Specific process medium tail gas closed oxidation treatment device

Abstract

The utility model provides a specific process medium tail gas closed oxidation treatment device which comprises a closed oxidizer for combusting specific process medium tail gas, and a secondary adsorber connected with a combustion product outlet of the closed oxidizer and used for adsorbing harmful products after combustion, a gas output pipeline of the secondary adsorber is connected with an air inlet of the induced draft fan, an automatic control valve is arranged on the gas output pipeline, the closed oxidizer is provided with an oxidizing agent inlet and a specific process medium tail gas inlet, the oxidizing agent inlet is connected with an oxidizing agent input pipeline, and the specific process medium tail gas inlet is connected with a specific process medium tail gas input pipeline. According to the closed oxidation treatment device for the tail gas of the specific process medium, disclosed by the utility model, a high-burning-explosive medium is quickly burnt out in the closed oxidizer, harmful combustion products are adsorbed and then discharged, so that discharged substances do not generate flying fire, and the discharged substances are ensured not to have harmfulness.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the field of fine chemical industry, specifically relates to a specific process medium tail gas closed oxidation treatment device. BACKGROUND

[0002] Highly flammable medium (i.e. specific process medium tail gas) refers to the medium with close ignition temperature to normal temperature, extremely flammable characteristics and extremely wide explosion limit range. The highly flammable medium, especially the high purity gas material of such medium, has a wide application prospect in the field of fine chemical industry. It is not only an important material required for the production of silicon wafer etching, passivation and epitaxy processes in the manufacturing of large-scale integrated circuits in the electronic industry, but also applied to the pharmaceutical, chemical and semiconductor industries, and involves application research in various fields, such as optical communication, metal smelting, etc. These media have a great driving effect on many industries, making their economic and social value increasingly improve.

[0003] With the development of related industries and the upgrading of industries, the market demand for highly flammable medium is expanding, and the gas production process of multi-specification and multi-quality products is also developing. In the gas production process, a large amount of tail gas rich in highly flammable medium will be generated due to vacuum replacement operation or medium leakage. The commonly used tail gas treatment process methods in the industry mainly include dry adsorption method, wet absorption method, reaction absorption method, etc. Among them, the dry adsorbent such as activated carbon is used in the dry adsorption method under general working conditions; the wet absorption method uses alkali solution to dissolve the corresponding substances, and is used when the solubility is high; the reaction absorption method absorbs through various neutralization reactions. Although these tail gas treatment methods have significant adsorption treatment effect, the adsorbent used naturally has periodic failure, and it is not easy to be detected and replaced in time, which can easily lead to self-ignition or instantaneous explosion limit of highly flammable medium when it is discharged at high altitude after the adsorption equipment, causing deflagration or detonation, and causing great risk to personal and property safety. Therefore, it is urgent to improve the existing tail gas treatment process.

[0004] CN110013759A discloses a device and method for low-temperature catalytic oxidation treatment of hydrogen-containing purge gas, wherein the hydrogen-containing purge gas and air enter the tubular catalytic oxidation reactor, contact the catalyst, and undergo non-combustion oxidation reaction. The reacted gas is discharged through the discharge line, and the generated water is discharged from the condensate discharge line; the tubular catalytic oxidation reactor is provided with a heating and temperature control system, and an internal fire barrier wire mesh is provided; the catalyst is platinum or palladium metal powder, or a metal wire mesh, or supported on an alumina carrier.

[0005] CN118416689A discloses a kind of processing method of hydrocarbon column non-condensable gas, including the introduction of non-condensable gas and oxidizing gas, mixing, reaction and export etc. Benefit from the setting and collocation mode of quenching layer and catalyst bed, the reaction of non-condensable gas imported from hydrocarbon column in reactor will not have the danger of explosion etc. even in explosive limit, ensure the intrinsic safety of hydrocarbon column non-condensable gas treatment, and due to the catalytic effect of catalyst active component in catalyst bed and quenching layer, the treatment of non-condensable gas is more efficient.

[0006] However, the prior art has not disclosed an effective treatment device for high flammable and explosive medium. Utility model content

[0007] The utility model provides a kind of specific process medium tail gas closed oxidation treatment device, make high flammable and explosive medium rapidly burn out in closed oxidizer and discharge after adsorbing harmful combustion product, so that the material after discharge will not produce flying fire, ensure that discharge material is not harmful.

[0008] The technical scheme adopted by the utility model is as follows:

[0009] A specific process medium tail gas closed oxidation treatment device includes a closed oxidizer for burning specific process medium tail gas, a secondary adsorber connected to the combustion product outlet of the closed oxidizer and used for adsorbing harmful products after combustion, a gas output pipeline of the secondary adsorber is connected to the air inlet of an induced draft fan, a self-control valve is arranged on the gas output pipeline, the closed oxidizer is provided with an oxidizing agent inlet and a specific process medium tail gas inlet, the oxidizing agent inlet is connected to an oxidizing agent input pipeline, and the specific process medium tail gas inlet is connected to a specific process medium tail gas input pipeline.

[0010] In this application, the specific process medium tail gas is a high flammable and explosive medium, which refers to a medium with an ignition temperature close to room temperature, extremely flammable characteristics, and an extremely wide explosive limit range, existing in high-purity electronic gas, chip manufacturing, and cutting-edge technology gas fields, such as gas with an explosive limit of 1.0% to 98% at an ignition temperature below 85°C to around 100°C, such as electronic-grade phosphine tail gas and silicon tetrahydride.

