Precision machining tool for side face of ultrathin element

Abstract

The utility model relates to an ultrathin element side face precision machining tool which comprises a workpiece disc, a supporting frame, a tool installation plate and an element positioning plate, an element penetrating hole is formed in the center of the workpiece disc, and the supporting frame is arranged on the workpiece disc and located on the periphery of the element penetrating hole. The tool mounting plate is arranged on the support frame in a sliding manner, and is vertical to the workpiece disc; the element positioning plate is arranged on the tool mounting plate in parallel, and a floating pressure adjusting mechanism is arranged between the upper end of the tool mounting plate and the supporting frame. According to the utility model, the perpendicularity between the processed side surface and the large surface as well as between the two adjacent side surfaces of the ultrathin element is within 2 microns, and the relative relation of the perpendicularity between the processed side surface and the large surface is not changed in the processing process, so that a reliable foundation is provided for the subsequent assembly and use of the element; error accumulation and performance reduction caused by perpendicularity deviation are reduced, and the flatness of the machined side face of the ultra-thin element reaches the submicron level.

Description

TECHNICAL FIELD

[0001] The utility model relates to workpiece polishing technical field especially is a kind of ultra-thin component side precision machining tool. BACKGROUND

[0002] With the rapid development of modern science and technology, especially in the field of microelectronics, optics and precision machinery, the application of ultra-thin components is increasingly widespread. These components usually have very high precision requirements, especially in the machining process of their side, which needs to achieve sub-micron level flatness and micron level perpendicularity. However, the existing machining technology faces many challenges when processing the side of ultra-thin components.

[0003] Flatness control difficulty: traditional machining methods are difficult to achieve sub-micron level flatness requirements when processing the side of ultra-thin components. Due to the extremely small thickness of the components, deformation is likely to occur during the machining process, resulting in non-compliance of flatness.

[0004] Perpendicularity is difficult to guarantee: the perpendicularity requirement of the side of ultra-thin components to the large surface and adjacent side is extremely high, usually within 2 microns. However, the existing machining equipment and process have deficiencies in maintaining such high-precision perpendicularity. During the machining process, the relative position of the components is likely to change, resulting in perpendicularity deviation.

[0005] Stability problem in the machining process: due to the fragile structure of ultra-thin components, they are easily affected by external factors such as vibration and temperature change during the machining process. These factors will cause instability of machining precision, thereby affecting the quality and performance of the product.

[0006] Tooling design complexity: in order to meet the high-precision machining requirements, the existing tooling design often needs complex structure and high-precision components, which not only increases the manufacturing cost, but also makes the debugging and maintenance of the machining process more difficult. INVENTION CONTENTS

[0007] Therefore, the utility model solves the technical problems in the prior art and provides an ultra-thin component side precision machining tool, which significantly improves the flatness of the microwave component during the machining process and meets the demand of high-precision application.

[0008] The utility model provides a kind of ultra-thin element side precision machining tool to solve the above technical problems, including: workpiece disc, support frame, tool mounting plate and element positioning plate, the workpiece disc center position is equipped with element through hole, the support frame is set on the workpiece disc, and it is located the periphery of the element through hole;The tool mounting plate is slidably arranged on the support frame, and with the workpiece disc keeps vertical state;The element positioning plate is parallelly arranged on the tool mounting plate;For installing ultra-thin element on the element positioning plate;Floating pressure adjusting mechanism is equipped between the upper end of the tool mounting plate and the support frame;When the tool mounting plate is up and down along the support frame, the element positioning plate drives ultra-thin element to realize synchronous up and down floating.

[0009] In an embodiment of the utility model, the support frame includes a base plate, a top plate and guide columns, the base plate is arranged on the workpiece disc, the top plate and the base plate are connected by guide columns, and the guide columns keep vertical state with the workpiece disc.

[0010] In an embodiment of the utility model, the tool mounting plate includes two, and is oppositely arranged on the support frame, and the two ends of each tool mounting plate are slidably connected with the guide columns by linear bearings.

[0011] In an embodiment of the utility model, the tool mounting plate is equipped with a pressing plate, the pressing plate is connected with the element positioning plate by fasteners, and the element positioning plate is pressed from the top.

[0012] In an embodiment of the utility model, a pressure adjusting mechanism is equipped between the upper end of the element positioning plate and the support frame.

