Feeding and discharging device

Abstract

The utility model relates to the technical field of conveying devices, and provides a feeding and discharging device which comprises a feeding component, a discharging component, a conveying carrier plate and a driving component. The feeding part comprises at least one first positioning conveying part; the discharging component comprises at least one second positioning conveying component. The conveying carrier plate is movably arranged between the feeding component and the discharging component and used for conveying the sheet bodies on the feeding component to the discharging component. A plurality of bearing plates used for containing sheet bodies are arranged on the conveying carrier plate side by side at intervals, and the driving component is used for driving the conveying carrier plate to complete feeding and discharging operation. The sheet bodies in the feeding component are supported and transferred through the conveying carrying plate to achieve feeding, the sheet bodies on the bearing plate fall down and are transferred to the discharging component to achieve discharging, and the conveying device has the beneficial effects of being high in transferring efficiency, small in sheet body position deviation and the like.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of conveying devices, in particular to a feeding and discharging device. BACKGROUND

[0002] A solar cell is a device for converting solar energy into electric energy. In the preparation process, a PVD (Physical Vapor Deposition) device or a CVD (Chemical Vapor Deposition) device is used to prepare a film layer on the surface of a silicon wafer. The silicon wafer is automatically fed and discharged by a gantry suction wafer method. In the gantry suction wafer method, a silicon wafer positioning runway is arranged on both sides of a carrier plate. The silicon wafer is positioned on the silicon wafer positioning runway, and then the silicon wafer on the silicon wafer positioning runway is transferred to the carrier plate by suction. In the process of suction transfer, problems such as missing suction and silicon wafer deviation are easily caused, and thus secondary positioning on the carrier plate is required, which affects the feeding and discharging efficiency and the silicon wafer positioning accuracy. CONTENT OF THE UTILITY MODEL

[0003] Therefore, the present application provides a feeding and discharging device with high efficiency and accurate wafer position.

[0004] The present application provides a feeding and discharging device, which comprises:

[0005] A feeding component, which comprises at least one first positioning conveying component, and a plurality of wafers are placed on the first positioning conveying component.

[0006] A discharging component, which is arranged on the wafer output side of the feeding component, and comprises at least one second positioning conveying component, and a plurality of wafers are placed on the second positioning conveying component.

[0007] A conveying carrier plate, which is movably arranged between the feeding component and the discharging component, and is used to transport the wafers on the feeding component to the discharging component. A plurality of carrier plates are arranged side by side and spaced apart on the conveying carrier plate, and the carrier plates are used to carry a plurality of wafers.

[0008] A driving component, which is connected with the conveying carrier plate, and is used to drive the conveying carrier plate to lift and transfer the wafers on the first positioning conveying component for feeding operation, and to carry and transfer the wafers on the conveying carrier plate to the second positioning conveying component for discharging operation.

[0009] In some embodiments, the opposite sides of each of the two adjacent carrier plates are provided with a plurality of first supporting protrusions, the opposite sides of the sheet placed on the first positioning and conveying component protrude from the first positioning and conveying component, the two adjacent carrier plates pass through the first positioning and conveying component from its two sides, and the plurality of first supporting protrusions cooperate to support and lift the sheet.

[0010] In some embodiments, the side of the first supporting protrusion in contact with the sheet is a lapping surface, and the angle between the lapping surface and the horizontal direction is 10°-80°.

[0011] In some embodiments, the carrier plate is further provided with a plurality of second supporting protrusions, which are arranged side by side between the adjacent first supporting protrusions along the horizontal direction.

[0012] In some embodiments, the width of the carrier plate gradually decreases in the direction away from the conveying carrier plate.

[0013] In some embodiments, the feeding and discharging device further comprises a feeding calibration component, which is arranged above the feeding component, and the feeding calibration component comprises a feeding position detection component and a first mechanical arm, the feeding position detection component is used to detect the position of the sheet on the feeding component, and the first mechanical arm is used to adjust the position of the sheet on the feeding component.

[0014] In some embodiments, the feeding and discharging device further comprises a discharging calibration component, which is arranged above the discharging component, and the discharging calibration component comprises a discharging position detection component and a second mechanical arm, the discharging position detection component is used to detect the position of the sheet on the discharging component, and the second mechanical arm is used to adjust the position of the sheet on the discharging component.

