Deviation correcting device and slicing machine
By introducing a correction device into the slicing machine and using a detector to correct the slant state of the diamond wire in real time, the problem of uneven diamond wire alignment was solved, cutting accuracy and production efficiency were improved, and the risk of wire breakage was avoided.
Patent Information
- Application Number
- CN202520300817.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-24
- Publication Date
- 2026-02-10
- Estimated Expiration
- 2035-02-24
AI Technical Summary
In existing technologies, the diamond wire has a problem of oblique pulling, which leads to a decrease in cutting accuracy and production efficiency, and even causes the risk of wire breakage.
A correction device is adopted, including a wire guide wheel, a winding roller, a first detector, and a second detector. The detector monitors the slant status of the diamond wire in real time, drives the wire guide wheel to move along the axial direction of the winding roller, corrects the slant, and ensures that the diamond wire is vertically laid.
It achieves automatic deviation correction of diamond wire, improves cutting accuracy and production efficiency, avoids the risk of wire breakage, and ensures stable wire winding and unwinding.
Smart Images
Figure CN223889704U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of cutting equipment technology, and in particular to a deviation correction device and a slicer. Background Technology
[0002] A slicing machine uses a continuously moving diamond wire to reciprocate and shape a workpiece. It is widely used because of its high cutting precision. To ensure stable operation of diamond wire cutting over a long period of time and to ensure smooth wire laying, the diamond wire segment between the take-up and feed rollers and the moving wire laying wheel needs to be kept as vertical as possible, and the wire should be kept as vertical as possible towards the output or return direction.
[0003] However, existing technologies for diamond wire routing suffer from the problem of slanted tension, making it difficult to achieve vertical routing. This results in frequent tension changes during the winding and unwinding of the diamond wire, which can affect the cutting accuracy and quality of silicon wafers, or even cause wire breakage, severely impacting production efficiency. Utility Model Content
[0004] The purpose of this application is to provide a correction device and a slicing machine to solve the technical problem of slanted pulling in the diamond wire cabling in the prior art.
[0005] In a first aspect, this application provides a correction device, which includes: a wire guide wheel, a winding roller, a first detector, and a second detector;
[0006] The wire guide wheel is located above the winding roller. The mounting axis of the wire guide wheel is perpendicular to the first reference plane, and the mounting axis of the winding roller is perpendicular to the second reference plane. The second reference plane is perpendicular to the first reference plane.
[0007] The winding roller is used to take in and unwind the diamond wire. The first end of the diamond wire is fixedly mounted on the winding roller. After the diamond wire is wound out of the winding roller, it passes through the wire guide wheel. The wire guide wheel can move parallel to the axis of the winding roller through the drive mechanism, thereby correcting the oblique tension of the diamond wire between the wire guide wheel and the winding roller.
[0008] The first detector is used to detect the position of the winding wheel; the second detector is used to sense whether the diamond wire between the winding wheel and the winding roller passes through the sensing area of the second detector.
[0009] When the diamond wire between the winding wheel and the winding roller sweeps perpendicularly across the sensing area of the second detector, the position of the winding wheel detected by the first detector is the calibrated position P1. During the operation of the winding wheel, whenever the diamond wire between the winding wheel and the winding roller sweeps across the second detector, the position of the winding wheel detected by the first detector is the real-time position P2. By comparing the positions of P2 and P1, the information on the diagonal pull, direction, and tilt of the diamond wire between the winding wheel and the winding roller can be obtained. This information is then used to control the drive mechanism to drive the winding wheel to move laterally in real time to eliminate the diagonal pull, thus achieving real-time automatic correction of the diamond wire between the winding wheel and the winding roller. Simultaneously, the diagonal pull is determined by the position of the winding wheel corresponding to a single second detector when the diamond wire between the winding wheel and the winding roller sweeps across it. Compared to determining the diagonal pull by the sweep time when the diamond wire between the winding wheel and the winding roller sweeps across a pair of detectors, this method avoids the problem of repeated detection fluctuations amplifying the detection fluctuations and also eliminates the influence of the winding wheel's running speed, thereby ensuring detection accuracy and ensuring vertical winding.
[0010] In an optional embodiment, the second detector is disposed on the outer periphery of the winding roller and is located between the wire guide wheel and the winding roller in the vertical direction.
[0011] To avoid interference between the second detector and the diamond wire between the wire guide wheel and the winding roller, and to ensure that the diamond wire between the wire guide wheel and the winding roller can pass through the sensing area of the second detector.
