Vacuum reaction cavity and edge type coating equipment

Abstract

The utility model discloses a vacuum reaction chamber and edge type coating equipment, which comprises a chamber body with an opening, a control structure, a support base and a furnace door body, and the opening is provided with a first furnace door flange, and the control structure, the support base and the furnace door body form a furnace door mechanism; the output end of the control structure is connected with a supporting base, furnace door bearing plates are arranged on the two sides of the top of the supporting base and connected with a furnace door body, and the furnace door body can be matched and attached to the first furnace door flange through the control structure. And at least one horizontal adjusting device and at least one vertical adjusting device are horizontally arranged and vertically arranged at the positions, corresponding to the furnace door bearing plate, of the supporting base. The horizontal adjusting device and the vertical adjusting device are used for adjusting the position of the furnace door body relative to the first furnace door flange in the horizontal direction and the vertical direction, so that the parallelism of the furnace door body and the first furnace door flange is adjusted, the furnace door body can be tightly attached to the first furnace door flange, and the vacuum reaction cavity obtains the ideal vacuum degree; and the passivation coating treatment effect is improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor device technology, and in particular to a vacuum reaction chamber and edge coating equipment. Background Technology

[0002] With the continuous development of the photovoltaic industry and the increasing demand for production capacity, the half-wafer encapsulation of solar cells on the market can greatly increase production capacity. This requires passivation coating treatment on the cross-section of the slicing half-wafer. However, since the reaction chamber of the edge passivation equipment needs to achieve an ideal vacuum level during the process, the furnace door mechanism at the material inlet and outlet needs to have good sealing performance.

[0003] The existing reaction chamber has a furnace door flange at the furnace door opening. When the furnace door of the furnace door mechanism matches and closes with the furnace door opening, the furnace door will fit tightly with the furnace door flange to obtain the ideal vacuum degree. However, the furnace door and the furnace door flange often deviate, causing the furnace door to fail to fit tightly with the furnace door flange, resulting in the reaction chamber failing to obtain the ideal vacuum degree, which in turn affects the passivation coating treatment of the reaction chamber. Utility Model Content

[0004] In view of this, the present invention provides a vacuum reaction chamber and an edge-type coating device to solve the problem in the prior art where the furnace door and the furnace door flange of the reaction chamber often deviate, resulting in the furnace door not being able to fit tightly with the furnace door flange, the reaction chamber not being able to obtain the ideal vacuum degree, and thus affecting the passivation coating treatment of the reaction chamber.

[0005] The technical solution of this utility model is a vacuum reaction chamber, including a cavity with an opening, the opening having a first furnace door flange, and a furnace door mechanism, the furnace door mechanism including a control structure, a support base and a furnace door body;

[0006] The output end of the control structure is connected to a support base. The top of the support base is provided with furnace door bearing plates on both sides. The furnace door bearing plates are connected to the furnace door body. The furnace door body can be matched and fitted with the first furnace door flange through the control structure.

[0007] Each of the support bases is provided with at least one horizontal adjustment device at the position corresponding to the furnace door bearing plate. The horizontal adjustment device is used to adjust the horizontal position of the furnace door body.

[0008] Each of the support bases is vertically equipped with at least one vertical adjustment device corresponding to the position of the furnace door bearing plate. The vertical adjustment device is used to adjust the vertical position of the furnace door body.

[0009] Furthermore, the leveling device includes at least one first adjusting bolt and a first limiting seat;

[0010] The top of the support base is provided with an adjustment base, and the two sides of the adjustment base are respectively provided with first limiting seats. At least one of the first adjusting bolts passes through the first limiting seats and is horizontally connected to the bottom of the furnace door bearing plate.

[0011] Furthermore, the vertical adjustment device includes at least one second adjusting bolt and a second limiting seat;

[0012] The bottom of the adjusting base is provided with a second limiting seat corresponding to the bottom of the furnace door bearing plate, and at least one second adjusting bolt passes through the first limiting seat and is vertically connected to the bottom of the adjusting base.

[0013] Furthermore, each of the furnace door support plates is provided with multiple adjustment through holes, and each adjustment through hole is matched with a fastener, which can pass through the adjustment through hole and connect to the furnace door body.

