Coating device

Abstract

The coating apparatus includes: a stage on which a mother substrate is placed; the nozzle module is arranged on the objective table; the supply part is connected with the nozzle module through a supply pipeline, and the nozzle module comprises a nozzle portal frame which comprises a nozzle front edge for spraying the coating liquid towards the mother substrate; the lamp shell is connected to the nozzle portal frame; an exposure lamp disposed inside the lamp housing and irradiating light toward the mother substrate; and a light shielding plate disposed inside the lamp housing and selectively blocking light irradiated from the exposure lamp.

Description

TECHNICAL FIELD

[0001] The utility model relates to a kind of coating devices. More specifically, the utility model relates to a kind of coating device used in the manufacturing process of display device. BACKGROUND

[0002] With the development of information technology, the importance of display devices as a connection medium between users and information is highlighted. As a result, the use of display devices such as liquid crystal display devices, organic light emitting display devices, and plasma display devices has increased.

[0003] On the other hand, in the process of manufacturing display devices, the process of coating organic films (or inorganic films) and the like is performed, and as a coating method for organic films (or inorganic films), a slit coating method using a slit coater can be used. SUMMARY

[0004] The object of the present utility model is to provide a coating device that simplifies the manufacturing process of a display device.

[0005] However, the object of the present utility model is not limited to such an object, and various extensions can be made without departing from the concept and scope of the present utility model.

[0006] To achieve the above-mentioned object of the present utility model, the coating device according to an embodiment of the present utility model can include: a stage on which a mother substrate is placed; a nozzle module disposed on the stage; and a supply portion connected to the nozzle module through a supply pipe, the nozzle module including: a nozzle gantry including a nozzle front edge that sprays a coating liquid toward the mother substrate; a lamp housing connected to the nozzle gantry; an exposure lamp disposed inside the lamp housing and irradiating light toward the mother substrate; and a light shield plate disposed inside the lamp housing and movable in a direction away from the nozzle gantry or in a direction close to the nozzle gantry.

[0007] In an embodiment, the lower portion of the lamp housing can define an opening portion overlapping the exposure lamp.

[0008] In an embodiment, the opening portion of the lamp housing can have a shape extending along the shape of the exposure lamp.

[0009] In an embodiment, the light shield plate can be movable to an open area that opens the opening portion or a closed area that covers the opening portion inside the lamp housing.

[0010] In an embodiment, the light shielding plate can be provided in a plurality of pieces, and a portion of the plurality of light shielding plates corresponding to the first area of the mother substrate can be positioned in the open area, and another portion of the plurality of light shielding plates corresponding to a second area of the mother substrate other than the first area can be positioned in the closed area.

[0011] In an embodiment, the first area of the mother substrate can include a display area of a display device in which a plurality of pixels are formed, and the second area of the mother substrate can include a pad area of the display device in which a pad portion is formed.

[0012] In an embodiment, the light shielding plate can be disposed in a lower portion of the lamp housing adjacent to the opening portion.

[0013] In an embodiment, the exposure lamp can be connected to an upper portion of the lamp housing.

[0014] In an embodiment, the nozzle module can be movable in a first direction, and the lamp housing can be connected to a rear surface of the nozzle gantry facing in a direction opposite to the first direction.

[0015] In an embodiment, the light shielding plate can be provided in a plurality of pieces, and the plurality of light shielding plates can be disposed adjacent to each other in a second direction crossing the first direction.

[0016] In an embodiment, a moving speed of the nozzle module can be inversely proportional to a time during which the coating liquid coated on the mother substrate is exposed to the light.

[0017] In an embodiment, the exposure lamp can include an ultraviolet (UV) lamp irradiating UV light.

[0018] In an embodiment, the lamp housing can be formed of a light blocking substance.

[0019] In an embodiment, the nozzle module can further include a light blocking film disposed between the nozzle gantry and the lamp housing.

[0020] In an embodiment, the nozzle front edge can have a trapezoidal shape in a cross section.

[0021] In an embodiment, the nozzle front edge can have a slit shape.

