Universal ramming head off-line rapid leak detection device

Abstract

The utility model discloses a universal ramming head off-line rapid leak detection device, comprising a complete machine support which is used as a support of the whole device and provides support and space for installation of other parts; the blasting head connecting mechanism is arranged at the upper part of the complete machine bracket, and a downward blasting head connecting flange is arranged on the blasting head connecting mechanism; the blasting head placing mechanism is arranged in the complete machine bracket, is exposed out of the upper part of the complete machine bracket, and is used for placing a to-be-detected blasting head, controlling the blasting head to ascend and descend and assisting an operator to mount the blasting head on the blasting head connecting mechanism or dismount the blasting head from the polishing connecting mechanism; the negative pressure generating mechanism is connected with the blasting head connecting mechanism through a negative pressure gas pipeline; the positive pressure generating mechanism is connected with the blasting head connecting mechanism through a positive pressure gas pipeline; the control module is used for collecting detection parameters and controlling the ramming head placing mechanism to ascend and descend. According to the utility model, the comprehensive efficiency of equipment can be improved, leak detection can be carried out more quickly and accurately, and the device is closer to the actual use condition and has better universality.

Description

TECHNICAL FIELD

[0001] The utility model relates to a general type of head-off-line fast leak detection device for silicon wafer processing, belonging to the field of semiconductor manufacturing technology. BACKGROUND

[0002] In the field of semiconductor manufacturing, the chemical mechanical polishing process is often used to achieve the ideal topography and brightness effect of the silicon wafer surface. In this process, the single-wafer polisher plays an almost irreplaceable role. For the single-wafer polisher, the polishing head is a key component that directly contacts and acts on the silicon wafer. The polishing head is usually composed of a circular metal and a wear-resistant non-metal structure. During the polishing process, the silicon wafer is first adsorbed by the template at the wafer loading position and then moved to the polishing pad. The template then applies different pressures to the silicon wafer and rotates and rubs on the polishing pad to remove a certain amount of material from the silicon wafer surface to achieve the desired parameters.

[0003] For the Template, it is usually made of soft and deformable rubber or other materials. During the processing, it undergoes continuous and repeated adsorption and pressure on the silicon wafer, and its service life is relatively short and needs to be replaced regularly. Because the Template needs to be adsorbed and pressurized by the negative pressure and positive pressure of the machine, its air tightness after replacement is also crucial. To avoid the breakage of the wafer and other abnormalities during processing due to poor air tightness after replacing the Template, the polishing head needs to be leak tested first, and then used after confirming that there is no abnormality.

[0004] Without a dedicated leak detection device, the Template needs to be installed on the machine and leak tested using the machine's leak detection program. Generally, each polishing machine is equipped with 4-8 polishing heads, and the leak detection time for each polishing head is 20-30 minutes. The replacement of one polishing head requires several hours of machine capacity. In the case where the machine does not have a leak detection program, the Template needs to be tested for processing to confirm its status, which may cause wafer breakage and result in greater economic losses. UTILITY MODEL CONTENTS

[0005] The utility model aims to provide a general type of head-off-line fast leak detection device to solve the problem of no dedicated leak detection device after replacing the Template in the current polishing process of silicon wafers, or the problem of occupying machine capacity or causing greater economic losses in the trial processing.

[0006] To achieve the above purpose, the utility model adopts the following technical solutions:

[0007] A general type of head-off-line fast leak detection device, the device has:

[0008] The whole machine support provides support and space for the installation of other components, including: a polishing head connecting mechanism, a polishing head placing mechanism, a negative pressure generating mechanism, a positive pressure generating mechanism, and a control module.

[0009] The polishing head connecting mechanism is arranged on the upper part of the whole machine support and is provided with a downward polishing head connecting flange.

[0010] The polishing head placing mechanism is arranged inside the whole machine support and exposed on the upper part of the whole machine support, used for placing the polishing head to be tested and controlling the lifting of the polishing head, assisting the operator to install or disassemble the polishing head on the polishing head connecting mechanism.

[0011] The negative pressure generating mechanism is connected to the polishing head connecting mechanism through a negative pressure gas pipeline, which is provided with a negative pressure pipeline electromagnetic valve and a negative pressure pipeline pressure detection sensor.

[0012] The positive pressure generating mechanism is connected to the polishing head connecting mechanism through a positive pressure gas pipeline, which is provided with a positive pressure pipeline electromagnetic valve and a positive pressure pipeline pressure detection sensor.

[0013] The control module collects detection parameters and controls the lifting of the polishing head placing mechanism.

[0014] Further, the whole machine support is a frame structure, and the inside is the installation space of other components, and the outside is provided with a cover plate to separate the inside and outside space, and the other components include the polishing head placing mechanism, the negative pressure generating mechanism, and the positive pressure generating mechanism.

