Silicon core furnace gas drainage device and silicon core furnace

Abstract

The utility model provides a silicon core furnace gas drainage device and a silicon core furnace, and relates to the technical field of silicon core furnace production equipment. The silicon core furnace gas drainage device comprises a first exhaust pipe arranged at the bottom of the silicon core furnace; an exhaust port is formed in the first exhaust pipe; the extension pipe is communicated with the first exhaust pipe; the extension pipe is arranged on the outer side of the side wall of a thermal insulation cylinder of the silicon core furnace; the second exhaust pipe is communicated with the extension pipe; the second exhaust pipe penetrates through a heat preservation barrel and a heat preservation felt of the silicon core furnace; an extraction opening of the second extraction pipe is arranged above a crucible in the silicon core furnace, so that gas and impurities in the silicon core furnace can be discharged from the upper part of the crucible in the silicon core furnace; according to the utility model, the airflow flowing state in the thermal field of the silicon core furnace can be improved, and the effects of prolonging the service life of the thermal field, reducing the oxidation condition of the silicon core and improving the production and quality of the silicon core are achieved.

Description

TECHNICAL FIELD

[0001] The utility model relates to silicon core furnace production equipment technical field, concretely to a silicon core furnace gas drainage device and silicon core furnace. BACKGROUND

[0002] In the silicon core drawing of silicon core furnace, usually through the air extraction device to improve the thermal field environment in the furnace, the main role of this air extraction device is to remove the oxygen and other oxides in the furnace that may affect the quality of the silicon core. For example, the oxygen generated by the reaction of the quartz crucible and the silicon liquid in the silicon core drawing process, if these oxygen cannot be extracted in time, it will re-enter the silicon liquid or the just drawn silicon core, thereby affecting the quality of the silicon core. In order to effectively remove these gases, the existing silicon core furnace adopts a bottom air extraction port design, through the lower air extraction port and the bottom air extraction pipeline to extract the gases and oxides in the thermal field, thereby quickly reducing the residence time of oxygen in the furnace. In addition, argon gas is widely used as a protective gas in the silicon core drawing process, which can prevent the oxidation of silicon at high temperature, and help to take away the volatile matter and impurities generated at high temperature through the lower exhaust port, so the air extraction device can also affect the airflow flow in the furnace by controlling the airflow flow state in the furnace. The way of air extraction device to improve the thermal field environment in the furnace includes removing oxygen and other harmful gases, using protective gas to maintain atmospheric balance, and controlling airflow flow state, thereby improving the quality and production efficiency of the silicon core.

[0003] Now the silicon core furnace drawing adopts the lower exhaust mode, the furnace bottom heater is fully open during the drawing process, after the crucible position is lifted, the cold zone space becomes larger, the airflow enters the cold zone with a longer path, if the furnace bottom heater is always on, it is easy to cause airflow aggregation, airflow back etching, poor exhaust, the temperature of the crucible side and the bottom of the crucible holder is higher, the airflow flow in the furnace is affected during the air extraction process, resulting in the formation of a local high pressure area, so as to cause serious corrosion of the gas to the crucible side and the crucible holder. At the same time, the lower exhaust mode cannot effectively extract the oxygen generated by the reaction of the silicon core furnace upper oxides and the silicon liquid with the silicon liquid, which has a great influence on the oxidation of the silicon core, increases the production cost of the silicon core drawing, and reduces the quality of the silicon core. UTILITY MODEL CONTENTS

[0004] The utility model discloses to solve the problem of the air extraction mode of the lower exhaust in the prior art, which is easy to cause local high pressure in the silicon core furnace, affect the exhaust of gas and impurities, increase the production cost of the silicon core drawing, and reduce the quality of the silicon core. A silicon core furnace gas drainage device and silicon core furnace are provided, which can improve the airflow flow state in the thermal field of the silicon core furnace, prolong the service life of the thermal field, reduce the oxidation of the silicon core, and improve the effect of the production and quality of the silicon core.

[0005] The utility model discloses the technical scheme is:

[0006] A silicon core furnace gas drainage device comprises:

[0007] A first exhaust pipe is arranged at the bottom of the silicon core furnace, and an exhaust port is arranged on the first exhaust pipe.

[0008] An extension pipe is in communication with the first exhaust pipe, and the extension pipe is arranged outside the sidewall of the heat preservation cylinder of the silicon core furnace.

