Liquid touch alarm of single crystal furnace

Abstract

The utility model discloses a liquid touch alarm of a single crystal furnace. The liquid touch alarm comprises a probe head assembly, a probe connecting assembly and an electrode head assembly, a second compression nut is fixedly arranged at one end of a molybdenum screw rod of the probe connecting assembly, the other end of the molybdenum screw rod is connected with a molybdenum screw rod joint, the molybdenum screw rod joint comprises a through hole and is provided with a contraction joint, and the molybdenum screw rod joint is screwed into the first compression nut of the probe head assembly to clamp the molybdenum screw rod; one end of a molybdenum wire rope of the electrode tip assembly is connected with a molybdenum wire rope joint with a contraction seam; the molybdenum wire rope sequentially penetrates through a first through hole extending in the axial direction of the molybdenum wire rope connector and a second through hole extending in the circumferential direction of the molybdenum wire rope connector and is fixed through a first fixing nut, and the molybdenum wire rope connector is screwed into a second pressing nut to clamp the molybdenum wire rope. The liquid touch alarm mechanism is divided into three detachable parts through the molybdenum lead screw connector, the first compression nut, the molybdenum wire rope connector and the second compression nut, the liquid touch alarm mechanism is easy to detach in the maintenance and cleaning process, maintenance and cleaning of the single crystal furnace are facilitated, the damaged parts can be independently replaced, and the maintenance cost is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to crystal growth equipment furnace, concretely relates to a kind of liquid touch alarm of single crystal furnace. BACKGROUND

[0002] In the automatic pulling crystal process, the heat shield needs to be automatically lowered above the liquid surface. If the liquid port distance is too close (the liquid port distance is the vertical distance between the flow guide cylinder and the silicon liquid in the quartz crucible), the high-temperature silicon liquid is easy to immerse into the flow guide cylinder, causing silicon spitting accidents, and even causing the single crystal furnace to explode due to the silicon liquid scalding through the water-cooled screen. It is necessary to take measures to prevent the flow guide cylinder from contacting the silicon liquid in the quartz crucible and to avoid the silicon liquid from easily immersing into the flow guide cylinder. The existing technology uses a liquid touch alarm mechanism to alarm in time. The liquid touch mechanism is installed on the inside of the heat shield. However, the heat shield needs to be cleaned. When the heat shield is cleaned, the liquid touch mechanism is easy to fall off and easy to be damaged. After the damage, the whole needs to be replaced, which is high in cost. The existing liquid touch alarm mechanism is not convenient to disassemble and assemble, and the maintenance cost is high. SUMMARY

[0003] The utility model aims at the above-mentioned shortcomings, and provides a liquid touch alarm of single crystal furnace which is easy to disassemble and assemble and reduces the maintenance cost.

[0004] Technical Solution: To solve the above problems, this utility model adopts a liquid contact alarm for a single crystal furnace, including a probe head assembly, a probe connection assembly, an electrode head assembly, and an electronic control device. The probe head assembly is connected to the electrode head assembly through the probe connection assembly. The probe head assembly is used to contact the surface of the molten silicon. The electronic control device obtains a signal indicating whether the probe head assembly is in contact with liquid through the electrode head assembly. The probe head assembly includes a probe and a molybdenum screw connector fixedly disposed on the top of the probe. The probe connection assembly includes a molybdenum screw. The molybdenum screw connector includes an axially extending mounting hole for the molybdenum screw to pass through. Several shrinkage slits communicating with the mounting hole are provided on the side of the molybdenum screw connector, and threads are provided on the outer periphery. When the molybdenum screw connector is screwed into the first clamping nut, the shrinkage slits of the molybdenum screw connector contract to clamp the inserted molybdenum screw, thereby realizing the connection between the probe head assembly and the probe connection assembly. The connection of the components; the electrode head assembly includes a vacuum flange electrode and a molybdenum wire rope connected to the vacuum flange electrode. One end of the molybdenum wire rope is connected to the vacuum flange electrode, and the other end is connected to the molybdenum wire rope connector. One end of the molybdenum wire rope connector includes an axially extending first through hole and a circumferentially extending second through hole, which communicate with each other. The other end of the molybdenum wire rope connector is provided with an axially extending mounting hole for the molybdenum wire rod to pass through, and several contraction slots communicating with the mounting holes are provided on the side. The outer circumference of the molybdenum wire rope connector is provided with threads. When the second clamping nut is screwed into the contraction slot end of the molybdenum wire rope connector, the contraction slot of the molybdenum wire rope connector contracts to clamp the inserted molybdenum wire rod. One end of the molybdenum wire rope passes through the first through hole and the second through hole of the molybdenum wire rope connector in sequence and is screwed into the first fixing nut. By fixing the first fixing nut and the second clamping nut, the connection between the probe connection assembly and the electrode head assembly is realized.