[0015] In some embodiments, the feeding component further comprises a sheet conveying component, which is arranged at the sheet input side of the first positioning and conveying component, and the sheet conveying component is used to convey the sheet to the first positioning and conveying component.

[0016] In some embodiments, the feeding component further comprises a connecting member, the connecting member comprises a connecting bridge and a lifting component, the connecting bridge is arranged between the first positioning conveying component and the sheet conveying component, the lifting component is used to drive the connecting bridge to move in the vertical direction, when the sheet conveying component conveys the sheet to the first positioning conveying component, the lifting component is used to drive the connecting bridge to move to the connection between the first positioning conveying component and the sheet conveying component to convey the sheet, when the conveying plate is moved from below the first positioning conveying component to above the first positioning conveying component, the lifting component is used to drive the connecting bridge to rise to make the conveying plate pass through the first positioning conveying component.

[0017] In some embodiments, the feeding and discharging device further comprises a first lifting support, the first lifting support is arranged at the sheet input side of the feeding component, and the driving component drives the conveying plate to move from below the feeding component to above the feeding component along the first lifting support.

[0018] In some embodiments, the feeding and discharging device further comprises a second lifting support, the second lifting support is arranged at the sheet input side of the discharging component, and the driving component drives the conveying plate to move from above the discharging component to below the discharging component along the second lifting support.

[0019] In some embodiments, the feeding and discharging device further comprises a return support, the return support is arranged below the feeding component and the discharging component, and the driving component drives the conveying plate to move along the return support to drive the discharging conveying plate below the feeding component.

[0020] Compared with the conventional technology, the present application has at least the following beneficial effects:

[0021] The present application uses the conveying plate to lift the positioned sheet in the feeding component, realizes the transfer of the sheet from the feeding component to the conveying plate, and realizes the sheet feeding process by the conveying plate. The processed sheet is transferred to the discharging component by the conveying plate, and the sheet is placed on the second positioning conveying component during the falling process of the conveying plate, and the discharging operation is completed. The present application adopts the lifting mode of the conveying plate in the feeding and discharging process, which has higher transfer efficiency than the sheet suction mode. Moreover, in the process of lifting and discharging by the conveying plate, the present application directly transfers according to the arrangement of the sheet, which can effectively reduce the deviation of the sheet caused by the transfer process compared with the suction disc transfer mode. The feeding and discharging device of the present application has the characteristics of high transfer efficiency and high accuracy. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1A front view of a feeding and discharging device in a feeding preparation stage according to an embodiment of the present application;

[0023] Figure 2 A front view of a feeding and discharging device in a feeding stage according to an embodiment of the present application;

[0024] Figure 3 A front view of a feeding and discharging device in a discharging preparation stage according to an embodiment of the present application;

[0025] Figure 4 A front view of a feeding and discharging device in a discharging stage according to an embodiment of the present application;

[0026] Figure 5 A top view of a conveying carrier plate in a feeding preparation stage of a feeding and discharging device according to an embodiment of the present application;

[0027] Figure 6 A top view of a conveying carrier plate in a discharging preparation stage of a feeding and discharging device according to an embodiment of the present application;

[0028] Figure 7 A side view of a carrier plate of a feeding and discharging device according to an embodiment of the present application, wherein a represents the width of the carrier plate.

[0029] Wherein, 100 - feeding component; 110 - first positioning conveying component; 120 - sheet conveying component; 130 - connecting piece; 131 - connecting bridge; 132 - lifting component; 200 - discharging component; 210 - second positioning conveying component; 300 - conveying carrier plate; 310 - carrier plate; 320 - first supporting protrusion; 330 - second supporting protrusion; 400 - feeding calibration component; 410 - first mechanical arm; 500 - discharging calibration component; 510 - second mechanical arm; 600 - first lifting support; 700 - second lifting support; 800 - return support; 900 - sheet. DETAILED DESCRIPTION

[0030] The application will be described in further detail below with reference to the drawings, embodiments and examples, which are presented for the purpose of illustration only and are not intended to limit the scope of the application. It should be understood that the application can be implemented in many different forms and is not limited to the embodiments and examples described herein, and various modifications or changes can be made thereto without departing from the spirit of the application. Furthermore, in the following description, numerous specific details are given to provide a more thorough understanding of the application. It should be understood that the application can be practiced without one or more of these specific details.

[0031] It should be understood that the terms "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the application.