[0009] A second exhaust pipe is in communication with the extension pipe.

[0010] The second exhaust pipe passes through the heat preservation cylinder and the heat preservation felt of the silicon core furnace, and the exhaust port of the second exhaust pipe is arranged above the crucible in the silicon core furnace, so that the gas and impurities in the silicon core furnace can be discharged from above the crucible in the silicon core furnace.

[0011] Further, the first exhaust pipe is provided with a sealing head at one end thereof.

[0012] Further, one side of the extension pipe, which is in contact with the outer wall of the heat preservation cylinder of the silicon core furnace, is an inwardly recessed arc.

[0013] Further, the extension pipe is provided with a fifth splicing port, and the fifth splicing port is provided with a fifth protruding block; the second exhaust pipe is provided with a sixth splicing port, and the sixth splicing port is provided with a sixth recess, and the fifth protruding block is inserted into the sixth recess.

[0014] Further, the extension pipe has at least a first pipe segment, a second pipe segment and a third pipe segment, and the first pipe segment, the second pipe segment and the third pipe segment are spliced by mutually matched recesses and protruding blocks.

[0015] A silicon core furnace comprises:

[0016] A heat preservation cylinder body;

[0017] A heat preservation felt is arranged at the lower part of the heat preservation cylinder body.

[0018] A furnace bottom plate is arranged below the heat preservation felt.

[0019] The silicon core furnace gas drainage device as described above, the first exhaust pipe is in communication with the bottom of the heat preservation cylinder body; the extension pipe is arranged outside the sidewall of the heat preservation cylinder body; and the second exhaust pipe is in communication with the upper part of the heat preservation cylinder body.

[0020] Further, the heat preservation cylinder body has at least an upper heat preservation cylinder, and the lower part of the upper heat preservation cylinder is provided with a lower heat preservation cylinder, and a crucible is arranged in the lower heat preservation cylinder.

[0021] Further, the second exhaust pipe passes through the sidewall of the upper heat preservation cylinder.

[0022] Furthermore, the lower insulation cylinder includes an upper insulation section, a middle insulation section, and a lower insulation section, which are detachably connected; and the extension pipe includes a first pipe section, a second pipe section, and a third pipe section, which are respectively connected to the upper insulation section, the middle insulation section, and the lower insulation section.

[0023] Furthermore, the furnace base plate is provided with a plurality of bottom connecting holes; and the exhaust port of the first exhaust pipe is positioned directly opposite the bottom connecting holes.

[0024] The beneficial effects of this utility model are:

[0025] 1. The gas diversion device for silicon core furnace of this utility model is provided by setting a first gas extraction pipe at the bottom of the silicon core furnace, an extension pipe on the outer side of the side wall of the silicon core furnace, and a second gas extraction pipe through the side wall of the silicon core furnace. The sealing head at one end of the first gas extraction pipe is used to seal the communication port at the bottom of the silicon core furnace. Then, the gas is diverted from above the crucible in the silicon core furnace to the first gas extraction pipe below through the extension pipe and the second gas extraction pipe. The gas and impurities are discharged out in conjunction with the exhaust port on the first gas extraction pipe. This avoids the formation of a long cold zone at the bottom of the crucible in the silicon core furnace, thereby preventing the formation of airflow agglomeration at the bottom. The gas can flow more smoothly, avoiding the problem of local airflow obstruction. It helps to improve the temperature uniformity in the silicon core furnace, thereby improving the quality and production efficiency of silicon cores. It solves the problem that the bottom exhaust gas extraction method in the prior art is prone to causing local high pressure in the silicon core furnace, affecting the discharge of gas and impurities, increasing the production cost of silicon core pulling, and reducing the quality of silicon cores.

[0026] 2. The silicon core furnace of this utility model is equipped with a first exhaust pipe at the bottom of the furnace, an extension pipe on the outer side wall of the furnace, and a second exhaust pipe penetrating the side wall of the furnace. The sealing head at one end of the first exhaust pipe seals the connection port at the bottom of the furnace. Gas is then guided from above the crucible inside the furnace to the first exhaust pipe below via the extension pipe and the second exhaust pipe. This, combined with the exhaust port on the first exhaust pipe, facilitates the removal of gas and impurities. This avoids the formation of a long cold zone at the bottom of the crucible within the furnace, preventing airflow agglomeration and allowing for smoother gas flow. It also avoids localized airflow obstruction, improving temperature uniformity within the furnace and thus enhancing silicon core quality and production efficiency. This invention solves the problem in existing bottom-exhaust systems that easily create localized high pressure within the furnace, affecting the removal of gas and impurities, increasing silicon core production costs, and reducing silicon core quality. Attached Figure Description

[0027] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or prior art description. Obviously, the drawings in the following description only constitute some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained from these drawings without creative labor.

