CIP die for pressing CVD-head shaft

Abstract

The utility model discloses a CIP (cleaning in place) die for pressing a CVD-head shaft, which belongs to the technical field of dies and comprises an upper hollow rubber sleeve and a lower hollow rubber sleeve. The lower rubber plug is detachably connected with the lower end of the rubber sleeve; the upper rubber plug is detachably connected with the upper end of the rubber sleeve; and the core rod is arranged in the rubber sleeve. According to the CIP mold, the rubber sleeve, the lower rubber plug, the upper rubber plug and the core rod are arranged, the CIP mold capable of being used for pressing the CVD-head shaft is prepared, powder waste is reduced, cost is saved, and the CIP mold is simple in structure and convenient to assemble and disassemble.

Description

TECHNICAL FIELD

[0001] The utility model relates to mould technical field, especially a kind of CIP mould for pressing CVD-heater shaft. BACKGROUND

[0002] Chemical vapor deposition technology refers to the gaseous reactant or vapor of liquid reactant containing film-forming elements and other gases required for reaction are introduced into reaction chamber, and thin film is generated by chemical reaction on substrate surface. In ultra large scale integrated circuit, many thin films are prepared by CVD method, and in this process, electrostatic chuck that can be heated is often used for fixation and etching deposition.

[0003] In such electrostatic chuck, it is usually composed of shaft and disc, and the two are connected by brazing, and the air leakage rate is controlled at 10 -9 (pam 3 / s) or more, so not only the brazing air tightness is guaranteed, but also the shaft air tightness is guaranteed, so it is more critical to make a shaft with good air tightness. At present, the shaft is generally made by isostatic pressing, glue removal and sintering, and the most important stage is isostatic pressing, so it is particularly important to design a suitable mould. CONTENT OF UTILITY MODEL

[0004] The utility model wants to solve the technical problem to provide a kind of CIP mould for pressing CVD-heater shaft, and the air tightness of the shaft pressed is good, and there is no crack after sintering.

[0005] To solve the above technical problem, the technical scheme of the utility model is as follows:

[0006] A kind of CIP mould for pressing CVD-heater shaft, comprising:

[0007] Upper and lower hollow rubber sleeve;

[0008] Lower rubber plug, the lower rubber plug is detachably connected with the lower end of the rubber sleeve;

[0009] Upper rubber plug, the upper rubber plug is detachably connected with the upper end of the rubber sleeve;

[0010] Core rod, the core rod is arranged in the rubber sleeve.

[0011] Preferably, the center axis of the core rod coincides with the center axis of the rubber sleeve.

[0012] Preferably, the lower rubber plug is provided with lower through hole matched with the core rod, and the upper rubber plug is provided with upper through hole matched with the core rod.

[0013] Preferably, the lower rubber plug includes first step, and the inner side wall of the lower end of the rubber sleeve is matched with the first step.

[0014] Preferably, the rubber sleeve is sleeved with a lower clamp, and the lower clamp is located at the first step.

[0015] Preferably, the upper rubber plug comprises a second step, and the inner wall of the upper end of the rubber sleeve is matched with the second step.

[0016] Preferably, the rubber sleeve is sleeved with an upper clamp, and the upper clamp is located at the second step.

[0017] Preferably, the rubber sleeve, the lower rubber plug and the upper rubber plug are all prepared by PU material.

[0018] The above technical scheme has the following beneficial effects:

[0019] By arranging the rubber sleeve, the lower rubber plug, the upper rubber plug and the mandrel, a CIP mold capable of pressing the CVD-heater shaft is prepared, so as to reduce the waste of powder and save the cost. BRIEF DESCRIPTION OF DRAWINGS

[0020] Fig. 1 It is a sectional view structural schematic diagram of the CIP mold for pressing the CVD-heater shaft.

[0021] Fig. 2 It is a sectional view structural schematic diagram of the lower rubber plug.

[0022] Fig. 3 It is a sectional view structural schematic diagram of the upper rubber plug. DETAILED DESCRIPTION

[0023] The specific embodiments of the utility model will be further described below in combination with the drawings. It should be noted that the description of these embodiments is used to help understand the utility model, but does not constitute the limitation of the utility model. In addition, the technical features involved in each embodiment of the utility model described below can be combined with each other as long as they do not conflict with each other.

[0024] Reference Figs. 1-3 A CIP mold for pressing the CVD-heater shaft, comprising:

[0025] The rubber sleeve 1 is hollow up and down, the CVD-heater shaft is cylindrical, therefore, the rubber sleeve 1 is also set to be cylindrical, and the hollow inside is also a circular hole, so as to be able to press into a shaft;

[0026] The lower rubber plug 2 is detachably connected with the lower end of the rubber sleeve 1, so as to be used repeatedly;

[0027] An upper rubber plug 3 is detachably connected to the upper end of the rubber sleeve 1.