[0011] Further, the closed oxidation device can be a horizontal container, a cylindrical structure, a support type such as a saddle support, and the size of the closed oxidation device can be DN900x1800mm, but is not limited thereto. The closed oxidation device comprises an outer cylinder, a countercurrent mass transfer distributor fixed in the outer cylinder, and a head provided at both left and right ends of the outer cylinder. The specific process medium tail gas inlet is provided at the left head, preferably at the center of the left head. The combustion product outlet is provided at the right head, preferably at the center of the right head. The oxidant inlet is provided at the top of the right end of the outer cylinder. The specific process medium tail gas inlet, the combustion product outlet, and the oxidant inlet are all in the form of a pipe opening. The specific process medium tail gas inlet, the combustion product outlet, and the oxidant inlet are all welded to the outer cylinder to ensure the sealing of the connection.

[0012] The countercurrent mass transfer distributor comprises a vertical draft tube fixedly connected to the outer cylinder, a plurality of mass transfer rods connected to the draft tube and distributed transversely, a plurality of mass transfer holes distributed on the mass transfer rods, and a simply supported rib for supporting the mass transfer rods.

[0013] The draft tube is, for example, at least two, and the plurality of draft tubes are preferably arranged in parallel and are preferably arranged transversely on the same cross section of the outer cylinder, and are usually arranged on the side opposite to the specific process medium tail gas inlet (i.e., the side close to the combustion product outlet) of the outer cylinder. The top end and the bottom end of the draft tube are, for example, welded to the inner wall of the outer cylinder. The draft tube is arranged below the oxidant inlet. The plurality of draft tubes are connected by a distribution pipe. The oxidant inlet pipe is connected to the distribution pipe for conveying the oxidant to the distribution pipe. The distribution pipe is used to distribute the oxidant to each draft tube. Each draft tube is connected to a plurality of mass transfer rods arranged in the height direction of the draft tube (the plurality of mass transfer rods are connected perpendicularly to the draft tube). The mass transfer rod is a hollow rod. The mass transfer rod extends towards the specific process medium tail gas inlet (the longitudinal axis of the mass transfer rod is generally consistent with the longitudinal axis of the outer cylinder). The mass transfer rod is used to realize the countercurrent mass transfer of the oxidant and the specific process medium tail gas. The draft tube can be, for example, two, three, four, etc. For example, 2-8 mass transfer rods can be arranged on each draft tube, such as 3, 4, or 5 mass transfer rods.

[0014] Preferably, the opening direction of the mass transfer hole is perpendicular to the flow direction of the process medium tail gas. The mass transfer hole is, for example, uniformly distributed on the mass transfer rod. For example, 8-200 mass transfer holes can be arranged on each mass transfer rod, preferably about 10-60 mass transfer holes, and further 20-40 mass transfer holes, such as 28 mass transfer holes. The diameter of the mass transfer hole can be, for example, between φ10mm and φ25mm. The mass transfer hole is used to realize mass transfer with the largest contact area. The lateral arrangement of the mass transfer hole directly increases the disturbance of the airflow, so that the oxidant participates in the reaction in a turbulent flow state.

[0015] The simple support bars are connected between the flow guide cylinder and the mass transfer rod in a diagonal direction, and are used for supporting the mass transfer rod to ensure the strength and rigidity of the reverse flow mass transfer distributor.

[0016] Further, the lower part of the outer cylinder is provided with an electric heating disc, the electric heating disc is connected with a temperature sensor arranged in the closed oxidizer, the electric heating disc is connected with the signal output end of the controller, and the temperature sensor is connected with the signal input end of the controller, the temperature in the closed oxidizer is set as T℃, the value of T is 30℃-50℃ higher than the ignition temperature of the specific process medium tail gas, at this time, the catalyst activity is the strongest, and the sufficiency of the oxidation combustion is ensured, when the temperature in the closed oxidizer is lower than the value of T, the controller is linked to increase the heating power of the electric heating disc, and when the temperature in the closed oxidizer is higher than the value of T, the controller is linked to decrease the heating power of the electric heating disc.

[0017] Further, the specific process medium tail gas input pipeline is formed by combining a process vacuum tail gas input pipeline and an emergency tail gas input pipeline, the gas inlet of the process vacuum tail gas input pipeline is communicated with a production device, for example, a rectification and purification device or a mixed gas filling device, the process vacuum tail gas input pipeline is used for processing the specific process medium generated due to leakage of the rectification and purification device or the mixed gas filling device, the gas inlet of the emergency tail gas input pipeline is communicated with the environmental space of a workshop where the production device is arranged, and is used for processing the specific process medium leaked due to an accident in the workshop, an explosion-proof split air conditioner is arranged in the workshop, and is used for realizing a low-temperature environment in the workshop, so as to ensure that the temperature of the specific process medium tail gas in the workshop is not higher than the ignition temperature of the medium, thereby avoiding causing explosion, the process vacuum tail gas input pipeline and the emergency tail gas input pipeline are respectively provided with control valves, the gas amount of the process vacuum tail gas is small, and the pipe diameter of the process vacuum tail gas input pipeline is for example between φ50mm and φ100mm, the gas amount of the emergency tail gas is related to the volume of the workshop where the accident occurs, and the pipe diameter of the emergency tail gas input pipeline is for example between φ400mm and φ800mm.