[0028] Figure 1 A perspective view of a gas drainage device according to an embodiment of the present application;

[0029] Figure 2 A perspective view of a first pipe segment according to an embodiment of the present application;

[0030] Figure 3 A perspective view of a second pipe segment according to an embodiment of the present application;

[0031] Figure 4 A perspective view of a third pipe segment according to an embodiment of the present application;

[0032] Figure 5 A perspective view of a second air extraction pipe according to an embodiment of the present application;

[0033] Figure 6 A perspective view of a silicon core furnace according to embodiment 2 of the present application;

[0034] Figure 7 A bottom view of a silicon core furnace according to embodiment 2 of the present application.

[0035] Reference signs: 100-first air extraction pipe, 110-sealing head, 120-exhaust port;

[0036] 200-extended pipe, 210-first pipe segment, 211-first communication port, 212-first splicing port, 213-first protruding block, 214-first recess, 220-second pipe segment, 222-second splicing port, 223-second recess, 224-second protruding block, 225-third splicing port, 226-third recess, 227-third protruding block, 230-third pipe segment, 232-fifth splicing port, 233-fifth protruding block, 235-fourth splicing port, 236-fourth protruding block, 237-fourth recess;

[0037] 300-second air extraction pipe, 310-air extraction port, 320-sixth splicing port, 323-sixth recess;

[0038] 400-heat preservation cylinder, 410-upper heat preservation cylinder, 420-lower heat preservation cylinder, 422-upper heat preservation segment, 424-middle heat preservation segment, 426-lower heat preservation segment;

[0039] 500-heat preservation felt;

[0040] 600 - furnace bottom tray, 610 - bottom communication hole. DETAILED DESCRIPTION

[0041] In the description of the utility model, it is understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the utility model and simplifying the description, and therefore cannot be understood as limiting the utility model.

[0042] The following disclosure provides many different embodiments or examples for implementing different structures of the utility model. In order to simplify the disclosure of the utility model, the components and settings of specific examples are described below. Of course, they are only examples, and the purpose is not to limit the utility model.

[0043] The embodiments of the utility model will be described in detail below with reference to the drawings.

[0044] Embodiment 1

[0045] The existing silicon core furnace drawing exhaust device usually adopts a lower exhaust mode. The furnace bottom heater is fully open during the drawing process. After the crucible is raised, the cold zone space becomes larger. The gas flow has a long path after entering the cold zone. The constant opening of the furnace bottom heater can easily cause the formation of a local high-pressure area and cause serious corrosion of the gas to the crucible and the crucible support. At the same time, the lower exhaust mode cannot effectively remove the oxygen generated by the reaction of the oxide on the upper part of the silicon core furnace and the quartz crucible and the silicon liquid, causing the silicon core to be oxidized, increasing the production cost, and reducing the quality of the silicon core.

[0046] In order to solve the above problems in the prior art, the embodiment provides a silicon core furnace gas flow guide device, which is mainly used for communication with the main exhaust pipe and the exhaust pump body outside the silicon core furnace, and can extract and discharge the gas, oxide, volatile matter and impurities generated by high temperature in the silicon core furnace. The silicon core furnace gas flow guide device can improve the gas flow state in the thermal field of the silicon core furnace, prolong the service life of the thermal field, reduce the oxidation of the silicon core, and improve the production and quality of the silicon core. Please refer to Figures 1-5 The silicon core furnace gas flow guide device mainly comprises a first exhaust pipe 100, an extension pipe 200 and a second exhaust pipe 300.