[0022] To achieve the foregoing purpose of the present application, the coating device according to the embodiment of the present application can include: a substrate table on which a mother substrate is placed; a nozzle module arranged on the substrate table; and a supply unit connected to the nozzle module through a supply pipeline, wherein the nozzle module includes: a nozzle gantry including a nozzle front edge for spraying a coating liquid toward the mother substrate; a lamp housing connected to the nozzle gantry; an exposure lamp arranged inside the lamp housing and configured to irradiate light toward the mother substrate; and a light blocking film arranged inside the lamp housing and configured to selectively block the light irradiated from the exposure lamp.

[0023] In an embodiment, the lower part of the lamp housing can define an opening part overlapping the exposure lamp.

[0024] In an embodiment, the light blocking film can be arranged at the lower part of the lamp housing adjacent to the opening part.

[0025] In an embodiment, the nozzle module can be movable in a first direction, and the lamp housing can be connected to the back of the nozzle gantry facing a direction opposite to the first direction.

[0026] In the coating device according to the embodiment of the present application, the nozzle module can include a nozzle gantry for spraying a coating liquid, a lamp housing connected to the nozzle gantry, an exposure lamp arranged inside the lamp housing and configured to irradiate light toward the coating liquid coated on the mother substrate, and a light blocking film arranged inside the lamp housing and movable in a direction close to the nozzle gantry or a direction away from the nozzle gantry to selectively block the light irradiated from the exposure lamp, without a separate exposure device and a mask, so that coating and exposure can be simultaneously performed on the mother substrate by the nozzle module. Thus, the manufacturing process of the display device can be simplified. In addition, the process cost of the display device can be reduced.

[0027] However, the effects of the present application are not limited to the above-mentioned effects, and various extensions can be made without departing from the concept and field of the present application. BRIEF DESCRIPTION OF DRAWINGS

[0028] Figure 1 is a perspective view showing a coating device according to an embodiment of the present application.

[0029] Figure 2 is a front view showing a nozzle module included in the coating device of Figure 1 .

[0030] Figure 3 is a plan view showing a nozzle module included in the coating device of Figure 1 .

[0031] Figure 4 is a perspective view showing a nozzle module included in the coating device ofFigure 1 A cross-sectional view of the nozzle module in the coating device.

[0032] Figures 5 to 7 It is used to illustrate its use. Figure 1 A diagram of the coating method of the coating apparatus.

[0033] Figure 8 This is a cross-sectional view showing an example of a display device.

[0034] (Explanation of reference numerals in the attached diagram)

[0035] SCA: Coating apparatus; STA: Stage

[0036] MS: Mother substrate; NM: Nozzle module

[0037] TP: Transfer Department; SP: Supply Department

[0038] SPP: Supply Pipeline; NG: Nozzle Gantry

[0039] NL: Nozzle leading edge; LH: Lamp housing

[0040] EL: Exposure lamp; SHT: Light shield Detailed Implementation

[0041] Hereinafter, the coating apparatus according to an embodiment of the present invention will be described in more detail with reference to the accompanying drawings. The same reference numerals will be used for the same components in the drawings, and repeated descriptions of the same components will be omitted.

[0042] Figure 1 This is a perspective view showing a coating apparatus according to an embodiment of the present invention.

[0043] In this specification, a plane can be defined by a first direction DR1 and a second direction DR2 intersecting the first direction DR1. For example, the first direction DR1 and the second direction DR2 can be perpendicular to each other. Additionally, a third direction DR3 can be perpendicular to the plane.

[0044] Reference Figure 1 According to an embodiment of the present invention, the coating apparatus SCA may include a stage STA, a nozzle module NM, a transfer unit TP, and a supply unit SP.

[0045] The mother substrate MS can be seated on the stage STA. That is, the stage STA can function to fix the mother substrate MS immovably during a process. The stage STA can include a mechanical or electronic fixing part that fixes the mother substrate MS. For example, the upper surface of the stage STA can also be composed of an electrostatic chuck that can control electrostatic force generated by a dielectric polarization phenomenon to adsorb the mother substrate MS to the upper surface of the stage STA, or include a mechanical clamp or a vacuum chuck.