[0028] A mandrel 4 is arranged in the rubber sleeve 1, and the mandrel 4 is used to press the inner hole of the CVD-heater shaft.

[0029] Specifically, referring to Fig. 1 The hollow rubber sleeve 1 is vertically placed, the lower rubber plug 2 is located at the lower end of the rubber sleeve 1 and is connected to the lower end of the rubber sleeve 1, correspondingly, the upper rubber plug 3 is located at the upper end of the rubber sleeve 1 and is connected to the upper end of the rubber sleeve 1, and the mandrel 4 is arranged in the rubber sleeve 1, at this time, the space in the rubber sleeve 1 forms a cavity 11 for loading powder.

[0030] The CIP mold is a mold pressed by using the cold isostatic pressing technology, and the CVD-heater is a heater assembly in a chemical vapor deposition (CVD) device, which is a key component in a semiconductor manufacturing process.

[0031] In some embodiments, the central axis of the mandrel 4 coincides with the central axis of the rubber sleeve 1.

[0032] Specifically, since the CVD-heater shaft has a hole in the inside, the mandrel 4 needs to be arranged during pressing, and the central axis of the hole coincides with the central axis of the CVD-heater shaft, so the central axis of the mandrel 4 coincides with the central axis of the rubber sleeve 1, and the size of the mandrel 4 is consistent with the size of the hole of the CVD-heater shaft.

[0033] In some embodiments, the lower rubber plug 2 is provided with a lower through hole 5 matched with the mandrel 4, and the upper rubber plug 3 is provided with an upper through hole 6 matched with the mandrel 4.

[0034] Specifically, the position of the mandrel 4 is limited by the lower through hole 5 and the upper through hole 6, the axis of the mandrel 4 coincides with the axis of the rubber sleeve 1, so the axes of the lower through hole 5 and the upper through hole 6 also coincide, the size of the mandrel 4 is determined, and the hole diameters of the lower through hole 5 and the upper through hole 6 are also equal. The distance between the upper side wall of the lower rubber plug 2 and the lower side wall of the upper rubber plug 3 is the length of the shaft to be pressed.

[0035] In some embodiments, the lower rubber plug 2 includes a first step 9, and the inner side wall of the lower end of the rubber sleeve 1 is matched with the first step 9.

[0036] Specifically, the first step 9 of the lower rubber plug 2 is inserted into the rubber sleeve 1, and the first step 9 can include two steps, and correspondingly, the inner side wall of the rubber sleeve 1 is also provided with a shape matched with the first step 9. After the first step 9 of the lower rubber plug 2 is inserted into the inside of the rubber sleeve 1, the preliminary installation is completed.

[0037] In some embodiments, the lower collar 7 is sleeved on the rubber sleeve 1 and is located at the first step 9.

[0038] Specifically, after the first step 9 of the lower rubber plug 2 is inserted into the rubber sleeve 1, the lower collar 7 is arranged to ensure that the lower rubber plug 2 and the rubber sleeve 1 are more closely matched. The number of the lower collar 7 can be equal to the number of the steps of the first step 9, and the position of the lower collar 7 can correspond to the position of the steps one by one, so as to ensure that the lower rubber plug 2 and the rubber sleeve 1 are closely and reliably connected.

[0039] In some embodiments, the upper rubber plug 3 includes the second step 10, and the inner side wall of the upper end of the rubber sleeve 1 is matched with the second step 10.

[0040] Specifically, the second step 10 of the upper rubber plug 3 is inserted into the rubber sleeve 1, and the second step 10 can include two steps. Correspondingly, the inner side wall of the rubber sleeve 1 is also provided with a shape matched with the second step 10. After the second step 10 of the upper rubber plug 3 is inserted into the rubber sleeve 1, the preliminary installation is completed. The diameter of the end portion of the upper rubber plug 3 can be equal to or greater than the outer diameter of the rubber sleeve 1. After the second step 10 is inserted into the rubber sleeve 1, the end portion of the upper rubber plug 3 is exposed outside the rubber sleeve 1.

[0041] In some embodiments, the upper collar 8 is sleeved on the rubber sleeve 1 and is located at the second step 10.

[0042] Specifically, after the second step 10 of the upper rubber plug 3 is inserted into the rubber sleeve 1, the upper collar 8 is arranged to ensure that the upper rubber plug 3 and the rubber sleeve 1 are more closely matched. The number of the upper collar 8 can be equal to the number of the steps of the second step 10, and the position of the upper collar 8 can correspond to the position of the steps one by one, so as to ensure that the upper rubber plug 3 and the rubber sleeve 1 are closely and reliably connected. Specifically, the structure of the upper rubber plug 3 can be the same as that of the lower rubber plug 2, and the structure of the upper collar 8 is the same as that of the lower collar 7, which is a stainless steel collar.