[0032] In the description of the application, unless otherwise explicitly specified and limited, the terms "connected", "connected", "fixed" and "provided" should be understood broadly, for example, can be fixedly connected, or can be detachably connected, or can be integrated; can be mechanically connected, or can be electrically connected; can be directly connected, or can be indirectly connected through an intermediate medium; can be the internal connection of two elements or the interaction relationship between two elements. For those skilled in the art, the meaning of the above terms in the application can be understood according to the specific circumstances.

[0033] In the present application, "optionally", "optional" and "optional" mean that it can or can not be present, i.e. it means to select from "yes" or "no" two parallel schemes. If there are multiple "optional" in a technical solution, unless otherwise specified, and there is no contradiction or mutual restriction, each "optional" is independent.

[0034] In the present application, the technical features described in an open manner include both the closed technical solution consisting of the listed features and the open technical solution containing the listed features.

[0035] In the present application, the terms "first", "second", etc. are used for descriptive purposes only and should not be construed as indicating or implying relative importance or quantity, nor should it be construed as implicitly indicating the importance or quantity of the technical features indicated. Moreover, "first", "second", etc. only serve the purpose of non-exhaustive enumeration and description, and should be understood as not constituting a closed limitation on the quantity.

[0036] All the documents mentioned in the present application are incorporated by reference into the present application as if each document was individually incorporated by reference. Unless and to the extent that the incorporated documents conflict with the application purpose and / or technical solution of the present application, the incorporated documents are incorporated by reference in their entirety and for all purposes. When the present application refers to the incorporated documents, the definitions of the relevant technical features, terms, names, phrases, etc. in the incorporated documents are also incorporated by reference. When the present application refers to the incorporated documents, the examples and preferred modes of the relevant technical features are also incorporated by reference into the present application, subject to the implementation of the present application. It should be understood that when the incorporated content conflicts with the description in the present application, the present application is given priority or is modified adaptively according to the description in the present application.

[0037] In the conventional technology, the gantry suction piece is used for feeding and discharging. During the feeding and discharging, the silicon wafer on the positioning runway is positioned once, and after the positioning is completed, the wafer is transferred by suction and transferred to the carrier plate. Since the wafer transfer by suction is prone to problems such as missing suction and deviation, the silicon wafer on the carrier plate needs to be positioned again. The gantry suction piece not only has low transfer efficiency and large transfer deviation, but also has a complex device structure.

[0038] Based on this, the present application provides a feeding and discharging device, as shown in Figure 1 , Figure 2 , Figure 3 and Figure 4 , the feeding and discharging device comprises a feeding component 100, a discharging component 200, a conveying carrier plate 300 and a driving component (not shown in the figure).

[0039] As shown in Figure 5 , the feeding component 100 comprises at least one first positioning conveying component 110, and the first positioning conveying component 110 is used for placing a plurality of wafer bodies 900. As shown in Figure 6 , the discharging component 200 is arranged on the wafer body 900 output side of the feeding component 100. The discharging component 200 comprises at least one second positioning conveying component 210, and the second positioning conveying component 210 is used for placing a plurality of wafer bodies 900. The conveying carrier plate 300 is movably arranged between the feeding component 100 and the discharging component 200, and is used for conveying the wafer bodies 900 on the feeding component 100 to the discharging component 200. A plurality of carrier plates 310 are arranged side by side and spaced apart on the conveying carrier plate 300, and the carrier plates 310 are used for carrying a plurality of wafer bodies 900.

[0040] The driving component is connected with the conveying carrier plate 300. The driving component is used to drive the conveying carrier plate 300 to lift and transfer the wafer bodies 900 on the first positioning conveying component 110 for feeding operation, and to carry and transfer the wafer bodies 900 on the conveying carrier plate 300 to the second positioning conveying component 210 for discharging operation. Specifically, as shown inFigure 1 and Figure 2 As shown in FIG. 9, the driving component is used to drive the conveying carrier plate 300 to move through the feeding component 100 from below the feeding component 100 to above the feeding component 100, and the carrier plate 310 lifts the sheet 900 on the first positioning conveying component 110 for feeding. As shown in FIG. 10, the driving component is also used to drive the conveying carrier plate 300 to move through the discharging component 200 from above the discharging component 200 to below the discharging component 200, and the carrier plate 310 transfers the sheet 900 to the second positioning conveying component 210 for discharging. Figure 3 and Figure 4 As shown in FIG. 9, the driving component is used to drive the conveying carrier plate 300 to move through the feeding component 100 from below the feeding component 100 to above the feeding component 100, and the carrier plate 310 lifts the sheet 900 on the first positioning conveying component 110 for feeding. As shown in FIG. 10, the driving component is also used to drive the conveying carrier plate 300 to move through the discharging component 200 from above the discharging component 200 to below the discharging component 200, and the carrier plate 310 transfers the sheet 900 to the second positioning conveying component 210 for discharging.

