Automatic positioning and jacking mechanism

Abstract

The utility model discloses an automatic positioning jacking mechanism which comprises a jacking assembly, a carrying table, a lifting driving assembly and a rotating assembly, an adsorption opening is formed in the carrying table, the lifting driving assembly can drive the jacking assembly to ascend and descend, and the rotating assembly can drive the carrying table to rotate. In the feeding process, the jacking assembly can be driven by the lifting driving assembly to ascend, the jacking assembly is used for bearing a product so that the product can be conveniently fed, then the product descends and falls on the carrying table, and the product is sucked through the adsorption opening; during positioning, the current placing angle of the product can be confirmed firstly, and then the carrying table is driven to rotate through the rotating assembly, so that the product is rotated to the required placing angle; and during discharging, the jacking assembly can be driven by the lifting driving assembly to ascend, so that the product is in a suspended state, and discharging of the product is facilitated. Therefore, the automatic positioning and jacking mechanism is high in practicability, high-precision positioning of the product position can be achieved, and automatic product taking and placing are facilitated.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing technology, and in particular to an automatic positioning and lifting mechanism. Background Technology

[0002] In the semiconductor ingot production process, when ingots are manually or mechanically loaded into the required position, the placement angles of different ingots vary, while a uniform angle is required during ingot processing. Therefore, positioning fixtures need to be designed at the loading position. Currently, positioning fixtures typically have contour grooves corresponding to the shape of the ingot to determine the ingot's placement angle through contour positioning. However, there is usually a gap between the contour groove and the ingot, which cannot completely guarantee the consistency of the ingot loading direction. Utility Model Content

[0003] In view of the shortcomings of the prior art, this application provides an automatic positioning and lifting mechanism that can position the product and ensure the consistency of the product feeding direction.

[0004] The following technical solution is adopted in this embodiment:

[0005] An automatic positioning and lifting mechanism includes:

[0006] Lifting components;

[0007] The platform is equipped with an adsorption port for holding and adsorbing products;

[0008] A lifting drive assembly for driving the lifting assembly to move up and down, so that the lifting assembly moves the product closer to / away from the surface of the platform; and

[0009] A rotating assembly, wherein the stage is disposed at the drive end of the rotating assembly.

[0010] Furthermore, in the automatic positioning and lifting mechanism, the rotating component includes a direct drive motor, and both the lifting drive component and the platform are located at the drive end of the direct drive motor.

[0011] Furthermore, the automatic positioning and lifting mechanism also includes a base plate, and the rotating assembly further includes a sensor and a sensing plate. The sensor and the rotating assembly are both disposed on the base plate, and the sensing plate is connected to the platform. The sensing plate can rotate with the platform to enter the sensing end of the sensor.

[0012] Furthermore, the automatic positioning and lifting mechanism also includes a base plate, and the rotating assembly further includes a rigid limiting member and a blocking member. The blocking member and the rotating assembly are both disposed on the base plate. The rigid limiting member is connected to the platform, and the rigid limiting member can rotate with the platform to abut against the blocking member.

[0013] Furthermore, the automatic positioning and lifting mechanism also includes a visual positioning component for visually positioning the product on the platform.

[0014] Furthermore, in the automatic positioning and lifting mechanism, the lifting component includes a mounting component and multiple lifting components. The mounting component is disposed at the drive end of the lifting drive component, and the multiple lifting components are disposed on the mounting component. The platform is provided with lifting openings, the number of lifting openings is the same as the number of lifting components, and each lifting component is disposed in the corresponding lifting opening.

[0015] Furthermore, in the automatic positioning and lifting mechanism, the lifting component includes a suction cup and a connecting column, the connecting column is disposed at the driving end of the lifting drive assembly, and the suction cup is disposed at the top of the connecting column.

[0016] Furthermore, in the automatic positioning and lifting mechanism, the platform is provided with a first adsorption area, a lifting area and a second adsorption area arranged sequentially around the same center. There are multiple adsorption ports, which are respectively located in the first adsorption area and the second adsorption area, and the lifting port is located in the lifting area.

[0017] Furthermore, in the automatic positioning and lifting mechanism, the platform includes a porous ceramic layer and a dense ceramic layer. The porous ceramic layer has a vacuum adsorption cavity inside, and the lifting port is opened in the dense ceramic layer.

[0018] Furthermore, in the automatic positioning and lifting mechanism, the platform includes a main body and a supporting part. The main body has an installation cavity, the lifting component is disposed in the installation cavity, and the supporting part covers the installation cavity.

