Evaporation heater for evaporation from top to bottom
By placing the glass substrate below the crucible and employing a top-down vapor deposition design, the coating quality problem caused by substrate sagging is solved, improving product quality and the efficiency of coating material utilization, and reducing costs.
Patent Information
- Application Number
- CN202520416233.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-11
- Publication Date
- 2026-02-17
- Estimated Expiration
- 2035-03-11
AI Technical Summary
In existing vapor deposition machines, the glass substrate is suspended above the crucible, which prevents the substrate and the mask from adhering tightly, resulting in poor coating quality, low yield, and increased costs.
The design employs a top-down vapor deposition process, placing the glass substrate below the crucible and using a heating mechanism to heat the coating material in the feeding chamber. This causes the coating material to evaporate and deposit onto the glass substrate below through a steam nozzle.
Ensuring that the glass substrate does not sag in the middle improves the efficiency of coating material utilization, enhances product quality and yield, and reduces costs.
Smart Images
Figure CN223921512U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of vapor deposition equipment, and in particular to an evaporation heater for top-down vapor deposition. Background Technology
[0002] Evaporation deposition machines are the core thin-film deposition equipment in processes such as OLED displays, perovskite cells, and semiconductor thin-film encapsulation. The evaporation heater used in these machines is the most critical functional component, determining the overall production line's yield and the performance of the deposited devices. Current evaporation heaters typically use a structure with a glass substrate on top and a crucible below, allowing vapor to deposit onto the substrate from bottom to top. The biggest drawback of this design is that the substrate is suspended above the crucible, causing it to sag and deform in the middle. This results in poor adhesion between the substrate and the mask, leading to poor product quality, low yield, and increased costs. Utility Model Content
[0003] The technical problem this invention aims to solve is as follows: To address the technical problems described in the background art, this invention provides an evaporation heater for top-down vapor deposition. By placing a glass substrate below a crucible, the crucible uses a heating mechanism to heat the coating material in the feeding chamber, causing the coating material to evaporate. The vapor is then deposited onto the glass substrate below through a steam nozzle. This ensures that the glass substrate does not sag in the middle, guaranteeing product quality and improving the utilization efficiency of the coating material.
[0004] The technical solution adopted by this utility model to solve its technical problem is:
[0005] An evaporation heater for top-down vapor deposition includes a crucible, a crucible lid, a vacuum chamber, a steam nozzle, a feeding chamber, and a heating mechanism. The crucible is topped with a lid, and its bottom is fixed to a vacuum chamber for placing a glass substrate. A steam nozzle is located at the bottom of the crucible and faces the vacuum chamber. A feeding chamber is located inside the crucible and is connected to the steam nozzle. A heating mechanism is mounted on the crucible.
[0006] Specifically, the feeding hopper is provided with a discharge area A and a discharge area B, and the partition between the discharge area A and the discharge area B is provided with multiple through holes for steam to pass through.
[0007] Specifically, the crucible is fixed with a middle plate one and a middle plate two. The feeding bin, the middle plate one, and the middle plate two are arranged in order from top to bottom. The middle plate one is provided with multiple through holes one for steam to pass through, and the middle plate two is provided with multiple through holes two for steam to pass through.
[0008] Specifically, the heating mechanism is an electric heating wire.
[0009] Specifically, a heating wire is installed on the crucible lid.
[0010] Specifically, a film thickness monitoring probe is installed inside the vacuum chamber.
[0011] Specifically, the crucible lid is hinged to the crucible, and the crucible lid is provided with a handle.
[0012] The beneficial effects of this invention are as follows: This invention provides an evaporation heater for top-down vapor deposition. By placing the glass substrate below the crucible, the crucible uses a heating mechanism to heat the coating material in the feeding chamber, causing the coating material to evaporate. The vapor is then deposited onto the glass substrate below through a steam nozzle. This ensures that the glass substrate does not sag in the middle, guaranteeing product quality and improving the utilization efficiency of the coating material. Attached Figure Description
[0013] The present invention will be further described below with reference to the accompanying drawings and embodiments.
[0014] Figure 1 This is a schematic diagram of the structure of this utility model;
[0015] Figure 2 This is a schematic diagram of the heating mechanism of this utility model;
[0016] Figure 3 This is a schematic diagram of the feeding hopper of this utility model;
[0017] In the diagram: 1. Crucible, 2. Crucible lid, 3. Vacuum chamber, 4. Steam nozzle, 5. Feeding bin, 6. Heating element.
[0018] Mechanism, 7. Middle plate one, 8. Middle plate two, 9. Film thickness monitoring probe, 21. Heating wire one, 51. Feeding area A, 52. Feeding area B, 53. Partition, 54. Through hole, 71. Through hole one, 81. Through hole two. Detailed Implementation
[0019] The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams, illustrating only the basic structure of the present invention, and therefore only show the components relevant to the present invention.