[0015] Further, the height of the whole machine support is adjustable to adapt to the needs of different operating habits of personnel.

[0016] Further, the negative pressure generating mechanism is a vacuum pump or a jet vacuum generator, and the pressure is adjustable according to actual testing needs.

[0017] Further, the positive pressure generating mechanism is an air pump or a compressed air source, and the pressure is adjustable according to actual testing needs.

[0018] Further, the polishing head connecting mechanism is designed to replace different connecting flanges according to the type of the polishing head to be detected, and is suitable for detecting different types of polishing heads.

[0019] Further, the polishing head connecting mechanism is provided with an end cap for sealing the polishing head connecting mechanism during self-checking of the device.

[0020] Further, the polishing head placing mechanism is a lifting platform provided with a lead screw guide and driven by a motor to control the lifting of the polishing head.

[0021] Further, the pressure detection sensor is a digital pressure sensor, which can collect the pressure of the negative pressure generating mechanism and the positive pressure generating mechanism acting on the ejection head in real time or in segments according to the setting.

[0022] Further, the control module controls the detection process according to the detection method input by an operator, and outputs the detection parameter and the detection result.

[0023] The utility model discloses the beneficial effects of:

[0024] The utility model discloses a general ejection head offline quick leak detection device can realize ejection head offline leak detection, and the ejection head can be directly offline detected after Template replacement, reduces the occupation to the machine table capacity, improves the equipment OEE (equipment comprehensive efficiency), also provides a prior detection method for the machine table without leak detection program, reduces the risk degree of economic loss caused by ejection head defect, through the method that the air pressure acting on the ejection head is directly detected to the simulation machine, the leakage condition of ejection head is more accurate and fast feedback, is closer to the actual situation, in addition, the connecting mechanism of the utility model can be adapted to different kinds of ejection head, and the test of different kinds of ejection head can be realized by replacing the ejection head connecting mechanism, has good universality. BRIEF DESCRIPTION OF DRAWINGS

[0025] Figure 1 It is the structure schematic diagram of the ejection head offline quick leak detection device of the utility model.

[0026] Figure 2 It is the structure schematic diagram of the lifting mechanism in the quick leak detection device of the utility model.

[0027] Figure 3 It is the overall appearance schematic diagram of the ejection head offline quick leak detection device of the utility model.

[0028] Figure 4 It is the flow chart of the ejection head offline quick leak detection using the quick leak detection device of the utility model.

[0029] Reference signs:

[0030] 1-Whole machine support, 2-Negative pressure generating mechanism, 3-Positive pressure generating mechanism, 4-Throw head connecting mechanism, 5-Throw head placing mechanism, 6-Negative pressure gas pipeline, 7-Positive pressure gas pipeline, 8-Throw head, 9-Control module, 101-External cover plate, 401-Throw head connecting flange, 402-Throw head connecting flange end cover, 501-Throw head taking and placing convenient hole, 502-Throw head placing mechanism lifting guide rail, 503-Throw head placing mechanism lifting screw, 504-Throw head placing mechanism lifting motor, 505-Throw head placing mechanism lifting motor support, 601-Negative pressure pipeline pressure detection sensor, 602-Negative pressure pipeline electromagnetic valve, 701-Positive pressure pipeline pressure detection sensor, 702-Positive pressure pipeline electromagnetic valve. DETAILED DESCRIPTION

[0031] The utility model will be described in further detail below in combination with the drawings, and it should be particularly pointed out that the utility model described below is only used to illustrate the individual implementation of the utility model and is not particularly limited to the utility model. In addition, it should be emphasized that in order to facilitate the description of the utility model, only part of the utility model is listed in the drawings, and the part expanded also includes in the protection scope of the utility model.

[0032] As shown in Figures 1-3 The utility model discloses a general type throw head off-line rapid leak detection device at least includes: whole machine support 1, negative pressure generating mechanism 2, positive pressure generating mechanism 3, throw head connecting mechanism 4, throw head placing mechanism 5, negative pressure gas pipeline 6, positive pressure gas pipeline 7, control module 9 and other components.