[0019] Compared to existing technologies, the automatic positioning and lifting mechanism provided in this application allows for several advantages. During loading, a lifting drive assembly raises the lifting component to support the product, facilitating loading. The lifting component then lowers, allowing the product to rest on the platform and be held in place by the suction port. For positioning, the current product angle is first determined, and then a rotating component drives the platform to rotate, positioning the product at the desired angle. For unloading, the lifting drive assembly raises the lifting component, suspending the product for easy unloading. Therefore, this automatic positioning and lifting mechanism is highly practical, enabling high-precision product positioning and facilitating automated product handling. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the overall structure of a specific embodiment of the automatic positioning and lifting mechanism provided in this application.

[0021] Figure 2 for Figure 1 An exploded view of the platform in the automatic positioning and lifting mechanism shown.

[0022] Figure 3 for Figure 1 The top view of the automatic positioning and lifting mechanism after the support part has been removed from the platform.

[0023] Among them, 10, lifting assembly; 11, mounting component; 12, lifting element; 13, linear guide rail; 20, platform; 21, main body; 211, mounting cavity; 22, bearing part; 221, first adsorption area; 222, lifting area; 223, second adsorption area; 30, lifting drive assembly; 31, motor; 32, lead screw; 33, nut; 34, sensor; 35, limit sensor; 40, rotating assembly; 41, direct drive motor; 42, sensor; 43, sensor plate; 44, hard limit component; 45, blocking component; 50, base plate. Detailed Implementation

[0024] To make the objectives, technical solutions, and effects of this application clearer and more explicit, the following detailed description of this application is provided with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only for explaining this application and are not intended to limit this application. Unless further described, elements, structures, and features in one embodiment may be advantageously combined with other embodiments.

[0025] It should be noted that when a metastructure is referred to as "fixed to" or "set on" another metastructure, it can be directly on or indirectly on that other metastructure. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated.

[0026] The terms “length”, “width”, “upper”, “lower”, “front”, “back”, “left”, “right”, “vertical”, “horizontal”, “top”, “bottom”, “inner”, “outer”, etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation.

[0027] This application provides an automatic positioning and lifting mechanism, which can be used to carry and accurately position the loaded product, ensuring a consistent loading direction and improving subsequent processing efficiency. Furthermore, it facilitates product loading and unloading, aiding in the automated handling of crystal ingots.

[0028] Please see Figure 1 and Figure 2The automatic positioning and lifting mechanism includes a lifting component 10, a platform 20, a lifting drive component 30, and a rotating component 40. The platform 20 is provided with an adsorption port for carrying and adsorbing products. The lifting component 10 can also carry products and is located at the drive end of the lifting drive component 30, so that the lifting drive component 30 can drive the lifting component 10 to move up and down, thereby moving the products closer to / away from the surface of the platform 20. The platform 20 is located at the drive end of the rotating component 40, so that the rotating component 40 can drive the platform 20 to rotate.

[0029] Taking crystal ingots as an example, during feeding, the lifting drive component 30 first drives the lifting component 10 to rise, and the crystal ingot is placed on the lifting component 10 by manual or automatic feeding mechanism. Then, the lifting drive component 30 drives the lifting component 12 to fall down, so that the product falls on the platform 20 and is held by the suction port, keeping the relative position of the product and the platform 20 unchanged.

[0030] During positioning, the current placement angle of the product can be confirmed through manual judgment, sensor detection, or visual positioning. Then, the rotating component 40 drives the platform 20 to rotate, so that the product is rotated to the required placement angle, thereby completing the product positioning and ensuring the consistency of the product's working position during the processing.

[0031] During the unloading process, the adsorption port is first disconnected, and then the lifting drive component 30 drives the lifting component 12 to rise, so that the product is in a suspended state. Finally, the ingot is removed by manual or automatic unloading mechanism.

[0032] It is evident that the automatic positioning and lifting mechanism is highly practical. It can not only adjust the product placement angle by rotating the platform 20 to achieve high-precision positioning of the product, but also lift the product through the lifting component 30, which is beneficial not only for manual product handling but also for automated product handling.

[0033] In some embodiments, the automatic positioning and lifting mechanism further includes a visual positioning component, which is used to take pictures of the product placed on the platform 20, and after image judgment, to confirm the direction of the product and the angle at which the product needs to be adjusted.

[0034] The visual positioning component may include a CCD camera, a lens, etc. The lens may be set above the stage 20 and placed at a certain height so that the entire surface of the stage 20 falls within the shooting range of the lens.

[0035] In some embodiments, the rotating assembly 40 includes a direct drive motor 41, and the lifting drive assembly 30 and the platform 20 are all disposed at the drive end of the direct drive motor 41.