[0041] The present application uses the conveying carrier plate 300 to lift the positioned sheet 900 in the feeding component 100, realizes the transfer of the sheet 900 from the feeding component 100 to the conveying carrier plate 300, and realizes the feeding process of the sheet 900 by the conveying carrier plate 300. The processed sheet 900 is transferred to the discharging component 200 by the conveying carrier plate 300, and in the process of falling from the conveying carrier plate 300, the sheet 900 is placed on the second positioning conveying component 210 to complete the discharging operation. The present application adopts the lifting mode of the conveying carrier plate 300 in the feeding and discharging process, which has higher transfer efficiency than the sheet suction mode. Moreover, in the process of lifting feeding and discharging by the conveying carrier plate 300, the present application directly transfers according to the arrangement of the sheet 900, which can effectively reduce the deviation of the sheet 900 caused by the transfer process compared with the suction disc transfer mode. The feeding and discharging device of the present application has the characteristics of high transfer efficiency and high accuracy.

[0042] It can be understood that in the process of lifting feeding, the carrier plate 310 in the conveying carrier plate 300 can pass through the first positioning conveying component 110 to lift the sheet 900, that is, two carrier plates 310 are used to lift the sheet 900. Or the sheet 900 is lifted between two first positioning conveying components 110, that is, one carrier plate 310 is used to lift the sheet 900. The first positioning conveying component 110 and the carrier plate 310 are placed staggered, which can realize the operation of passing through the sheet 900. Similarly, for the discharging process, the carrier plate 310 in the conveying carrier plate 300 falls from both sides of the second positioning conveying component 210 to place the sheet 900 on the second positioning conveying component 210. Or it can fall between two second positioning conveying components 210 to place the sheet 900 between the two second positioning conveying components 210. The second positioning conveying component 210 and the carrier plate 310 are placed staggered, which can realize the operation of passing through the discharging.

[0043] It can be understood that the first positioning conveying component 110 and the second positioning conveying component 210 can position and arrange the wafer 900 placed thereon according to preset requirements. For example, the first positioning conveying component 110 and the second positioning conveying component 210 can be wafer positioning runways in a gantry wafer suction manner.

[0044] In some embodiments, as shown in Figure 7 The opposite sides of the two adjacent carrier plates 310 are provided with a plurality of first supporting protrusions 320, and the opposite sides of the wafer 900 placed on the first positioning conveying component 110 protrude from the first positioning conveying component 110. The two adjacent carrier plates 310 pass through the first positioning conveying component 110 from the two sides of the first positioning conveying component 110, as shown in Figure 5 and Figure 6 The plurality of first supporting protrusions 320 cooperate to carry and support the wafer 900. The first supporting protrusions 320 are arranged on the side of the carrier plate 310, the wafer 900 is supported by the first supporting protrusions 320, and the wafer 900 is limited by the carrier plate 310, further avoiding the wafer 900 from deviating during the transfer process.

[0045] In some embodiments, as shown in Figure 7 The side of the first supporting protrusion 320 in contact with the wafer 900 is a lapping surface. Optionally, the lapping surface is arranged obliquely. Further optionally, the angle between the lapping surface and the horizontal direction is 10°-80°, for example, which can be 10°, 20°, 30°, 40°, 50°, 60°, 70° or 80°. The lapping surface is arranged obliquely to the horizontal plane, and when the wafer 900 is transferred to the conveying carrier plate 300, the oblique lapping surface can further limit the wafer 900, further avoiding the deviation caused by the transfer of the wafer 900.

[0046] In some embodiments, as shown in Figure 7 The carrier plate 310 is further provided with a plurality of second supporting protrusions 330, and the second supporting protrusions 330 are arranged side by side between the adjacent first supporting protrusions 320 along the horizontal direction. The second supporting protrusions 330 are arranged to assist the wafer 900 in being placed horizontally on the conveying carrier plate 300.

