Diaphragm thickness detection device

Abstract

The utility model relates to the technical field of lithium diaphragms, in particular to a diaphragm thickness detection device which comprises a detection table and a test assembly. A contact surface is arranged on one side, facing the test assembly, of the detection table and is used for placing a diaphragm; a plurality of air holes arranged in an array are formed in the contact surface; a negative pressure chamber is arranged on one side, deviating from the test assembly, of the detection table, and the negative pressure chamber adsorbs the diaphragm through the air holes, so that the diaphragm is attached to the contact surface; and the test assembly is arranged on one side, deviating from the contact surface, of the diaphragm and is used for detecting the thickness of the diaphragm. According to the embodiment of the invention, the diaphragm is adsorbed through micro negative pressure, deformation of the diaphragm caused by stretching the diaphragm at the edge is avoided, and accurate detection of the diaphragm thickness is realized.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of lithium separator, in particular to a separator thickness detection device. BACKGROUND

[0002] In recent years, the application of lithium battery is more and more widely, and the separator is an important component of lithium ion battery. In the production of the battery cell, the thickness test result of the separator is one of the bases for determining whether the raw material of this batch is suitable for production, and the performance of the separator directly affects the safety and reliability of the lithium battery, so the thickness test of the separator is particularly important.

[0003] In the production of the separator, the hand-held separator is generally used for thickness detection. On the one hand, the hand-held process is easy to cause mechanical stretching of the separator; on the other hand, the hand-held test separator also has the phenomenon of wrinkling. The above-mentioned conditions ultimately lead to inaccurate thickness test of the separator, so the prior art cannot accurately characterize the thickness data of the separator. CONTENT OF THE UTILITY MODEL

[0004] The purpose of the present application is to provide a separator thickness detection device, which adsorbs the separator by negative pressure, avoids stretching the separator at the edge to cause deformation of the separator, and realizes accurate detection of the thickness of the separator.

[0005] The embodiment of the present application is implemented as follows:

[0006] The embodiment of the present application provides a separator thickness detection device, which comprises a detection table and a test assembly. The detection table has a contact surface on the side facing the test assembly, and the contact surface is used for placing the separator. A plurality of array-arranged air holes are formed on the contact surface. The detection table has a negative pressure chamber on the side away from the test assembly, and the negative pressure chamber adsorbs the separator through the air holes, so that the separator is attached to the contact surface. The test assembly is arranged on the side of the separator away from the contact surface, and is used for detecting the thickness of the separator.

[0007] As an optional implementation, the test assembly comprises a bearing structure and a test probe, and the test probe is arranged on the side of the bearing structure facing the contact surface.

[0008] As an optional implementation, the device further comprises a base and a driving module. The driving module drives the detection table to move in a first direction, and the test assembly can move in a second direction. The first direction intersects with the second direction. A plurality of detection areas are prearranged on the separator along the moving path of the detection table. The projection of the test probe on the contact surface falls into the detection areas in sequence, so that the test probe can contact the detection areas in sequence.

[0009] As an optional implementation, the device further comprises a controller and a sensing module; the sensing module is configured to detect the position of the bearing structure; and the controller is configured to control the movement state of the detection table so that the test probe is projected to fall within the detection area.

[0010] As an optional implementation, the sensing module comprises a light sensor, a receiver and a reflective element; the light sensor and the receiver are arranged on the base; and the reflective element is arranged on the bearing structure; when the bearing structure moves towards the contact surface along the second direction, the light sensor emits light to the reflective element, and the light is reflected by the reflective element and then enters the receiver.

[0011] As an optional implementation, the bearing structure moves along the second direction; and the light sensor projects light to the reflective element along the first direction.

[0012] As an optional implementation, the base is provided with a guide rail extending along the first direction and located on both sides of the detection table.

[0013] As an optional implementation, the driving module comprises a driving motor, a rack and a gear; the rack is fixed on the base and extends along the same direction as the guide rail; the gear is installed on the power output end of the driving motor, and the gear is engaged with the rack.

[0014] As an optional implementation, the device further comprises a negative pressure pump; the detection table is provided with a communication port in communication with the negative pressure chamber, and an exhaust pipe is connected between the negative pressure pump and the communication port.