[0018] Further, the process vacuum tail gas input pipeline is provided with a first adsorber, the volume of the first adsorber can be 300-600L, preferably about 500L, the first adsorber is filled with adsorbent, the adsorbent is copper oxide or a mixture of manganese, aluminum and calcium, the first adsorber is used for preliminary adsorption of high flammability medium contained in the process vacuum tail gas to remove most of the high flammability medium, the process vacuum tail gas can be, for example, electronic grade phosphine tail gas (ignition temperature about 100℃, explosion limit 1.8%-98%, extremely easy to ignite) or tetrahydrogen silicon (ignition temperature below 85℃, explosion limit 1.4%-96%, extremely easy to ignite) with a purity of 5.0N (99.999%). Due to the extremely high concentration of medium in the process vacuum tail gas, it needs to be treated by the first adsorber first, and then combined with the emergency tail gas through a specific process medium tail gas input pipeline to enter the closed oxidizer for treatment together or in different time periods.

[0019] Further, the oxidant inlet is connected with an oxidant input pipeline for conveying low-temperature compressed air, the oxidant is low-temperature compressed air, the temperature of the low-temperature compressed air can be, for example, 25℃-30℃, the pressure can be, for example, 0.1-0.2MPa, preferably about 0.15MPa, the gas source pressure is 0.6-0.8MPa, and the pressure is reduced to 0.15MPa by a pressure reducing valve. The low-temperature compressed air is used as the oxidant, and the amount of the low-temperature compressed air is in a certain proportional relationship with the total flow of the two kinds of tail gas. Generally, the proportion of the flow of the oxidant in the total flow of the two kinds of tail gas is controlled to be less than 10% of the lower limit of the explosion of the specific process medium. This concentration is within a safe range, which can effectively avoid the risk of combustion and explosion during the reaction process.

[0020] Further, the gas output pipeline is divided into a first branch pipe and a second branch pipe, and self-control valves are arranged on the first branch pipe and the second branch pipe, for example, the self-control valves can be pneumatic regulating valves, preferably pneumatic butterfly valves, and the self-control valves are connected with the output end of the controller.

[0021] Further, the induced draft fan includes a first induced draft fan and a second induced draft fan, the air inlet of the first induced draft fan is connected with the first branch pipe, the air inlet of the second induced draft fan is connected with the second branch pipe, the first induced draft fan and the second induced draft fan are used one by one in normal conditions, and all are opened in accident conditions. The induced draft fan provides a power source for the specific process medium tail gas to enter the closed oxidation treatment device, the induced draft fan is connected with the output end of the controller, and the input end of the controller is connected with a detection alarm in the workshop, for example, after the toxic and flammable gas detection alarm in the workshop alarms, the self-control valves are immediately interlocked to be opened, the induced draft fan is started synchronously, and when the specific process medium tail gas medium treatment is completed or the alarm in the workshop is removed, the self-control valves and the induced draft fan can be interlocked to be closed.

[0022] Further, the bottom of the outer cylinder is provided with a hand hole for putting or taking out the catalyst from the outer cylinder, so that the catalyst can be replaced regularly to ensure long-term activity of the catalyst, and the catalyst is placed at the lower edge of the inner part of the outer cylinder, and the catalyst can be one or more of vanadium oxide (V2O5), molybdenum oxide (MnO3), copper oxide (CuO), manganese dioxide (MnO2) and the like to achieve the oxidation effect, and the frequency of replacing the catalyst is determined according to the gas volume of the specific process medium tail gas to be treated and the number of times of starting the fan, for example, when the gas volume of the specific process medium tail gas to be treated is 7000m 3 / h and the number of times of starting the device is 24, the catalyst needs to be replaced once a week.

[0023] Further, the outer cylinder below the specific process medium tail gas inlet is provided with a regeneration steam inlet, the regeneration steam inlet is connected with a regeneration steam input pipeline, the outer cylinder below the combustion product outlet is provided with a regeneration steam outlet, the regeneration steam outlet is connected with a regeneration steam output pipeline, the regeneration steam inlet is used for inputting external steam for regenerating the catalyst, and the regeneration steam outlet is used for outputting steam, the steam input into the outer cylinder is used for purging the catalyst to remove organic by-products, mechanical dust or impurities on the surface of the catalyst, so that the catalyst can be regenerated in situ without being replaced.

[0024] Further, the secondary adsorber is provided with an adsorbent, and the adsorbent can be granular activated carbon, and the secondary adsorber is used for adsorbing trace harmful products after combustion, and the specification of the secondary adsorber is DN900*1100mm.

[0025] Further, the controller is a DCS or PLC control system, the control circuit of the controller can be realized through simple programming by those skilled in the art, and the control mode and circuit connection belong to the common knowledge in the field, so that the control mode and circuit connection will not be explained in detail.

[0026] Further, the closed oxidation treatment device of the utility model is integrally pry-mounted on the base, the floor area is reduced, the site resources are comprehensively utilized, the equipment configuration is optimized, the closed oxidation treatment device can be integrally connected with the existing tail gas absorption equipment, the integration pry-mounted is realized, and the floor space is saved.

