PECVD (plasma enhanced chemical vapor deposition) gas-liquid separator

Abstract

The utility model relates to the technical field of PECVD (Plasma Enhanced Chemical Vapor Deposition), in particular to a PECVD gas-liquid separator which comprises a barrel body, a gas inlet pipe is inserted on the outer wall of the barrel body, an upper cover is arranged on the top end wall of the barrel body, an exhaust pipe is arranged on the top end wall of the upper cover, a bottom plate is arranged on the bottom end wall of the barrel body, a plurality of liquid discharge holes are formed in the outer wall of the bottom plate in a penetrating manner, and a plurality of liquid discharge holes are formed in the bottom plate. A top seat is arranged in the middle of the top end wall of the bottom plate, a motor is arranged in the middle of the bottom end wall of the bottom plate, a rotating rod is rotationally connected to the outer wall of the top seat through a bearing, the bottom end of the rotating rod is fixedly connected with the output end of the motor through a coupler, and a circular plate is arranged on the top end wall of the rotating rod. According to the PECVD gas-liquid separator disclosed by the utility model, the unique working principle of synergistic effect of centrifugal force and friction of the filter cartridge is adopted, efficient separation of a gas-liquid mixture is realized, and the purity of gas entering a vacuum pump and a reaction chamber is ensured, so that the uniformity and quality of film deposition are remarkably improved, defects and holes of a film are reduced, and the qualification rate of products is improved.

Description

Technical Field

[0001] This utility model relates to the field of PECVD technology, specifically to a PECVD gas-liquid separator. Background Technology

[0002] PECVD, as an important thin film deposition technology, has wide applications in many fields such as semiconductor manufacturing, optical coating, and material surface modification. The PECVD process involves complex steps such as precursor vaporization, chemical reactions, and product deposition. However, due to various factors, a gas-liquid mixed phase often occurs.

[0003] On the one hand, precursors may not completely vaporize during the vaporization process. For example, some organometallic precursors have high boiling points or complex molecular structures, making it difficult to completely convert them into the gas phase under given process conditions. This results in some liquid precursors being trapped in the gas phase and entering subsequent reaction processes. On the other hand, reaction products may condense under specific temperature and pressure conditions, forming liquid particles or droplets that mix with the gas phase substances.

[0004] If this gas-liquid mixture directly enters downstream equipment of the PECVD system, such as vacuum pumps and reaction chambers, it will cause a series of serious problems. For vacuum pumps, the entry of liquid will damage their internal sealing structure, corrode pump components, and reduce the pumping efficiency and service life. In the reaction chamber, the presence of the gas-liquid mixture will interfere with the uniformity and stability of the reaction. The liquid may be unevenly distributed within the chamber, leading to inconsistent film deposition thickness, defects, voids, and other quality problems, severely affecting the performance and quality of the prepared film and reducing the product yield.

[0005] Currently, existing gas-liquid separation technologies have many shortcomings when applied to PECVD systems. Traditional gravity settling gas-liquid separators, while simple in structure, have low separation efficiency, are ineffective at separating tiny droplets, and often require large equipment volume and long residence times when processing large flow rates of gas-liquid mixtures, making it difficult to meet the high-efficiency and rapid production requirements of PECVD systems. Furthermore, some gas-liquid separators based on the inertial collision principle are easily affected by fluctuations in the flow rate and velocity of the gas-liquid mixture, exhibiting poor adaptability. When the process parameters of the PECVD system change, it is difficult to guarantee stable separation performance. Utility Model Content

[0006] To address the aforementioned problems, this invention presents a PECVD gas-liquid separator.

[0007] To achieve the above-mentioned technical objectives and effects, this utility model is implemented through the following technical solution:

[0008] A PECVD gas-liquid separator includes a cylindrical body with an inlet pipe inserted into its outer wall. A top cover is provided on the top wall of the cylindrical body, and an exhaust pipe is provided on the top wall of the top cover. A bottom plate is provided on the bottom wall of the cylindrical body, and multiple drain holes are formed through the outer wall of the bottom plate. A top seat is provided in the middle of the top wall of the bottom plate, and a motor is provided in the middle of the bottom wall of the bottom plate. A rotating rod is rotatably connected to the outer wall of the top seat via a bearing, and the bottom end of the rotating rod is fixedly connected to the output end of the motor via a coupling. A circular plate is provided on the top wall of the rotating rod, and a circular rod is provided in the middle of the top wall of the circular plate. Multiple blades are provided between the outer walls of the circular plate and the circular rod. A cylinder is provided on the top wall of the bottom plate, and a filter cartridge is provided on the top wall of the bottom plate. The filter cartridge is placed inside the cylinder, and the circular plate is placed inside the filter cartridge. A liquid collection device is provided on the bottom wall of the bottom plate.

