Electronic-grade silane system device

Abstract

The utility model relates to the technical field of silane production, in particular to an electronic-grade silane system device which comprises a partition plate tower, the partition plate tower is communicated with a purification furnace through a first pipeline, the purification furnace is connected with a rectifying tower through a second pipeline, and a filter is arranged on the second pipeline. Process gas prepared by a silicon-magnesium method reaction kettle is conveyed to the middle of a partition plate tower, light component impurities such as H2 and N2 are removed at the top of the partition plate tower, and after non-metal hydride and high-order silane components such as silane and disilane are removed at the bottom of the tower, crude silane is extracted from the tower side and is introduced into a purification furnace through a first pipeline, and by means of the property that the thermal stability of the silane and the hydride impurities is different, the high-order silane is obtained. And adjusting the temperature of the purification furnace to a proper temperature, carrying out thermal decomposition on hydride impurities, filtering a silane gas phase obtained in the purification furnace through a filter on a second pipeline, introducing the filtered silane gas phase into a rectifying tower for refining, and finally extracting a liquid phase, thereby obtaining the high-purity electronic-grade silane.

Description

Technical Field

[0001] This utility model relates to the field of silane production technology, specifically to a system device for electronic-grade silane. Background Technology

[0002] Currently, the main methods for producing electronic-grade silanes are the chlorosilane disproportionation process and the silicon-magnesium process (Komatsu process). Among them, the silane process is still used by some manufacturers to produce electronic-grade silanes because it can co-produce higher-order silanes such as methylsilane (hereinafter referred to as silane), ethylsilane, and propane, and the process has the advantages of low investment, easy implementation of process parameters, and high safety.

[0003] Because the silane process yields a large number of products, and these products are of high value, a large number of distillation columns are typically used to separate and purify higher-order silanes such as silane, ethylsilane, and propane. This undoubtedly increases the initial investment cost and also raises the production cost of the products. Utility Model Content

[0004] The purpose of this invention is to provide a system device for electronic-grade silane to address the aforementioned shortcomings in the prior art.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A system device for electronic-grade silane includes a partition column, the partition column being connected to a purification furnace via a first pipe, the purification furnace being connected to a distillation column via a second pipe, and a filter being installed on the second pipe.

[0007] Furthermore, the filter includes two filter tubes arranged in parallel on the second pipe, and a flow divider is provided at the connection between the inlet of the two filter tubes and the second pipe. The filter tubes and the second pipe can be connected by flanges, which is a common technique used by those skilled in the art and will not be described in detail here.

[0008] Furthermore, the diverter includes a diverting ball rotatably disposed within a second pipe. The diverting ball has a first opening, a second opening, and a third opening, which are all interconnected. A controller for rotating the diverting ball is also provided on the second pipe, and a sealing gasket is also provided inside the second pipe.

[0009] Furthermore, the controller includes a rotating rod fixedly mounted on the diverter ball, the rotating rod passing through the second pipe and slidably connected to a twist cap, the twist cap driving the diverter ball to rotate via the rotating rod.

[0010] Furthermore, the end of the rotating rod that is slidably connected to the toggle cap is rectangular in shape.

[0011] Furthermore, a locking rod is fixedly installed on the second pipe, and multiple locking holes are provided on the twist cap, with the multiple locking holes arranged in a ring.

[0012] The beneficial effects of the electronic-grade silane system device provided by this utility model in the above technical solution are as follows:

[0013] The process gas prepared in the silicon-magnesium process reactor is conveyed to the middle of a baffled column. At the top of the column, light impurities such as H2 and N2 are removed. At the bottom, non-metallic hydrides and higher-order silane components such as silanes and silanes are removed. Crude silane is collected from the side of the column and fed into a purification furnace via a first pipeline. Utilizing the difference in thermal stability between silanes and hydride impurities, the purification furnace is adjusted to a suitable temperature to thermally decompose the hydride impurities. The silane gas phase obtained in the purification furnace is then filtered through a filter on a second pipeline and fed into a distillation column for purification. Finally, the liquid phase is collected, yielding high-purity electronic-grade silane. This device can reduce the number of purification units while ensuring high separation efficiency between silanes and other higher-order silanes, thereby reducing initial construction costs.