[0005] Furthermore, the threaded holes of the first and second clamping nuts both include a frustum-shaped first clamping portion, and the contraction joint of the molybdenum screw joint and the molybdenum wire rope joint has a frustum-shaped contraction portion at one end, which cooperates with the first clamping portion of the first and second clamping nuts.

[0006] Furthermore, both the molybdenum wire rod joint and the molybdenum wire rope joint include four contraction joints.

[0007] Furthermore, the probe head assembly also includes a ceramic sleeve fixedly sleeved outside the probe and a fixing seat fixedly sleeved outside the ceramic sleeve, the fixing seat being used to fix the probe to the lower edge of the inner side of the water-cooled screen.

[0008] Furthermore, the probe connection assembly also includes a ceramic sleeve fixedly sleeved outside the molybdenum wire rod and an upper fixing plate for clamping the ceramic sleeve. The upper fixing plate is used to fix the molybdenum wire rod to the upper edge of the inner side of the water-cooled screen.

[0009] Further, the vacuum flange electrode comprises a flange part, an outer connecting part and an inner connecting part, the outer connecting part and the inner connecting part extend along the axial direction of the flange part, and the outer connecting part and the inner connecting part are located on both sides of the flange part, the end of the outer connecting part and the inner connecting part is provided with a through hole perpendicular to the axial direction, and the second fixing nut and the third fixing nut are arranged on both sides of the through hole, one end of the molybdenum wire rope passes through the through hole of the inner connecting part and is pressed on the inner connecting part through the second fixing nut and the third fixing nut of the inner connecting part, and the wire of the electric control device passes through the through hole of the outer connecting part and is pressed on the outer connecting part through the second fixing nut and the third fixing nut of the outer connecting part.

[0010] Further, the electrode head assembly further comprises an insulating ceramic sleeve sleeved outside the molybdenum wire rope.

[0011] Further, the first pressing nut, the second pressing nut, the molybdenum wire rod joint and the molybdenum wire rope joint are all made of molybdenum material.

[0012] Advantages: compared with the prior art, the molybdenum wire rod joint and the first pressing nut, the molybdenum wire rope joint and the second pressing nut divide the touch liquid alarm mechanism into three detachable parts, which is easy to detach during maintenance and cleaning, facilitates the maintenance and cleaning of the single crystal furnace, and when damage occurs during maintenance and cleaning, the damaged part can be replaced individually without the need for overall replacement, thereby reducing maintenance cost. The existing screw clamping method has the risk of screw loosening and falling, and the clamping method is convenient to detach and safe and reliable and not easy to fall off. The overall structure of the touch liquid alarm mechanism is firm and not easy to collide and fall off during cleaning and maintenance. BRIEF DESCRIPTION OF DRAWINGS

[0013] Figure 1 It is a structural schematic view of the touch liquid alarm installed in the single crystal furnace.

[0014] Figure 2 It is a structural schematic view of the touch liquid alarm installed in the single crystal furnace.

[0015] Figure 3 It is a structural schematic view of the probe head assembly in the utility model.

[0016] Figure 4 It is a sectional view of the probe head assembly in the utility model.

[0017] Figure 5 It is a structural schematic view of the molybdenum wire rod joint in the utility model.

[0018] Figure 6 It is a structural schematic view of the molybdenum wire rod joint in the utility model.

[0019] Figure 7The utility model discloses a second compression nut and molybdenum wire rope joint connection structure diagram.