[0046] The nozzle module NM can be disposed on the stage STA. In particular, the nozzle module NM can be disposed on the stage STA to be spaced apart from the stage STA by a certain interval. The nozzle module NM can function to spray a coating liquid to coat the coating liquid on the mother substrate MS disposed on the stage STA. With regard to the nozzle module NM, reference will be made to Figures 2 to 4 which will be described in detail later.

[0047] The transfer part TP can be disposed on both sides of each of the stage STA and the nozzle module NM. In particular, a pair of transfer parts TP can directly contact both sides of the nozzle module NM facing each other to support both sides of the nozzle module NM. The nozzle module NM can be fixed to the transfer part TP, so that the relative positions of the nozzle module NM and the transfer part TP do not change. The transfer part TP can function to fix the nozzle module NM so that the nozzle module NM can be maintained at a certain distance from the stage STA.

[0048] The transfer part TP can move along the side of the adjacent stage STA. In particular, a pair of transfer parts TP can move at a certain speed along the side of the stage STA in the second direction DR2 to move the nozzle module NM disposed between the pair of transfer parts TP in the second direction DR2. By moving the transfer part TP at a certain speed together with the nozzle module NM, the coating liquid sprayed at a certain speed from the nozzle module NM can not accumulate at one point of the stage STA and be coated on the mother substrate MS disposed on the stage STA at a uniform thickness.

[0049] The supply part SP can be connected to the nozzle gantry (for example, the nozzle gantry NG of Figures 2 to 4 ) of the nozzle module NM through a supply pipe SPP. The supply part SP can include a pressure providing member such as a pump that applies a certain pressure to the coating liquid supplied. The supply part SP can apply pressure to the coating liquid located inside to supply the coating liquid to the nozzle gantry through the supply pipe SPP.

[0050] Figure 2 is a front view illustrating a nozzle module included in a coating apparatus of Figure 1 . Figure 3 is a plan view illustrating a nozzle module included in a coating apparatus of Figure 1 . Figure 4 is a sectional view illustrating a nozzle module included in a coating apparatus of Figure 1 .

[0051] Referring to Figure 2 , Figure 3 and Figure 4 , the nozzle module NM of the coating apparatus SCA according to an embodiment of the present application (refer to Figure 1 ) can include a nozzle gantry NG that sprays a coating liquid CLQ.

[0052] The nozzle gantry NG can include a nozzle front edge NL at a lower portion. The nozzle front edge NL can function as a spray outlet that sprays the coating liquid CLQ from the lower portion of the nozzle gantry NG. That is, the nozzle front edge NL can include an opening portion in a direction (i.e., a first direction DR1) parallel to a long side of the nozzle gantry NG, thereby providing a path in which the coating liquid CLQ sprayed from above is sprayed in a direction toward the stage STA. In other words, the nozzle gantry NG can spray the coating liquid CLQ through the nozzle front edge NL to be coated on the mother substrate MS. In an embodiment, the nozzle gantry NG can be a slit coater including the nozzle front edge NL in a slit shape.

[0053] For example, the nozzle gantry NG can coat the coating liquid CLQ on the entire surface of the mother substrate MS through the nozzle front edge NL.

[0054] For example, the coating liquid CLQ can include a photoresist. In this case, the photoresist can be a negative photoresist. However, the material of the coating liquid CLQ is not limited thereto.

[0055] The entire surface of the mother substrate MS can include first areas A1 and second areas A2 between adjacent first areas A1. The first areas A1 can include display areas DA, and the second areas A2 can include pad areas PDA. The display areas DA are areas in which a plurality of pixels are formed, and the pad areas PDA are areas in which pad portions that supply various signals, voltages, etc. received from external devices are formed. After a structure of a display device is formed on the mother substrate MS, the mother substrate MS can be cut to manufacture a plurality of display devices each including the display areas DA and the pad areas PDA.