[0014] It should be understood that the foregoing general description and the following detailed description are exemplary and illustrative only, and are not intended to limit this disclosure.

[0015] This application provides an overview of various implementations or examples of the technology described in this disclosure, and is not a full disclosure of the entire scope or all features of the disclosed technology. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings.

[0017] Figure 1 A schematic diagram of the overall process structure provided for an embodiment of this utility model;

[0018] Figure 2 A schematic diagram of the filter structure provided in an embodiment of this utility model;

[0019] Figure 3 This is a cross-sectional view of the filter provided in an embodiment of the present invention;

[0020] Figure 4 This is a schematic diagram of the splitter structure provided in an embodiment of the present utility model.

[0021] Explanation of reference numerals in the attached figures:

[0022] 1. Baffle tower; 2. Purification furnace; 3. Filter; 31. Filter tube; 4. Distillation column; 5. First pipe; 6. Second pipe; 7. Flow divider; 71. Flow divider ball; 72. First opening; 73. Second opening; 74. Third opening; 8. Controller; 81. Rotating rod; 82. Twist cap; 83. Locking hole. Detailed Implementation

[0023] To make the objectives, technical solutions, and advantages of the embodiments of this disclosure clearer, the technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this disclosure. All other embodiments obtained by those skilled in the art based on the described embodiments of this disclosure without creative effort are within the scope of protection of this disclosure.

[0024] Please see Figure 1-4 A system device for electronic-grade silane includes a partition tower 1, which is connected to a purification furnace 2 via a first pipe 5. The purification furnace 2 is connected to a distillation tower 4 via a second pipe 6, and a filter 3 is installed on the second pipe 6.

[0025] The pressure of the partition column 1 is 0.3 to 0.5 MPaG and the temperature is -90 to -20℃; the purification furnace 2 is heated and the temperature is set at 300 to 450℃; the temperature of the distillation column 4 is -90 to -120℃ and the pressure is controlled at 0.2 to 0.4 MPaA.

[0026] Furthermore, the filter 3 includes two filter tubes 31, which are arranged in parallel on the second pipe 6, and a flow divider 7 is provided at the connection between the inlet of the two filter tubes 31 and the second pipe 6. A filter screen is provided inside each filter tube 31, with a filtration accuracy of 60-120 mesh.

[0027] Since this device can continuously produce electronic-grade silane, and the filter 3 will gradually become clogged during use, affecting the production efficiency, the second pipe 6 can be connected to a filter tube 31 in one direction through the splitter 7. Thus, when the filter tube 31 is replaced, one filter tube 31 can perform filtration without stopping the machine and without affecting the production of electronic-grade silane.

[0028] Furthermore, the diverter 7 includes a diverting ball 71 rotatably disposed within the second pipe 6. The diverting ball 71 has a first opening 72, a second opening 73, and a third opening 74, all of which are interconnected. A controller 8 for rotating the diverting ball 71 is also provided on the second pipe 6, and a sealing gasket is also provided inside the second pipe 6. The sealing gasket is used to seal the diverting ball 71 and the second pipe 6, preventing material from escaping from the second pipe 6 and affecting safety.

[0029] See appendix Figure 3 When the first opening 72 and the second opening 73 are connected, they are connected to the filter tube 31 on the lower side; the third opening 74 is sealed by a sealing gasket; when the diverting ball 71 is rotated clockwise, when the first opening 72 and the third opening 74 are connected, they are connected to the filter tube 31 on the upper side, and at this time the second opening 73 is sealed by a sealing gasket.