[0012] In an optional embodiment, the distance between the detection point of the second detector and the mounting centerline of the wire guide wheel in the vertical direction is L1, and the distance between the detection point of the second detector and the mounting centerline of the winding roller in the vertical direction is L2.
[0013] 0.1≤L1:L2≤10.
[0014] The detection point of the second detector can be located at the midpoint, above the midpoint, or below the midpoint of the installation centerline of the wire guide wheel and the installation centerline of the winding roller in the vertical direction, thereby ensuring that the diamond wire between the wire guide wheel and the winding roller can pass through the sensing area of the second detector.
[0015] In an optional implementation, 1 < L1: L2 ≤ 10.
[0016] The detection point of the second detector can be located at the midpoint or below the midpoint of the installation centerline of the wire guide wheel and the installation centerline of the winding roller in the vertical direction. Since the detection point of the second detector is closer to the winding roller in the vertical direction, the accuracy of detecting the diamond wire diagonal information, diagonal direction and diagonal tilt amount between the wire guide wheel and the winding roller is higher.
[0017] In an optional implementation, the first detector is an encoder, which is mounted on the mounting shaft of the cable reel and is communicatively connected to the controller.
[0018] The position of the cable reel is detected by an encoder, ensuring accuracy.
[0019] In an optional implementation, the first detector is a ranging sensor, which is positioned on the path of the reciprocating movement of the cable reel, with the detection end of the ranging sensor facing the cable reel, and the ranging sensor is communicatively connected to the controller.
[0020] The cable reel moves toward or away from the distance sensor. The distance sensor detects the change in the distance between itself and the cable reel to obtain the position of the cable reel, which is accurate.
[0021] In an optional implementation, the first detector includes an encoder and a ranging sensor;
[0022] The encoder is mounted on the mounting shaft of the cable reel;
[0023] The ranging sensor is positioned on the path of the reciprocating movement of the cable reel, with the detection end of the ranging sensor facing the cable reel;
[0024] Both the encoder and the ranging sensor are connected to the controller via communication.
[0025] Setting both the encoder and the distance sensor simultaneously not only achieves the same effect as setting only one of them, but also ensures that the position of the cable reel is accurate only when the encoder and the distance sensor detect the same position. Conversely, if the encoder and the distance sensor detect different positions, it can be determined that at least one of the encoder and the distance sensor is faulty, thus further ensuring the accuracy of the cable reel position detection.
[0026] In an optional implementation, the second detector is a photoelectric sensor, a laser sensor, or an ultrasonic sensor.
[0027] Photoelectric sensors, laser sensors, and ultrasonic sensors all have the advantages of strong adaptability, non-contact detection, and accurate detection.
[0028] In an optional embodiment, at least two second detectors are provided along the axial direction of the winding roller.
[0029] During the winding and unwinding of the diamond wire, each second detector can make a diagonal pull judgment on the diamond wire between the wire guide wheel and the winding roller. Increasing the number of second detectors can increase the judgment cycle of the diamond wire between the wire guide wheel and the winding roller, and can adjust the diamond wire between the wire guide wheel and the winding roller more frequently.
[0030] In an optional implementation, the second detectors are spaced at equal intervals, and all the second detectors are equidistant from the winding roller.
[0031] This can reduce the detection error caused by uneven spacing of the second detector and unequal distance between it and the winding roller, thereby improving the overall detection accuracy.
[0032] Secondly, this utility model provides a slicing machine, including a wire saw device and a correction device of any one of the aforementioned embodiments;
[0033] The wire saw device includes at least two grooved rollers, which are spaced apart from each other and parallel to each other;
[0034] The groove of the grooved roller is used to wind diamond wire, and the first end of the diamond wire is fixed on the winding roller. After the diamond wire is wound out of the winding roller, it is wound around the wire guide wheel and then wound to the grooved roller. According to the detection of the first detector and the second detector, the correction device drives the wire guide wheel to move parallel to the axis of the winding roller to correct the oblique tension of the diamond wire between the wire guide wheel and the winding roller, so as to adjust the wire saw tension of the diamond wire on the grooved roller.
[0035] The slicer provided in this application includes the aforementioned correction device. Therefore, the technical advantages and effects achieved by the slicer include those achieved by the aforementioned correction device, which will not be elaborated here.
[0036] Other features and advantages of this application will be described in detail in the following detailed description section. Attached Figure Description
[0037] To more clearly illustrate the technical solutions in the specific embodiments of this application or the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.