[0036] The direct drive motor 41, also known as a DD motor, direct drive motor or direct drive servo motor, does not require belts, gears, ball screws or other reduction devices. It directly transmits the motor torque to the load, thus featuring high efficiency, high precision and high response speed.

[0037] The automatic positioning and lifting mechanism may also include a base plate 50, and the rotating component 40 may also include a sensor 42 and a sensor plate 43. The sensor 42 and the rotating component 40 are both disposed on the base plate 50, and the sensor plate 43 is connected to the platform 20.

[0038] The base plate 50 serves to mount the rotating assembly 40 and the sensor 42. The sensor 42 and the sensing plate 43 determine the rotation limit position of the stage 20 by sensing through the sensor 34. When the rotating assembly 40 drives the stage 20 to rotate, the sensing plate 43 can rotate with the stage 20. When the sensing plate 43 rotates to the sensing end of the sensor 42, the rotating assembly 40 is stopped to ensure that the rotation angle of the stage 20 is within the set range, avoiding adverse effects caused by overtravel.

[0039] Furthermore, the rotating assembly 40 also includes a rigid limiting member 44 and a blocking member 45. Both the blocking member 45 and the rotating assembly 40 are disposed on the base plate 50. The rigid limiting member 44 is connected to the platform 20 and can rotate with the platform 20 to abut against the blocking member 45.

[0040] The function of the hard limiter 44 and the blocking member 45 is to further ensure that the stage 20 will not rotate beyond its travel range by means of hard limiting, based on the sensing limit. When the rotating assembly 40 drives the stage 20 to rotate, the hard limiter 44 can rotate with the stage 20; when the hard limiter 44 rotates and abuts against the blocking member 45, the blocking member 45 will prevent the hard limiter 44 from moving further, thereby ensuring that the stage 20 will not continue to rotate.

[0041] Please see Figure 2 and Figure 3 In some embodiments, the lifting assembly 10 includes a mounting member 11 and a lifting member 12. The mounting member 11 is disposed at the driving end of the lifting drive assembly 30, and the platform 20 is provided with a lifting opening. The lifting member 12 is disposed inside the lifting opening.

[0042] By housing the lifting component 12 within the lifting opening, space can be effectively utilized while ensuring the lifting effect. Furthermore, multiple lifting components 12 can be installed together on the mounting component 11 and arranged in a suitable manner. The mounting component 11 is then positioned at the drive end of the lifting drive assembly 30, and multiple lifting openings are provided at corresponding positions on the platform 20. This allows the lifting drive assembly 30 to drive multiple lifting components 12 together via the mounting component 11, lifting the product from multiple directions and improving stability during lifting.

[0043] In some embodiments, the platform 20 includes a main body 21 and a support part 22. The main body 21 has an installation cavity 211, the lifting assembly 10 is disposed in the installation cavity 211, and the support part 22 covers the installation cavity 211.

[0044] The support section 22 is used to support the crystal ingot and can be made entirely of ceramic material. The main body section 21 is used to install the support section 22 and to house the lifting assembly 10, making the overall structure of the platform 20 more compact.

[0045] The mounting cavity 211 is used to accommodate the lifting assembly 10. When the lifting member 12 is lowered, it is completely located within the mounting cavity 211. Several air pipe connectors can be provided on the main body 21, and air pipe connectors are also provided at the bottom of the lifting member 12. By providing connecting air passages, the corresponding air pipe connectors are connected to each other, and vacuum is conducted to the lifting member 12 to realize the adsorption function of the lifting member 12.

[0046] In some embodiments, the support portion 22 is provided with a first adsorption region 221, a lifting region 222 and a second adsorption region 223 arranged sequentially around the same center. There are multiple adsorption ports, which are respectively located in the first adsorption region 221 and the second adsorption region 223, and the lifting port is located in the lifting region 222.

[0047] The adsorption of products in the first adsorption zone 221 and the second adsorption zone 223 is independent of each other. When a small product is placed on the support part 22, the product is located in the first adsorption zone 221 and the lifting zone 222. At this time, the first adsorption zone 221 works while the second adsorption zone 223 does not work, so as to ensure the adsorption effect of the first adsorption zone 221.

[0048] When a large product is placed on the support section 22, the product is located in the first adsorption area 221, the lifting area 222, and the second adsorption area 223. At this time, both the first adsorption area 221 and the second adsorption area 223 work together to adsorb the product and ensure the adsorption effect.

[0049] Furthermore, a third adsorption zone, a fourth adsorption zone, etc., can be provided outside the second adsorption zone 223, and one or more lifting zones 222 can be provided between each adsorption zone, so that the supporting part 22 can support products of more sizes.

