compared with the prior art, the beneficial effects of the present application are as follows: the parallelism between the printing head and the workpiece table is measured by using the distance measuring sensor, and then the horizontal of the printing head is adjusted by using the corresponding actions of the three telescopic cylinders, so as to realize the automatic leveling effect. In addition, the anti-rotation mechanism is used to prevent the rotation of the printing head during adjustment, thereby ensuring the accuracy of the direction. BRIEF DESCRIPTION OF DRAWINGS

[0020] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can also be obtained without creative labor.

[0021] Figure 1 is a first perspective view of the leveling device between the imprinting head and the workpiece table of the nano-imprint equipment provided by the embodiments of the present application;

[0022] Figure 2 is a second perspective view of the leveling device between the imprinting head and the workpiece table of the nano-imprint equipment provided by the embodiments of the present application;

[0023] Figure 3 is a schematic view of the connection relationship between the ball hinge mechanism and the printing head provided by the embodiments of the present application;

[0024] Figure 4 is a cross-sectional view of the connection relationship between the ball hinge mechanism and the printing head provided by the embodiments of the present application.

[0025] In the figure: 10 - lower pressing plate; 20 - printing head; 30 - ball hinge mechanism; 31 - ball seat; 32 - pressing disc; 33 - pull rod; 34 - hydraulic cylinder; 40 - anti-rotation mechanism; 41 - support rod; 42 - U-shaped seat; 43 - round rod; 50 - telescopic cylinder; 60 - distance measuring sensor. DETAILED DESCRIPTION

[0026] The technical solutions in the embodiments of the present application will be described below in combination with the drawings in the embodiments of the present application.

[0027] Please refer to Figures 1-4The application provides a leveling device between a nanoimprint equipment imprint head and a workpiece table, which comprises a pressing plate 10, an imprint head 20 and a ball hinge mechanism 30, the imprint head 20 is connected with the pressing plate 10 through the ball hinge mechanism 30, a rotation prevention mechanism 40 is arranged between the imprint head 20 and the pressing plate 10, an electric telescopic cylinder 50 is arranged between the imprint head 20 and the pressing plate 10, and a distance measuring sensor 60 is arranged on the imprint head 20. Wherein, the distance measuring sensor 60 is used to measure the parallelism between the imprint head 20 and the workpiece table, then three telescopic cylinders 50 are used to adjust the level of the imprint head 20, so that the automatic leveling effect is realized, and the rotation prevention mechanism 40 is used to prevent the rotation of the imprint head 20 during the adjustment, so that the direction accuracy is ensured.

[0028] Please refer to Figures 1-4 The ball hinge mechanism 30 comprises a ball seat 31 and a pressing disc 32, the ball seat 31 is fixedly connected with the pressing plate 10, the inner and outer walls of the ball seat 31 are arranged as concentric spherical surfaces, the outer wall of the ball seat 31 is frictionally connected with the imprint head 20 in a spherical shape, the pressing disc 32 is frictionally connected with the inner wall of the ball seat 31 in a spherical shape, and the pressing disc 32 is adjustably connected with the imprint head 20. The pressing disc 32 and the imprint head 20 are clamped on the ball seat 31 and can rotate freely along the spherical surface, so that the horizontal adjustment action is realized.

[0029] Please refer to Figures 1-4 The ball hinge mechanism 30 further comprises a pull rod 33, the lower end of the pull rod 33 is fixedly connected with the imprint head 20, the upper end of the pull rod 33 is movably penetrated through the pressing disc 32, and a hydraulic cylinder 34 is arranged between the pull rod 33 and the pressing disc 32. The hydraulic cylinder 34 drives the pull rod 33 by taking the pressing disc 32 as a support, so that the pressing disc 32 and the imprint head 20 clamp the ball seat 31, and the damping and locking of the ball hinge are adjusted by the force of the hydraulic cylinder 34.

[0030] Please refer to Figures 1-4 The lower end of the pull rod 33 is a solid section, the upper end of the pull rod 33 is a hollow section, the hollow section is movably penetrated through the pressing disc 32, and the hydraulic cylinder 34 is located in the hollow section of the pull rod 33. The hydraulic cylinder 34 is arranged in the pull rod 33, which is beneficial to coaxial force and resistance and avoids deflection, and one hydraulic cylinder 34 is convenient to control.

[0031] Please refer to Figures 1-4 The telescopic cylinder 50 is one of a pneumatic cylinder, an electric cylinder and an oil cylinder, and the telescopic cylinder 50 is spherically hinged at both ends with the pressing plate 10 and the pressing disc 32. In the embodiment, the telescopic cylinder 50 adopts a telescopic rod driven by a voice coil motor, which has high precision and quick response.

[0032] Please refer to Figures 1-4 Three telescopic cylinders 50 are arranged, and the telescopic cylinders 50 are arranged in a Y shape around the pressing disc 32. The three telescopic cylinders 50 are driven to move the pressing disc 32 in a matching action, so as to drive the imprint head 20 to be horizontally adjusted.