[0027] In the application, the adsorber is an equipment provided with an adsorbent to realize gas-solid adsorption and desorption.

[0028] The utility model further provides a specific process medium tail gas closed oxidation treatment process using the specific process medium tail gas closed oxidation treatment device, and the process comprises the following steps:

[0029] Firstly, the specific process medium tail gas must be disposed in a low-temperature environment before being subjected to oxidation treatment (achieved by setting an explosion-proof split air conditioner in the workshop, by setting the explosion-proof split air conditioner, the low-temperature environment in the workshop is ensured, so that the temperature of the specific process medium tail gas in the workshop is not higher than the ignition temperature of the medium itself, thereby the specific process medium tail gas will not cause combustion and explosion, the temperature control value of different specific process media is different, and the specific medium is set according to the specific medium, for example, the ignition temperature of tetrahydrogenated silicon is 50 DEG C to 85 DEG C, and the temperature of the tetrahydrogenated silicon needs to be controlled to below 25 DEG C in advance, so that the tetrahydrogenated silicon does not self-ignite before being subjected to oxidation treatment), and the process vacuum tail gas is subjected to adsorption purification by a first adsorber, and then is jointly or in time periods with the emergency tail gas into a closed oxidizer, the specific process medium tail gas from the left end of the closed oxidizer enters the internal space of the outer cylinder, the low-temperature high-pressure oxidant is continuously introduced into the oxidant inlet pipe from the oxidant inlet of the right end of the closed oxidizer, and then enters the distribution pipe, the distribution pipe distributes the oxidant to each flow guide cylinder, the oxidant enters the mass transfer rod from the flow guide cylinder, the oxidant moves left in the mass transfer rod and overflows from the mass transfer hole, and the specific process medium tail gas moves left, so that the specific process medium tail gas and the oxidant are subjected to countercurrent mass transfer oxidation combustion process, under the conditions of the catalyst and high temperature (the temperature in the closed oxidizer is set as T DEG C, and the T value is 30 DEG C to 50 DEG C higher than the ignition temperature of the specific process medium tail gas), the high-efficiency mass transfer combustion reaction is further completed, and the combustion product is obtained, the combustion product is a mixture containing chemical components such as phosphorus and copper, the combustion product is transported to the second adsorber for secondary adsorption, and the harmful substances such as phosphorus and copper are removed, and the gas output from the second adsorber is discharged to the high-altitude diffusion tower by the induced draft fan and meets the discharge standard.

[0030] The specific process medium tail gas closed oxidation treatment device has the advantages that the specific process medium tail gas is rapidly combusted in the closed oxidizer, the combustion product directly enters the second adsorber, the second adsorber is discharged after secondary adsorption, the flying fire of the discharged material is avoided, and the safety of the discharged material is ensured.

[0031] The specific process medium tail gas closed oxidation treatment device has the advantages that the specific process medium tail gas is rapidly combusted in the closed oxidizer, the combustion product directly enters the second adsorber, the second adsorber is discharged after secondary adsorption, the flying fire of the discharged material is avoided, and the safety of the discharged material is ensured.

[0032] This invention employs a combination of flow guidance, vertical convection, and counter-current flow. Flow guidance is achieved through a flow guide tube. After entering the sealed oxidizer, the oxidant first enters the flow guide tube and flows along its structural path. Vertical convection is mainly completed from the flow guide tube to the counter-current mass distributor component. The oxidant is guided from the flow guide tube through various branches to the counter-current mass distributor, where it reaches a near-full state. Then, it is discharged into the process medium tail gas space of the sealed oxidizer through the mass transfer orifice. The flow direction of the process medium tail gas is from upstream to downstream of the sealed oxidizer, while the mass transfer orifice is perpendicular to the flow direction of the process medium tail gas. Furthermore, due to the density and velocity differences between the process medium tail gas and the oxidant, gas-phase turbulence is formed, achieving the effect of vertical convection. The countercurrent is mainly achieved through the countercurrent mass distributor. As the oxidant is diverted from the guide tube to the countercurrent mass distributor, it has its own kinetic energy. After diversion, it naturally has a flow direction opposite to that of the process medium tail gas. When it is discharged from the mass transfer hole, due to the influence of airflow disturbance and gas phase turbulence, part of the kinetic energy is converted into vertical kinetic energy, and the other part of the kinetic energy maintains the original reverse kinetic energy. When it comes into contact with the process medium tail gas, countercurrent is formed. Attached Figure Description

[0033] Figure 1 This is a top view schematic diagram of the closed oxidation treatment device for tail gas of a specific process medium according to this utility model.

[0034] Figure 2 This is a front view of the closed oxidation treatment device for tail gas of a specific process medium according to this utility model.

[0035] Figure 3 This is a schematic diagram of the entire closed oxidizer.

[0036] Figure 4 This is a schematic diagram of a countercurrent mass distributor.

[0037] Explanation of reference numerals in the attached figures:

[0038] 1-First-stage adsorber, 2-Controller, 3-Closed oxidizer, 4-Second-stage adsorber, 5-Gas output pipe, 6-Automatic control valve, 7-Induced draft fan, 8-Oxidant input pipe, 9-Countercurrent mass distributor, 10-Guide cylinder, 11-Mass transfer hole, 12-Simply supported rib, 13-Mass transfer rod, 14-Catalyst, 15-Specific process medium tail gas input pipe, 151-Process vacuum tail gas input pipe, 152-Emergency tail gas input pipe, 16-Outer cylinder, 17-Regenerated steam input pipe, 18-Regenerated steam output pipe, 19-Electric heating plate, 20-Oxidant inlet pipe, 21-Distribution pipe. Detailed Implementation

[0039] The present invention will be further described below with reference to the accompanying drawings.