[0020] Figure 8 The utility model discloses a second compression nut and molybdenum wire rope joint connection sectional view schematic drawing.

[0021] Figure 9 The utility model discloses a vacuum flange electrode structure schematic drawing. Specific implementation

[0022] As Figure 1 The utility model discloses a kind of single crystal furnace's touch liquid alarm in the embodiment, touch liquid alarm 100 is used in photovoltaic single crystal furnace one-key automation crystal pulling process, this alarm is installed in water-cooled screen 200 inside, probe 111 is installed in the lower edge of water-cooled screen 200, is connected combination integral through molybdenum wire rod 121 and molybdenum wire rope 131, is connected on vacuum flange electrode 132.Vacuum flange electrode is installed on the furnace cover 300 of single crystal furnace, vacuum flange electrode is connected to industrial computer by electric lead, and industrial computer provides a voltage value for probe, when water-cooled screen drops, probe contacts silicon liquid, voltage value becomes 0, simultaneously alarm.This time water-cooled screen and flow guide cylinder have dropped to the lowest position, in dangerous position, cannot continue to drop.In actual use, water-cooled screen drops to set position, probe is not in contact with silicon liquid, but because of uncertain factor, in one-key crystal pulling process, cause water-cooled screen not to stop at set position, continue to drop, until probe contacts silicon liquid, detect that probe touches liquid, immediately alarm, remind operator single crystal furnace in dangerous state, need emergency treatment fault.

[0023] As Figure 2 Indicated, touch liquid alarm 100 includes probe head assembly 110, probe connection assembly 120, electrode head assembly 130 and electric control control device.Probe head assembly 110 is connected 130 with electrode head assembly through probe connection assembly 120, probe head assembly 110 is used to contact with the liquid level of silicon liquid, and electric control control device includes industrial computer, and electric control control device obtains whether probe head assembly 110 touches liquid signal through electrode head assembly 130.

[0024] As Figures 3 to 5As shown, the probe head assembly 110 includes a probe 111, a molybdenum wire rod joint 122 fixedly arranged at the tail of the probe, a ceramic sleeve 112 fixedly arranged outside the probe, and a fixed seat 113 fixedly arranged outside the ceramic sleeve, and the fixed seat 113 is used for fixing the probe 111 to the lower side of the inner side of the water-cooled screen. The probe 111 is made of high-temperature-resistant molybdenum material, and the outer side is insulated by the ceramic sleeve. The fixed seat clamps the ceramic sleeve and is installed at the lower side of the inner side of the water-cooled screen. The molybdenum wire rod joint 122 includes an axially extending mounting hole for the molybdenum wire rod 121 to pass through, and a plurality of shrinkage seams are arranged on the side surface and communicated with the mounting hole. In this embodiment, the molybdenum wire rod joint 122 is provided with four shrinkage seams, and a tapered conical shrinkage portion is arranged at one end of the molybdenum wire rod joint 122. A threaded hole of the first compression nut 114 includes a tapered conical first compression portion and a cylindrical second threaded portion, and the tapered conical first compression portion is used to compress the shrinkage portion of the molybdenum wire rod joint 122.

[0025] As shown, Figure 6 The probe connecting assembly 120 includes a molybdenum wire rod 121, a ceramic sleeve 123 fixedly arranged outside the molybdenum wire rod, and an upper fixed plate 124 clamping the ceramic sleeve. The upper fixed plate 124 is used for fixing the molybdenum wire rod 121 to the upper side of the inner side of the water-cooled screen and supporting the entire probe connecting assembly. The molybdenum wire rod 121 passes through the insulating ceramic sleeve and avoids contacting the upper fixed plate 124. The insulating ceramic sleeve is fixed on the upper fixed plate by screw clamping. One end of the molybdenum wire rod 121 is connected with the molybdenum wire rope joint 134, and the other end is connected with the molybdenum wire rod joint 122. When the molybdenum wire rod joint 122 is screwed into the first compression nut 114, the shrinkage seam of the molybdenum wire rod joint 122 is compressed to clamp and fix the molybdenum wire rod 121 passing through, so as to realize the fixed and firm connection of the probe head assembly and the probe connecting assembly.