[0050] In some embodiments, the support portion 22 includes a porous ceramic layer and a dense ceramic layer, the porous ceramic layer having a vacuum adsorption chamber inside, and the lifting port being opened on the dense ceramic layer.

[0051] The porous ceramic layer is characterized by its loose and porous structure. When multiple pores of the porous ceramic layer are connected to the vacuum adsorption chamber, multiple adsorption ports are formed, which can adsorb products. The dense ceramic layer does not form pores and has higher strength, which is used to better support products.

[0052] The support unit 22 can adopt an independent ring of porous ceramic layer in the first adsorption zone 221, and a first vacuum adsorption chamber is set below the porous ceramic layer. The first vacuum adsorption chamber is connected to an external vacuum generating device through a gas pipe to realize the adsorption function of the first adsorption zone 221.

[0053] Meanwhile, the support unit 22 can also adopt an independent ring of porous ceramic layer in the second adsorption zone 223, and a second vacuum adsorption chamber is set below the porous ceramic layer. The second vacuum adsorption chamber is also connected to an external vacuum generating device through another gas pipe to realize the adsorption function of the second adsorption zone 223.

[0054] In some embodiments, the lifting member 12 includes a suction cup and a connecting post, the connecting post being disposed on the mounting member 11 and the suction cup being disposed at the top of the connecting post.

[0055] The suction cup is connected to an external vacuum device. When the lifting component 12 lifts the product, the suction cup can hold the product in place to prevent the product from shifting or falling off during the lifting process.

[0056] In some embodiments, the lifting assembly 10 further includes a linear guide rail 13, which is disposed on the platform 20, and the mounting member 11 is slidably disposed on the linear guide rail 13.

[0057] The linear guide rail 13 can limit and guide the sliding of the mounting part 11, improve the stability of the mounting part 11 when it is raised and lowered, prevent the mounting part 11 and the lifting part 12 on the mounting part 11 from shaking, and thus prevent the product from shaking.

[0058] Specifically, the number of linear guide rails 13 can be set to multiple and installed in the mounting cavity 211 in a reasonable arrangement. Then, the corresponding guide rail sliders are fixed on the mounting component 11 to slide and limit the different positions of the mounting component 11 together, so as to ensure the smooth and reliable lifting action.

[0059] Alternatively, the linear guide 13 can be replaced with a linear bearing, which includes a guide shaft and a bearing sleeve fitted onto the guide shaft. The guide shaft is connected to the platform 20, and the bearing sleeve is mounted on the mounting component 11.

[0060] Specifically, the number of linear bearings can be set to multiple, and the guide shafts of multiple linear bearings are arranged in a reasonable manner in the mounting cavity 211 to slide and limit different positions of the mounting component 11 together, so as to ensure the smooth and reliable lifting action.

[0061] Please refer to Figures 1 and 2. In some embodiments, the lifting drive assembly 30 may include a lifting drive motor 31, a lead screw 32, and a nut 33. The lead screw 32 is disposed at the drive end of the lifting drive motor 31, the nut 33 is sleeved on the lead screw 32, and the nut 33 is connected to the mounting member 11.

[0062] The lifting drive motor 31 can be a stepper lifting drive motor 31. By rotating the lifting drive motor 31 in both directions, and through the cooperation of the lead screw 32 and the nut 33, the nut 33 drives the mounting part 11 to rise and fall, thereby realizing the lifting and lowering of the lifting part 12.

[0063] Furthermore, a sensor 34 can be provided on the side of the mounting component 11, and a limit sensor 35 can be provided on the mounting component 11. The movement position of the mounting component 11 can be determined by the cooperation of the sensor 34 and the limit sensor 35.

[0064] Specifically, sensor 34 is divided into upper limit sensor and lower limit sensor, and is set on different sides of mounting component 11. At the same time, corresponding upper limit sensing plate and lower limit sensing plate are set on mounting component 11. Through the cooperation of the two sets of sensors and sensing plates, it is ensured that the upper and lower movement limits of mounting component 11 do not exceed the set position.

[0065] When the crystal ingot needs to be loaded, the stepper lifting drive motor 31 drives the lifting assembly 10 to rise through the lead screw 32, so that the upper limit sensor reaches the sensing position of the upper limit sensor. The suction cup at the end of the lifting component 12 exceeds the table surface of the platform 20. After the crystal ingot is placed on the suction cup at the end of the lifting component 12, the vacuum of the suction cup is turned on to adsorb the crystal ingot onto the suction cup. Then, the stepper lifting drive motor 31 drives the lifting assembly 10 to fall through the lead screw 32, so that the lower limit sensor reaches the sensing position of the lower limit sensor. At this time, the crystal ingot falls onto the table surface of the platform 20, and the platform 20 turns on the vacuum and adsorbs the crystal ingot.