[0030] Furthermore, the controller 8 includes a rotating rod 81 fixedly mounted on the diverter ball 7. The rotating rod 81 passes through the second pipe 6 and is slidably connected to a twist cap 82. The twist cap 82 drives the diverter ball 71 to rotate via the rotating rod 81. The rotation of the diverter ball 71 adjusts the connection status of the first opening 72, the second opening 73, and the third opening 74 with the second pipe 6 and the two filter tubes 31.

[0031] Furthermore, the end of the rotating rod 81 that is slidably connected to the twist cover 82 is rectangular. It is not limited to a rectangle; it can also be hexagonal, triangular, etc., as long as it satisfies the requirement that the twist cover 82 drives the rotating rod 81 to rotate.

[0032] Furthermore, a locking rod is fixedly installed on the second pipe 6, and the twist cover 82 has multiple locking holes 83 arranged in a ring. When the twist cover 82 is rotated, the locking holes 83 are inserted into the locking rod to lock the position of the twist cover 82 at that moment, thereby limiting the position of the diverter ball 71 to facilitate filtration.

[0033] Working Principle: The process gas prepared by the silicon-magnesium process reactor is conveyed to the middle of the baffle column 1. Light impurities such as H2 and N2 are removed at the top of the column, and non-metallic hydrides and higher-order silane components such as silane and silane are removed at the bottom. Crude silane is then collected from the side of the column and fed into the purification furnace 2 via the first pipe 5. Utilizing the difference in thermal stability between silane and hydride impurities, the purification furnace 2 is adjusted to a suitable temperature to thermally decompose the hydride impurities. The silane gas phase obtained in the purification furnace 2 is then filtered through the filter 3 on the second pipe 6 and further purified in the distillation column 4. Finally, the liquid phase is collected, yielding high-purity electronic-grade silane. This device can reduce the number of purification units while ensuring high separation efficiency between silane and other higher-order silanes, thereby reducing initial construction costs.

[0034] The foregoing description only illustrates certain exemplary embodiments of the present invention. Undoubtedly, those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A system apparatus for electronic grade silane, characterized by: The application relates to a filter for a separating plate tower (1), which is communicated with a purification furnace (2) through a first pipeline (5), the purification furnace (2) is connected with a rectifying tower (4) through a second pipeline (6), and a filter (3) is arranged on the second pipeline (6).

2. A system for producing electronic grade silane as claimed in claim 1, wherein, The filter (3) comprises two filter pipes (31), the two filter pipes (31) are arranged in parallel on the second pipeline (6), and a flow divider (7) is arranged at the connection position between the feed inlet of the two filter pipes (31) and the second pipeline (6).

3. A system for producing electronic grade silane as claimed in claim 2, wherein, The flow divider (7) comprises a flow dividing ball (71) which is rotatably arranged in the second pipeline (6), the flow dividing ball (71) is respectively provided with a first opening (72), a second opening (73) and a third opening (74), the first opening (72), the second opening (73) and the third opening (74) are arranged in communication, a controller (8) for rotating the flow dividing ball (71) is further arranged on the second pipeline (6), and a sealing gasket is further arranged in the second pipeline (6).

4. A system for producing electronic grade silane as claimed in claim 3, wherein, The controller (8) comprises a rotating rod (81) which is fixedly arranged on the flow dividing ball (7), the rotating rod (81) penetrates through the second pipeline (6) and is slidably connected with a twist cap (82), the twist cap (82) drives the flow dividing ball (71) to rotate through the rotating rod (81).

5. A system for producing electronic grade silane as claimed in claim 4, wherein, One end of the rotating rod (81) and the twist cap (82) is arranged in a rectangular shape.

6. A system for producing electronic grade silane as claimed in claim 4 wherein, Locking rods are fixedly arranged on the second pipeline (6), a plurality of locking holes (83) are arranged on the twist cap (82), and the locking holes (83) are arranged in a ring shape.

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