[0026] The electrode head assembly 130 includes a vacuum flange electrode 131, a molybdenum wire rope 132, and an insulating ceramic sleeve 133 arranged outside the molybdenum wire rope. One end of the molybdenum wire rope 132 is connected with the flange electrode 131, and the other end is connected with the molybdenum wire rope joint 134. One end of the molybdenum wire rope joint 134 includes an axially extending first through hole and a circumferentially extending second through hole, and the first through hole is communicated with the second through hole. The other end of the molybdenum wire rope joint 134 is provided with an axially extending mounting hole for the molybdenum wire rod 121 to pass through, and a plurality of shrinkage seams are arranged on the side surface and communicated with the mounting hole. In this embodiment, the molybdenum wire rope joint 134 is provided with four shrinkage seams, and the end of the molybdenum wire rope joint 134 where the shrinkage seams are located is a tapered conical shrinkage portion. A threaded hole of the second compression nut 125 includes a tapered conical first compression portion and a cylindrical second threaded portion, and the tapered conical first compression portion is used to compress the shrinkage portion of the molybdenum wire rope joint 134. The outer periphery of the molybdenum wire rope joint 134 is provided with threads, which cooperates with the second threaded portion of the second compression nut 125 and the first fixed nut 135, and the first fixed nut 135 is an M12 nut. Figure 7 and Figure 8As shown, when the molybdenum wire rope connector 134 is screwed into the second clamping nut 125, the contraction joint of the molybdenum wire rope connector 134 contracts and clamps the inserted molybdenum wire rod 121. One end of the molybdenum wire rope 132 passes through the first through hole and the second through hole of the molybdenum wire rope connector 134 in sequence, extends out from the side of the molybdenum wire rope connector 134, and is clamped and fixed by the first fixing nut 135 and the second clamping nut 125, so as to realize the secure connection between the probe connection assembly and the electrode head assembly.

[0027] like Figure 9 As shown, the vacuum flange electrode 131 includes a flange portion 1311, an outer connecting portion 1312, and an inner connecting portion 1313. Both the outer connecting portion 1312 and the inner connecting portion 1313 extend axially along the flange portion and are located on both sides of the flange portion 1311. The ends of both the outer connecting portion 1312 and the inner connecting portion 1313 are provided with through holes 1314 perpendicular to the axial direction. A second fixing nut 1315 and a third fixing nut 1316 are provided on both sides of the through hole 1314. One end of the molybdenum wire rope passes through the through hole 1314 of the inner connecting portion and is pressed onto the inner connecting portion by the second fixing nut 1315 and the third fixing nut 1316. The wire of the electrical control device passes through the through hole 1314 of the outer connecting portion and is pressed onto the outer connecting portion 1312 by the second fixing nut 1315 and the third fixing nut 1316. The flange portion 1311 is fixed to the furnace cover of the single crystal furnace. After the entire assembly is connected, the industrial control computer provides the voltage, and an alarm signal is issued when the probe head comes into contact with the molten silicon.