[0066] Alternatively, the lifting drive assembly 30 may include a cylinder, with the piston rod of the cylinder connected to the mounting member 11. When the piston rod of the cylinder extends, it can push the lifting assembly 10 to the upper limit position, so that the suction cup at the end of the lifting member 12 exceeds the table surface of the platform 20. After the crystal ingot is placed on the suction cup at the end of the lifting member 12, the vacuum of the suction cup is turned on to adsorb the crystal ingot onto the suction cup. Then, when the piston rod of the cylinder retracts, it can drive the lifting assembly 10 to descend to the lower limit position. At this time, the crystal ingot falls onto the table surface of the platform 20, and the platform 20 turns on the vacuum and adsorbs the crystal ingot.

[0067] Furthermore, when the cylinder is used as the lifting power, it needs to be used in conjunction with a speed control valve or a proportional valve to prevent the compressed gas from being too fast or too violent, which could cause the ingot to fall during the lifting process. The piston rod of the cylinder can be directly connected to the lifting component 12 through a floating joint or a self-made floating head, or it can be converted into vertical lifting by setting a cam groove and a cam mechanism, so that the piston rod of the cylinder extends horizontally and then is converted into vertical lifting through the cam groove and the cam mechanism.

[0068] Of course, in other embodiments, other common linear drive structures can also be used to realize the lifting drive function of the lifting drive component 30 to the lifting component 10.

[0069] It is understood that those skilled in the art can make equivalent substitutions or changes based on the technical solution and concept of this application, and all such substitutions or changes should fall within the protection scope of the appended claims.

Claims

1. An automatic positioning and lifting mechanism, characterized in that, include: Lifting components; The platform is equipped with an adsorption port for holding and adsorbing products; A lifting drive assembly is used to drive the lifting assembly to move up and down, so that the lifting assembly moves the product closer to / away from the surface of the platform. as well as A rotating assembly, wherein the stage is disposed at the drive end of the rotating assembly.

2. The automatic positioning and lifting mechanism according to claim 1, characterized in that, The rotating component includes a direct drive motor, and the lifting drive component and the platform are both located at the drive end of the direct drive motor.

3. The automatic positioning and lifting mechanism according to claim 2, characterized in that, It also includes a base plate, and the rotating assembly further includes a sensor and a sensing plate. The sensor and the rotating assembly are both disposed on the base plate, and the sensing plate is connected to the platform. The sensing plate can rotate with the platform to enter the sensing end of the sensor.

4. The automatic positioning and lifting mechanism according to claim 2, characterized in that, It also includes a base plate, and the rotating assembly further includes a rigid limiting member and a blocking member. The blocking member and the rotating assembly are both disposed on the base plate. The rigid limiting member is connected to the platform, and the rigid limiting member can rotate with the platform to abut against the blocking member.

5. The automatic positioning and lifting mechanism according to claim 1, characterized in that, It also includes a visual positioning component for visually positioning the product on the platform.

6. The automatic positioning and lifting mechanism according to claim 1, characterized in that, The lifting assembly includes a mounting component and multiple lifting components. The mounting component is disposed at the drive end of the lifting drive assembly, and the multiple lifting components are disposed on the mounting component. The platform is provided with lifting openings, the number of which is the same as the number of lifting components, and each lifting component is disposed in a corresponding lifting opening.

7. The automatic positioning and lifting mechanism according to claim 6, characterized in that, The lifting component includes a suction cup and a connecting column. The connecting column is disposed at the driving end of the lifting drive assembly, and the suction cup is disposed at the top of the connecting column.

8. The automatic positioning and lifting mechanism according to claim 6, characterized in that, The platform is provided with a first adsorption zone, a lifting zone and a second adsorption zone arranged sequentially around the same center. There are multiple adsorption ports, which are respectively located in the first adsorption zone and the second adsorption zone. The lifting port is located in the lifting zone.

9. The automatic positioning and lifting mechanism according to claim 6, characterized in that, The stage includes a porous ceramic layer and a dense ceramic layer. The porous ceramic layer has a vacuum adsorption cavity inside, and the lifting port is opened in the dense ceramic layer.

10. The automatic positioning and lifting mechanism according to claim 6, characterized in that, The platform includes a main body and a support part. The main body has an installation cavity, the lifting assembly is disposed in the installation cavity, and the support part covers the installation cavity.

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