[0015] As an optional implementation, the diameter of the air hole is 0.1-0.3 mm.

[0016] The beneficial effects of the embodiments of the present application include:

[0017] The diaphragm thickness detection device provided by the embodiment of the present application comprises a detection table and a test assembly; the detection table is provided with a contact surface on the side facing the test assembly, and the contact surface is used for placing the diaphragm; a plurality of arrayed air holes are arranged on the contact surface; the detection table is provided with a negative pressure chamber on the side away from the test assembly, and the negative pressure chamber is used for adsorbing the diaphragm through the air holes, so that the diaphragm is attached to the contact surface; the test assembly is arranged on the side of the diaphragm away from the contact surface, and is used for detecting the thickness of the diaphragm. When the diaphragm is detected, the diaphragm is adsorbed by using negative pressure, so that the diaphragm edge does not need to be mechanically stretched, and stretching of the diaphragm caused by manual operation is also avoided, so that the thickness of the diaphragm in a natural state is ensured to be measured. The diaphragm is adsorbed by the contact surface, so that the diaphragm is ensured to be laid flat on the contact surface, and wrinkles can be effectively prevented. The uniformly distributed air holes ensure that the diaphragm is attached to the contact surface flatly, so that measurement errors caused by wrinkles can be effectively avoided. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can also be obtained without creative labor on the basis of these drawings.

[0019] Figure 1 FIG. 1 is a structural schematic diagram of a diaphragm thickness detection device according to an embodiment of the present application;

[0020] Figure 2 FIG. 2 is a structural schematic diagram of a diaphragm thickness detection device according to an embodiment of the present application;

[0021] Figure 3 FIG. 3 is a structural schematic diagram of a diaphragm thickness detection device according to an embodiment of the present application;

[0022] Figure 4 FIG. 4 is a structural schematic diagram of a diaphragm thickness detection device according to an embodiment of the present application.

[0023] FIG. 1 is a structural schematic diagram of a diaphragm thickness detection device according to an embodiment of the present application;

[0024] 100-detection table; 101-test assembly; 102-contact surface; 103-air hole; 104-bearing structure; 105-test probe; 106-base; 107-sensing module; 108-optical sensor; 109-reflective element; 110-guide rail; 1141-driving motor; 1142-rack; 1143-gear; 111-negative pressure pump; 112-communication port; 113-exhaust pipe; 114-driving module; 115-negative pressure chamber; X-first direction; Y-second direction. DETAILED DESCRIPTION

[0025] So that the purposes, technical solutions and advantages of the embodiments of the present application are more apparent, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings herein can be arranged and designed in various different configurations.

[0026] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without making creative efforts fall within the scope of protection of the present application.

[0027] It should be noted that: similar reference numerals and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings. In addition, the terms "first", "second", "third" and the like are only used to distinguish description, and cannot be understood as indicating or implying relative importance.

[0028] In the description of the present application, it should also be noted that, unless otherwise explicitly specified and limited, the terms "arrange", "mount", "connect", "connect" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to the specific circumstances.

[0029] The performance of the diaphragm is directly related to the safety and reliability of the lithium battery, so the thickness test of the diaphragm is particularly important. In the production of the diaphragm, the diaphragm is generally manually held for thickness detection. On the one hand, the manual holding process is easy to cause mechanical stretching of the diaphragm; on the other hand, the diaphragm also has a wrinkling phenomenon when manually held for testing. The above cases ultimately result in inaccurate diaphragm stretching thickness test, so the prior art cannot accurately represent the thickness data of the diaphragm.

[0030] To solve the above technical problems, the embodiments of the present application provide a diaphragm thickness detection device.

[0031] Reference Figure 1 , Figure 2 and Figure 4As shown, the diaphragm thickness detection device provided in this application embodiment includes a detection stage 100 and a test assembly 101; the detection stage 100 has a contact surface 102 on the side facing the test assembly 101, and the contact surface 102 is used to place the diaphragm; a plurality of arrayed air holes 103 are opened on the contact surface 102; the detection stage 100 has a negative pressure chamber 115 on the side away from the test assembly 101, and the negative pressure chamber 115 adsorbs the diaphragm through the air holes 103 so that the diaphragm is in contact with the contact surface 102; the test assembly 101 is disposed on the side of the diaphragm away from the contact surface 102 and is used to detect the diaphragm thickness.