[0047] The first exhaust pipe 100 is arranged in the bottom communication hole of the silicon core furnace and is used for plugging the bottom communication hole. As shown inFigure 1 As shown in the figure, the first exhaust pipe 100 is substantially cylindrical, and the first exhaust pipe 100 is provided with a sealing head 110 at one end thereof which is inserted into the bottom communication hole of the silicon core furnace, so that the bottom communication hole which is originally used for exhausting gas outside is closed, thereby preventing the gas in the hot field of the silicon core furnace from being exhausted from the bottom to form a cold zone. Meanwhile, the side wall of the first exhaust pipe 100 is provided with an exhaust port 120, which is vertically downward in the present embodiment, and is arranged opposite to the communication hole in the bottom plate of the silicon core furnace, and is in communication with the main exhaust pipe and the exhaust pump (not shown in the figure) outside the silicon core furnace, and is used for exhausting the gas, oxide and volatile matter and impurities generated at high temperature which are extracted from the inside of the silicon core furnace.

[0048] The extension pipe 200 is used for connecting the first exhaust pipe 100 at the lower part of the silicon core furnace and the second exhaust pipe 300 at the upper part of the silicon core furnace, and is used for guiding the gas and impurities. In the present embodiment, the extension pipe 200 is arranged outside the side wall of the heat preservation cylinder of the silicon core furnace, and extends in the vertical direction, and one end of the extension pipe 200 close to the lower part of the heat preservation cylinder of the silicon core furnace is in communication with the end of the first exhaust pipe 100 which is directed to the outside of the silicon core furnace, and the other end of the extension pipe 200 close to the upper part of the heat preservation cylinder of the silicon core furnace is in communication with the end of the second exhaust pipe 300 which is directed to the outside of the silicon core furnace.

[0049] The second exhaust pipe 300 is used for connecting the inside of the silicon core furnace, and is used for providing an outlet for the gas, oxide and volatile matter and impurities generated at high temperature in the inside of the silicon core furnace. In the present embodiment, the second exhaust pipe 300 is arranged through the side wall of the heat preservation cylinder of the silicon core furnace, and the second exhaust pipe 300 is substantially tubular with a rectangular cross section, and the second exhaust pipe 300 is arranged through the wall of the heat preservation cylinder and the heat preservation felt of the silicon core furnace, and the end of the second exhaust pipe 300 which is inserted into the inside of the silicon core furnace is provided with an exhaust port 310, and the exhaust port 310 is arranged above the crucible in the silicon core furnace, and is used for extracting the gas and impurities from the hot field above the crucible.

[0050] A specific working mode of the present embodiment is as follows:

[0051] When the inside of the silicon core furnace needs to be exhausted, first, the main exhaust pipe and the exhaust pump which are in communication with the exhaust port 120 arranged at the bottom of the first exhaust pipe 100 are opened, and then the gas and impurities such as oxide and volatile matter in the silicon core furnace are extracted from above the crucible in the silicon core furnace through the exhaust port 310 of the second exhaust pipe 300. Since the extraction is from above, the gas and impurities in the silicon core furnace will flow to the upper part of the crucible, and are exhausted after being heated by the hot field of the crucible, and during the extraction process, the long cold zone which is formed when the position of the crucible in the silicon core furnace is raised in the bottom exhaust mode can be prevented, thereby avoiding the formation of gas flow clusters.

[0052] In the embodiment, the silicon ingot furnace gas guiding device is provided with the first gas suction pipe 100 at the bottom of the silicon ingot furnace, the extension pipe 200 outside the sidewall of the silicon ingot furnace and the second gas suction pipe 300 through the sidewall of the silicon ingot furnace. The communication port at the bottom of the silicon ingot furnace is closed by the sealing head 110 at one end of the first gas suction pipe 100, and then the gas is guided from above the crucible in the silicon ingot furnace to the first gas suction pipe 100 below through the extension pipe 200 and the second gas suction pipe 300, and the exhaust port 120 on the first gas suction pipe 100 is used to complete the exhaust of the gas and impurities, so as to avoid the formation of a long cold zone by the gas suction at the bottom of the crucible in the silicon ingot furnace, prevent the formation of a gas flow cluster at the bottom, and make the gas flow more smoothly, thereby avoiding the problem of poor local gas flow, improving the temperature uniformity in the silicon ingot furnace, improving the quality and production efficiency of the silicon ingot, and solving the problems in the prior art, such as the easy formation of local high pressure in the silicon ingot furnace by the gas suction of the lower exhaust, the influence on the exhaust of the gas and impurities, the increase of the production cost of the silicon ingot drawing and the reduction of the quality of the silicon ingot.