[0056] For example, the nozzle leading edge NL can have a trapezoidal shape in cross section. However, embodiments of the present application are not limited thereto, and the nozzle leading edge NL can also have a rectangular shape in cross section.

[0057] In one embodiment, the nozzle module NM can further include a lamp housing LH, an exposure lamp EL disposed inside the lamp housing LH, and a light shield plate SHT disposed inside the lamp housing LH. The lamp housing LH can be connected to the nozzle gantry NG. That is, the lamp housing LH can be connected to the nozzle gantry NG and move together with the nozzle gantry NG (e.g., in the second direction DR2).

[0058] In one embodiment, the lamp housing LH can be connected to the rear of the nozzle gantry NG. Here, the rear of the nozzle gantry NG can be a face that faces in a direction opposite to the second direction DR2, which is the moving direction of the nozzle module NM.

[0059] An opening portion OP can be defined in a lower portion of the lamp housing LH. For example, the opening portion OP can have a shape that extends along the shape of the exposure lamp EL. That is, the opening portion OP of the lamp housing LH can be defined as a light transmission portion, and the remaining portion of the lamp housing LH other than the opening portion OP can be defined as a light blocking portion. For example, the lamp housing LH can include a known light blocking material.

[0060] The exposure lamp EL can be connected to an upper portion of the lamp housing LH and overlap the opening portion OP of the lamp housing LH. The exposure lamp EL can irradiate light L toward the mother substrate MS disposed on the stage STA. The light L can be irradiated on the mother substrate MS through the opening portion OP of the lamp housing LH. Specifically, the exposure lamp EL can irradiate light L toward the coating liquid CLQ coated on the mother substrate MS through the nozzle gantry NG. Thus, the coating liquid CLQ coated on the mother substrate MS can be exposed.

[0061] For example, the exposure lamp EL can include a UV lamp that irradiates ultraviolet (UV) light. However, embodiments of the present application are not limited thereto, and the exposure lamp EL can also irradiate light of various wavelengths other than ultraviolet light.

[0062] The moving speed of the nozzle gantry NG (i.e., the moving speed of the nozzle module NM) can be adjusted to adjust the time (i.e., the exposure amount) that the coating liquid CLQ coated on the mother substrate MS is exposed to the light L. That is, the moving speed of the nozzle gantry NG (i.e., the moving speed of the nozzle module NM) can be inversely proportional to the time (i.e., the exposure amount) that the coating liquid CLQ coated on the mother substrate MS is exposed to the light L.

[0063] For example, if the moving speed of the nozzle gantry NG is decreased, the exposure amount can be increased. In contrast, if the moving speed of the nozzle gantry NG is increased, the exposure amount can be decreased. In addition, the exposure intensity of the coating liquid CLQ coated on the mother substrate MS can be controlled by lamp dimming.

[0064] When the moving speed of the nozzle gantry NG is changed, the thickness of the coating layer formed by the coating liquid CLQ coated on the mother substrate MS can be changed. The thickness change of the coating layer can be adjusted by the coating liquid ejection amount (i.e., the ejection speed) of the nozzle gantry NG.

[0065] In an embodiment, the light shield plate SHT can be disposed at the lower portion of the lamp housing LH. Specifically, the light shield plate SHT can be disposed at the lower portion of the lamp housing LH adjacent to the opening portion OP. The light shield plate SHT can be referred to as a light blocking film.

[0066] The light shield plate SHT can selectively block the light L irradiated from the exposure lamp EL. To this end, the light shield plate SHT can move in a direction away from the nozzle gantry NG (i.e., in a direction opposite to the second direction DR2) or in a direction close to the nozzle gantry NG (i.e., in the second direction DR2). That is, the light shield plate SHT can function as a mask that divides the area exposed in the mother substrate MS. The light shield plate SHT can be manufactured to change the size of the area exposed according to the size of the display device. For example, the light shield plate SHT can include a known light blocking substance.