[0013] In an embodiment of the utility model, the pressure adjusting mechanism includes an adjusting screw and a spring, the adjusting screw is arranged between the tool mounting plate and the element positioning plate, and the spring is arranged on the outside of the adjusting screw.

[0014] In an embodiment of the utility model, the element positioning plate includes a base plate, a pad plate, a positioning block and a pressing strip, the pad plate is arranged on the surface of the base plate, one side of the base plate is equipped with a positioning block, the pressing strip is connected with the positioning block by fasteners, and is used for fixing the machined ultra-thin element on the pad plate.

[0015] In an embodiment of the utility model, the opposite side of the base plate, which is located opposite the positioning block, is also equipped with a first locking fixture, which is used for pressing the ultra-thin element to be machined from the side.

[0016] In an embodiment of the utility model, the positioning block is also equipped with a gasket, and the gasket corresponds to the first locking fixture one by one.

[0017] In one embodiment of the utility model, second locking device is equipped on the substrate still, be used for to the ultra -thin element of processing from top compression.

[0018] In one embodiment of the utility model, first locking fixing device and second locking fixing device include top screw fixed block and top compression screw, top screw fixed block sets up on element positioning plate, top compression screw sets up on top screw fixed block.

[0019] The above technical scheme of the utility model has the following beneficial effects compared with the prior art:

[0020] The ultra -thin element side precision machining frock of the utility model can guarantee that the perpendicularity of the machined side of the ultra -thin element and the big face and the adjacent two sides is within 2 microns, and can guarantee that the perpendicularity of the machined side and the big face does not change in the relative relationship in the machining process, this high-precision perpendicularity control provides reliable basis for subsequent assembly and use of the element, reduces error accumulation and performance decline caused by perpendicularity deviation, makes the planeness of the machined side of the ultra -thin element reach submicron level. BRIEF DESCRIPTION OF DRAWINGS

[0021] In order to make the content of the utility model more easily be clearly understood, the following according to the specific embodiment of the utility model and combining with the drawings, the utility model is further detailed, wherein

[0022] Fig. 1 It is the structure schematic view of the ultra -thin element side precision machining frock in the preferred embodiment of the utility model;

[0023] Fig. 2 It is the structure schematic view of the element positioning plate of the utility model;

[0024] Description of the drawings reference sign: 1, workpiece disc;2, support frame;21, bottom plate;22, top plate;23, guide pillar;3, frock mounting plate;4, element positioning plate;6, floating pressure adjusting mechanism;7, first locking fixing device;8, second locking device;9, linear bearing. DETAILED DESCRIPTION

[0025] The utility model is further explained in conjunction with the drawings and specific embodiment, so that the person skilled in the art can better understand the utility model and can be implemented, but the embodiment is not as the limitation of the utility model.

[0026] Refer to Figs. 1-2The utility model provides a kind of ultra-thin element side precision machining tool, including: workpiece disc 1, support frame 2, tool mounting plate 3 and element positioning plate 4, the workpiece disc 1 center position is equipped with element through hole, the support frame 2 is set on the workpiece disc 1, and located the periphery of the element through hole;The tool mounting plate 3 is slidably arranged on the support frame 2, and with the workpiece disc 1 keeps vertical state;The element positioning plate 4 is parallelly arranged on the tool mounting plate 3;The element positioning plate 4 is used for installing ultra-thin element, and the upper end of the tool mounting plate 3 is equipped with floating pressure adjusting mechanism 6 between the support frame 2;When the tool mounting plate 3 is up and down along the support frame 2, the element positioning plate 4 drives ultra-thin element to realize synchronous up and down movement.

[0027] By setting workpiece disc 1, support frame 2, tool mounting plate 3 and element positioning plate 4, and enabling tool mounting plate 3 to be up and down along support frame, thereby driving element positioning plate 4 and ultra-thin element installed thereon to realize synchronous up and down movement, this structural design can effectively control the position change of ultra-thin element during processing, improve processing precision, ensure that the perpendicularity of the side surface of ultra-thin element and large surface and adjacent side surface meets high-precision requirements, meet the processing standards of sub-micron level flatness and micron level perpendicularity, provide reliable foundation for subsequent assembly and use, reduce error accumulation and performance decline.