[0020] Figure 1 This is a schematic diagram of the structure of this utility model; Figure 2 This is a schematic diagram of the heating mechanism of this utility model;
[0021] Figure 3 This is a schematic diagram of the feeding hopper of this utility model.
[0022] As attached Figure 1As shown, an evaporation heater for top-down vapor deposition includes a crucible 1, a crucible cover 2, a vacuum chamber 3, a steam nozzle 4, a feeding chamber 5, and a heating mechanism 6. The crucible 1 is topped with a crucible cover 2, and the bottom of the crucible 1 is fixed to the vacuum chamber 3 for placing a glass substrate. The bottom of the crucible 1 is provided with a steam nozzle 4 facing the vacuum chamber 3. The crucible 1 is provided with a feeding chamber 5, which is connected to the steam nozzle 4. The heating mechanism 6 is installed on the crucible 1.
[0023] The feeding bin 5 is provided with a discharge area A51 and a discharge area B52. The partition 53 between the discharge area A51 and the discharge area B52 is provided with multiple through holes 54 for steam to pass through.
[0024] The crucible 1 is fixed with a middle plate 7 and a middle plate 8. The feeding bin 5, the middle plate 7, and the middle plate 8 are arranged from top to bottom. The middle plate 7 is provided with multiple through holes 71 for steam to pass through, and the middle plate 8 is provided with multiple through holes 81 for steam to pass through.
[0025] Heating mechanism 6 is an electric heating wire.
[0026] A heating wire 21 is installed on the crucible lid 2. After the crucible lid 2 is closed on the crucible 1, the heating wire 21 will start to heat the coating material in the feeding chamber 5.
[0027] A film thickness monitoring probe 9 is installed inside the vacuum chamber 3. The film thickness monitoring probe 9 is used to monitor the thickness of the film layer on the glass substrate and the evaporation rate in real time.
[0028] The crucible lid 2 is hinged to the crucible 1, and the crucible lid 2 is equipped with a handle. The operator can open and close the crucible lid 2 by holding the handle.
[0029] The working method of this application is as follows: First, the glass substrate is placed flat in the vacuum chamber 3. Since the bottom of the glass substrate has full support, the middle of the glass substrate will not sag. At this time, the glass substrate is located below several steam nozzles 4. The crucible lid 2 is opened, and then the coating material is placed into the feeding area A51 and feeding area B52 and spread flat. Then, the crucible lid 2 is covered to cover the crucible 1. At this time, the heating wire 21 and the heating mechanism 6 are energized to heat the feeding chamber 5. Then, the coating material in the feeding chamber 5 is heated and vaporized to form steam. The steam will then pass through the through hole 54, the through hole 71 of the middle plate 7, and the through hole 81 of the middle plate 8, and then be sprayed downward from the steam nozzles 4. The steam is deposited on the glass substrate to form a coating layer.
[0030] Based on the above-described preferred embodiments of this utility model, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.
Claims
1. An evaporation heater for evaporation from above, characterized in that The utility model relates to a glass substrate production device, including the crucible (1), the crucible cover (2), the vacuum cavity (3), the steam nozzle (4), the charging bin (5), the heating mechanism (6), the crucible (1) top is equipped with the crucible cover (2), and the crucible (1) bottom is fixed on the vacuum cavity (3) for placing glass substrate, and the crucible (1) bottom is equipped with the steam nozzle (4), and the steam nozzle (4) is towards the vacuum cavity (3), and the crucible (1) is equipped with the charging bin (5) in, and the charging bin (5) is linked with the steam nozzle (4), and the crucible (1) is equipped with the heating mechanism (6) on.
2. The evaporative heater for up-down evaporation according to claim 1, wherein: The charging bin (5) is equipped with the discharge area A (51) and the discharge area B (52) in, and the baffle (53) in the discharge area A (51) and the discharge area B (52) middle is equipped with a plurality of through -hole (54) for passing through the steam.
3. The evaporative heater for up-down evaporation according to claim 1, wherein: The crucible (1) is fixed with the middle plate one (7) and the middle plate two (8) in, and the charging bin (5), the middle plate one (7), the middle plate two (8) are sequentially arranged from top to bottom, and the middle plate one (7) is equipped with a plurality of through -hole one (71) for passing through the steam, and the middle plate two (8) is equipped with a plurality of through -hole two (81) for passing through the steam.
4. The evaporative heater for up-down evaporation according to claim 1, wherein: The heating mechanism (6) is electric heating wire.
5. The evaporative heater for up-down evaporation according to claim 1, wherein: The crucible cover (2) is equipped with electric heating wire one (21) on.
6. The evaporative heater for up-down evaporation according to claim 1, wherein: The vacuum cavity (3) is equipped with film thickness monitoring probe (9) in.
7. The evaporative heater for up-down evaporation according to claim 1, wherein: The crucible cover (2) is hinged on the crucible (1), and the crucible cover (2) is equipped with handle.