[0067] The light shield plate SHT can be provided in a plurality. The plurality of light shield plates SHT can be disposed adjacent to each other in the first direction DR1. The plurality of light shield plates SHT can each independently move in the second direction DR2 or in a direction opposite to the second direction DR2, thereby opening or covering the opening portion OP. In an embodiment, each of the light shield plates SHT can be located in an open area OA that opens the opening portion OP, or in a close area CA that covers the opening portion OP.

[0068] For example, a portion of the light shield SHT corresponding to the second area A2 of the mother substrate MS can be moved to be located in the closed area CA, and another portion of the light shield SHT corresponding to the first area A1 of the mother substrate MS can be moved to be located in the open area OA. In this case, the light L irradiated toward the first area A1 of the mother substrate MS can expose the coating liquid CLQ coated on the first area A1 of the mother substrate MS through the lamp housing LH, and the light L irradiated toward the second area A2 of the mother substrate MS can be blocked by the light shield SHT. However, embodiments of the present application are not limited thereto.

[0069] The light shield SHT can be fixed to the lamp housing LH inside the lamp housing LH by a light shield bracket disposed at a lower portion of the lamp housing LH. For example, the light shield SHT can be moved to open or cover the opening portion OP in a sliding manner. However, the moving manner of the light shield SHT is not limited thereto.

[0070] Alternatively, when exposure is required in the entire area of the mother substrate MS, the light shield SHT can also be moved to be entirely located in the open area OA. Alternatively, when exposure is not required in the mother substrate MS, the light shield SHT can also be moved to be entirely located in the closed area CA.

[0071] For example, the light shield SHT can open the opening portion OP in a desired cell size when controlled in a recipe form. The cell means a display device formed by one display area DA and one pad area PDA in the mother substrate MS.

[0072] As a result, the nozzle module NM can perform coating and exposure on the mother substrate MS simultaneously by the nozzle module NM without a separate exposure device and a mask, by including the nozzle gantry NG, the lamp housing LH connected to the nozzle gantry NG, the exposure lamp EL disposed inside the lamp housing LH, and the light shield SHT disposed inside the lamp housing LH.

[0073] In an embodiment, the nozzle module NM can further include a light blocking film BF disposed between the lamp housing LH and the nozzle gantry NG. The light blocking film BF can block the light L emitted from the exposure lamp EL toward the nozzle leading edge NL of the nozzle gantry NG.

[0074] Figures 5 to 7 is a diagram for explaining a coating method of a coating apparatus using Figure 1 .

[0075] Referring to Figure 5 A plurality of display element layers DL can be formed on the mother substrate MS disposed on the stage STA. The display element layers DL can be formed on Figure 3 the display area DA. The display element layers DL can each include pixels.

[0076] Referring to Figure 6 The nozzle module NM can be disposed on the mother substrate MS. The nozzle module NM can perform coating and exposure on the mother substrate MS at the same time. Specifically, the nozzle gantry NG of the nozzle module NM can coat the coating liquid CLQ on the mother substrate MS. At the same time, the exposure lamp EL of the nozzle module NM can selectively irradiate the light L toward the mother substrate MS. That is, the light L is irradiated on the display element layers DL by the light shielding plate SHT, but the area between the display element layers DL can not be irradiated with the light L. Thus, the coating liquid CLQ coated on the mother substrate MS can be cured by the light L at the same time as the coating of the coating liquid CLQ.

[0077] For example, the coating liquid CLQ can be coated on the entire area of the mother substrate MS. Alternatively, the area between the display element layers DL (for example, Figure 3 the second area A2) can not be coated with the coating liquid CLQ. In this case, Figure 7 the step can be omitted.

[0078] Referring to Figure 7 The portion of the coating layer CL that does not overlap the display element layers DL can be removed by development. As a result, the coating layer CL can be formed only on the area where the display element layers DL are formed (for example, Figure 3 the first area A1), and not formed on the area between the display element layers DL (for example, Figure 3 the second area A2).

[0079] Figure 8 is a cross-sectional view illustrating an example of a display device.