[0009] Furthermore, the liquid collection device includes a lower cover, the outer wall of which has multiple through holes, a base in the middle of the bottom wall of the lower cover, a water tank on the bottom wall of the lower cover, and a drain pipe on the bottom wall of the water tank.

[0010] Furthermore, the number of through holes and drainage holes are equal, and their positions are arranged vertically opposite each other.

[0011] Furthermore, multiple blades are arranged in a circumferentially spaced manner on the top wall of the circular plate.

[0012] Furthermore, the left end of the air intake pipe extends into the filter cartridge.

[0013] The beneficial effects of this utility model are:

[0014] This utility model's PECVD gas-liquid separator employs a unique working principle of synergistic action between centrifugal force and filter cartridge friction to achieve efficient separation of gas-liquid mixtures. Driven by a motor, the rotating rod, circular plate, circular rod, and blades rotate at high speed, generating a powerful centrifugal force on the gas-liquid mixture. It possesses excellent separation capabilities even for minute droplets. When processing liquid impurities resulting from the incomplete vaporization of organometallic precursors or droplets formed by the condensation of reaction products, it can precisely separate the liquid from the gas phase, ensuring the purity of the gas entering the vacuum pump and reaction chamber. This significantly improves the uniformity and quality of thin film deposition, reduces the occurrence of film defects and pores, and increases the product yield. Attached Figure Description

[0015] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of the structure of this utility model;

[0017] Figure 2 This is a schematic diagram of the internal structure of the cylinder of this utility model;

[0018] Figure 3 This is a schematic diagram of the liquid collection device of this utility model.

[0019] The attached diagram lists the components represented by each number as follows:

[0020] 1. Cylinder body, 2. Air inlet pipe, 3. Top cover, 4. Exhaust pipe, 5. Bottom plate, 6. Drain hole, 7. Top seat, 8. Motor, 9. Rotating rod, 10. Circular plate, 11. Circular rod, 12. Blade, 13. Cylinder, 14. Filter cartridge, 15. Bottom cover, 16. Through hole, 17. Base, 18. Water tank, 19. Drain pipe. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0022] See Figure 1-3 As shown, a PECVD gas-liquid separator includes a cylindrical body 1, an inlet pipe 2 inserted into the outer wall of the cylindrical body 1, a top cover 3 on the top wall of the cylindrical body 1, an exhaust pipe 4 on the top wall of the top cover 3, a bottom plate 5 on the bottom wall of the cylindrical body 1, multiple drain holes 6 extending through the outer wall of the bottom plate 5, a top seat 7 in the middle of the top wall of the bottom plate 5, a motor 8 in the middle of the bottom wall of the bottom plate 5, and a rotating rod 9 rotatably connected to the outer wall of the top seat 7 via bearings. The bottom end of the rotating rod 9 is fixedly connected to the output end of the motor 8 via a coupling. A circular plate 10 is provided on the top wall of the rotating rod 9. A circular rod 11 is provided in the middle of the top wall of the circular plate 10. Multiple blades 12 are provided between the outer walls of the circular plate 10 and the circular rod 11. A cylinder 13 is provided on the top wall of the bottom plate 5. A filter cylinder 14 is provided on the top wall of the bottom plate 5. The filter cylinder 14 is placed inside the cylinder 13. The circular plate 10 is placed inside the filter cylinder 14. A liquid collection device is provided on the bottom wall of the bottom plate 5.

[0023] Furthermore, the liquid collection device includes a lower cover 15, with multiple through holes 16 extending through the outer wall of the lower cover 15. A base 17 is provided in the middle of the bottom wall of the lower cover 15, and a water tank 18 is provided on the bottom wall of the lower cover 15. A drain pipe 19 is provided on the bottom wall of the water tank 18. When the film layer on the surface of the filter cartridge 14 reaches a certain area and thickness, it flows downward along the surface of the cylinder 13 and the filter cartridge 14, and is discharged into the water tank 18 for collection through the drain hole 6 and the through holes 16.

[0024] Furthermore, the number of through holes 16 and the number of drain holes 6 are equal, and their positions are arranged vertically opposite each other. When the film layer on the surface of the filter cartridge 14 reaches a certain area and thickness, it flows downward along the surface of the cylinder 13 and the filter cartridge 14, making it convenient to be discharged into the water inlet tank 18 for collection through the drain holes 6 and the through holes 16.

[0025] Furthermore, multiple blades 12 are arranged in a circumferential gap on the top wall of the circular plate 10. The motor 8 causes the rotating rod 9 to drive the circular plate 10, the circular rod 11 and the blades 12 to rotate at high speed. While the blades 12 are rotating at high speed, they also drive the gas-liquid mixture to rotate at high speed. Under the action of centrifugal force, the gas will throw the liquid out.