[0014] Furthermore, the control structure includes a switch drive device, a switch guide rail, a mounting plate, a lifting drive device, and a lifting guide rail;

[0015] The mounting base is provided with a switch drive device and a switch rail. The switch rail is slidably connected to a mounting plate. The output end of the switch drive device is also connected to the mounting plate. The mounting plate is provided with a lifting drive device and a lifting rail. The lifting rail is slidably connected to a support base. The output end of the lifting drive device is also connected to the support base.

[0016] Furthermore, the furnace door mechanism is also provided with an observation window assembly, which includes a second furnace door flange, an observation window, a sealing ring, and an observation window cover;

[0017] The furnace door body is provided with a through hole, and a second furnace door flange is sealed and welded to the side of the through hole away from the cavity. An observation window is connected to the side of the second furnace door flange away from the through hole. The observation window is also matched and covered by an observation window cover. A sealing ring is provided around the edge of the observation window.

[0018] Furthermore, the second furnace door flange, the observation window, the observation window cover, and the sealing ring are all locked and sealed by clamps.

[0019] This utility model also proposes an edge coating equipment, which includes the vacuum reaction chamber described above.

[0020] Furthermore, the vacuum reaction chamber also includes a frame on which the reaction chamber is mounted. A mounting base is mounted on one side wall of the frame, and a control structure is mounted on the mounting base. The control mechanism can drive the furnace door body to match and fit with the first furnace door flange.

[0021] Furthermore, the length of the furnace door body along its horizontal direction is greater than the length of the furnace door body along its vertical direction.

[0022] Compared with the prior art, the present invention has at least the following beneficial effects:

[0023] This invention can adjust the position of the furnace door body relative to the first furnace door flange in multiple directions in the horizontal and vertical directions through the horizontal adjustment device and the vertical adjustment device, thereby adjusting the parallelism between the furnace door body and the first furnace door flange so that the furnace door body can fit tightly with the first furnace door flange, thereby enabling the vacuum reaction chamber to obtain an ideal vacuum degree, and thus improving the passivation coating treatment effect of the vacuum reaction chamber. Attached Figure Description

[0024] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains; the terminology used herein in the specification is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention; the terms "comprising" and "having," and any variations thereof, in the specification, claims, and accompanying drawings of this invention are intended to cover non-exclusive inclusion. The terms "first," "second," etc., in the specification, claims, or accompanying drawings of this invention are used to distinguish different objects and not to describe a particular order.

[0025] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0026] Figure 1 This is a partial structural schematic diagram of the edge-type coating equipment proposed in this utility model;

[0027] Figure 2 This is a partial front view of the furnace door structure proposed in this utility model;

[0028] Figure 3 for Figure 2 A cross-sectional view along the AA direction;

[0029] Figure 4 This is a schematic diagram of the furnace door structure proposed in this utility model.

[0030] Figure label:

[0031] 1. Cavity;

[0032] 21. Mounting base; 22. Control structure; 221. Switch drive device; 222. Switch guide rail; 223. Mounting plate; 224. Lifting drive device; 225. Lifting guide rail; 23. Support base; 24. Furnace door body; 241. Through hole; 25. Furnace door bearing plate; 251. Adjustment through hole; 26. Fastener; 27. Adjustment base; 28. Horizontal adjustment device; 281. First adjusting bolt; 282. First limit seat; 29. ​​Vertical adjustment device; 291. Second adjusting bolt; 292. Second limit seat; 30. Observation window assembly; 301. Second furnace door flange; 302. Observation window; 303. Sealing ring; 304. Observation window cover;

[0033] 3. Frame. Detailed Implementation

[0034] To make the technical problem to be solved, the technical solution, and the beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model. Therefore, a feature pointed out in this specification is used to describe one feature of one embodiment of the present utility model, and does not imply that every embodiment of the present utility model must have the described feature. Furthermore, it should be noted that this specification describes many features. Although certain features may be combined to illustrate possible system designs, these features may also be used in other combinations not explicitly stated. Therefore, unless otherwise stated, the described combinations are not intended to be limiting.

[0035] The principle and structure of this utility model will be described in detail below with reference to the accompanying drawings and embodiments.

[0036] The existing reaction chamber has a furnace door flange at the furnace door opening. When the furnace door of the furnace door mechanism matches and closes with the furnace door opening, the furnace door will fit tightly with the furnace door flange to obtain the ideal vacuum degree. However, the furnace door and the furnace door flange often deviate, causing the furnace door to fail to fit tightly with the furnace door flange, resulting in the reaction chamber failing to obtain the ideal vacuum degree, which in turn affects the passivation coating treatment of the reaction chamber.