[0080] Referring to Figure 8 The display device DD can include a substrate SUB, a circuit layer CRL, a pixel definition film PDL, first to third light emitting elements LED1, LED2, LED3, an encapsulation layer ENC, a bank layer BL, first and second color conversion layers CCL1, CCL2, a light transmission layer LTL, a cover layer CPL, a low-refraction layer LRL, first to third color filters CF1, CF2, CF3, and a protective layer PRL.

[0081] The substrate SUB can include a transparent substance or a non-transparent substance. The substrate SUB can be composed of a transparent resin substrate. As an example of the transparent resin substrate, a polyimide substrate or the like can be given. In this case, the polyimide substrate can include a first organic layer, a first barrier layer, and a second organic layer. Alternatively, the substrate SUB can also include a quartz substrate, a synthetic quartz substrate, a calcium fluoride substrate, a F-doped quartz substrate, a soda-lime glass substrate, a non-alkali glass substrate, or the like. These can be used alone or in combination with each other.

[0082] The circuit layer CRL can be provided on the substrate SUB. For example, the circuit layer CRL can include a switching transistor, a driver transistor, a capacitor, a signal wiring, or the like.

[0083] The first to third pixel electrodes PE1, PE2, PE3 can be provided on the circuit layer CRL. The first pixel electrode PE1 can overlap the first light-emitting region EA1, the second pixel electrode PE2 can overlap the second light-emitting region EA2, and the third pixel electrode PE3 can overlap the third light-emitting region EA3. The first to third light-emitting regions EA1, EA2, EA3 can be regions that emit light of different colors from each other.

[0084] For example, each of the first to third pixel electrodes PE1, PE2, PE3 can include a metal, an alloy, a metal nitride, a conductive metal oxide, a transparent conductive substance, or the like. These can be used alone or in combination with each other.

[0085] The pixel defining film PDL can be provided on the circuit layer CRL. The pixel defining film PDL can overlap the light-blocking region BA. The light-blocking region BA can be a region that does not emit light. The pixel defining film PDL can cover an edge of each of the first to third pixel electrodes PE1, PE2, PE3. In addition, the pixel defining film PDL can define an opening portion that exposes at least a portion of a top surface of each of the first to third pixel electrodes PE1, PE2, PE3. For example, the pixel defining film PDL can include an inorganic substance or an organic substance. In an embodiment, the pixel defining film PDL can include an organic substance such as an epoxy resin, a silicone resin, or the like. These can be used alone or in combination with each other.

[0086] The first light-emitting layer EML1, the second light-emitting layer EML2, and the third light-emitting layer EML3 can be provided on the first pixel electrode PE1, the second pixel electrode PE2, and the third pixel electrode PE3, respectively. Each of the first to third light-emitting layers EML1, EML2, and EML3 can be provided on the opening portion of the pixel defining film PDL.

[0087] Each of the first to third light-emitting layers EML1, EML2, and EML3 can include an organic material that emits light of a predetermined color. In an embodiment, each of the first to third light-emitting layers EML1, EML2, and EML3 can include an organic material that emits blue light.

[0088] The first common electrode CE1, the second common electrode CE2, and the third common electrode CE3 can be integrally formed. Each of the first and second common electrodes CE1 and CE2 can include a metal, an alloy, a metal nitride, a conductive metal oxide, a transparent conductive material, or the like. These can be used alone or in combination with each other.

[0089] The first light-emitting element LED1 including the first pixel electrode PE1, the first light-emitting layer EML1, and the first common electrode CE1 can be provided on the first light-emitting region EA1 on the substrate SUB, the second light-emitting element LED2 including the second pixel electrode PE2, the second light-emitting layer EML2, and the second common electrode CE2 can be provided on the second light-emitting region EA2 on the substrate SUB, and the third light-emitting element LED3 including the third pixel electrode PE3, the third light-emitting layer EML3, and the third common electrode CE3 can be provided on the third light-emitting region EA3 on the substrate SUB.