[0038] Figure 1 This is a schematic diagram of the correction device structure provided in the embodiments of this application;
[0039] Figure 2 A schematic diagram of the correction device provided in this application embodiment when the diamond wire sweeps across the second detector vertically and obliquely;
[0040] Figure 3 This is a schematic diagram of the correction device provided in the embodiment of this application along the axial direction of the winding roller.
[0041] Icons: 1-Wire guide wheel; 2-Winding roller; 3-Diamond wire; 4-Second detector. Detailed Implementation
[0042] The technical solutions of this application will be clearly and completely described below with reference to the embodiments. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.
[0043] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.
[0044] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.
[0045] Furthermore, the technical solutions of the various embodiments can be combined with each other, but only if they are based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be considered that such combination of technical solutions does not exist and is not within the scope of protection claimed in this application.
[0046] The present application will now be described in further detail with reference to specific embodiments and accompanying drawings.
[0047] The specific structure is as follows: Figures 1 to 3 As shown.
[0048] This embodiment provides a correction device, which includes: a wire guide wheel 1, a winding roller 2, a first detector, and a second detector 4. The wire guide wheel 1 is located above the winding roller 2, and the mounting axis of the wire guide wheel 1 is perpendicular to the first reference plane. The mounting axis of the winding roller 2 is perpendicular to the second reference plane, and the second reference plane is perpendicular to the first reference plane. The winding roller 2 is used to wind and unwind diamond wire 3. The first end of the diamond wire 3 is fixedly mounted on the winding roller 2. After the diamond wire 3 is wound out of the winding roller 2, it passes through the wire guide wheel 1. The wire guide wheel 1 can move parallel to the axis of the winding roller 2 through the drive of the drive mechanism, thereby correcting the oblique tension of the diamond wire 3 between the wire guide wheel 1 and the winding roller 2. The first detector is used to detect the position of the wire guide wheel 1. The second detector 4 is used to sense whether the diamond wire 3 between the wire guide wheel 1 and the winding roller 2 passes through the sensing area of the second detector 4.
[0049] In this embodiment, when the diamond wire 3 between the winding wheel 1 and the winding roller 2 sweeps perpendicularly across the sensing area of the second detector 4, the position of the winding wheel 1 detected by the first detector is the calibrated position P1. During the operation of the winding wheel 1, whenever the diamond wire 3 between the winding wheel 1 and the winding roller 2 sweeps across the second detector 4, the position of the winding wheel 1 detected by the first detector is the real-time position P2. By comparing the positions of P2 and P1, the oblique pull information, oblique pull direction and oblique pull tilt of the diamond wire 3 between the winding wheel 1 and the winding roller 2 can be obtained, thereby controlling the drive mechanism to drive the winding wheel 1 to move laterally in real time to eliminate oblique pull, and realizing real-time automatic correction of the diamond wire 3 between the winding wheel 1 and the winding roller 2. Simultaneously, the oblique pull determination is made by scanning the diamond wire 3 between the winding wheel 1 and the winding roller 2 across the position of the winding wheel 1 corresponding to a single second detector 4. Compared with the oblique pull determination by scanning the diamond wire 3 between the winding wheel 1 and the winding roller 2 across the upper and lower pairs of detectors, there is no problem of repeated detection fluctuations causing amplification of detection fluctuations. It can also eliminate the influence of the running speed of the winding wheel 1, thereby ensuring detection accuracy and ensuring vertical winding.
[0050] In the optional technical solutions of this embodiment, such as Figure 3 As shown, the second detector 4 is disposed on the outer periphery of the winding roller 2 and is located between the wire feeding wheel 1 and the winding roller 2 in the vertical direction.
[0051] In this embodiment, the second detector 4 is disposed on the outer periphery of the winding roller 2, that is, along the axial direction of the winding roller 2. The second detector 4 is disposed on the left or right side of the winding roller 2. At the same time, along the vertical direction, the second detector 4 is located between the wire guide wheel 1 and the winding roller 2 to avoid mutual interference between the second detector 4 and the diamond wire 3 between the wire guide wheel 1 and the winding roller 2, and to ensure that the diamond wire 3 between the wire guide wheel 1 and the winding roller 2 can pass through the sensing area of the second detector 4.