[0032] It should be noted that the testing stage 100 in this embodiment has a contact surface 102 for placing the diaphragm to be tested, and a negative pressure chamber 115 is provided on the side of the testing stage 100 away from the testing assembly 101. In this embodiment, a plurality of arrayed air holes 103 are formed on the contact surface 102, and these air holes 103 connect to the negative pressure chamber 115. Therefore, the negative pressure chamber 115 in this embodiment can generate negative pressure through the air holes 103, thereby adsorbing the diaphragm and causing the diaphragm to fit tightly against the contact surface 102.

[0033] When the diaphragm is adsorbed onto the contact surface 102, it can be ensured that the diaphragm is laid flat on the contact surface 102 without stretching the edges of the diaphragm. In this embodiment, the test component 101 is set on the side opposite to the contact surface 102 to perform accurate measurement of the diaphragm thickness when the diaphragm is flat, wrinkle-free, and free from mechanical stretching.

[0034] It should be noted that the specific value of the negative pressure generated by the negative pressure chamber 115 through the vent 103 in this embodiment is not specifically limited, and those skilled in the art can choose according to their needs. It should be noted that excessive negative pressure should be avoided to prevent the diaphragm from embedding into the vent 103, forming a micro-negative pressure on the adsorption diaphragm, in order to ensure the diaphragm remains flat.

[0035] For example, the micro-negative pressure value is -0.6 MPa to -0.8 MPa.

[0036] The diameter of the pore 103 is 0.1-0.3 mm. For example, the diameter of the pore 103 is 0.2 mm. In addition, the spacing between adjacent pores 103 can be set by those skilled in the art as needed, and is not specifically limited here.

[0037] The technical effects that the embodiments of this application can produce are as follows:

[0038] In this embodiment of the application, when testing the diaphragm, negative pressure is used to adsorb the diaphragm, so there is no need to mechanically stretch the edge of the diaphragm, and the stretching of the diaphragm caused by manual operation is also avoided, thus ensuring the thickness measurement of the diaphragm in its natural state.

[0039] In this embodiment, the diaphragm is adsorbed onto the contact surface 102, ensuring that the diaphragm lies flat on the contact surface 102 and effectively preventing wrinkles. The evenly distributed pores 103 in this embodiment ensure that the diaphragm adheres smoothly to the contact surface 102, thus effectively avoiding measurement errors caused by wrinkles.

[0040] The embodiments of this application can improve measurement accuracy. Due to the improvements in the two factors mentioned above, the separator thickness detection device provided in the embodiments of this application can more accurately characterize the actual thickness of the separator, providing more reliable data support for the safety and reliability of lithium batteries.

[0041] Compared to traditional handheld inspection methods, this device enables a more stable and efficient thickness inspection process, significantly improving automation and making it suitable for large-scale production environments.

[0042] Reference Figure 1 As shown, as an optional implementation, the test assembly 101 includes a support structure 104 and a test probe 105; the test probe 105 is disposed on the side of the support structure 104 facing the contact surface 102.

[0043] It should be noted that the supporting structure 104 is used to mount and support the test probe 105, enabling the test probe 105 to stably perform thickness measurement operations. The test probe 105 is located on the side of the supporting structure 104 facing the contact surface 102, and can directly contact the diaphragm surface to achieve thickness measurement.

[0044] It should be noted that the supporting structure 104 can drive the test probe 105 to move in the direction perpendicular to the contact surface 102, so that the test probe 105 approaches or moves away from the diaphragm on the contact surface 102. When the supporting structure 104 drives the test probe 105 to approach the contact surface 102, so that the test probe 105 abuts against the diaphragm, the thickness of the diaphragm can be measured.

[0045] It should be noted that the test probe 105 can be a ranging sensor.

[0046] When no diaphragm is placed on the contact surface 102 of the testing platform 100, the test probe 105 directly abuts against the contact surface 102 of the testing platform 100. At this time, the test probe 105 measures and counts, which is used as the zero reference value. When a diaphragm is placed on the contact surface 102 of the testing platform 100, the test probe 105 abuts against the diaphragm. At this time, the difference between the measured value of the test probe 105 and the zero reference value is the distance between the test probe 105 and the contact surface 102, which is the diaphragm thickness.