[0090] The circuit layer CRL and the first to third light-emitting elements LED1, LED2, and LED3 can form a display element layer (for example, the display element layer DL of FIG. 1). Figure 5 and Figure 6 The display element layer DL of FIG. 1).

[0091] The encapsulation layer ENC can be provided on the first to third common electrodes CE1, CE2, and CE3. The encapsulation layer ENC can prevent impurities, moisture, external air, or the like from penetrating into the first to third light-emitting elements LED1, LED2, and LED3 from the outside. The encapsulation layer ENC can include at least one inorganic layer and at least one organic layer.

[0092] The bank layer BL can be provided on the encapsulation layer ENC. The bank layer BL can form a space (i.e., an opening portion) in which an ink composition can be accommodated in a process of forming the first color conversion layer CCL1, the second color conversion layer CCL2, and the light transmission layer LTL. For example, the bank layer BL can include an organic substance such as polyimide.

[0093] The first color conversion layer CCL1, the second color conversion layer CCL2, and the light transmission layer LTL can be provided on the encapsulation layer ENC. The first color conversion layer CCL1 can overlap the first light emitting area EA1, the second color conversion layer CCL2 can overlap the second light emitting area EA2, and the light transmission layer LTL can overlap the third light emitting area EA3. Specifically, each of the first color conversion layer CCL1, the second color conversion layer CCL2, and the light transmission layer LTL can be provided in the opening portion of the bank layer BL.

[0094] The first and second color conversion layers CCL1, CCL2 can each include a base resin in which quantum dots and scattering particles are dispersed. The light transmission layer LTL can include a base resin in which scattering particles are dispersed.

[0095] A cover layer CPL can be provided on the bank layer BL, the first color conversion layer CCL1, the second color conversion layer CCL2, and the light transmission layer LTL. The cover layer CPL can be provided along the contours of the bank layer BL, the first color conversion layer CCL1, the second color conversion layer CCL2, and the light transmission layer LTL. The cover layer CPL can perform a moisture permeation prevention function for preventing deterioration of the optical filter. For example, the cover layer CPL can include an inorganic substance such as silicon oxide, silicon nitride, silicon oxynitride. These can be used alone or in combination with each other.

[0096] A low-refractive layer LRL can be provided on the cover layer CPL. The low-refractive layer LRL can have a relatively low refractive index. For example, the refractive index of the low-refractive layer LRL can be lower than the refractive indexes of the first color conversion layer CCL1, the second color conversion layer CCL2, and the light transmission layer LTL. The low-refractive layer LRL can include an organic substance. For example, the low-refractive layer LRL can include an organic polymer substance including silicon.

[0097] A color filter layer can be provided on the low-refractive layer LRL. The color filter layer can include a first color filter CF1, a second color filter CF2, and a third color filter CF3.

[0098] The first color filter CF1 can overlap the first light emitting area EA1 and the light blocking area BA, the second color filter CF2 can overlap the second light emitting area EA2 and the light blocking area BA, and the third color filter CF3 can overlap the third light emitting area EA3 and the light blocking area BA.

[0099] A protective layer PRL can be provided on the first color filter CF1, the second color filter CF2, and the third color filter CF3. The protective layer PRL can cover the first color filter CF1, the second color filter CF2, and the third color filter CF3. The protective layer PRL can include an inorganic substance or an organic substance. As examples of the inorganic substance, silicon oxide, silicon nitride, silicon oxynitride, and the like can be given. As examples of the organic substance, epoxy resin, siloxane resin, photoresist, and the like can be given.

[0100] In one embodiment, the coating layer CL formed by the coating method of Figures 5 to 7 may correspond to the protective layer PRL. In another embodiment, the coating layer CL formed by the coating method of Figures 5 to 7 may also correspond to the low-refractive layer LRL. However, embodiments of the present application are not limited thereto.

[0101] In the above description, the exemplary embodiments of the present application have been described with reference to the drawings, but it will be understood by those skilled in the relevant art that the present application can be variously modified and changed within the scope of the concept and field of the present application recited in the appended claims without departing from the spirit of the present application.