[0052] In the optional technical solutions of this embodiment, such as Figure 2As shown, the vertical distance between the detection point of the second detector 4 and the mounting axis of the wire guide wheel 1 is L1, and the vertical distance between the detection point of the second detector 4 and the mounting axis of the winding roller 2 is L2. The detection point is a point within the sensing area of the second detector 4 that can be detected; preferably, the sensing area can be reduced to a single point. Simultaneously, the detection point of the second detector 4 satisfies 0.1≤L1:L2≤10, meaning the detection point of the second detector 4 can be located at the midpoint, above, or below the midpoint of the mounting axis of the wire guide wheel 1 and the mounting axis of the winding roller 2 in the vertical direction, thereby ensuring that the diamond wire 3 between the wire guide wheel 1 and the winding roller 2 can pass through the sensing area of the second detector 4.
[0053] In the optional technical solutions of this embodiment, 1 < L1: L2 ≤ 10. That is, the detection point of the second detector 4 can be located at the middle position or below the middle position of the installation center axis of the wire guide wheel 1 and the installation center axis of the winding roller 2 in the vertical direction. Since the detection point of the second detector 4 is closer to the winding roller 2 in the vertical direction, the accuracy of detecting the diagonal information, diagonal direction and diagonal tilt of the diamond wire 3 between the wire guide wheel 1 and the winding roller 2 is higher.
[0054] In this embodiment, when the diamond wire 3 between the wire guide wheel 1 and the winding roller 2 is pulled at an angle, that is, when there is a positional difference between P2 and P1, and the positional difference is La, the distance of the pull is L, and L = (L1 + L2) * La / L1. The drive mechanism drives the wire guide wheel 1 to move laterally L in the opposite direction of the pull to eliminate the pull.
[0055] In the optional technical solution of this embodiment, the first detector is an encoder, which is mounted on the mounting shaft of the cable reel 1 and is communicatively connected to the controller.
[0056] In this embodiment, when the second detector 4 senses the diamond wire 3 during automatic operation, it records the position of the winding wheel 1. Specifically, an encoder is connected to the mounting shaft of the winding wheel 1. The encoder is communicatively connected to the servo driver, and the controller is communicatively connected to the servo driver to obtain the position of the winding wheel 1. When oblique pull occurs, the controller compares the positions of P2 and P1, calculates and judges the oblique pull information, oblique pull direction, and oblique pull tilt amount of the diamond wire 3, and controls the drive mechanism to drive the winding wheel 1 to move laterally in real time to eliminate the oblique pull, thereby realizing real-time automatic correction of the diamond wire 3 between the winding wheel 1 and the winding roller 2. The position of the winding wheel 1 is detected by the encoder, which is accurate.
[0057] In the optional technical solution of this embodiment, the first detector is a distance sensor. The distance sensor is set on the path of the reciprocating movement of the cable reel 1, and the detection end of the distance sensor faces the cable reel 1. The distance sensor is communicatively connected to the controller. The cable reel 1 moves toward or away from the distance sensor, and the position of the cable reel 1 is obtained by detecting the change in the distance between the cable reel 1 and the distance sensor, which is accurate.
[0058] In the optional technical solution of this embodiment, the first detector includes an encoder and a distance sensor; the encoder is mounted on the mounting shaft of the cable reel 1; the distance sensor is mounted on the path of the reciprocating movement of the cable reel 1, and the detection end of the distance sensor faces the cable reel 1; both the encoder and the distance sensor are communicatively connected to the controller.
[0059] In this embodiment, the encoder and the distance sensor are set simultaneously, which not only has the effect of setting one of them alone, but also ensures that the position of the cable wheel 1 is accurate when the encoder and the distance sensor detect the same position. Conversely, if the encoder and the distance sensor detect different positions of the cable wheel 1, it can be determined that at least one of the encoder and the distance sensor is faulty, thus further ensuring the accuracy of the position detection of the cable wheel 1.
[0060] In the optional technical solutions of this embodiment, the second detector 4 is a photoelectric sensor, a laser sensor, or an ultrasonic sensor. Photoelectric sensors, laser sensors, and ultrasonic sensors all have the advantages of strong adaptability, non-contact detection, and accurate detection.
[0061] In the optional technical solution of this embodiment, at least two second detectors 4 are provided along the axial direction of the winding roller 2. During the winding of the diamond wire 3 by the winding roller 2, each second detector 4 can make a diagonal pull judgment on the diamond wire 3 between the wire guide wheel 1 and the winding roller 2. Increasing the number of second detectors 4 can increase the judgment cycle of the diamond wire 3 between the wire guide wheel 1 and the winding roller 2, and can adjust the diamond wire 3 between the wire guide wheel 1 and the winding roller 2 more frequently.