[0043] In some embodiments, the rubber sleeve 1, the lower rubber plug 2, and the upper rubber plug 3 are all prepared by PU material.

[0044] Specifically, PU is polyurethane, which has the characteristics of oil resistance, wear resistance, low temperature resistance, aging resistance, high hardness, and elasticity, and can be used to prepare a CIP mold.

[0045] By arranging the rubber sleeve 1, the lower rubber plug 2, the upper rubber plug 3, and the core rod 4, a CIP mold capable of pressing CVD-heater shafts is prepared, so as to reduce the waste of powder and save costs. The CIP mold has a simple structure and is convenient to assemble and disassemble.

[0046] The embodiments of the present application are described in detail in combination with the drawings, but the present application is not limited to the described embodiments. For those skilled in the art, various changes, modifications, replacements and variations of the embodiments can be made without departing from the principles and spirits of the present application, and still fall within the protection scope of the present application.

Claims

1. A CIP mold for pressing a CVD-heater shaft, characterized in that, The utility model relates to a hollow rubber sleeve (1) with a lower rubber plug (2) and an upper rubber plug (3) and a core rod (4) arranged in the hollow rubber sleeve (1). The utility model discloses a hollow rubber sleeve (1) with a lower rubber plug (2) and an upper rubber plug (3) and a core rod (4) arranged in the hollow rubber sleeve (1). The utility model discloses a hollow rubber sleeve (1) with a lower rubber plug (2) and an upper rubber plug (3) and a core rod (4) arranged in the hollow rubber sleeve (1). The utility model discloses a hollow rubber sleeve (1) with a lower rubber plug (2) and an upper rubber plug (3) and a core rod (4) arranged in the hollow rubber sleeve (1). The utility model discloses a hollow rubber sleeve (1) with a lower rubber plug (2) and an upper rubber plug (3) and a core rod (4) arranged in the hollow rubber sleeve (1).

2. A CIP mold for pressing a CVD-heater shaft according to claim 1, characterized in that, The utility model discloses a hollow rubber sleeve (1) with a lower rubber plug (2) and an upper rubber plug (3) and a core rod (4) arranged in the hollow rubber sleeve (1).

3. A CIP mold for pressing a CVD-heater shaft according to claim 1, characterized in that, The utility model discloses a hollow rubber sleeve (1) with a lower rubber plug (2) and an upper rubber plug (3) and a core rod (4) arranged in the hollow rubber sleeve (1).

4. A CIP mold for pressing a CVD-heater shaft according to claim 1, characterized in that, The utility model discloses a hollow rubber sleeve (1) with a lower rubber plug (2) and an upper rubber plug (3) and a core rod (4) arranged in the hollow rubber sleeve (1).

5. A CIP mold for pressing a CVD-heater shaft according to claim 4, characterized in that The utility model discloses a hollow rubber sleeve (1) with a lower rubber plug (2) and an upper rubber plug (3) and a core rod (4) arranged in the hollow rubber sleeve (1).

6. A CIP mold for pressing a CVD-heater shaft according to claim 1, characterized in that, The utility model discloses a hollow rubber sleeve (1) with a lower rubber plug (2) and an upper rubber plug (3) and a core rod (4) arranged in the hollow rubber sleeve (1).

7. A CIP mold for pressing a CVD-heater shaft according to claim 6, characterized in that The utility model discloses a hollow rubber sleeve (1) with a lower rubber plug (2) and an upper rubber plug (3) and a core rod (4) arranged in the hollow rubber sleeve (1).

8. A CIP mold for pressing a CVD-heater shaft according to claim 1, characterized in that, The utility model discloses a hollow rubber sleeve (1) with a lower rubber plug (2) and an upper rubber plug (3) and a core rod (4) arranged in the hollow rubber sleeve (1). The utility model discloses a hollow rubber sleeve (1) with a lower rubber plug (2) and an upper rubber plug (3) and a core rod (4) arranged in the hollow rubber sleeve (1). The utility model discloses a hollow rubber sleeve (1) with a lower rubber plug (2) and an upper rubber plug (3) and a core rod (4) arranged in the hollow rubber sleeve (1). The utility model discloses a hollow rubber sleeve (1) with a lower rubber plug (2) and an upper rubber plug (3) and a core rod (4) arranged in the hollow rubber sleeve (1). The utility model discloses a hollow rubber sleeve (1) with a lower rubber plug (2) and an upper rubber plug (3) and a core rod (4) arranged in the hollow rubber sleeve (1). The utility model discloses a hollow rubber sleeve (1)

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