[0033] Among them, as Figure 1As shown, the whole machine support 1 as an external support frame, provides other components to install space, installation location, the whole machine support 1 inside is provided with negative pressure generating mechanism 2 and positive pressure generating mechanism 3. Negative pressure generating mechanism 2 is connected with the head connection mechanism 4 by independent negative pressure gas pipeline 6, and the negative pressure generated by the negative pressure generating mechanism 2 is transmitted to the head connection mechanism 4 through the negative pressure gas pipeline 6; the positive pressure generating mechanism 3 is connected with the head connection mechanism 4 by independent positive pressure gas pipeline 7, and the positive pressure generated by the positive pressure generating mechanism 3 is transmitted to the head connection mechanism 4 through the positive pressure gas pipeline 7. The negative pressure pipeline electromagnetic valve 602 is provided on the negative pressure pipeline 6, which is used to control the opening and closing of the negative pressure effect of the negative pressure generating mechanism 2 on the head during leak detection; the positive pressure pipeline electromagnetic valve 702 is provided on the positive pressure pipeline 7, which is used to control the opening and closing of the positive pressure effect of the positive pressure generating mechanism 3 on the head during leak detection. A negative pressure pipeline pressure detection sensor 601 is provided on the negative pressure pipeline 6 after the negative pressure pipeline electromagnetic valve 602, which collects the pressure of the negative pressure gas pipeline 6 and transmits it to the control module 9; a positive pressure pipeline pressure detection sensor 701 is provided on the positive pressure pipeline 7 after the positive pressure pipeline electromagnetic valve 702, which collects the pressure of the positive pressure gas pipeline 7 and transmits it to the control module 9.

[0034] The head connection mechanism is arranged on the upper part of the whole machine support 1, and a downward head connection flange 401 is arranged thereon. It should be particularly pointed out that the head connection flange 401 can be replaced according to different types of heads 8, so as to realize the adaptation of multiple types of heads 8. A detachable head connection flange end cover 402 is arranged on the head connection flange 401. When the head 8 to be detected is not installed, the head connection flange end cover 402 is installed on the head connection flange 401 to seal the gas circuit of the leak detection device, and the self-checking of the leak detection device is carried out to exclude the false judgment caused by the leakage of the leak detection device during the head leak detection. Figure 2 As shown, the head placing mechanism 5 is arranged inside the whole machine support 1 and exposed on the upper part of the whole machine support 1, mainly including a head taking and placing convenient hole 501, a head placing mechanism lifting guide rail 502, a head placing mechanism lifting screw 503, a head placing mechanism lifting motor 504, a head placing mechanism lifting motor support 505 and the like. The outside of the whole machine support is covered by an external cover plate 101 to seal the inside of the machine table, so that the overall effect is beautiful. The control module 9 is arranged on the front cover plate of the whole device, which is convenient for the operator to operate.

[0035] As shown, Figures 1-3As shown, in the leak detection process of the operator using the device to carry out single cavity head, the operator holds the diameter position of the head 8 with both hands, and the hands pass through the head taking and placing convenient hole 501 on both sides of the head placing mechanism 5 respectively, and places the head 8 on the head placing mechanism 5. The operator issues the instruction of the head placing mechanism 5 rising through the control module 9. The head placing mechanism lifting motor 504 drives the head placing mechanism lifting screw 503 to rise, so as to drive the head placing mechanism 5 to move upward along the head placing mechanism lifting guide rail 502. After rising to the position where the head 8 contacts the head connecting flange 401, stop, the operator fixes the head 8 and the head connecting flange 401 together through the fixing tool of the head 8, issues the instruction of the head placing mechanism 5 descending through the control module 9, and drives the head placing mechanism lifting screw 503 to descend through the head placing mechanism lifting motor 504, so as to drive the head placing mechanism 5 to descend to the initial position along the head placing mechanism lifting guide rail 502. After detection is completed, the operator first controls the head placing mechanism to rise to the position where the head 8 just contacts the head placing mechanism 5 through the control module 9, opens the fixing tool of the head 8 and makes the head 8 fall on the head placing mechanism 5, and then controls the head placing mechanism 5 to carry the head 8 to descend to the initial position through the control module 9. The operator holds the diameter position of the head 8 with both hands respectively passing through the head taking and placing convenient hole 501 on both sides of the head placing mechanism 5 and taking the head.

[0036] As Figure 4 shown, the device of the utility model in the process of using, the operator issues the instruction of leak detection test through the control module 9:

[0037] When the negative pressure leak detection is performed, the negative pressure pipeline electromagnetic valve 602 on the negative pressure gas pipeline 6 is opened, the negative pressure generating mechanism 2 acts the pressure of the chuck and the whole negative pressure gas pipeline 6 to the set pressure value a through the negative pressure gas pipeline 6 and keeps for a period of time, then the negative pressure pipeline electromagnetic valve 602 is closed, the whole negative pressure gas pipeline 6 and the chuck 8 gas circuit keep pressure for a period of time. After the pressure keeping is finished, the control module 9 collects the pipeline pressure b after the pressure keeping is finished through the negative pressure pipeline pressure detection sensor 601 and performs pressure loss rate calculation (the calculation method is: pressure loss rate S1=(b-a) / a*100%), and compares with the pressure loss rate threshold value set by the operator, the pressure loss rate S1 is within the threshold value range, and it is judged as qualified, and the pressure loss rate S1 exceeds the threshold value range, and it is judged as unqualified; when the positive pressure leak detection is performed, the positive pressure pipeline electromagnetic valve 702 on the positive pressure gas pipeline 7 is opened, the positive pressure generating mechanism 3 acts the pressure of the chuck and the whole positive pressure gas pipeline 7 to the set pressure value c through the positive pressure gas pipeline 7 and keeps for a period of time, then the positive pressure pipeline electromagnetic valve 702 is closed, the whole positive pressure gas pipeline 7 and the chuck 8 gas circuit keep pressure for a period of time. After the pressure keeping is finished, the control module 9 collects the pipeline pressure d after the pressure keeping is finished through the positive pressure pipeline pressure detection sensor 701 and performs pressure loss rate calculation (the calculation method is: pressure loss rate S2=(d-c) / c*100%), and compares with the pressure loss rate threshold value set by the operator, the pressure loss rate S2 is within the threshold value range, and it is judged as qualified, and the pressure loss rate S2 exceeds the threshold value range, and it is judged as unqualified.