[0028] Among them, support frame 2 includes bottom plate 21, top plate 22 and guide column 23, the bottom plate 21 is set on the workpiece disc 1, the top plate 22 and bottom plate 21 are connected through guide column 23, and the guide column 23 keeps vertical state with the workpiece disc 1.This structural design makes support frame 2 have good stability and rigidity, can provide stable support and accurate guidance for tool mounting plate 3, ensure that tool mounting plate keeps vertical state during lifting, thereby guaranteeing the perpendicularity and position precision of element positioning plate 4 and ultra-thin element, further improving processing quality and reducing processing error.

[0029] Tool mounting plate 3 includes two in the embodiment, oppositely set on the support frame 2, and the two ends of each tool mounting plate 3 are slidably connected with guide column 23 through linear bearing 9 respectively.The design of linear bearing 9 enables tool mounting plate 3 to stably and flexibly lift along guide column 23, and since linear bearing 9 is used, friction is reduced, and the stability and precision of movement are improved, which is conducive to accurately controlling the up and down movement of element positioning plate 4 and ultra-thin element, ensuring the position stability of element during processing, reducing processing error caused by unstable movement, and improving processing efficiency and quality.

[0030] In addition, the tool mounting plate 3 is provided with a pressing plate connected with the element positioning plate 4 through fasteners to press the element positioning plate 4 from the top. This structure design can effectively fix the element positioning plate 4, prevent it from loosening or shifting during processing, ensure the stable installation of the ultra-thin element on the element positioning plate 4, improve the stability during processing, avoid processing errors caused by the instability of the element positioning plate 4, and ensure the processing precision and quality.

[0031] The floating pressure adjusting mechanism 6 includes an adjusting screw arranged between the tool mounting plate 3 and the top plate 22 and a spring arranged outside the adjusting screw. The pressure adjusting mechanism 6 can adjust the pressure between the tool mounting plate 3 and the support frame 2 according to the processing needs. This design makes the tool adapt to ultra-thin elements of different thicknesses and materials. By adjusting the pressure, the element can be ensured to be properly clamped during processing to prevent deformation or damage of the element, while ensuring the stability and processing precision of the element, and improving the applicability and flexibility of the tool. When adjusting the pressure, the adjusting screw can be rotated to accurately control the pressure between the element positioning plate 4 and the support frame 2. The spring can provide stable elastic force to make the pressure adjustment more stable, which is conducive to adapting to the pressure requirements under different processing conditions and ensuring the stability and processing quality of the ultra-thin element during processing.

[0032] The element positioning plate 4 includes a base plate 41, a pad plate 42, a positioning block 43, and a pressing strip 44. The pad plate 42 is arranged on the surface of the base plate 41, one side of the base plate 41 is provided with the positioning block 43, and the pressing strip 44 is connected with the positioning block 43 through fasteners to fix the processed ultra-thin element on the pad plate 42. This structure design can effectively fix the ultra-thin element, ensure its stability and position precision during processing, and the pad plate 42 and the positioning block 43 can provide good support and positioning for the ultra-thin element, and the use of the pressing strip 44 can further enhance the fixing effect of the element to prevent the ultra-thin element from shifting or deforming during processing, thereby improving the processing precision and quality.

[0033] The base plate 41 is also provided with a first locking and fixing device 7 on the side opposite to the positioning block 43 to press the processed ultra-thin element from the side, and the positioning block 43 is also provided with a gasket 45 corresponding to the first locking and fixing device 7. The first locking and fixing device 7 can further fix the ultra-thin element from the side to ensure its stability during processing and prevent the ultra-thin element from moving or tilting laterally. The gasket 45 can protect the surface of the element to avoid damage to the element caused by the pressing of the first locking and fixing device 7, thereby improving the protection and processing precision of the tool.

[0034] The second locking device 8 is arranged on the substrate 41 and used for pressing the ultra-thin element to be processed from the top. The design can further fix the ultra-thin element from the top, ensure the stability of the ultra-thin element during processing, prevent the ultra-thin element from moving or vibrating in the vertical direction, and form a comprehensive fixing effect in cooperation with the second locking device 8 on the side, thereby improving the stability and processing precision of the ultra-thin element and reducing the processing error caused by the displacement of the ultra-thin element.

[0035] In the embodiment, the first locking device 7 and the second locking device 8 include a jackscrew fixing block and a jackscrew. The jackscrew fixing block is arranged on the element positioning plate 4, and the jackscrew is arranged on the jackscrew fixing block. By adjusting the depth of the jackscrew in the jackscrew fixing block, the locking of the side and the top of the ultra-thin element can be realized. The design makes the locking more flexible and accurate, and can be adjusted according to the actual situation of the ultra-thin element, thereby ensuring the stability and position precision of the element during processing and improving the applicability and processing quality of the tooling.

