Ultra-pure water storage equipment convenient to clean

Abstract

The utility model relates to ultrapure water storage equipment convenient to clean. According to the technical scheme, a spiral storage assembly is fixedly installed on the upper portion of a base and comprises a spiral inner pipe, the spiral inner pipe is fixedly sleeved with a spiral outer pipe in a sealed mode, the upper end and the lower end of the spiral inner pipe respectively extend forwards to form two parallel extending pipes, and a pipe opening in the front end of the extending pipe on the upper side is connected with the upper end of an L-shaped circulating pipe in a sealed mode; the lower end of the L-shaped circulating pipe is in sealed connection with a water drainage pipe opening of the circulating pump, a water suction pipe opening in the lower end of the circulating pump is in sealed connection with a pipe opening in the front end of the lower side extending pipe, and an air injection pipe and a water injection pipe controlled by a valve are fixedly arranged on the front side and the rear side, connected with the extending pipe, of an upper end pipe opening of the spiral inner pipe correspondingly. A control drainage pipe with a valve is arranged on the lower portion of the front end of an extension pipe at the lower end of the spiral inner pipe, and a nitrogen adjusting pipe with a valve control function is arranged at the left end of a middle-layer pipe of the spiral outer pipe. The automatic circulating flushing device has the advantages that manual intervention is not needed, and automatic circulating flushing is achieved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of ultrapure water storage, and relates to an ultrapure water storage device convenient to clean. BACKGROUND

[0002] When cleaning integrated circuit semiconductor raw materials and the used utensils, preparing photolithography masks, manufacturing solid-state electronic devices, thick film and thin film circuits, printed circuits, vacuum tubes and the like, ultrapure water needs to be used, and the ultrapure water needs to be treated in multiple steps before being obtained, and needs to be stored in a special environment. The existing ultrapure water storage device is mostly in the form of a static sealing tank body, and this form is prone to cause microbial membranes in the liquid static stagnation area, and manual or mechanical structures need to be used to clean the inner wall of the tank body regularly to ensure the storage quality of the ultrapure water. However, this cleaning method needs to be maintained during shutdown, and may introduce other pollution.

[0003] Therefore, the utility model provides an ultrapure water storage device convenient to clean, which solves the above problems. UTILITY MODEL CONTENTS

[0004] In view of the problems in the prior art, the utility model discloses an ultrapure water storage device convenient to clean, which adopts the technical scheme that a base is fixedly installed with a spiral storage assembly at the upper portion, the spiral storage assembly comprises a spiral inner tube, a spiral outer tube is fixedly sealed on the outer portion of the spiral inner tube, two parallel extension tubes are respectively extended forward from the upper end and the lower end of the spiral inner tube, the front end pipe opening of the extension tube on the upper side is sealingly connected with the upper end of an L-shaped circulating pipe, the lower end of the L-shaped circulating pipe is sealingly connected with the drain pipe opening of a circulating pump, the water suction pipe opening at the lower end of the circulating pump is sealingly connected with the front end pipe opening of the extension tube on the lower side, the front and rear sides of the upper end pipe opening of the spiral inner tube connected with the extension tubes are respectively fixedly provided with a gas injection pipe and a water injection pipe with valve control, the front end lower portion of the extension tube at the lower end of the spiral inner tube is provided with a control drain pipe with a valve, the left end of the intermediate layer pipe of the spiral outer tube is provided with a nitrogen gas adjusting pipe with valve control, and a mass flow meter is arranged on the pipe wall of the connecting end of the nitrogen gas adjusting pipe and the spiral outer tube.

[0005] As a preferred scheme of the utility model, the lower end pipe opening of the spiral outer tube and the first fixed lug fixedly connected with the base are fixedly sleeved together.

[0006] As a preferred scheme of the utility model, the rear side of the bottom layer pipe wall of the spiral outer tube and the second fixed lug fixedly connected with the base are fixedly sleeved together.

[0007] As a preferred scheme of the utility model, the front end of the extension pipe of the spiral inner pipe lower end is fixedly connected with the third fixed lug of the base.

[0008] As a preferred scheme of the utility model, the upper end pipe orifice of the spiral outer pipe is fixedly connected with the upper end of the L-shaped support, and the lower end of the L-shaped support is fixedly connected with the base.