[0053] Meanwhile, the gas flow in the hot field can be guided from the outside of the silicon ingot furnace by the upper guiding mode in the embodiment, so as to avoid the impact of the gas flow on the key parts such as the sidewall of the crucible and the bottom of the crucible support, prolong the service life of the parts in the hot field, increase the gas suction efficiency, help to timely exhaust the waste gas and impurities such as oxides generated in the silicon ingot furnace, keep the environment in the furnace clean, and reduce the oxidation of the silicon ingot in the furnace

[0054] Specifically, in the embodiment, the cross section of the extension pipe 200 is substantially quadrangular, the side of the extension pipe 200 in contact with the outer wall of the heat preservation cylinder of the silicon core furnace is arc-shaped and inwardly recessed, and is arranged in abutment with the adjacent outer wall of the heat preservation cylinder, so that the overall structure of the silicon core furnace gas guiding device of the embodiment is more stable. Moreover, the extension pipe 200 comprises a first pipe segment 210, a second pipe segment 220 and a third pipe segment 230 connected in sequence from top to bottom. The first pipe segment 210 is provided with a circular first communication port 211 at the side wall bottom of the side facing the inside of the silicon core furnace, the first communication port 211 is in communication with the first suction pipe 100 and is adapted in shape and size, the upper part of the first pipe segment 210 is a first splicing interface 212, the first splicing interface 212 is provided with a first protrusion 213 on each of the two opposite sides along the radial direction of the silicon core furnace, and is provided with a first recess 214 on each of the two opposite sides along the circumferential direction of the silicon core furnace. Meanwhile, the lower part of the second pipe segment 220 is a second splicing interface 222, the second splicing interface 222 is provided with a second recess 223 on each of the two opposite sides along the radial direction of the silicon core furnace, the second recess 223 is provided in insertion with the first protrusion 213, the second splicing interface 222 is provided with a second protrusion 224 on each of the two opposite sides along the circumferential direction of the silicon core furnace, and the second protrusion 224 is provided in insertion in the first recess 214. The upper part of the second pipe segment 220 is a third splicing interface 225, the third splicing interface 225 is provided with a third recess 226 on each of the two opposite sides along the radial direction of the silicon core furnace, and is provided with a third protrusion 227 on each of the two opposite sides along the circumferential direction of the silicon core furnace. Moreover, the lower part of the third pipe segment 230 is a fourth splicing interface 235, the fourth splicing interface 235 is provided with a fourth protrusion 236 on each of the two opposite sides along the radial direction of the silicon core furnace, and the fourth protrusion 236 is provided in insertion in the third recess 226, the fourth splicing interface 235 is provided with a fourth recess 237 on each of the two opposite sides along the circumferential direction of the silicon core furnace, and the fourth recess 237 is provided in insertion with the third protrusion 227. The upper part of the third pipe segment 230 is a fifth splicing interface 232, the fifth splicing interface 232 is provided with a fifth protrusion 233 on each of the two opposite sides along the radial direction of the silicon core furnace. In addition, the bottom of the end of the second suction pipe 300 facing the outside of the silicon core furnace is provided with a sixth splicing interface 320, the sixth splicing interface 320 is provided with a sixth recess 323 on each of the two opposite sides along the radial direction of the silicon core furnace, and the sixth recess 323 is provided in insertion with the fifth protrusion 233. The above-mentioned multi-segment splicing structure design in the embodiment makes the installation and removal of the silicon core furnace gas guiding device more convenient, and makes the connection at the joints between the pipe segments more stable and reliable.

[0055] Preferably, in the embodiment, a carbon carbon sleeve pipe can be further provided outside the extension pipe 200 for protection under high temperature.

[0056] Embodiment 2

[0057] On the basis of the above-mentioned embodiments, a silicon core furnace using the silicon core furnace gas guiding device in the above-mentioned embodiments is further proposed, and the second embodiment is provided below.

[0058] Referring to Figures 5-6 , the silicon core furnace in the second embodiment is mainly used for performing silicon core drawing of single crystal silicon. The silicon core furnace can improve the airflow flow state in the thermal field of the silicon core furnace by using the silicon core furnace gas flow guide device in the above embodiments, so as to achieve the effects of prolonging the service life of the thermal field, reducing the oxidation of the silicon core, and improving the production and quality of the silicon core. The silicon core furnace mainly includes: a heat preservation cylinder 400, a heat preservation felt 500, a furnace bottom plate 600, and the silicon core furnace gas flow guide device in the above embodiments.