[0047] This embodiment of the application enables precise control of the probe position via the support structure 104. The support structure 104 drives the test probe 105 to move, thereby precisely controlling the distance between the test probe 105 and the diaphragm. Since the movement of the test probe 105 is controlled by a mechanical structure, inconsistencies or errors caused by manual adjustments are avoided, ensuring the repeatability and reliability of the measurement results.

[0048] Furthermore, the embodiments of this application can adapt to diaphragms of different thicknesses. The design provided by these embodiments allows the test probe 105 to flexibly adjust its distance from the diaphragm according to the actual thickness of the diaphragm, making it suitable for detecting the thickness of diaphragms of different specifications and enhancing the versatility of the device. When the probe is not in use, it can be moved away by the control system to prevent unnecessary collisions or wear, protecting both the test probe 105 and the diaphragm under test, and extending the service life of the equipment.

[0049] The embodiments of this application can improve the degree of automation. By combining automated control logic, the embodiments of this application can achieve a high degree of automation in the diaphragm thickness detection process, improve work efficiency, and are suitable for the rapid detection needs in large-scale production environments.

[0050] The specific structure of the load-bearing structural member 104 is not specifically limited, and those skilled in the art can configure it as needed. For example, the load-bearing structural member 104 is a lifting shaft, the axis of which is perpendicular to the contact surface 102, and the test probe 105 is installed at the lower end of the lifting shaft.

[0051] Reference Figure 1 , Figure 2 As shown, as an optional implementation, it also includes a base 106 and a drive module 114; the drive module 114 drives the detection stage 100 to move along the first direction X, and the test component 101 can move along the second direction Y; the first direction X and the second direction Y intersect; a plurality of detection areas are preset on the diaphragm and arranged at intervals along the moving path of the detection stage 100; the projection of the test probe 105 on the contact surface 102 falls into the detection area in sequence, so that the test probe 105 can contact the plurality of detection areas in sequence.

[0052] Preferably, the first direction X intersects the second direction Y perpendicularly. Specifically, the first direction X is parallel to the contact surface 102, and the second direction Y is perpendicular to the contact surface 102.

[0053] It should be noted that, in this embodiment, the base 106 provides a stable foundation for the entire device. The drive module 114 can drive the detection stage 100 to move in a direction parallel to the contact surface 102, that is, to enable the diaphragm on the contact surface 102 to move in a straight line. Therefore, the projection of the test probe 105 in this embodiment can fall on different areas of the diaphragm.

[0054] When the drive module 114 drives the test stage 100 to move, the diaphragm can move horizontally along the first direction X, ensuring that different test areas of the diaphragm can be measured one by one by the test probe 105. Specifically, the test assembly 101 can move up and down along the second direction Y, so that the test probe 105 can accurately approach or leave the test area on the diaphragm surface.

[0055] The embodiments of this application can achieve comprehensive coverage detection. By controlling the detection stage 100 to move along the first direction X through the drive module 114, and combining the up and down movement of the test probe 105 along the second direction Y, comprehensive coverage and accurate measurement of multiple preset detection areas of the diaphragm can be achieved, ensuring the accuracy of data at each detection point.

[0056] The embodiments of this application can improve measurement efficiency. The high degree of automation of the embodiments of this application reduces manual intervention and improves detection speed and efficiency, making them suitable for large-scale production and quality control needs.

[0057] In addition, it should be noted that by flexibly adjusting the relative positions of the detection stage 100 and the test probe 105, the thickness detection requirements of diaphragms of different shapes and sizes can be met, thus increasing the application range of the equipment.

[0058] Reference Figure 1 As shown, as an optional implementation, it also includes a controller and a sensing module 107; the sensing module 107 is used to detect the position of the supporting structure 104; the controller is used to control the movement state of the testing stage 100 so that the test probe 105 is projected into the testing area.