[0009] As a preferred scheme of the utility model, the circulating pump adopts a full ceramic pump body; by adopting the full ceramic pump body, the energy consumption of long-time operation can be reduced, and the heat of mechanical operation is reduced, thereby preventing the temperature of the ultrapure water in the spiral inner pipe from rising in the circulating process.

[0010] The utility model has the advantages of:

[0011] I. By adopting the spiral pipeline, the water flow can be made to flow close to the pipe wall through centrifugal force, and the liquid static dead zone of the traditional storage tank can be reduced; in the ultrapure water continuous circulation process, the formation of microbial membranes can be inhibited in the dynamic flow state, and the biological pollution risk can be reduced compared with the static storage tank.

[0012] II. By driving the water flow to fall from the top spiral through the circulating pump, a continuous water film can be formed to flush the inner wall, online cleaning without manual intervention can be realized, and the shutdown maintenance frequency can be reduced. BRIEF DESCRIPTION OF DRAWINGS

[0013] Fig. 1 It is the whole structure schematic view of the utility model;

[0014] Fig. 2 It is the rear side schematic view of the base of the utility model;

[0015] Fig. 3 It is the spiral storage assembly schematic view of the utility model.

[0016] In the drawing: 1-base, 2-spiral storage assembly, 3-circulating pump, 4-gas injection pipe, 5-water injection pipe, 6-drain pipe, 7-nitrogen adjusting pipe, 8-mass flow meter, 11-first fixed lug, 12-second fixed lug, 13-third fixed lug, 14-L-shaped support, 21-spiral inner pipe, 22-spiral outer pipe, 23-L-shaped circulating pipe. DETAILED DESCRIPTION

[0017] Example 1

[0018] As Figs. 1 to 3The utility model discloses a kind of ultra-pure water storage equipment convenient to clean, the technical scheme adopted is, including base 1, the lower end pipe orifice of spiral outer tube 22 is fixedly connected with the first fixed lug 11 fixedly connected of base 1 Fixedly fitted together, the bottom layer pipe wall rear side of spiral outer tube 22 is fixedly connected with the second fixed lug 12 fixedly connected of base 1 Fixedly fitted together, the front end of the extension pipe of the lower end of spiral inner tube 21 is fixedly connected with the third fixed lug 13 fixedly connected of base 1 Fixedly fitted together, the upper end pipe orifice of spiral outer tube 22 is fixedly fitted with the upper end of L-shaped support 14, the lower end of L-shaped support 14 is fixedly connected with base 1, the upper portion of base 1 is fixedly installed spiral storage assembly 2, spiral storage assembly 2 includes spiral inner tube 21, the outside of spiral inner tube 21 is fixedly sealed with spiral outer tube 22, the upper end and the lower end of spiral inner tube 21 respectively extend two parallel extension pipes forward, the front end pipe orifice of the extension pipe on the upper side is sealedly connected with the upper end of L-shaped circulating pipe 23, the lower end of L-shaped circulating pipe 23 is sealedly connected with the drain pipe orifice of circulating pump 3, circulating pump 3 adopts full ceramic pump body, and adopts frequency conversion control mode, the water suction pipe orifice of the lower end of circulating pump 3 is sealedly connected with the front end pipe orifice of the extension pipe on the lower side, the upper end pipe orifice of spiral inner tube 21 is fixedly provided with gas injection pipe 4 and water injection pipe 5 with valve control respectively on the front and back sides of its extension pipe, the front end lower portion of the extension pipe of spiral inner tube 21 is provided with drain pipe 6 with valve control, the left end of the intermediate layer pipe of spiral outer tube 22 is provided with nitrogen adjusting pipe 7 with valve control, mass flow meter 8 is opened on the pipe wall of the connecting end of spiral outer tube 22 with nitrogen adjusting pipe 7, liquid nitrogen is injected into the gap between spiral outer tube 22 and spiral inner tube 21 by nitrogen adjusting pipe 7 through external liquid nitrogen equipment, nitrogen gas pressure in spiral outer tube 22 is adjusted in corresponding range by mass flow meter 8, so that high-purity nitrogen positive pressure barrier is formed, avoid that external contaminant penetrates into spiral inner tube 21.