[0059] The heat preservation cylinder 400 is mainly used for reducing heat loss and improving the heat preservation effect of the thermal field. By reducing the outward conduction and radiation of heat, the heat preservation cylinder can effectively reduce the energy consumption of the silicon core furnace and improve the heat utilization rate. In addition, the heat preservation cylinder 400 also bears the function of supporting the entire thermal field structure and can withstand the pressure in the thermal field to ensure the stability of the thermal field. Figure 5 , Figure 6 As shown in the above embodiments, the heat preservation cylinder 400 of the present embodiment is a spliced structure, mainly including an upper heat preservation cylinder 410 and a lower heat preservation cylinder 420. The upper heat preservation cylinder 410 has a smaller diameter, and the lower heat preservation cylinder 420 has a larger diameter. The lower heat preservation cylinder 420 has a three-layer spliced structure of an upper heat preservation section 422, a middle heat preservation section 424, and a lower heat preservation section 426. A graphite bottom plate is arranged in the lower heat preservation section 426. The multi-layer spliced structure can prolong the service life of the heat preservation cylinder and reduce the replacement frequency. In addition, a crucible (not shown in the figure) is arranged in the heat preservation cylinder 400.

[0060] The heat preservation felt 500 is mainly used for heat insulation in cooperation with the heat preservation cylinder 400, especially for strengthening the heat insulation effect of the bottom, optimizing the thermal field structure, and protecting the heat preservation cylinder 400 and other components in the thermal field. In the present embodiment, the heat preservation felt 500 mainly includes a plurality of layers of hard felt and soft felt arranged inside and below the lower heat preservation section 426.

[0061] The furnace bottom plate 600 is mainly used for supporting the entire thermal field structure, including the crucible, the heater, and other components, to ensure the stability and integrity of the thermal field. The furnace bottom plate 600 is also provided with an electrode for power supply and is connected with the lifting and rotating mechanism of the crucible. The furnace bottom plate 600 is arranged below the bottom heat preservation felt 500, and a plurality of bottom communication holes 610 are formed in the furnace bottom plate 600.

[0062] The first air exhaust pipe 100 of the silicon core furnace gas guiding device in the above embodiment is arranged on the sidewall of the lower heat preservation section 426, and the exhaust port 120 of the first air exhaust pipe 100 is aligned with the bottom communication hole 610 arranged on the furnace bottom plate 600, so that the main exhaust pipeline is connected to the bottom communication hole 610 to facilitate the gas exhaust. The extension pipe 200 is arranged outside the sidewall of the lower heat preservation cylinder 420, and the first pipe section 210, the second pipe section 220 and the third pipe section 230 of the extension pipe 200 are respectively connected to the upper heat preservation section 422, the middle heat preservation section 424 and the lower heat preservation section 426 of the lower heat preservation cylinder 420, so that the extension pipe 200 can be synchronously installed and disassembled. Meanwhile, the second air exhaust pipe 300 is arranged on the sidewall of the upper heat preservation cylinder 410, and the crucible is lifted in the lower heat preservation cylinder 420 during use, so that the second air exhaust pipe 300 can always exhaust air from the hot field above the crucible.

[0063] In the embodiment, the silicon core furnace is provided with the first air exhaust pipe 100 arranged at the bottom of the silicon core furnace, the extension pipe 200 arranged outside the sidewall of the silicon core furnace and the second air exhaust pipe 300 arranged through the sidewall of the silicon core furnace, the communication hole at the bottom of the silicon core furnace is closed by the sealing head 110 at one end of the first air exhaust pipe 100, the gas in the crucible above the silicon core furnace is guided to the first air exhaust pipe 100 below through the extension pipe 200 and the second air exhaust pipe 300, and the exhaust port 120 on the first air exhaust pipe 100 is used to complete the exhaust of the gas and impurities, so that the cold zone formed by the air exhaust at the bottom of the crucible in the silicon core furnace is avoided, the gas flow is prevented from gathering at the bottom, the gas can flow more smoothly, the problem of poor local gas flow is avoided, the temperature uniformity in the silicon core furnace is improved, the quality and production efficiency of the silicon core are improved, and the problems in the prior art, such as the local high pressure in the silicon core furnace caused by the air exhaust mode of the lower exhaust, the influence on the exhaust of the gas and impurities, the increase of the production cost of the silicon core drawing and the reduction of the quality of the silicon core, are solved.