[0037] Therefore, to solve the above problems, in one embodiment, reference is made to the appendix. Figure 1 and 4 This utility model proposes a vacuum reaction chamber, including a chamber body 1, the opening of which is provided with a first furnace door flange (not shown, the same throughout); it also includes a furnace door mechanism, the furnace door mechanism including a control structure 22, a support base 23 and a furnace door body 24;

[0038] The output end of the control structure 22 is connected to a support base 23. The support base 23 has furnace door bearing plates 25 on both sides of its top. The furnace door bearing plates 25 are connected to the furnace door body 24. The furnace door body 24 can be matched and fitted with the first furnace door flange through the control structure 22.

[0039] Each of the support bases 23 is horizontally provided with at least one horizontal adjustment device 28 corresponding to the position of the furnace door bearing plate 25. The horizontal adjustment device 28 is used to adjust the horizontal position of the furnace door body 24.

[0040] Each of the support bases 23 is provided with at least one vertical adjustment device 29 at the position corresponding to the furnace door bearing plate 25. The vertical adjustment device 29 is used to adjust the vertical position of the furnace door body 24.

[0041] Thus, when the furnace door body 24 needs to match and cover the furnace door opening of the cavity 1 (i.e., the furnace door body 24 matches and fits the first furnace door flange), the maintenance personnel need to first use the horizontal adjustment device 28 and the vertical adjustment device 29 to adjust the position of the furnace door body 24 relative to the first furnace door flange in multiple directions in the horizontal and vertical directions, thereby adjusting the parallelism between the furnace door body 24 and the first furnace door flange so that the furnace door body 24 can fit tightly with the first furnace door flange, thereby enabling the vacuum reaction chamber to obtain the ideal vacuum degree, and thus improving the passivation coating treatment effect of the vacuum reaction chamber.

[0042] It should be noted that improving the passivation coating effect of the vacuum reaction chamber includes at least one of the following:

[0043] 1. Improved coating quality: The uniformity and purity of the coating are significantly improved, reducing the phenomenon of local over-thickness or under-thinness.

[0044] 2. Improve reaction efficiency: The reaction rate is accelerated, energy consumption is reduced, and production efficiency is improved.

[0045] 3. Improved product yield: The smoother film surface reduces defects and flaws, thus improving product yield and consistency.

[0046] 4. Improved film adhesion: The adhesion between the film and the substrate is significantly enhanced, improving the durability and reliability of the film.

[0047] 5. Improved process stability: The stable vacuum level of the vacuum reaction chamber makes the entire passivation coating process more stable and controllable, reducing the impact of process fluctuations.

[0048] In this embodiment, the horizontal direction is the X-axis direction and the vertical direction is the Z-axis direction.

[0049] Specifically, for ease of understanding, this embodiment presents a structure for a horizontal adjustment device 28, as shown in the attached diagram. Figure 2 The horizontal adjustment device 28 includes at least one first adjusting bolt 281 and a first limiting seat 282;

[0050] The top of the support base 23 is provided with an adjustment base 27, and the two sides of the adjustment base 27 are respectively provided with first limiting seats 282. At least one first adjusting bolt 281 passes through the first limiting seat 282 and is horizontally connected to the bottom of the furnace door bearing plate 25.

[0051] It should be noted that a first limiting seat 282 is provided on each side of the adjusting base 27. Each first limiting seat 282 is penetrated by two first adjusting bolts 281 arranged horizontally along the Y-axis, and each first adjusting bolt 281 is horizontally connected to the bottom of the corresponding furnace door bearing plate 25.

[0052] Thus, when it is necessary to adjust the horizontal position of the furnace door body 24 relative to the first furnace door flange, a tool can be used to adjust the distance between the first adjusting bolt 281 and the corresponding first limiting seat 282. The first adjusting bolt 281 will drive the furnace door body 24 to move horizontally through the furnace door bearing plate 25, thereby adjusting the parallelism between the furnace door body 24 and the first furnace door flange.

[0053] Specifically, for ease of understanding, this embodiment presents a structure for a vertical adjustment device 29, as shown in the attached diagram. Figure 2 The vertical adjustment device 29 includes at least one second adjusting bolt 291 and a second limiting seat 292;

[0054] The bottom of the adjusting base 27 is provided with a second limiting seat 292 corresponding to the bottom of the furnace door bearing plate 25. At least one second adjusting bolt 291 passes through the first limiting seat 282 and is vertically connected to the bottom of the adjusting base 27.