[0059] The controller is electrically connected to the drive module 114, and controls the movement of the testing platform 100 through the drive module 114. The movement status includes movement time and speed. The sensor module 107 feeds back the position information of the supporting structural component 104 to the controller, which then performs precise motion control based on this information. The sensor module 107 is used to monitor the position of the supporting structural component 104 in real time, ensuring that the test probe 105 accurately falls within the preset testing area.

[0060] It should be noted that those skilled in the art can select the specific types of the sensing module 107 and the controller as needed, and no special restrictions are imposed on them.

[0061] For example, the sensing module 107 includes a light sensor 108, a receiver, and a reflective element 109; the light sensor 108 and the receiver are disposed on the base 106; the reflective element 109 is disposed on the supporting structure 104; when the supporting structure 104 moves along the second direction Y toward the contact surface 102, the light sensor 108 emits light toward the reflective element 109, and the light is reflected by the reflective element 109 and then incident on the receiver.

[0062] The specific actions of this application embodiment are as follows:

[0063] The supporting structure 104 moves along the second direction Y toward the contact surface 102 so that the test probe 105 approaches the diaphragm. When it approaches the contact surface 102, the light sensor 108 projects light toward the reflective element 109 along the first direction X.

[0064] When the light is reflected by the reflector 109 and returns to the receiver, it indicates that the test probe 105 has reached the predetermined position. The drive module 114 stops driving, causing the test stage 100 to stop moving and enter the preset stop time.

[0065] During the preset stop time, the test probe 105 contacts the diaphragm to complete the thickness measurement.

[0066] After the preset time has elapsed, the test probe 105 moves upward, and the light emitted by the light sensor 108 can no longer hit the reflective element 109, meaning the receiver cannot receive the reflected light. The drive module 114 then continues to move the detection stage 100 to the next fixed interval.

[0067] The diaphragm length is set to 55cm. The drive module 114 drives the detection stage 100 to move a fixed distance and then stops for a preset time. During the preset time, the test probe 105 comes into contact with the diaphragm to measure its thickness. The fixed distance can be set to 5cm, thus forming 10 detection areas on the diaphragm.

[0068] When the test probe 105 falls, the light sensor 108 emits light towards the reflector 109. After being reflected by the reflector 109, the light enters the receiver. At this time, the drive module 114 stops driving, generating a preset stop time of 5-10 seconds, allowing the test probe 105 to contact the diaphragm for measurement. After the preset stop time ends, the test probe 105 moves upward, and the light sensor 108 can no longer emit light towards the reflector 109. That is, when the receiver does not receive the reflected light, the drive module 114 continues to drive the detection stage 100 to move a fixed distance.

[0069] It should be noted that this embodiment utilizes the cooperation of the light sensor 108 and the reflective element 109 to monitor the position of the supporting structural member 104 in real time, ensuring that the test probe 105 can accurately fall within each detection area, thus improving measurement accuracy. The entire process is highly automated, reducing manual intervention and improving work efficiency. The drive module 114 operates according to a set fixed interval and stop time, ensuring that each measurement is performed under the same conditions.

[0070] Reference Figure 2 as well as Figure 3 As shown, in one optional implementation, the drive module 114 includes a drive motor 1141, a rack 1142, and a gear 1143; the rack 1142 is fixed on the base 106 and extends in the same direction as the guide rail 110; the gear 1143 is installed at the power output end of the drive motor 1141 and meshes with the rack 1142.

[0071] The guide rail 110 extends along the first direction X and is located on both sides of the testing table 100.

[0072] It should be noted that the combination of rack 1142 and gear 1143 in this embodiment provides very high transmission accuracy, converting the rotation of the motor into linear displacement. This linear displacement ensures that each detection area on the diaphragm can be accurately measured. The presence of guide rail 110 in this embodiment not only defines the movement path of the detection stage 100 but also ensures the stability and consistency of the detection stage 100 throughout the entire detection process. This helps reduce errors caused by vibration or other external factors, improving the reliability of the measurement results.

[0073] Reference Figure 4 As shown, as an optional implementation, it also includes a negative pressure pump 111; the testing platform 100 is provided with a communication port 112 that communicates with the negative pressure chamber 115, and an exhaust pipe 113 is connected between the negative pressure pump 111 and the communication port 112.