[0036] Based on the above-mentioned structure, the side precision machining tooling for the ultra-thin element can not only ensure the perpendicularity between the side to be processed and the two adjacent sides, but also ensure the perpendicularity between the side to be processed and the large face, and the relative relationship does not change during processing. In addition, the overall movement direction of the element positioning plate 4 on the support frame 2 is parallel to the direction of the large face and the two adjacent sides. Through the high-precision flatness control, the processing quality of the ultra-thin element can be significantly improved, the demand for high-precision application can be met, and the ultra-thin element with different thicknesses and materials, as well as different processing conditions and requirements, can be adapted. The flexibility and adaptability enable the tooling to quickly adjust to the best state during processing, reduce the processing time loss caused by tooling adjustment, and improve the processing efficiency.

[0037] Obviously, the above-mentioned embodiments are only examples for clearly illustrating the application, and are not intended to limit the embodiments. Based on the above description, other different forms of changes or variations can be made by those skilled in the art. Here, all the embodiments need not and cannot be exhausted. The obvious changes or variations derived therefrom are still within the protection scope of the application.

Claims

1. An ultra-thin element side precision machining tool, characterized in that: The utility model provides a kind of super-thin component processing device, including: workpiece disc, support frame, tool mounting plate and element positioning plate, the workpiece disc central position is equipped with element through hole, the support frame is set on the workpiece disc, and located the periphery of the element through hole;The tool mounting plate is slidably arranged on the support frame, and with the workpiece disc keeps vertical state;The element positioning plate is parallelly arranged on the tool mounting plate;The element positioning plate is used to install ultra-thin component;The upper end of the tool mounting plate and the support frame are equipped with floating pressure adjusting mechanism;When the tool mounting plate moves up and down along the support frame, the element positioning plate drives ultra-thin component to realize synchronous up and down floating. The support frame includes a bottom plate, a top plate, and guide columns. The bottom plate is arranged on the workpiece disc. The top plate and the bottom plate are connected by guide columns, and the guide columns keep a vertical state with the workpiece disc.

2. The precision machining tool for the side surface of an ultrathin component according to claim 1, characterized in that: The tool mounting plate includes two, which are oppositely arranged on the support frame. The two ends of each tool mounting plate are slidably connected with the guide columns by linear bearings.

3. The precision machining tool for the side surface of an ultrathin component according to claim 2, characterized in that: The tool mounting plate is equipped with a pressing plate, which is connected with the element positioning plate by fasteners to press the element positioning plate from the top.

4. The precision machining tool for the side surface of an ultrathin component according to claim 3, characterized in that: The floating pressure adjusting mechanism includes an adjusting screw and a spring. The adjusting screw is arranged between the tool mounting plate and the element positioning plate, and the spring is arranged outside the adjusting screw.

5. The precision machining tool for the side surface of an ultrathin component according to claim 1, characterized in that: The element positioning plate includes a base plate, a pad plate, a positioning block, and a pressing strip. The pad plate is arranged on the surface of the base plate. One side of the base plate is equipped with a positioning block. The pressing strip is connected with the positioning block by fasteners to fix the processed ultra-thin component on the pad plate.

6. The precision machining tool for the side surface of an ultrathin component according to claim 1, characterized in that: The opposite side of the base plate to the positioning block is also equipped with a first locking fixture for pressing the ultra-thin component to be processed from the side.

7. The precision machining tool for the side surface of an ultrathin component according to claim 6, characterized in that: The positioning block is also equipped with a gasket, which corresponds to the first locking fixture one by one.

8. The precision machining tool for the side surface of an ultrathin component according to claim 7, characterized in that: The base plate is also equipped with a second locking device for pressing the ultra-thin component to be processed from the top.

9. The precision machining tool for the side surface of an ultrathin component according to claim 8, characterized in that: The first locking fixture and the second locking fixture include a top screw fixed block and a tightening screw. The top screw fixed block is arranged on the element positioning plate, and the tightening screw is arranged on the top screw fixed block.

10. The precision machining tool for the side surface of an ultrathin component according to claim 9, characterized in that: ​

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