[0055] It should be noted that the bottom of the adjusting base 27 is provided with two second limiting seats 292 arranged horizontally along the Y-axis direction, corresponding to the bottom of the furnace door bearing plate 25. Each second limiting seat 292 is penetrated by a corresponding second adjusting bolt 291, and each second adjusting bolt 291 is vertically connected to the bottom of the corresponding furnace door bearing plate 25.

[0056] Thus, when it is necessary to adjust the vertical position of the furnace door body 24 relative to the first furnace door flange, a tool can be used to adjust the distance between the second adjusting bolt 291 and the corresponding second limiting seat 292. The second adjusting bolt 291 will drive the furnace door body 24 to move vertically through the furnace door bearing plate 25, thereby adjusting the parallelism between the furnace door body 24 and the first furnace door flange.

[0057] To further adjust the parallelism between the furnace door body 24 and the first furnace door flange, so that the furnace door body 24 can fit more tightly with the first furnace door flange, refer to the attached... Figure 2 Each of the furnace door support plates 25 is provided with a plurality of adjustment through holes 251 vertically along its Z-axis direction. Each of the adjustment through holes 251 is matched with a fastener 26, which can pass through the adjustment through hole 251 and be connected to the furnace door body 24.

[0058] It should be noted that the fastener 26 is preferably a vibration damping bolt, and the inner surface of the adjusting through hole 251 is provided with internal threads.

[0059] In this way, when the repairman needs to adjust the position of the furnace door body 24 relative to the first furnace door flange in multiple directions in the horizontal and vertical directions using the horizontal adjustment device 28 and the vertical adjustment device 29, the position of the furnace door body 24 relative to the first furnace door flange can be adjusted in more detail by connecting the fastener 26 to the bolt of the adjustment through hole 251, so that the furnace door body 24 can fit more tightly with the first furnace door flange, thereby enabling the vacuum reaction chamber to obtain a more ideal vacuum degree and improving the passivation coating treatment effect of the vacuum reaction chamber.

[0060] The specific adjustment process is as follows: First, screw all fasteners 26 into the corresponding adjustment through holes 251, but do not tighten them completely; then, first align the furnace door body 24 with the first furnace door flange, and then use a ruler or level to check the parallelism between the furnace door body 24 and the first furnace door flange. Alternatively, you can place a thin piece of paper between the furnace door body 24 and the first furnace door flange and check whether the paper can slide smoothly in all positions. This can provide a preliminary judgment of parallelism; then, based on the inspection results, adjust the tightness of the fasteners 26 appropriately. If a tilt is found on one side, you can slightly loosen the fasteners 26 on that side and tighten the fasteners 26 on the other side until the furnace door body 24 and the first furnace door flange are completely parallel; after confirming that the parallelism adjustment is complete, tighten all fasteners 26 completely to ensure that the furnace door support plate 25 is firmly fixed on the furnace door body 24.

[0061] Specifically, for ease of understanding, this embodiment proposes a structure for control structure 22, as shown in the attached diagram. Figure 4 The control structure 22 includes a switch drive device 221, a switch guide rail 222, a mounting plate 223, a lifting drive device 224, and a lifting guide rail 225;

[0062] The mounting base 21 is provided with a switch drive device 221 and a switch guide rail 222. The switch guide rail 222 is slidably connected to a mounting plate 223. The output end of the switch drive device 221 is also connected to the mounting plate 223. The mounting plate 223 is provided with a lifting drive device 224 and a lifting guide rail 225. The lifting guide rail 225 is slidably connected to a support base 23. The output end of the lifting drive device 224 is also connected to the support base 23.

[0063] It should be noted that the switch drive device 221 is preferably an actuator, and the lifting drive device 224 is preferably a lifting cylinder. Furthermore, the vacuum reaction chamber in this embodiment also includes a main control unit (not shown, the same throughout), which is electrically connected to both the switch drive device 221 and the lifting drive device 224.