[0074] It should be noted that the connecting port 112 serves as the air outlet of the negative pressure chamber 115, and the arrayed air holes 103 serve as the air inlets of the negative pressure chamber 115. The negative pressure pump 111 serves as the power source, and it is connected to the connecting port 112 through the exhaust pipe 113. When the negative pressure pump 111 is working, it can draw air from the negative pressure chamber 115, thereby creating a negative pressure inside the negative pressure chamber 115. Due to the formation of negative pressure, the air entering through the air holes 103 creates an adsorption force on the diaphragm.

[0075] In this embodiment, a negative pressure pump 111 draws air from the negative pressure chamber 115, causing the pores 103 on the contact surface 102 to generate suction, effectively adsorbing the separator flatly onto the contact surface 102. This avoids the mechanical stretching and wrinkling that may occur during traditional handheld testing, thus ensuring the accuracy of separator thickness measurement. Furthermore, because the adsorption process is gentle and uniform, it does not damage or deform the separator, helping to maintain its physical properties, which is crucial for subsequent battery assembly and other applications.

[0076] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A diaphragm thickness detection device, characterized in that, The device includes a testing platform (100) and a testing assembly (101); the testing platform (100) has a contact surface (102) on the side facing the testing assembly (101), the contact surface (102) is used to place a diaphragm; a plurality of arrayed air holes (103) are opened on the contact surface (102); the testing platform (100) has a negative pressure chamber (115) on the side away from the testing assembly (101), the negative pressure chamber (115) adsorbs the diaphragm through the air holes (103) so that the diaphragm fits against the contact surface (102); the testing assembly (101) is located on the side of the diaphragm away from the contact surface (102).

2. The diaphragm thickness detection device according to claim 1, characterized in that, The test assembly (101) includes a support structure (104) and a test probe (105); the test probe (105) is disposed on the side of the support structure (104) facing the contact surface (102).

3. The diaphragm thickness detection device according to claim 2, characterized in that, It also includes a base (106) and a drive module (114); the drive module (114) drives the detection stage (100) to move along a first direction (X), and the test component (101) can move along a second direction (Y); the first direction (X) and the second direction (Y) intersect; a plurality of detection areas are preset on the diaphragm and arranged at intervals along the moving path of the detection stage (100); the projection of the test probe (105) on the contact surface (102) falls into the detection area in sequence, so that the test probe (105) can contact the plurality of detection areas in sequence.

4. The diaphragm thickness detection device according to claim 3, characterized in that, It also includes a controller and a sensing module (107); the sensing module (107) is used to detect the position of the supporting structure (104); the controller is used to control the movement state of the testing stage (100) so that the test probe (105) is projected into the testing area.

5. The diaphragm thickness detection device according to claim 4, characterized in that, The sensing module (107) includes a light sensor (108), a receiver, and a reflective element (109); the light sensor (108) and the receiver are disposed on the base (106); the reflective element (109) is disposed on the supporting structure (104); when the supporting structure (104) moves close to the contact surface (102) along the second direction (Y), the light sensor (108) emits light towards the reflective element (109), and the light is reflected by the reflective element (109) and then incident on the receiver.

6. The diaphragm thickness detection device according to claim 5, characterized in that, The supporting structure (104) moves along the second direction (Y); the light sensor (108) projects light onto the reflective element (109) along the first direction (X).

7. The diaphragm thickness detection device according to any one of claims 3-6, characterized in that, The base (106) is provided with a guide rail (110), which extends along the first direction (X) and is located on both sides of the detection table (100).

8. The diaphragm thickness detection device according to claim 7, characterized in that, The drive module (114) includes a drive motor (1141), a rack (1142), and a gear (1143); the rack (1142) is fixed on the base (106) and extends in the same direction as the guide rail (110); the gear (1143) is installed at the power output end of the drive motor (1141) and meshes with the rack (1142).

9. The diaphragm thickness detection device according to any one of claims 1-6, characterized in that, It also includes a negative pressure pump (111); the testing platform (100) is provided with a communication port (112) that communicates with the negative pressure chamber (115), and an exhaust pipe (113) is connected between the negative pressure pump (111) and the communication port (112).

10. The diaphragm thickness detection device according to any one of claims 1-6, characterized in that, The diameter of the pores (103) is 0.1-0.3 mm.

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