[0040] As shown in Figures 1-4 A certain process medium tail gas closed oxidation treatment device, which comprises a closed oxidizer 3 for burning the certain process medium tail gas, a secondary adsorber 4 connected with the combustion product outlet of the closed oxidizer 3 and used for adsorbing the harmful products after combustion, a gas output pipeline 5 of the secondary adsorber 4 connected with the air inlet of an induced draft fan 7, a self-control valve 6 arranged on the gas output pipeline 5, and the closed oxidizer 3 is provided with an oxidant inlet and a certain process medium tail gas inlet, the oxidant inlet is connected with an oxidant input pipeline 8, and the certain process medium tail gas inlet is connected with a certain process medium tail gas input pipeline 15.

[0041] The closed oxidizer 3 can be a horizontal container, for example, a cylindrical structure, and the support type can be, for example, a saddle support. The specification of the closed oxidizer 3 can be, for example, DN900x1800mm. The closed oxidizer 3 comprises an outer cylinder 16, a countercurrent mass transfer distributor 9 fixed in the outer cylinder 16, and a head arranged at both ends of the outer cylinder 16. The certain process medium tail gas inlet is arranged at the left head, preferably at the center of the left head. The combustion product outlet is arranged at the right head, preferably at the center of the right head. The oxidant inlet is arranged at the top of the right end of the outer cylinder 16. The certain process medium tail gas inlet, the combustion product outlet and the oxidant inlet are all in the form of a pipe opening. The certain process medium tail gas inlet, the combustion product outlet and the oxidant inlet are all in sealed connection with the outer cylinder 16, such as welding connection. Since the certain process medium tail gas has high flammability, welding ensures the sealing of the connection.

[0042] The countercurrent mass transfer distributor 9 comprises a vertical draft tube 10 fixedly connected with the outer cylinder 16, a plurality of mass transfer rods 13 connected with the draft tube 10 and distributed transversely, a plurality of mass transfer holes 11 distributed on the mass transfer rods 13, and a simply supported rib (support strip) 12 for supporting the mass transfer rods 13. Preferably, the opening direction of the mass transfer holes is perpendicular to the flow direction of the process medium tail gas.

[0043] The draft tube 10 is, for example, at least two, and a plurality of draft tubes 10 are preferably arranged in parallel. The top end and the bottom end of the draft tube 10 are, for example, welded to the inner wall of the outer cylinder 16. The draft tube 10 is arranged below the oxidant inlet. The plurality of draft tubes 10 are communicated through a distribution pipe 21. The oxidant inlet pipeline 20 is connected with the distribution pipe 21 for conveying the oxidant to the distribution pipe 21. The distribution pipe 21 is used for distributing the oxidant to each draft tube 10. Each draft tube 10 is connected with a plurality of mass transfer rods 13 arranged at intervals. The mass transfer rod 13 is a hollow rod. The mass transfer rod 13 extends towards the certain process medium tail gas inlet. The mass transfer rod 13 is used to realize the countercurrent mass transfer of the oxidant and the certain process medium tail gas. The draft tube 10 can be, for example, two. Each draft tube 10 is, for example, provided with 4 mass transfer rods 13.

[0044] The mass transfer holes 11 are evenly distributed on the mass transfer rods 13, for example, 8-200, preferably about 20-40, mass transfer holes 11 are arranged on each mass transfer rod 13, and the diameter of the mass transfer holes 11 is, for example, φ10mm-φ25mm. The mass transfer holes 11 are used to achieve mass transfer with the largest contact area. The lateral arrangement of the mass transfer holes 11 directly increases the disturbance of the airflow, so that the oxidizing agent participates in the reaction in a turbulent flow state.

[0045] The simply supported bars 12 are obliquely connected between the flow guide cylinder 10 and the mass transfer rod 13, and are used to support the mass transfer rod 13 to ensure the strength and rigidity of the counter-flow mass transfer distributor 9.

[0046] The lower part of the outer cylinder 16 is provided with an electric heating disc 19, which is interlocked with a temperature sensor arranged in the closed oxidizer 3. The electric heating disc 19 is connected to the signal output end of the controller 2, and the temperature sensor is connected to the signal input end of the controller 2. The temperature in the closed oxidizer 3 is set to T℃, and the value of T is 30-50℃ higher than the specific process medium tail gas ignition temperature. At this time, the catalyst 14 has the strongest activity, ensuring the sufficiency of the oxidation combustion. When the temperature in the closed oxidizer 3 is lower than T, the controller 2 interlocks to increase the heating power of the electric heating disc 19; when the temperature in the closed oxidizer 3 is higher than T, the controller 2 interlocks to decrease the heating power of the electric heating disc 19.