Claims

1. A liquid contact alarm for a single crystal furnace, characterized in that, The probe head assembly (110) is connected with the electrode head assembly (130) through the probe connecting assembly (120), the probe head assembly (110) is used for contacting with the liquid level of the silicon liquid, and the electric control control device obtains the liquid contact signal of the probe head assembly (110) through the electrode head assembly (130); the probe head assembly (110) comprises a probe (111) and a molybdenum wire rod joint (122) fixedly arranged at the top of the probe, the probe connecting assembly (120) comprises a molybdenum wire rod (121), the molybdenum wire rod joint (122) comprises an installation hole extending in the axial direction for the molybdenum wire rod (121) to pass through, a plurality of shrinkage joints in communication with the installation hole are arranged on the side surface of the molybdenum wire rod joint (122), and threads are arranged on the outer periphery; when the molybdenum wire rod joint (122) is screwed into the first compression nut (114), the shrinkage joints of the molybdenum wire rod joint (122) are shrunk to clamp the molybdenum wire rod (121) passing through, so that the connection between the probe head assembly (110) and the probe connecting assembly (120) is realized; the electrode head assembly (130) comprises a vacuum flange electrode (131) and a molybdenum wire rope (132) connected with the vacuum flange electrode (131), one end of the molybdenum wire rope (132) is connected with the vacuum flange electrode (131), and the other end is connected with a molybdenum wire rope joint (134); one end of the molybdenum wire rope joint (134) comprises a first through hole extending in the axial direction and a second through hole extending in the circumferential direction, the first through hole is in communication with the second through hole, the other end of the molybdenum wire rope joint (134) is provided with an installation hole extending in the axial direction for the molybdenum wire rod (121) to pass through, and a plurality of shrinkage joints in communication with the installation hole are arranged on the side surface, threads are arranged on the outer periphery of the molybdenum wire rope joint (134); when the end provided with the shrinkage joints of the molybdenum wire rope joint (134) is screwed into the second compression nut (125), the shrinkage joints of the molybdenum wire rope joint (134) are shrunk to clamp the molybdenum wire rod (121) passing through, one end of the molybdenum wire rope (132) passes through the first through hole and the second through hole of the molybdenum wire rope joint (134) in sequence and is screwed into the first fixed nut (135), the first fixed nut (135) and the second compression nut (125) are clamped and fixed by fixing, and the connection between the probe connecting assembly (120) and the electrode head assembly (130) is realized.

2. The melt level alarm for a single crystal furnace as set forth in claim 1, wherein The threaded holes of the first compression nut (114) and the second compression nut (125) all comprise a first compression part in the shape of a truncated cone, and the end of the shrinkage joint of the molybdenum wire rod joint (122) and the molybdenum wire rope joint (134) is in the shape of a truncated cone, which cooperates with the first compression part of the first compression nut (114) and the second compression nut (125).

3. The touch liquid alarm of a single crystal furnace according to claim 2, wherein The molybdenum wire rod joint and the molybdenum wire rope joint (134) all comprise four shrinkage joints.

4. The melt level alarm for a single crystal growth furnace as defined in claim 1 wherein, The probe head assembly (110) further comprises a ceramic sleeve (112) fixedly sleeved outside the probe and a fixed seat (113) fixedly sleeved outside the ceramic sleeve, and the fixed seat (113) is used for fixing the probe (111) to the lower edge of the inner side of the water-cooled screen.

5. The melt level alarm for a single crystal growth furnace as defined in claim 1 wherein, The probe connecting assembly (120) further comprises a ceramic sleeve (123) fixedly sleeved outside the molybdenum wire rod (121) and an upper fixing plate (124) clamping the ceramic sleeve, the upper fixing plate (124) being used for fixing the molybdenum wire rod (121) to the upper side of the inner side of the water-cooled screen.

6. The melt level alarm for a single crystal growth furnace as defined in claim 1 wherein, The vacuum flange electrode (131) comprises a flange part (1311), an outer connecting part (1312) and an inner connecting part (1313), the outer connecting part (1312) and the inner connecting part (1313) extending along the axial direction of the flange part (1311), and the outer connecting part (1312) and the inner connecting part (1313) being located on both sides of the flange part (1311), the end of the outer connecting part (1312) and the inner connecting part (1313) being provided with a through hole (1314) perpendicular to the axial direction, and the second fixing nut (1315) and the third fixing nut (1316) being arranged on both sides of the through hole, one end of the molybdenum wire rope (132) penetrating through the through hole of the inner connecting part (1313) and being compressed on the inner connecting part (1313) through the second fixing nut (1315) and the third fixing nut (1316) of the inner connecting part (1313), and the wire of the electric control device penetrating through the through hole of the outer connecting part (1312) and being compressed on the outer connecting part (1312) through the second fixing nut (1315) and the third fixing nut (1316) of the outer connecting part (1312), and the flange part (1311) being fixed to the furnace cover of the single crystal furnace.

7. The touch fluid alarm of claim 1, wherein, The electrode head assembly (130) further comprises an insulating ceramic sleeve (133) sleeved outside the molybdenum wire rope (132).

8. The touch fluid alarm of claim 1, wherein, The first compression nut (114), the second compression nut (125), the molybdenum wire rod joint (122) and the molybdenum wire rope joint (134) are all made of molybdenum material.

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