[0064] Thus, when it is necessary to open the opening of the furnace door body 24 relative to the cavity 1, the main control unit first activates the switch drive device 221, which then moves along the switch guide rail 222 to move the furnace door body 24 away from the furnace door opening. Then, the main control unit activates the lifting drive device 224, which then moves the furnace door body 24 down along the lifting guide rail 225 to expose the furnace door opening so that the substrate to be coated can be placed (the substrate is a half-wafer of silicon after slicing, the same applies throughout the text).

[0065] Similarly, when it is necessary to close the furnace door body 24 relative to the opening of the cavity 1, the main control unit first activates the lifting drive device 224, which will drive the furnace door body 24 to rise along the lifting guide rail 225 so that the furnace door body 24 and the furnace door opening are at the same height. Then the main control unit activates the switch drive device 221, which will move along the switch guide rail 222 to drive the furnace door body 24 closer to the furnace door opening until the furnace door body 24 can fit tightly with the first furnace door flange. This provides a good environment for the material box containing the substrate to enter and exit.

[0066] Because the existing reaction chamber has heaters around its outer surface except for the furnace door, it is impossible to install observation windows, making it impossible to observe the inside of the reaction chamber during operation. Therefore, to solve this problem, refer to the attached... Figure 3 The furnace door mechanism proposed in this utility model is also provided with an observation window assembly 30, which includes a second furnace door flange 301, an observation window 302, a sealing ring 303, and an observation window cover 304.

[0067] The furnace door body 24 is provided with a through hole 241. A second furnace door flange 301 is sealed and welded to the side of the through hole 241 away from the cavity 1. An observation window 302 is connected to the side of the second furnace door flange 301 away from the through hole 241. An observation window cover 304 is also matched and fitted to the observation window 302. A sealing ring 303 is provided around the edge of the observation window 302.

[0068] It should be noted that when the furnace door body 24 is closed with the furnace door opening of the cavity 1, the sealing ring 303 is used to prevent air leakage from the observation window 302, and the observation window cover 304 is used to prevent the observation window 302 from falling off. Furthermore, in this embodiment, the observation window 302 is made of quartz glass, and the second furnace door flange 301 is preferably a KF flange, which is welded to the furnace door body 24 by a sealing weld.

[0069] Thus, without affecting the passivation coating treatment of the vacuum reaction chamber, this embodiment provides an observation window 302 on the furnace door body 24 so that the situation inside the chamber 1 can be observed when the vacuum reaction chamber is running.

[0070] To ensure good sealing of the furnace door mechanism, the second furnace door flange 301, the observation window 302, the observation window cover 304, and the sealing ring 303 are all locked and sealed by clamps.

[0071] Example 2

[0072] This utility model also proposes an edge coating equipment, which includes the vacuum reaction chamber described above.

[0073] Among them, refer to the appendix Figure 1 The edge coating equipment also includes a frame 3, on which a vacuum reaction chamber is installed. A mounting base 21 is installed on one side wall of the frame 3, and a control structure 22 is installed on the mounting base 21. The control structure 22 can drive the furnace door body 24 to match and fit with the first furnace door flange.

[0074] In contrast to existing solutions where the furnace door mechanism rests on the upper surface of the frame and moves to the left after opening and closing, resulting in excessive travel and requiring a large main frame that wastes a lot of equipment space, this embodiment sets the mounting base 21 on one side wall of the frame 3, and then installs the corresponding control structure 22, support base 23, furnace door body 24, horizontal adjustment device 28, and vertical adjustment device 29 on the mounting base 21. This reduces the space of the frame 3 in the length direction, making the layout of the entire edge coating equipment more compact, thereby reducing the space occupied by the entire edge coating equipment.

[0075] Specifically, to facilitate the downward movement of the furnace door body 24 after opening, the stroke of the lifting drive device 224 is reduced, further making the layout of the entire edge coating equipment more compact and further reducing the space occupied by the entire edge coating equipment. (Refer to Appendix) Figure 1-2 The length of the furnace door body 24 in its horizontal direction is greater than the length of the furnace door body 24 in its vertical direction.

[0076] It should be noted that the horizontal direction of the furnace door body 24 is the X-axis direction, and the vertical direction of the furnace door body 24 is the Z-axis direction.

[0077] Obviously, the embodiments described above are only some embodiments of this utility model, not all embodiments. The accompanying drawings show preferred embodiments of this utility model, but do not limit the patent scope of this utility model. This utility model can be implemented in many different forms; rather, the purpose of providing these embodiments is to provide a more thorough and comprehensive understanding of the disclosure of this utility model. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing specific embodiments, or make equivalent substitutions for some of the technical features. Any equivalent structures made using the content of this utility model specification and drawings, directly or indirectly applied to other related technical fields, are similarly within the patent protection scope of this utility model.