[0047] In some embodiments, as shown in Figure 7 The width a of the carrier plate 310 gradually decreases in the direction away from the conveying carrier plate 300. It can be understood that the width of the carrier plate 310 in the present application refers to the size of the carrier plate 310 in the vertical direction. The carrier plate 310 is arranged in a triangular structure, which not only improves the structural stability of the carrier plate 310, but also optimizes the gravity distribution of the carrier plate 310, reduces the weight of the carrier plate 310, and ensures the transfer stability of the carrier plate 310 during the transfer process.

[0048] In some embodiments, such as Figures 1-4 As shown, the loading and unloading device also includes a loading calibration component 400, which is disposed above the loading component 100. The loading calibration component 400 includes a loading position detection component and a first robotic arm 410. The loading position detection component is used to detect the position of the wafer 900 on the loading component 100. The first robotic arm 410 is used to adjust the position of the wafer 900 on the loading component 100. Optionally, the loading calibration component 400 is also provided with a lifting device, which is used to drive the loading calibration component 400 to move in the vertical direction. This application utilizes the loading calibration component 400 to assist in the position of the wafer 900 on the loading calibration component 400, thereby improving the positional accuracy of the wafer 900.

[0049] In some embodiments, such as Figures 1-4 As shown, the loading and unloading device also includes a loading calibration component 500, which is positioned above the loading component 200. The loading calibration component 500 includes a loading position detection component and a second robotic arm 510. The loading position detection component detects the position of the wafer 900 on the loading component 200, and the second robotic arm 510 adjusts the position of the wafer 900 on the loading component 200. Optionally, the loading calibration component 500 is further equipped with a lifting device, which moves the loading calibration component 500 vertically. This application utilizes the loading calibration component 500 to assist in positioning the wafer 900 on the loading calibration component 500, thereby improving the positional accuracy of the wafer 900.

[0050] In some embodiments, such as Figures 1-4 As shown, the feeding component 100 also includes a sheet transfer component 120, which is disposed on the sheet 900 input side of the first positioning and conveying component 110. The sheet transfer component 120 is used to transfer the sheet 900 to the first positioning and conveying component 110.

[0051] In some embodiments, such as Figures 1-4As shown, the feeding component 100 further comprises a connecting piece 130, which comprises a connecting bridge 131 and a lifting component 132. The connecting bridge 131 is arranged between the first positioning conveying component 110 and the sheet conveying component 120, and the lifting component 132 is used to drive the connecting bridge 131 to move in the vertical direction. When the sheet conveying component 120 conveys the sheet 900 to the first positioning conveying component 110, the lifting component 132 is used to drive the connecting bridge 131 to move to the connection between the first positioning conveying component 110 and the sheet conveying component 120 to convey the sheet 900. When the conveying carrier plate 300 moves from below the first positioning conveying component 110 to above the first positioning conveying component 110, the lifting component 132 is used to drive the connecting bridge 131 to rise so that the conveying carrier plate 300 passes through the first positioning conveying component 110. The present application uses the connecting bridge 131 to convey the sheet conveying component 120 to the first positioning conveying component 110, and the connecting bridge 131 can be raised during the movement of the conveying carrier plate 300 to ensure that the conveying carrier plate 300 moves from below the first positioning conveying component 110 to above the first positioning conveying component 110.

[0052] In some embodiments, as shown in Figure 5 As shown, the feeding and discharging device further comprises a first lifting support 600. The first lifting support 600 is arranged at the input side of the sheet 900 of the feeding component 100, and the driving component drives the conveying carrier plate 300 to move from below the feeding component 100 to above the feeding component 100 along the first lifting support 600.

[0053] In some embodiments, as shown in Figure 6 As shown, the feeding and discharging device further comprises a second lifting support 700. The second lifting support 700 is arranged at the input side of the sheet 900 of the discharging component 200, and the driving component drives the conveying carrier plate 300 to move from above the discharging component 200 to below the discharging component 200 along the second lifting support 700.

[0054] In some embodiments, as shown in Figures 1-4 As shown, the feeding and discharging device further comprises a return support 800. The return support 800 is arranged below the feeding component 100 and the discharging component 200, and the driving component drives the conveying carrier plate 300 to move along the return support 800 to drive the discharging conveying carrier plate 300 to below the feeding component 100.