[0047] The specific process medium tail gas input pipeline 15 is formed by the combination of the process vacuum tail gas input pipeline 151 and the emergency tail gas input pipeline 152. The gas inlet of the process vacuum tail gas input pipeline 151 is connected to a production device, such as a rectification purification device or a gas mixing and filling device. The process vacuum tail gas input pipeline 151 is used to process specific process media leaked from the rectification purification device or the gas mixing and filling device. The gas inlet of the emergency tail gas input pipeline 152 is connected to the environmental space of the workshop where the production device is located, and is used to process specific process media leaked from the workshop in case of an accident. An explosion-proof split air conditioner is provided in the workshop to achieve a low-temperature environment in the workshop, so as to ensure that the temperature of the specific process medium tail gas in the workshop is not higher than the ignition temperature of the medium itself, thereby preventing combustion and explosion. Control valves are respectively arranged on the process vacuum tail gas input pipeline 151 and the emergency tail gas input pipeline 152. The gas quantity of the process vacuum tail gas is small, and the pipe diameter of the process vacuum tail gas input pipeline 151 is, for example, φ50mm-φ100mm. The gas quantity of the emergency tail gas is related to the volume of the workshop where the accident occurs, and the pipe diameter of the emergency tail gas input pipeline 152 is, for example, φ400mm-φ800mm.

[0048] The process vacuum tail gas input pipeline 151 is provided with a first adsorber 1, the volume of the first adsorber 1 can be 300-600L, preferably about 500L, the first adsorber 1 is filled with adsorbent, the adsorbent can be copper oxide or a mixture of manganese, aluminum and calcium, the first adsorber 1 is used for preliminary adsorption of high flammable and explosive medium contained in the process vacuum tail gas, to remove most (for example, 60-90wt%) of the high flammable and explosive medium, the process vacuum tail gas can be, for example, electronic grade phosphine tail gas (ignition temperature about 100℃, explosion limit 1.8%-98%, extremely easy to ignite) or tetrahydrogen silicon (ignition temperature below 85℃, explosion limit 1.4%-96%, extremely easy to ignite) with a purity of 5.0N (99.999%) and the like, due to the extremely high concentration of the medium in the process vacuum tail gas, it is necessary to be treated by the first adsorber 1 first, and then combined with the emergency tail gas through the specific process medium tail gas input pipeline 15, and then enter the closed oxidizer 3 for treatment.

[0049] The oxidant inlet is connected with the oxidant input pipeline 8 for conveying low-temperature compressed air, the oxidant is low-temperature compressed air, the temperature of the low-temperature compressed air can be, for example, 25℃-30℃, the pressure can be, for example, 0.1-0.2MPa, preferably about 0.15MPa, the gas source pressure is 0.6-0.8MPa, the pressure is reduced to 0.15MPa by a pressure reducing valve, the low-temperature compressed air is used as the oxidant, and the amount of the low-temperature compressed air is in a certain proportional relationship with the total flow of the two kinds of tail gas, and the flow of the oxidant in the total flow of the two kinds of tail gas is generally controlled to be less than 10% of the lower limit of the explosion of the specific process medium, the concentration content is in a safe range, and the risk of combustion and explosion in the reaction process can be effectively avoided.

[0050] The gas output pipeline 5 is divided into a first branch pipe and a second branch pipe, and self-control valves 6 are arranged on the first branch pipe and the second branch pipe, the self-control valves 6 can be, for example, pneumatic regulating valves, and are preferably pneumatic butterfly valves, and the self-control valves 6 are connected with the output end of the controller 2.

[0051] The induced draft fan 7 can include a first induced draft fan and a second induced draft fan, the air inlet of the first induced draft fan is connected with the first branch pipe, the air inlet of the second induced draft fan is connected with the second branch pipe, the first induced draft fan and the second induced draft fan are used one by one in normal conditions, and are all opened in accident conditions, the induced draft fan 7 provides a power source for the specific process medium tail gas to enter the closed oxidation treatment device, the induced draft fan 7 is connected with the output end of the controller 2, and the input end of the controller 2 is connected with a detection alarm in the workshop, for example, after a toxic and flammable gas detection alarm in the workshop alarms, the self-control valves 6 are immediately interlocked to be opened, the induced draft fan 7 is started synchronously, and when the specific process medium tail gas medium treatment is completed, or the alarm in the workshop is removed, the self-control valves 6 and the induced draft fan 7 can be interlocked to be closed.

[0052] The bottom of the outer cylinder 16 is provided with a hand hole for putting or taking out the catalyst 14, so that the catalyst 14 can be replaced regularly to ensure long-term activity of the catalyst 14, the catalyst 14 is placed at the inner lower edge of the outer cylinder 16, and the catalyst 14 can be one or more of vanadium oxide (V2O5), molybdenum oxide (MoO3), copper oxide (CuO) and manganese dioxide (MnO2) to achieve the oxidation effect, the frequency of replacing the catalyst 14 is determined according to the gas amount of the specific process medium tail gas to be treated and the number of times of starting the fan 7, for example, when the gas amount of the specific process medium tail gas to be treated is 7000m 3 / h and the number of times of starting the device is 24, the catalyst 14 needs to be replaced once a week.

[0053] The outer cylinder 16 below the specific process medium tail gas inlet is provided with a regeneration steam inlet, the regeneration steam inlet is connected with a regeneration steam input pipeline 17, the outer cylinder 16 below the combustion product outlet is provided with a regeneration steam outlet, the regeneration steam outlet is connected with a regeneration steam output pipeline 18, the regeneration steam inlet is used for inputting external steam for regenerating the catalyst 14, and the regeneration steam outlet is used for outputting steam; the steam input into the outer cylinder 16 is used for purging the catalyst 14, removing organic by-products, mechanical dust or impurities on the surface of the catalyst 14, and in-situ regenerating the catalyst 14 without replacing the catalyst 14.