[0062] In the optional technical solution of this embodiment, the second detectors 4 are arranged at equal intervals, and the distance between all the second detectors 4 and the winding roller 2 is equal. This can reduce the detection error caused by uneven spacing of the second detectors 4 and unequal distance between them and the winding roller 2, thereby improving the overall detection accuracy.
[0063] This embodiment provides a slicing machine, including a wire saw device and the aforementioned correction device. The wire saw device includes at least two grooved rollers, which are spaced apart from each other and parallel to each other. The grooves of the grooved rollers are used to wind diamond wire 3, and the first end of the diamond wire 3 is fixedly mounted on the winding roller 2. After the diamond wire 3 is wound out from the winding roller 2, it is wound around the guide wheel 1 and then wound to the grooved roller. The correction device drives the guide wheel 1 to move parallel to the axial direction of the winding roller 2 according to the detection of the first detector and the second detector 4, so as to correct the oblique tension of the diamond wire 3 between the guide wheel 1 and the winding roller 2 and adjust the wire saw tension of the diamond wire 3 on the grooved roller.
[0064] Therefore, the technical advantages and effects achieved by the slicer include those achieved by the aforementioned correction device, which will not be elaborated here.
[0065] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.
Claims
1. A correction device, characterized in that, The correction device includes: a wire guide wheel, a winding roller, a first detector, and a second detector; The wire guide wheel is located above the winding roller, the mounting axis of the wire guide wheel is perpendicular to the first reference plane, the mounting axis of the winding roller is perpendicular to the second reference plane, and the second reference plane is perpendicular to the first reference plane. The winding roller is used to wind and unwind diamond wire. The first end of the diamond wire is fixedly mounted on the winding roller. After the diamond wire is wound out of the winding roller, it passes through the wire guide wheel. The wire guide wheel can move parallel to the axis of the winding roller through the drive mechanism, thereby correcting the oblique tension of the diamond wire between the wire guide wheel and the winding roller. The first detector is used to detect the position of the wire guide wheel; the second detector is used to sense whether the diamond wire between the wire guide wheel and the winding roller passes through the sensing area of the second detector.
2. The correction device according to claim 1, characterized in that, The second detector is disposed on the outer periphery of the winding roller and in the vertical direction, and is located between the wire guide wheel and the winding roller.
3. The correction device according to claim 1, characterized in that, The distance between the detection point of the second detector and the installation center axis of the wire guide wheel in the vertical direction is L1, and the distance between the detection point of the second detector and the installation center axis of the winding roller in the vertical direction is L2. 0.1≤L1:L2≤10.
4. The correction device according to claim 3, characterized in that, 1 < L1: L2 ≤ 10.
5. The correction device according to claim 1, characterized in that, The first detector is an encoder, which is mounted on the mounting shaft of the cable reel and is communicatively connected to the controller.
6. The correction device according to claim 1, characterized in that, The first detector is a ranging sensor, which is positioned on the path of the reciprocating movement of the cable reel, with the detection end of the ranging sensor facing the cable reel, and the ranging sensor is communicatively connected to the controller.
7. The correction device according to claim 1, characterized in that, The first detector includes an encoder and a ranging sensor; The encoder is mounted on the mounting shaft of the cable tray; The ranging sensor is positioned on the path of the reciprocating movement of the cable reel, and the detection end of the ranging sensor faces the cable reel. Both the encoder and the ranging sensor are communicatively connected to the controller.
8. The correction device according to claim 1, characterized in that, The second detector is a photoelectric sensor, a laser sensor, or an ultrasonic sensor.
9. The correction device according to claim 1, characterized in that, At least two second detectors are provided along the axial direction of the winding roller.
10. The correction device according to claim 9, characterized in that, Each of the second detectors is spaced at equal intervals, and the distance between all the second detectors and the winding roller is equal.
11. A slicer, characterized in that, Includes a wire saw device and a correction device as described in any one of claims 1-9; The wire saw device includes at least two grooved rollers, and the grooved rollers are spaced apart from each other and parallel to each other; The groove of the grooved roller is used to wind diamond wire, and the first end of the diamond wire is fixedly disposed on the winding roller. After the diamond wire is wound out from the winding roller, it is wound around the wire guide wheel and then wound to the grooved roller. The correction device drives the wire guide wheel to move parallel to the axis of the winding roller in reciprocating motion according to the detection of the first detector and the second detector, so as to correct the oblique tension of the diamond wire between the wire guide wheel and the winding roller and adjust the wire saw tension of the diamond wire on the grooved roller.