[0038] After the negative pressure leak detection and the positive pressure leak detection are completed, the final judgment standard of the chuck is comprehensively judged according to the detection results of the pressure loss rates S1 and S2, as shown in Table 1.

[0039] Table 1 final judgment standard of chuck

[0040]

[0041] In the case that S1 and S2 are both qualified, the chuck detection result is judged as directly usable, and as long as one of S1 and S2 is unqualified, the chuck is judged as unusable.

[0042] In summary, the utility model provides a general type chuck offline rapid leak detection device in view of the problem that there is no special leak detection device after the chuck is replaced in the polishing process of the silicon wafer or the machine table capacity is occupied or a greater economic loss risk is caused in the trial processing process. Offline detection is performed by using the device, the occupation of the machine table capacity is reduced, and the problem of economic loss such as fragments caused by the trial processing process of part of the machine table without the leak detection program is avoided. In addition, the chuck connecting mechanism chuck connecting flange is designed as a structure that can be replaced with different types of chucks, so that the leak detection of various chucks can be performed, and good universality is achieved.

Claims

1. A universal head off-line leak detection device, characterized in that, The device has: The whole machine support provides support and space for the installation of other components, including: the head connection mechanism, the head placement mechanism, the negative pressure generating mechanism, the positive pressure generating mechanism, and the control module. The head connection mechanism is set on the upper part of the whole machine support, and a downward head connection flange is set thereon. The head placement mechanism is set inside the whole machine support and exposed on the upper part of the whole machine support, used for placing the measured head and controlling the head lifting, assisting the operator to install or disassemble the head on the head connection mechanism. The negative pressure generating mechanism is connected with the head connection mechanism through a negative pressure gas pipeline, and a negative pressure pipeline electromagnetic valve and a negative pressure pipeline pressure detection sensor are arranged on the negative pressure gas pipeline. The positive pressure generating mechanism is connected with the head connection mechanism through a positive pressure gas pipeline, and a positive pressure pipeline electromagnetic valve and a positive pressure pipeline pressure detection sensor are arranged on the positive pressure gas pipeline. The control module collects detection parameters and controls the lifting of the head placement mechanism.

2. The universal head off-line leak detection device of claim 1, wherein, The whole machine support is a frame structure, and the inside is the installation space of other components, and the outside is provided with a cover plate to separate the inside and outside space, and the other components include the head placement mechanism, the negative pressure generating mechanism, and the positive pressure generating mechanism.

3. The universal head off-line leak detection device of claim 2, wherein, The height of the whole machine support is adjustable.

4. The universal head off-line leak detection device of claim 1, wherein, The negative pressure generating mechanism is a vacuum pump or a jet vacuum generator, and the pressure is adjustable.

5. The universal head off-line leak detection device of claim 1, wherein, The positive pressure generating mechanism is an air pressure pump or a compressed air source, and the pressure is adjustable.

6. The universal head off-line quick leak detection device of claim 1, wherein, The head connection mechanism is designed to replace different connection flanges according to the actual detected head type, and is suitable for detecting different types of heads.

7. The universal head off-line quick leak detection device of claim 6, wherein, The head connection mechanism is provided with an end cover for sealing the head connection mechanism during device self-checking.

8. The universal head off-line quick leak detection device of claim 1, wherein, The head placement mechanism is a lifting platform provided with a lead screw guide, driven by a motor to control the lifting of the head.

9. The universal head off-line quick leak detection device of claim 1, wherein, The pressure detection sensor is a digital pressure sensor, which can collect the pressure of the head acted on by the negative pressure generating mechanism and the positive pressure generating mechanism in the test process according to the setting in real time or in segments.

10. The universal head off-line leak detection device of claim 1, wherein, The control module controls the detection process according to the detection method input by the operator, and outputs the detection parameters and detection result judgment.

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