[0026] Furthermore, the left end of the air inlet pipe 2 extends into the filter cartridge 14, and the gas-liquid mixture enters the inner cavity of the filter cartridge 14 through the air inlet pipe 2 for gas-liquid separation.

[0027] For those skilled in the art, all electrical components and parts in this case are general standard parts or parts known to those skilled in the art. Their structures and principles can be known to those skilled in the art through technical manuals or conventional experimental methods. All models are compatible with this solution and can operate normally. All electrical components in this case are connected to their compatible power supplies through wires. According to the actual situation, a suitable controller is selected to meet the control requirements. The specific connection and control sequence should refer to the working principle below, and the electrical connection is completed by the sequential operation of each electrical component. The detailed connection method is a well-known technology in the art, and the electrical control will not be described further.

[0028] One specific application of this embodiment is:

[0029] In use, the gas-liquid mixture enters the inner cavity of the filter cartridge 14 through the air inlet pipe 2. The motor 8 drives the rotating rod 9 to drive the circular plate 10, the circular rod 11, and the blades 12 to rotate at high speed. The high-speed rotation of the blades 12 also drives the gas-liquid mixture to rotate at high speed. The high-speed rotation of the gas-liquid mixture generates a huge centrifugal force, causing the gas-liquid mixture to rub against the filter cartridge 14. Due to the affinity of liquid, when the gas containing liquid rubs against the filter cartridge 14, a film layer containing liquid of a certain area will be formed on the surface of the filter cartridge 14. Under the action of centrifugal force, the gas will throw the liquid out. The continuously thrown liquid is absorbed and dissolved on the surface of the filter cartridge 14 by the affinity of the film layer. When the film layer on the surface of the filter cartridge 14 reaches a certain area and thickness, it flows downward along the surface of the cylinder 13 and the filter cartridge 14, and is discharged into the water inlet tank 18 for collection through the drain hole 6 and the through hole 16. The separated gas is discharged and collected through the exhaust pipe 4, completing the separation operation of the gas-liquid mixture.

[0030] Of course, the above description is not intended to limit the present utility model, nor is the present utility model limited to the examples given above. Any changes, alterations, additions or substitutions made by those skilled in the art within the scope of the present utility model should be protected by the present utility model.

Claims

1. A PECVD gas-liquid separator, characterized in that: Includes the cylinder (1). An air inlet pipe (2) is inserted into the outer wall of the cylinder (1). A top cover (3) is provided on the top wall of the cylinder (1). An exhaust pipe (4) is provided on the top wall of the top cover (3). A bottom plate (5) is provided on the bottom wall of the cylinder (1). Multiple drainage holes (6) are provided through the outer wall of the bottom plate (5). A top seat (7) is provided in the middle of the top wall of the bottom plate (5). A motor (8) is provided in the middle of the bottom wall of the bottom plate (5). A rotating rod (9) is rotatably connected to the outer wall of the top seat (7) through a bearing. The bottom end of the rotating rod (9) is connected to the bottom of the rotating rod (9) through a coupling. The rotating rod (9) is fixedly connected to the output end of the motor (8). A circular plate (10) is provided on the top wall of the rotating rod (9). A circular rod (11) is provided in the middle of the top wall of the circular plate (10). Multiple blades (12) are provided between the outer walls of the circular plate (10) and the circular rod (11). A cylinder (13) is provided on the top wall of the bottom plate (5). A filter cylinder (14) is provided on the top wall of the bottom plate (5). The filter cylinder (14) is placed inside the cylinder (13). The circular plate (10) is placed inside the filter cylinder (14). A liquid collection device is provided on the bottom wall of the bottom plate (5).

2. The PECVD gas-liquid separator according to claim 1, characterized in that: The liquid collection device includes a lower cover (15), the outer wall of which is provided with multiple through holes (16), a base (17) is provided in the middle of the bottom wall of the lower cover (15), a water tank (18) is provided on the bottom wall of the lower cover (15), and a drain pipe (19) is provided on the bottom wall of the water tank (18).

3. A PECVD gas-liquid separator according to claim 2, characterized in that: The number of through holes (16) and drainage holes (6) are equal, and their positions are arranged vertically opposite each other.

4. A PECVD gas-liquid separator according to claim 1, characterized in that: Multiple blades (12) are arranged in a circumferentially spaced manner on the top wall of the circular plate (10).

5. A PECVD gas-liquid separator according to claim 1, characterized in that: The left end of the air intake pipe (2) extends into the filter cartridge (14).

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