[0054] The secondary adsorber 4 is provided with an adsorbent, for example, granular activated carbon, and is used for adsorbing trace harmful products after combustion, and the specification of the secondary adsorber 4 is, for example, DN900*1100mm.

[0055] The controller 2 is a DCS or PLC control system, the control circuit of the controller 2 can be realized through simple programming of those skilled in the art, and the control mode and circuit connection belong to the prior art and will not be explained in detail.

[0056] The closed oxidation treatment device is integrally installed on the base, the floor area is reduced, the site resources are comprehensively utilized, the equipment configuration is optimized, the closed oxidation treatment device can be integrally connected with the existing tail gas absorption equipment, integration and installation are realized, and the floor space is saved.

[0057] The use process of the specific process medium tail gas closed oxidation treatment device is as follows:

[0058] Firstly, the specific process medium tail gas in the utility model must be disposed in low temperature environment before oxidation treatment (achieved by setting the explosion-proof split air conditioner in the workshop, the low temperature environment in the workshop is ensured by setting the explosion-proof split air conditioner, so that the temperature of the specific process medium tail gas in the workshop is not higher than the ignition temperature of the medium, thereby the explosion is not caused, the temperature control value of different specific process media is different, and the specific medium is set according to the specific medium, for example, the ignition temperature of tetrahydrogenated silicon is 50 DEG C~85 DEG C, and the temperature of the tetrahydrogenated silicon is controlled to below 25 DEG C in advance, so that the tetrahydrogenated silicon does not self-ignite before oxidation treatment), the process vacuum tail gas is adsorbed and purified by the first adsorber 1, and then is jointly or in time periods into the closed oxidizer 3 with the emergency tail gas, the specific process medium tail gas import from the left end of the closed oxidizer 3 enters the internal space of the outer cylinder body 16, the low-temperature high-pressure oxidant is continuously introduced into the oxidant import pipeline 20 from the oxidant import of the right end of the closed oxidizer 3, then enters the distribution pipe 21, the distribution pipe 21 distributes the oxidant to each flow guide cylinder 10, the oxidant enters the mass transfer rod 13 from the flow guide cylinder 10, the oxidant moves left in the mass transfer rod 13 and overflows from the mass transfer hole 11, and countercurrent mass transfer oxidation combustion process is carried out with the specific process medium tail gas moving left, under the catalysis of the catalyst 14 and high temperature condition (T DEG C, the T value is 30 DEG C~50 DEG C higher than the ignition temperature of the specific process medium tail gas), high-efficiency mass transfer combustion reaction is further completed, and the combustion product is obtained, the combustion product is a mixture containing chemical components such as phosphorus and copper, the combustion product is transported to the second adsorber 4 for secondary adsorption, and harmful substances such as phosphorus and copper are removed, and the gas output from the second adsorber 4 is discharged to the high-altitude diffusion tower by the induced draft fan 7 and is discharged to the atmosphere. Example 1

[0059] The specific process medium tail gas closed oxidation treatment process uses the device of the application, and comprises the following steps:

[0060] Firstly, the specific process medium tail gas in the utility model must be disposed in low temperature environment before oxidation treatment, for example, the temperature of the tetrahydrogenated silicon is controlled to below 25 DEG C in advance, so that the tetrahydrogenated silicon does not self-ignite before oxidation treatment, the specification of the process vacuum tail gas input pipeline is DN50, the specification of the emergency tail gas input pipeline is DN400, the volume of the first adsorber is 500L, the first adsorber is internally filled with adsorbent, the adsorbent is copper oxide, the specification of the closed oxidizer is DN900*1800mm, the temperature in the closed oxidizer is set to be 30 DEG C higher than the ignition temperature of the tetrahydrogenated silicon, the specification of the second adsorber is DN900*1100mm, and the adsorbent filled in the second adsorber is granular activated carbon.

[0061] The process vacuum tail gas (the process vacuum tail gas is tetrahydrogenated silicon with a purity of 99.999%) with a flow rate of 500 SLM (standard liters per minute) from a rectification purification process and a mixed gas filling process enters a first adsorber for treatment to remove 85% to 97% of the tetrahydrogenated silicon, and the flow rate of the treated process vacuum tail gas is 7000 m 3 / h of emergency tail gas (the emergency tail gas is tetrahydrogenated silicon with a purity of 99.9%) from a production workshop enters an emergency tail gas input pipeline and is combined with the treated process vacuum tail gas to enter a closed oxidizer.

[0062] Uninterrupted low-temperature compressed air is introduced into the end of the closed oxidizer, the temperature of the low-temperature compressed air is 25℃, the pressure is 0.15 MPa, the flow rate of the low-temperature compressed air accounts for 5% of the lower explosive limit of the specific process medium in the total flow rate of the two tail gases, the low-temperature compressed air and the specific process medium tail gas perform a heat and mass transfer chemical reaction in the closed oxidizer to obtain a combustion product, the combustion product is a mixture containing chemical components such as phosphorus and copper, the combustion product is transported to a second adsorber for secondary adsorption to remove harmful substances such as phosphorus and copper, and finally is discharged to a specified height by an induced draft fan and discharged to the atmosphere to meet the standard. The utility model has been proved to have a significant effect in the existing industry, has substantial utility in environmental protection, energy saving, and carbon reduction, has a low investment cost, has a high cost performance, can bring sufficient economic benefits and social benefits to enterprises, and the like.