[0033] Please refer to Figures 1-4The anti-rotation mechanism 40 includes a support rod 41 and a U-shaped seat 42, the U-shaped seat 42 is fixedly connected with the lower pressing plate 10, the support rod 41 is fixedly connected with the printing head 20, the upper end of the support rod 41 is fixedly connected with a round rod 43, the round rod 43 is clamped in the U-shaped seat 42 and moves. The four round rods 43 are located in the same plane and are parallel to the printing head 20, the axes of the four round rods 43 all intersect at the center of the ball seat 31. When the printing head 20 is horizontally adjusted, the four round rods 43 can be clamped in the U-shaped seat 42, forming a circumferential fixing effect, ensuring that the direction of the printing head 20 does not change, the two round rods 43 facing each other form a group, the axes of the two groups of round rods 43 are perpendicular to each other, so that when one group of round rods 43 performs a pitching motion, the other group of round rods 43 performs a rotating motion, and neither of them interferes with the U-shaped seat 42, and the principle is similar to the automatic tilting device of a helicopter.

[0034] The working principle of the leveling device between the nano-imprinting equipment printing head and the workpiece table is as follows: the lower pressing plate 10 is installed on the nano-imprinting machine, when the lower pressing plate 10 moves downward with the printing head 20, the plurality of laser ranging sensors 60 continuously emit light signals to the workpiece table, the parallelism between the printing head 20 and the worktable is measured, then the printing head 20 is adjusted along the surface of the ball seat 31 by adjusting the three telescopic cylinders 50, then the hydraulic cylinder 34 drives the pull rod 33 with the support of the pressing disc 32, so that the pressing disc 32 and the printing head 20 clamp the ball seat 31, horizontal locking is realized, to ensure the parallelism between the printing head 20 and the workpiece table, when the printing head 20 deflects, the direction of the printing head 20 is ensured not to change, the round rod 43 is driven to move by the support rod 41, and the circumferential locking of the printing head 20 is ensured by the restriction of the U-shaped seat 42 on the round rod 43, in summary, the ranging sensor 60 is used to measure the parallelism between the printing head 20 and the workpiece table, the three telescopic cylinders 50 are used to adjust the level of the printing head 20, to realize the automatic leveling effect, and the anti-rotation mechanism 40 is used to prevent the rotation of the printing head 20 during adjustment, to ensure the accuracy of the direction.

[0035] The above is only an embodiment of the present application and does not limit the protection scope of the present application. For those skilled in the art, the present application can have various changes and variations. Any modification, improvement or equivalent replacement made within the spirit and principle of the present application shall be included in the protection scope of the present application. It should be noted that similar reference numbers and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

Claims

1. A leveling device between a nanoimprint apparatus imprint head and a workpiece table, characterized by, The application relates to a printing head device which comprises a lower pressing plate (10), a printing head (20) and a ball hinge mechanism (30), wherein the printing head (20) is connected with the lower pressing plate (10) through the ball hinge mechanism (30), a rotation preventing mechanism (40) is arranged between the printing head (20) and the lower pressing plate (10), and an electric telescopic cylinder (50) is arranged between the printing head (20) and the lower pressing plate (10).

2. The leveling device between the imprint head of the nanoimprint equipment and the workpiece table according to claim 1, characterized in that, The ball hinge mechanism (30) comprises a ball seat (31) and a pressing disc (32), the ball seat (31) is fixedly connected with the lower pressing plate (10), the inner and outer walls of the ball seat (31) are arranged as concentric spherical surfaces, the outer wall of the ball seat (31) is connected with the printing head (20) in a spherical friction mode, the pressing disc (32) is connected with the inner wall of the ball seat (31) in a spherical friction mode, and the pressing disc (32) is connected with the printing head (20) in an adjustable distance mode.

3. The leveling device between the imprint head of the nanoimprint equipment and the workpiece table according to claim 2, characterized in that, The ball hinge mechanism (30) further comprises a pull rod (33), the lower end of the pull rod (33) is fixedly connected with the printing head (20), the upper end of the pull rod (33) is movably penetrated through the pressing disc (32), and a hydraulic cylinder (34) is arranged between the pull rod (33) and the pressing disc (32).

4. The leveling device between the imprint head of the nanoimprint equipment and the workpiece table according to claim 3, characterized in that, The lower end of the pull rod (33) is a solid section, the upper end of the pull rod (33) is a hollow section, the hollow section is movably penetrated through the pressing disc (32), and the hydraulic cylinder (34) is located in the hollow section of the pull rod (33).

5. The leveling device between the imprint head of the nanoimprint equipment and the workpiece table according to claim 4, wherein, The telescopic cylinder (50) is one of a gas cylinder, an electric cylinder and an oil cylinder, and the telescopic cylinder (50) is connected with the lower pressing plate (10) and the pressing disc (32) in a spherical mode.

6. The leveling device between the imprint head of the nanoimprint equipment and the workpiece table according to claim 5, wherein, Three telescopic cylinders (50) are arranged in a Y shape around the pressing disc (32).

7. The leveling device between the imprint head of the nanoimprint equipment and the workpiece table according to claim 6, characterized in that, The rotation preventing mechanism (40) comprises a supporting rod (41) and a U-shaped seat (42), the U-shaped seat (42) is fixedly connected with the lower pressing plate (10), the supporting rod (41) is fixedly connected with the printing head (20), the upper end of the supporting rod (41) is fixedly connected with a round rod (43), and the round rod (43) is movably clamped in the U-shaped seat (42).

8. The leveling device between the imprint head of the nanoimprint equipment and the workpiece table according to claim 7, characterized in that, The four round rods (43) are located in the same plane and are parallel to the printing head (20), and the axes of the four round rods (43) are all intersected at the ball center of the ball seat (31).

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