[0055] Exemplarily, a method for feeding and discharging the sheet 900 by the above feeding and discharging device is provided, which comprises the following steps:

[0056] S1, transferring the sheet 900 from the sheet conveying component 120 to the first positioning conveying component 110 through the connecting bridge 131, and positioning the sheet 900 in the first positioning conveying component 110 by using the feeding calibration component 400, as shown in Figure 1 As shown, the feeding and discharging device is in the feeding preparation stage;

[0057] S2, the driving component drives the conveying carrier plate 300 to move from below the first positioning conveying component 110 to above it, during which the carrier plate 310 transfers the sheet body 900 placed on the first positioning conveying component 110 to the first supporting protrusion 320 and the second supporting protrusion 330 between adjacent carrier plates 310, and conveys the conveying carrier plate 300 with the sheet body 900 to the sheet body 900 processing device, completing the feeding operation, as shown in FIG. 6, the feeding and discharging device is in the feeding stage; Figure 2

[0058] S3, after the processing of the sheet body 900 is completed, the conveying carrier plate 300 is output from the sheet body 900 processing device and moves to above the second positioning conveying component 210, as shown in FIG. 7, the feeding and discharging device is in the discharging preparation stage; Figure 3

[0059] S4, the driving component drives the conveying carrier plate 300 to move from above the second positioning conveying component 210 to below it, during which the sheet body 900 on the conveying carrier plate 300 is transferred to the second positioning conveying component 210, and after the position of the sheet body 900 in the second positioning conveying component 210 is adjusted by the discharging calibration component 500, the discharging operation is completed, as shown in FIG. 8, the feeding and discharging device is in the discharging stage. Figure 4

[0060] The present application uses the conveying carrier plate 300 to lift the positioned sheet body 900 in the feeding component 100, realizes the transfer of the sheet body 900 from the feeding component 100 to the conveying carrier plate 300, and realizes the feeding processing of the sheet body 900 by the conveying carrier plate 300. The processed sheet body 900 is transferred to the discharging component 200 by the conveying carrier plate 300, and in the process of falling of the conveying carrier plate 300, the sheet body 900 is placed on the second positioning conveying component 210, and the discharging operation is completed. The present application adopts the lifting mode of the conveying carrier plate 300 in the feeding and discharging process, which has higher transfer efficiency than the sheet suction mode. Moreover, in the process of lifting feeding and discharging by the conveying carrier plate 300, the present application directly transfers according to the placement and arrangement of the sheet body 900, which can effectively reduce the deviation of the sheet body 900 caused by the transfer process compared with the sheet suction mode using suction disc transfer. The feeding and discharging device of the present application has the characteristics of high transfer efficiency and high accuracy.

[0061] Specifically, the present application has the following characteristics:

[0062] (1) The carrier plate 310 in the present application adopts a shovel type structure and has a triangular side surface, and the first supporting protrusion 320 and the second supporting protrusion 330 are used to support the precursor, which reduces the weight of the carrier plate 310 and improves the transfer stability of the sheet body 900.

[0063] ​​​(2) The wafer 900 is transferred by lifting the carrier plate 310 and lifting and dropping the wafer 900, which effectively improves the wafer transfer efficiency and reduces the damage to the wafer during the transfer process.

[0064] (3) In the loading and unloading process of the present application, the wafer 900 is positioned only when loading and unloading, without the need to repeatedly position the wafer 900, the positioning time is short and the error is small, and the loading and unloading efficiency is higher.

[0065] (4) Compared with the gantry wafer suction type loading and unloading device, the present application has smaller floor area and simpler structure, and does not need to additionally set up a negative pressure device for wafer suction operation.

[0066] The technical features of the above embodiments can be combined in any way. In order to make the description simple, not all possible combinations of the technical features in the above embodiments are described, but as long as the combinations of the technical features do not exist, they should be considered as the scope of the present application.

[0067] The above embodiments only express several implementation manners of the present application, and the description is more specific and detailed, but it should not be understood as a limitation on the scope of the application. It should be pointed out that for ordinary skilled in the art, without departing from the concept of the present application, a number of modifications and improvements can be made, which are all within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the appended claims.