[0019] The utility model discloses a working principle: in use, the outside nitrogen equipment is connected through pipeline with the injection pipe 4 sealedly, and the outside pure water pipeline is connected with the water injection pipe 5 sealedly, and the outside liquid nitrogen equipment is connected with the nitrogen gas regulating pipe 7 sealedly, passes through mass flowmeter 8, and the liquid nitrogen pressure in the spiral outer tube 22 is controlled to be maintained in a certain range, opens the control valve of injection pipe 4, and closes the control valve of water injection pipe 5 and the lower drain pipe 6 simultaneously, and closes circulating pump 3, and through injection pipe 4, the spiral inner tube 21 and L type circulation pipe 23 are evacuated, then, the outside high purity nitrogen is injected into the spiral inner tube 21 and L type circulation pipe 23 through injection pipe 4, and is replaced 3-4 times, and the control valve of injection pipe 4 is opened, and the control valve of lower drain pipe 6 is closed, and the outside ultrapure water is injected into the spiral inner tube 21, L type circulation pipe 23 and circulating pump 3, so that it is completely filled, and then all control valves are closed, and circulating pump 3 is opened, and ultrapure water flows in the spiral inner tube 21, L type circulation pipe 23 and circulating pump 3 to realize the dynamic flushing of the spiral inner tube 21, L type circulation pipe 23 and circulating pump 3, and does not need to stop and manual intervention, and when needing to drain, the control valve of injection pipe 4 can be opened, and high purity nitrogen is injected into the spiral inner tube 21, and the control valve of drain pipe 6 is opened, and the ultrapure water in the spiral inner tube 21 is extruded to go out.

[0020] The electrical connection mode or structure not described in detail in the present document is prior art.

[0021] Although the specific embodiments of the utility model have been described in detail above, the utility model is not limited to the above-mentioned embodiments, and various changes can be made within the knowledge range of the ordinary skill in the art without departing from the purpose of the utility model, and the modification or deformation without creative labor is still within the protection range of the utility model.

Claims

1. An easy-to-clean ultrapure water storage device, characterized in that: Includes a base (1), on the upper part of which a spiral storage assembly (2) is fixedly installed. The spiral storage assembly (2) includes a spiral inner tube (21), and a spiral outer tube (22) is fixedly and sealed around the spiral inner tube (21). Two parallel extension tubes extend forward from the upper and lower ends of the spiral inner tube (21), respectively. The front end of the upper extension tube is sealed to the upper end of an L-shaped circulation pipe (23), and the lower end of the L-shaped circulation pipe (23) is sealed to the drain port of a circulation pump (3). The lower end of the circulation pump (3) has a suction port. The water pipe opening is sealed to the front end of the extension pipe below. The upper end of the spiral inner pipe (21) is connected to the extension pipe, and the front and rear sides are respectively fixed with valve-controlled air injection pipe (4) and water injection pipe (5). The lower end of the extension pipe at the lower end of the spiral inner pipe (21) is provided with valve-controlled drain pipe (6). The left end of the middle layer of the spiral outer pipe (22) is provided with valve-controlled nitrogen regulating pipe (7). A mass flow meter (8) is provided on the pipe wall at the end of the nitrogen regulating pipe (7) connected to the spiral outer pipe (22).

2. The easy-to-clean ultrapure water storage device according to claim 1, characterized in that: The lower end of the spiral outer tube (22) is fixedly fitted together with the first fixing ear (11) that is fixedly connected to the base (1).

3. The easy-to-clean ultrapure water storage device according to claim 1, characterized in that: The second fixing ear (12) of the bottommost tube wall of the spiral outer tube (22) is fixedly fitted together with the base (1).

4. The easy-to-clean ultrapure water storage device according to claim 1, characterized in that: The front end of the extension tube at the lower end of the spiral inner tube (21) is fixedly fitted together with the third fixing ear (13) which is fixedly connected to the base (1).

5. The easy-to-clean ultrapure water storage device according to claim 1, characterized in that: The upper end of the spiral outer tube (22) is fixedly fitted to the upper end of the L-shaped bracket (14), and the lower end of the L-shaped bracket (14) is fixedly connected to the base (1).

6. The easy-to-clean ultrapure water storage device according to claim 1, characterized in that: The circulating pump (3) adopts an all-ceramic pump body.

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