Claims

1. A vacuum reaction chamber, comprising a cavity (1) with an opening, wherein the opening is provided with a first furnace door flange; characterized in that, It also includes a furnace door mechanism, which includes a control structure (22), a support base (23), and a furnace door body (24); The output end of the control structure (22) is connected to a support base (23). The support base (23) has furnace door bearing plates (25) on both sides of its top. The furnace door bearing plates (25) are connected to the furnace door body (24). The furnace door body (24) can be matched and fitted with the first furnace door flange through the control structure (22). The support base (23) is provided with at least one horizontal adjustment device (28) at the position corresponding to the furnace door bearing plate (25). The horizontal adjustment device (28) is used to adjust the horizontal position of the furnace door body (24). The support base (23) is provided with at least one vertical adjustment device (29) at the position corresponding to the furnace door bearing plate (25). The vertical adjustment device (29) is used to adjust the vertical position of the furnace door body (24).

2. The vacuum reaction chamber according to claim 1, characterized in that, The horizontal adjustment device (28) includes at least one first adjusting bolt (281) and a first limiting seat (282); The support base (23) is provided with an adjustment base (27) on the top. The adjustment base (27) is provided with a first limiting seat (282) on both sides. At least one first adjusting bolt (281) passes through the first limiting seat (282) and is horizontally connected to the bottom of the furnace door bearing plate (25).

3. The vacuum reaction chamber according to claim 2, characterized in that, The vertical adjustment device (29) includes at least one second adjusting bolt (291) and a second limiting seat (292); The bottom of the adjusting base (27) is provided with a second limiting seat (292) corresponding to the bottom of the furnace door bearing plate (25). At least one second adjusting bolt (291) passes through the first limiting seat (282) and is vertically connected to the bottom of the adjusting base (27).

4. The vacuum reaction chamber according to claim 1, characterized in that, Each of the furnace door support plates (25) is provided with a plurality of adjustment through holes (251), and each of the adjustment through holes (251) is provided with a fastener (26), which can pass through the adjustment through hole (251) and be connected to the furnace door body (24).

5. The vacuum reaction chamber according to claim 1, characterized in that, The control structure (22) includes a switch drive device (221), a switch guide rail (222), a mounting plate (223), a lifting drive device (224), and a lifting guide rail (225); The mounting base (21) is provided with a switch drive device (221) and a switch guide rail (222). The switch guide rail (222) is slidably connected to a mounting plate (223). The output end of the switch drive device (221) is also connected to the mounting plate (223). The mounting plate (223) is provided with a lifting drive device (224) and a lifting guide rail (225). The lifting guide rail (225) is slidably connected to a support base (23). The output end of the lifting drive device (224) is also connected to the support base (23).

6. The vacuum reaction chamber according to claim 1, characterized in that, The furnace door mechanism is also provided with an observation window assembly (30), which includes a second furnace door flange (301), an observation window (302), a sealing ring (303), and an observation window cover (304); The furnace door body (24) is provided with a through hole (241). A second furnace door flange (301) is sealed and welded to the side of the through hole (241) away from the cavity (1). An observation window (302) is connected to the side of the second furnace door flange (301) away from the through hole (241). The observation window (302) is also matched and covered by an observation window cover (304). A sealing ring (303) is provided around the edge of the observation window (302).

7. The vacuum reaction chamber according to claim 6, characterized in that, The second furnace door flange (301), the observation window (302), the observation window cover (304), and the sealing ring (303) are all locked and sealed by clamps.

8. An edge-type coating device, characterized in that, The edge-type coating equipment includes the vacuum reaction chamber as described in any one of claims 1-7.

9. The edge-type coating equipment according to claim 8, characterized in that, The edge coating equipment also includes a frame (3), on which a vacuum reaction chamber is installed. A mounting base (21) is installed on one side wall of the frame (3), and a control structure (22) is installed on the mounting base (21). The control structure (22) can drive the furnace door body (24) to match and fit with the first furnace door flange.

10. The edge-type coating apparatus according to claim 8 or 9, characterized in that, The length of the furnace door body (24) in its horizontal direction is greater than the length of the furnace door body (24) in its vertical direction.

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