[0102] The present application can be applied to a process of manufacturing various display apparatuses that can have display devices. For example, the present application can be applied to a process of manufacturing high-resolution smartphones, mobile phones, smart pads, smart watches, tablet PCs (personal computers), navigation systems for vehicles, televisions, computer monitors, notebook computers, and the like.

Claims

1. A coating apparatus characterized by, Comprising: a stage on which a mother substrate is placed; a nozzle module disposed on the stage; and a supply unit connected to the nozzle module through a supply pipe, the nozzle module comprising: a nozzle gantry including a nozzle front edge that sprays a coating liquid toward the mother substrate; a lamp housing connected to the nozzle gantry; an exposure lamp disposed inside the lamp housing and irradiating light toward the mother substrate; and a light shield disposed inside the lamp housing and capable of moving in a direction away from the nozzle gantry or in a direction close to the nozzle gantry. 2.The coating apparatus according to claim 1, wherein an opening portion overlapping the exposure lamp is defined in a lower portion of the lamp housing. 3.The coating apparatus according to claim 2, wherein the opening portion of the lamp housing has a shape extending along a shape of the exposure lamp. 4.The coating apparatus according to claim 2, wherein the light shield is capable of moving to an open region that opens the opening portion or a closed region that covers the opening portion inside the lamp housing. 5.The coating apparatus according to claim 4, wherein the light shield is provided in plural, a portion of the light shields corresponding to a first region of the mother substrate is located in the open region, and another portion of the light shields corresponding to a second region of the mother substrate other than the first region is located in the closed region. 6.The coating apparatus according to claim 5, wherein the first region of the mother substrate includes a display region of a display device in which a plurality of pixels are formed, the second region of the mother substrate includes a pad region of the display device in which a pad portion is formed. 7.The coating apparatus according to claim 2, wherein the light shield is disposed in a lower portion of the lamp housing adjacent to the opening portion. 8.The coating apparatus according to claim 1, wherein the exposure lamp is connected to an upper portion of the lamp housing. 9.The coating apparatus according to claim 1, wherein the nozzle module is capable of moving in a first direction, and the lamp housing is connected to a rear surface of the nozzle gantry facing in a direction opposite to the first direction. 10.The coating apparatus according to claim 9, wherein the light shield is provided in plural, and the light shields are disposed adjacent to each other in a second direction crossing the first direction. 11.The coating apparatus according to claim 9, wherein a moving speed of the nozzle module is inversely proportional to a time during which the coating liquid coated on the mother substrate is exposed to the light. 12.The coating apparatus according to claim 1, wherein the exposure lamp includes a UV lamp that irradiates ultraviolet rays. 13.The coating apparatus according to claim 1, wherein the lamp housing is formed of a light blocking substance. 14.The coating apparatus according to claim 1, wherein the nozzle module further comprises: a light blocking film disposed between the nozzle gantry and the lamp housing. 15.The coating apparatus according to claim 1, wherein ​ The nozzle front edge has a trapezoidal shape in cross section.

16. The coating apparatus according to claim 1, wherein The nozzle front edge has a slit shape.

17. A coating apparatus comprising: a stage on which a mother substrate is placed; a nozzle module disposed on the stage; and a supply portion connected to the nozzle module through a supply pipe. The nozzle module includes: a nozzle gantry including a nozzle front edge that ejects a coating liquid toward the mother substrate; a lamp housing connected to the nozzle gantry; an exposure lamp disposed inside the lamp housing and irradiating light toward the mother substrate; and a light blocking film disposed inside the lamp housing and selectively blocking the light irradiated from the exposure lamp.

18. The coating apparatus according to claim 17, wherein an opening portion overlapping the exposure lamp is defined in a lower portion of the lamp housing.

19. The coating apparatus according to claim 18, wherein the light blocking film is disposed in the lower portion of the lamp housing adjacent to the opening portion.

20. The coating apparatus according to claim 17, wherein the nozzle module is movable in a first direction, and the lamp housing is connected to a rear surface of the nozzle gantry facing in a direction opposite to the first direction. ​

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