[0064] The basic principle, main features and advantages of the utility model are shown and described above. It should be understood by those skilled in the art that the utility model is not limited by the above embodiments, and the above embodiments and the description in the specification are only preferred examples of the utility model and are not used to limit the utility model. Without departing from the spirit and scope of the utility model, the utility model can also have various changes and improvements, and these changes and improvements all fall within the scope of the utility model claimed. The protection scope of the utility model is defined by the appended claims and their equivalents.

Claims

1. A silicon core furnace gas flow guiding device, characterized by, The utility model relates to a silicon core furnace gas drainage device, which comprises a first exhaust pipe (100) arranged at the bottom of a silicon core furnace, an exhaust port (120) arranged on the first exhaust pipe (100), an extension pipe (200) in communication with the first exhaust pipe (100), the extension pipe (200) being arranged outside the sidewall of a heat preservation cylinder of the silicon core furnace, and a second exhaust pipe (300) in communication with the extension pipe (200). The second exhaust pipe (300) passes through the heat preservation cylinder and the heat preservation felt of the silicon core furnace, and the exhaust port (310) of the second exhaust pipe (300) is arranged above the crucible in the silicon core furnace, so that the gas and impurities in the silicon core furnace can be discharged from above the crucible in the silicon core furnace. The first exhaust pipe (100) is provided with a sealing head (110) at one end thereof facing the silicon core furnace. The extension pipe (200) is provided with an inwardly recessed arc-shaped surface in contact with the outer wall of the heat preservation cylinder of the silicon core furnace. The extension pipe (200) is provided with a fifth splicing port (232) and a fifth protrusion (233) arranged on the fifth splicing port (232), the second exhaust pipe (300) is provided with a sixth splicing port (320) and a sixth recess (323) arranged on the sixth splicing port (320), and the fifth protrusion (233) is inserted into the sixth recess (323). The extension pipe (200) comprises at least a first pipe segment (210), a second pipe segment (220) and a third pipe segment (230), and the first pipe segment (210), the second pipe segment (220) and the third pipe segment (230) are spliced by recesses and protrusions matched with each other.

2. The silicon core furnace gas flow guiding device according to claim 1, wherein The utility model relates to a silicon core furnace gas drainage device, which comprises a heat preservation cylinder body (400), a heat preservation felt (500) arranged at the lower part of the heat preservation cylinder body (400), a furnace bottom plate (600) arranged below the heat preservation felt (500), and a first exhaust pipe (100) in communication with the bottom of the heat preservation cylinder body (400), an extension pipe (200) arranged outside the sidewall of the heat preservation cylinder body (400), and a second exhaust pipe (300) in communication with the upper part of the heat preservation cylinder body (400).

3. The silicon core furnace gas flow guiding device according to claim 1, wherein The heat preservation cylinder body (400) comprises at least an upper heat preservation cylinder (410), the lower part of the upper heat preservation cylinder (410) is provided with a lower heat preservation cylinder (420), and a crucible is arranged in the lower heat preservation cylinder (420).

4. The silicon core furnace gas flow guiding device as claimed in claim 1, wherein The second exhaust pipe (300) passes through the sidewall of the upper heat preservation cylinder (410).

5. The silicon core furnace gas flow guiding device as claimed in claim 1, wherein The lower heat preservation cylinder (420) comprises an upper heat preservation segment (422), a middle heat preservation segment (424) and a lower heat preservation segment (426), the upper heat preservation segment (422), the middle heat preservation segment (424) and the lower heat preservation segment (426) are detachably connected, and the extension pipe (200) comprises a first pipe segment (210), a second pipe segment (220) and a third pipe segment (230), the first pipe segment (210), the second pipe segment (220) and the third pipe segment (230) are connected with the upper heat preservation segment (422), the middle heat preservation segment (424) and the lower heat preservation segment (426) respectively.

6. A silicon core furnace characterized by ​ ​ ​ ​ ​ 7. The silicon core furnace as claimed in claim 6, wherein ​ 8. The silicon core furnace as claimed in claim 7, wherein ​ 9. The silicon core furnace of claim 7 wherein, ​ 10. The silicon core furnace as claimed in claim 6, wherein The furnace bottom tray (600) is provided with a plurality of bottom communication holes (610); and the exhaust port (120) of the first air exhaust pipe (100) is arranged opposite to the bottom communication holes (610).

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