Claims

1. A loading and unloading device, characterized in that, The loading and unloading device includes: The feeding component (100) includes at least one first positioning conveying component (110), on which a plurality of sheets (900) are placed. The unloading component (200) is disposed on the sheet output side of the loading component (100). The unloading component (200) includes at least one second positioning conveying component (210), on which multiple sheets (900) are placed. A conveyor plate (300) is movably disposed between the loading component (100) and the unloading component (200) for transporting the sheet (900) on the loading component (100) to the unloading component (200); a plurality of bearing plates (310) are arranged side by side and spaced apart on the conveyor plate (300), and the bearing plates (310) are used to support the plurality of sheet (900). A driving component is connected to the conveying carrier plate (300). The driving component is used to drive the conveying carrier plate (300) to lift and transfer the sheet (900) on the first positioning conveying component (110) for loading operation, and to carry and transfer the sheet (900) on the conveying carrier plate (300) to the second positioning conveying component (210) for unloading operation.

2. The loading and unloading device as described in claim 1, characterized in that, Each of the two adjacent support plates (310) has a plurality of first support protrusions (320) on its opposite sides. The opposite sides of the sheet (900) placed on the first positioning and conveying component (110) protrude from the first positioning and conveying component (110). The two adjacent support plates (310) pass through the first positioning and conveying component (110) from both sides. The plurality of first support protrusions (320) cooperate to support and lift the sheet (900).

3. The loading and unloading device as described in claim 2, characterized in that, The side of the first support protrusion (320) that contacts the sheet (900) is an overlapping surface, and the angle between the overlapping surface and the horizontal direction is 10°~80°.

4. The loading and unloading device as described in claim 2, characterized in that, The support plate (310) is also provided with a plurality of second support protrusions (330), which are arranged side by side in the horizontal direction between adjacent first support protrusions (320).

5. The loading and unloading device as described in claim 1, characterized in that, The width of the carrier plate (310) gradually decreases in the direction away from the conveyor plate (300).

6. The loading and unloading device as described in claim 1, characterized in that, The loading and unloading device further includes a loading calibration component (400), which is disposed above the loading component (100). The loading calibration component (400) includes a loading position detection component and a first robotic arm (410). The loading position detection component is used to detect the position of the sheet (900) on the loading component (100), and the first robotic arm (410) is used to adjust the position of the sheet (900) on the loading component (100); and / or, The loading and unloading device further includes a loading calibration component (500), which is disposed above the loading component (200). The loading calibration component (500) includes a loading position detection component and a second robotic arm (510). The loading position detection component is used to detect the position of the sheet (900) on the loading component (200), and the second robotic arm (510) is used to adjust the position of the sheet (900) on the loading component (200).

7. The loading and unloading device according to any one of claims 1-6, characterized in that, The feeding component (100) further includes a sheet transfer component (120), which is disposed on the sheet input side of the first positioning and conveying component (110) and is used to transfer a sheet (900) to the first positioning and conveying component (110).

8. The loading and unloading device as described in claim 7, characterized in that, The feeding component (100) further includes a connector (130), which includes a connecting bridge (131) and a lifting component (132). The connecting bridge (131) is disposed between the first positioning conveying component (110) and the sheet conveying component (120). The lifting component (132) is used to drive the connecting bridge (131) to move vertically. When the sheet conveying component (120) conveys the sheet (900) to the first positioning conveying component (110), the lifting component... (132) is used to move the connecting bridge (131) to the connection point of the first positioning conveying component (110) and the sheet conveying component (120) to convey the sheet (900); when the conveying plate (300) moves from below the first positioning conveying component (110) to above the first positioning conveying component (110), the lifting component (132) is used to move the connecting bridge (131) up so that the conveying plate (300) passes through the first positioning conveying component (110).

9. The loading and unloading device according to any one of claims 1-6, characterized in that, The loading and unloading device further includes a first lifting bracket (600); the first lifting bracket (600) is disposed on the sheet input side of the loading component (100), and the driving component drives the conveying carrier plate (300) to move from below the loading component (100) to above the loading component (100) along the first lifting bracket (600); and / or, The loading and unloading device further includes a second lifting bracket (700), which is disposed on the sheet input side of the unloading component (200). The driving component drives the conveying plate (300) along the second lifting bracket (700) to move from above the unloading component (200) to below the unloading component (200).

10. The loading and unloading device according to any one of claims 1-6, characterized in that, The loading and unloading device also includes a return support (800), which is located below the loading component (100) and the unloading component (200). The driving component is used to drive the conveying plate (300) to move along the return support (800) and drive the unloaded conveying plate (300) to the area below the loading component (100).

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