[0063] The above-described embodiments only express several implementation manners of the utility model, the description is more specific and detailed, but it cannot be understood as a limitation on the patent application scope. It should be noted that for ordinary skilled persons in the art, several modifications and improvements can be made without departing from the concept of the utility model, and these all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent should be subject to the appended claims.

Claims

1. A process medium specific off-gas containment oxidation treatment apparatus characterized by, It includes a closed oxidizer (3) for burning specific process medium tail gas, a secondary adsorber (4) connected with the combustion product outlet of the closed oxidizer (3) and used for adsorbing harmful products after combustion, a gas output pipeline (5) of the secondary adsorber (4) is connected with the air inlet of the induced draft fan (7), a self-control valve (6) is arranged on the gas output pipeline (5), the closed oxidizer (3) is provided with an oxidant inlet and a specific process medium tail gas inlet, the oxidant inlet is connected with an oxidant input pipeline (8), and the specific process medium tail gas inlet is connected with a specific process medium tail gas input pipeline (15).

2. The process medium off-gas containment oxidative abatement device of claim 1, wherein, The closed oxidizer (3) is a horizontal container, the closed oxidizer (3) comprises an outer cylinder (16) and a countercurrent mass transfer distributor (9) fixed in the outer cylinder (16), both left and right ends of the outer cylinder (16) are provided with end covers, the specific process medium tail gas inlet is arranged on the left end cover, the combustion product outlet is arranged on the right end cover, and the oxidant inlet is arranged on the top of the right end of the outer cylinder (16), and the specific process medium tail gas inlet, the combustion product outlet and the oxidant inlet are all in the form of pipe openings.

3. The process medium off-gas containment oxidative abatement device of claim 2, wherein, The countercurrent mass transfer distributor (9) comprises a vertical flow guide cylinder (10) fixedly connected with the outer cylinder (16), a plurality of mass transfer rods (13) transversely distributed on the flow guide cylinder (10), a plurality of mass transfer holes (11) distributed on the mass transfer rods (13), and simple support bars (12) for supporting the mass transfer rods (13).

4. The process medium off-gas containment oxidative abatement device of claim 3, wherein, The opening direction of the mass transfer hole (11) is perpendicular to the flow direction of the process medium tail gas.

5. The process medium off-gas containment oxidative abatement device of claim 3, wherein, The flow guide cylinder (10) is at least two, a plurality of flow guide cylinders (10) are arranged in parallel, the flow guide cylinder (10) is arranged below the oxidant inlet, the plurality of flow guide cylinders (10) are communicated through a distribution pipe (21), the oxidant inlet pipeline (20) is connected with the distribution pipe (21), the distribution pipe (21) is used for distributing the oxidant to each flow guide cylinder (10), each flow guide cylinder (10) is connected with a plurality of mass transfer rods (13) arranged at intervals, the mass transfer rod (13) is a hollow rod, the mass transfer rod (13) extends towards the specific process medium tail gas inlet, the mass transfer holes (11) are uniformly distributed on the mass transfer rod (13), and the simple support bars (12) are obliquely connected between the flow guide cylinder (10) and the mass transfer rod (13).

6. The process medium off-gas containment oxidative abatement device of claim 5, wherein, A lower portion of the outer cylinder (16) is provided with an electric heating disc (19), the electric heating disc (19) is interlocked with a temperature sensor arranged in the closed oxidizer (3), the electric heating disc (19) is connected with a signal output end of a controller (2), and the temperature sensor is connected with a signal input end of the controller (2).

7. The process medium off-gas containment oxidative treatment apparatus of any one of claims 1-6, wherein, The specific process medium tail gas input pipeline (15) is formed by converging a process vacuum tail gas input pipeline (151) and an emergency tail gas input pipeline (152), an air inlet of the process vacuum tail gas input pipeline (151) is communicated with a production device, and an air inlet of the emergency tail gas input pipeline (152) is communicated with an environmental space of a workshop where the production device is located.

8. The process medium off-gas containment oxidative abatement device of claim 7, wherein, A primary adsorber (1) is arranged on the process vacuum tail gas input pipeline (151), and the primary adsorber (1) is filled with an adsorbent.

9. The process medium off-gas containment oxidative abatement device of claim 1, wherein, The gas output pipeline (5) is divided into a first branch pipe and a second branch pipe, and the first branch pipe and the second branch pipe are both provided with self-control valves (6), and the self-control valves (6) are connected with the output end of the controller (2).

10. The process medium off-gas containment oxidative abatement device of claim 9, wherein, The air draught fan (7) comprises a first air draught fan and a second air draught fan, the air inlet of the first air draught fan is connected with the first branch pipe, the air inlet of the second air draught fan is connected with the second branch pipe, the air draught fan (7) is connected with the output end of the controller (2), and the input end of the controller (2) is connected with a detection alarm in the workshop.

11. The process medium off-gas containment oxidative treatment apparatus of claim 6 or 10, wherein, The controller (2) is a DCS or PLC control system.

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